EP2376257A1 - Vorrichtung zur beidseitigen schleifenden bearbeitung flacher werkstücke - Google Patents
Vorrichtung zur beidseitigen schleifenden bearbeitung flacher werkstückeInfo
- Publication number
- EP2376257A1 EP2376257A1 EP09795315A EP09795315A EP2376257A1 EP 2376257 A1 EP2376257 A1 EP 2376257A1 EP 09795315 A EP09795315 A EP 09795315A EP 09795315 A EP09795315 A EP 09795315A EP 2376257 A1 EP2376257 A1 EP 2376257A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- working
- workpieces
- deburring
- disk
- deburring means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
- B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/005—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents using brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
- B24D13/145—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face having a brush-like working surface
Definitions
- the invention relates to a device for double-sided grinding flat workpieces with an upper and a lower working disk, each having a work surface with an abrasive coating, wherein the work surfaces between them form a working gap, can be ground in the workpieces, wherein at least one of the working disks means a drive is rotatably driven, and further comprising means for guiding the workpieces in the working gap.
- Double-sided surface grinding machines for the precise machining of workpieces with two plane-parallel surfaces.
- Corresponding machines are available in a large number of different designs.
- Common double-side grinding machines have in common is that they have two mostly annular working discs whose facing with an abrasive material facing each other and between them form a working gap through which the workpieces are guided while being processed on both sides simultaneously.
- a double-sided grinding machine with planetary kinematics may be mentioned, as described in DE 195 47 085 A1.
- the present invention seeks to provide a device of the type mentioned above, with a two-sided grinding machining is also possible with low effort and high quality of burrs prone to burring.
- the invention achieves the object by disengaging means, which are designed to deburr the workpieces during their processing in the apparatus, being arranged on at least one of the working disks.
- the workpieces to be machined are moved by the guide means in the working gap formed between the working surfaces of the working disks and at the same time ground on both sides by the work surfaces by at least one of the Working disks are driven in rotation.
- the working wheels can be arranged coaxially for machining. But it is also a non-coaxial alignment of the working wheels possible.
- the machining of the flat workpieces usually serves to produce plane-parallel workpiece surfaces. They can for example consist of a metallic material, in particular a steel material.
- the workpieces can also be, for example, semiconductor wafers or other workpieces.
- the device according to the invention therefore has deburring means arranged on at least one working disk.
- the deburring means according to the invention can be provided in particular on both working disks.
- the deburring means are arranged so that the workpieces come into contact with the working surfaces as well as with the deburring means on their path traveled in the apparatus in the course of their processing.
- the device according to the invention combines the functionality of a double-sided surface grinding machine with that of a deburring machine, so that the workpieces are simultaneously ground and deburred. There is thus an in situ deburring during processing.
- the deburring means may be integrated into the working surface of the at least one working disk.
- the workpieces are therefore simultaneously deburred during their processing in the working gap in this.
- the at least one working disk can have at least one receptacle formed in the region of the working surface, in particular at least one groove, in which the deburring means are arranged.
- corresponding recesses for the deburring means are formed in the end face defining the working gap of the at least one working disk.
- the deburring means can therefore be arranged extending in an annular manner in the work surface and / or extending radially in the work surface and / or running in an arcuate manner in the work surface.
- the means for guiding the workpieces have at least one, in particular a plurality, arranged in the working gap rotor disc which receives the workpieces to be machined in recesses and can be rotated by means of a rolling device, whereby recorded in the rotor disc Workpieces move along cycloidal paths in the working gap.
- the rolling device can have an inner and an outer pin or ring gear in a conventional manner, wherein at least one of the pin or ring gears can be rotated by means of a drive.
- the at least one rotor disc can then have correspondingly on its periphery an external toothing, with which it rolls upon rotation of at least one of the pin or ring gears on this.
- the deburring means may be connected to the working disk, but need not. It may further be provided that the deburring means are arranged annularly circumferentially on the outer periphery of the working disk. In addition or as an alternative, in the case of ring-shaped working disks, it may be provided that the deburring means are arranged annularly circumferentially on the inner circumference of the working disk. The deburring means thus extend annularly along the inner and / or outer periphery of the at least one working disk. In this embodiment, the workpieces are deburred when they are led out of the working gap or enter this and thereby reach the area of action of the deburring. This removal or introduction of the workpieces and the corresponding contact with the deburring means can be carried out once or cyclically in the course of workpiece machining.
