EP2416346A3 - Quecksilberdampflampe für eine homogene flächenhafte Bestrahlung - Google Patents

Quecksilberdampflampe für eine homogene flächenhafte Bestrahlung Download PDF

Info

Publication number
EP2416346A3
EP2416346A3 EP11005665A EP11005665A EP2416346A3 EP 2416346 A3 EP2416346 A3 EP 2416346A3 EP 11005665 A EP11005665 A EP 11005665A EP 11005665 A EP11005665 A EP 11005665A EP 2416346 A3 EP2416346 A3 EP 2416346A3
Authority
EP
European Patent Office
Prior art keywords
chamber
sub
quartz glass
foremost
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11005665A
Other languages
English (en)
French (fr)
Other versions
EP2416346B1 (de
EP2416346A2 (de
Inventor
Alex Dr. Voronov
Burkard Jung
Franz-Josef Schilling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
Heraeus Noblelight GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Noblelight GmbH filed Critical Heraeus Noblelight GmbH
Priority to PL11005665T priority Critical patent/PL2416346T3/pl
Publication of EP2416346A2 publication Critical patent/EP2416346A2/de
Publication of EP2416346A3 publication Critical patent/EP2416346A3/de
Application granted granted Critical
Publication of EP2416346B1 publication Critical patent/EP2416346B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/305—Flat vessels or containers
    • H01J61/307—Flat vessels or containers with folded elongated discharge path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
    • H01J61/72—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr having a main light-emitting filling of easily vaporisable metal vapour, e.g. mercury

Landscapes

  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

Bekannte Quecksilberdampflampen zur flächenhaften Bestrahlung sind mit einem Lampenkolben aus Quarzglas versehen, der einen geschlossenen Entladungsraum mit einem nicht linearen Gasentladungskanal umschließt. Um eine konstruktiv einfache Lampe bereitzustellen, die auch bei geringem Abstand zur zu behandelnden Oberfläche eine möglichst hohe Homogenität der UV-Bestrahlung gewährleistet, wird erfindungsgemäß vorgeschlagen, dass der Lampenkolben als eine von geraden Wänden begrenzte Quarzglaskammer mit Unterseite, Oberseite und Seitenwandungen ausgebildet ist und mittels mehrer, von der Unterseite bis zur Oberseite ragender Trennstege aus Quarzglas in Subkammern unterteilt ist, die eine vorderste und eine hinterste Subkammer umfassen und die in Aneinanderreihung den nicht linearen Gasentladungskanal bilden, indem sich die Trennstege wechselweise von einer Seitenwand bis nahe an die gegenüberliegende Seitenwand unter Freilassung eines benachbarte Subkammern fluidisch verbindenden Spaltes erstrecken, wobei die eine Elektrode der vordersten Subkammer und die andere Elektrode der hintersten Subkammer zugeordnet ist.
EP11005665.2A 2010-08-04 2011-07-12 Quecksilberdampflampe für eine homogene flächenhafte Bestrahlung Not-in-force EP2416346B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL11005665T PL2416346T3 (pl) 2010-08-04 2011-07-12 Lampa rtęciowa do równomiernego planarnego naświetlania

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010033446A DE102010033446B4 (de) 2010-08-04 2010-08-04 Quecksilberdampflampe für eine homogene flächenhafte Bestrahlung

Publications (3)

Publication Number Publication Date
EP2416346A2 EP2416346A2 (de) 2012-02-08
EP2416346A3 true EP2416346A3 (de) 2013-01-02
EP2416346B1 EP2416346B1 (de) 2013-09-25

Family

ID=44542940

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11005665.2A Not-in-force EP2416346B1 (de) 2010-08-04 2011-07-12 Quecksilberdampflampe für eine homogene flächenhafte Bestrahlung

Country Status (7)

Country Link
US (1) US8400059B2 (de)
EP (1) EP2416346B1 (de)
JP (1) JP2012038729A (de)
CA (1) CA2745283C (de)
DE (1) DE102010033446B4 (de)
DK (1) DK2416346T3 (de)
PL (1) PL2416346T3 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9927094B2 (en) * 2012-01-17 2018-03-27 Kla-Tencor Corporation Plasma cell for providing VUV filtering in a laser-sustained plasma light source
DE102013007463A1 (de) * 2013-04-30 2014-10-30 Carl Zeiss Microscopy Gmbh Einrichtung zur Sterilisation eines Probenraums in einem Lebendzellmikroskop

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2326773A (en) * 1941-02-19 1943-08-17 Oscar H Floyd Ultra violet ray applicator
US6373185B1 (en) * 1998-02-23 2002-04-16 Smiths Industries Public Limited Company Gas discharge lamps with glow mode electrodes
US6731058B1 (en) * 2000-06-12 2004-05-04 Ushio America, Inc. Arc path formed in lamp body
DE202008017007U1 (de) * 2008-12-23 2009-07-16 Uv-Technik Speziallampen Gmbh Gasentladungslampe, Vorrichtung zur Reinigung eines sauerstoffhaltigen Gases und raumlufttechnische Anlage

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Title
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Also Published As

Publication number Publication date
US20120032586A1 (en) 2012-02-09
CA2745283A1 (en) 2012-02-04
DE102010033446A1 (de) 2012-02-09
EP2416346B1 (de) 2013-09-25
EP2416346A2 (de) 2012-02-08
PL2416346T3 (pl) 2014-03-31
CA2745283C (en) 2014-04-29
JP2012038729A (ja) 2012-02-23
US8400059B2 (en) 2013-03-19
DK2416346T3 (da) 2013-12-16
DE102010033446B4 (de) 2012-03-22

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