JPS6413295U - - Google Patents
Info
- Publication number
- JPS6413295U JPS6413295U JP10813687U JP10813687U JPS6413295U JP S6413295 U JPS6413295 U JP S6413295U JP 10813687 U JP10813687 U JP 10813687U JP 10813687 U JP10813687 U JP 10813687U JP S6413295 U JPS6413295 U JP S6413295U
- Authority
- JP
- Japan
- Prior art keywords
- case
- inner case
- outer case
- spindle shaft
- lower outer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10813687U JPS6413295U (de) | 1987-07-13 | 1987-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10813687U JPS6413295U (de) | 1987-07-13 | 1987-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6413295U true JPS6413295U (de) | 1989-01-24 |
Family
ID=31343184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10813687U Pending JPS6413295U (de) | 1987-07-13 | 1987-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6413295U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014080981A (ja) * | 2009-08-28 | 2014-05-08 | Edwards Kk | 真空ポンプ |
-
1987
- 1987-07-13 JP JP10813687U patent/JPS6413295U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014080981A (ja) * | 2009-08-28 | 2014-05-08 | Edwards Kk | 真空ポンプ |
| EP2472120B1 (de) * | 2009-08-28 | 2022-11-30 | Edwards Japan Limited | Vakuumpumpe und element für die vakuumpumpe |