- the formation of the deburring means outside the working surface is particularly suitable for devices which have no planetary kinematics.
- Such a device may, for example, have a rotatably driven guide disk, the axis of rotation of which is arranged essentially parallel but offset relative to the or the axes of rotation of the working disks.
- This guide disc Through this guide disc, the workpieces can be kept and in the course of the rotation of the guide disc in the working gap into, through and out through this out of the working gap. You get in contact with the arranged for example at the edge of the at least one working disc Entgratungsschn.
- the deburring means may comprise deburring brushes which protrude with their bristles over the plane of the working surface of the at least one working disk.
- the brushes may have individual bristle tufts provided with abrasive grains for deburring.
- the bristle tufts are arranged one behind the other along an annular, radial or arcuate course of the deburring means, for example. They protrude slightly beyond the plane spanned by the working surface of the respective working disk, ie in particular into the working gap. The workpieces then come in contact with the bristles during machining and are deburred in this way.
- the deburring means in particular the Entgratungsbürsten, be adjustable in height. By this height adjustment can be defined exactly how far the deburring protrude into the working gap.
- an optionally continuous adjustment of the position of the deburring means can be carried out in order to maintain the desired supernatant even with a wear of the deburring. Usually, the wear of the deburring will be faster or slower than the wear of the abrasive coatings of the working wheels.
- the height adjustment of the deburring means can be done, for example, by exchangeable fixed or adjustable spacer elements on which the deburring means, for example the deburring brushes are mounted.
- an adjustment is also conceivable, for example, by means of adjusting screws, which can be operated manually or by motor and thus allow a height adjustment.
- the deburring means can be driven in rotation. Rotation of the deburring means improves the deburring effect.
- the deburring means can be driven by the same drive as the at least one working disk. But it is also conceivable to provide for the deburring their own, different drive than the working disk. This is conceivable in particular if the deburring means are arranged outside the working disks and independently of these.
- the rotational speeds for the working disks and the deburring means can be selected independently of one another and, for example, opposing directions of rotation can also be selected. be presented. As a result, the flexibility is increased and the deburring effect can be further optimized.
- FIG. 1 shows the basic structure of a device according to the invention in a perspective view according to a first embodiment
- FIG. 3 is a working disk of a device according to the invention in a plan view according to a first embodiment
- FIG. 4 shows the working disk shown in FIG. 3 in a cross section
- FIG. 5 is a working disk of a device according to the invention in a plan view according to a second embodiment
- Fig. 7 is a working disk of a device according to the invention in a plan view according to a third embodiment.
- FIG. 1 the basic structure of a device according to the invention for two-sided machining of flat workpieces is shown.
- the device shown in the example in FIG. 1 is a double-side grinding machine 10 with planetary kinematics.
- the device 10 has an upper pivoting arm 12, which can be pivoted about a pivot axis 16 mounted on a lower base 14 about a vertical axis.
- On the pivot arm 12 is an annular upper work disk 18 worn.
- the upper working disk 18 is rotationally driven via a drive motor, not shown in detail in FIG.
- the working disk 18 has a working surface, which is provided in the example shown with an abrasive coating.
- the workpieces to be ground are inserted into the recesses 26 of the carriers 24.
- the two working wheels 18, 22 are aligned coaxially with each other. They then form a working gap between them, in which the carriers 24 are arranged with the workpieces held by them.
- the upper working disk 16 is then pressed onto the workpieces by means of a high-precision loading system. It then acts from the upper and the lower working disk 18, 22 each have a contact pressure on the workpieces to be machined and these are ground simultaneously on both sides.
- the structure and function of such a double-side processing machine 10 are known in the art.
- the device for guiding the workpieces in the working gap according to Figure 2 has a likewise annular guide plate 40, are held in the workpieces to be machined (not shown) in receptacles 41.
- the guide plate 40 is rotationally driven. Its axis of rotation 42 is substantially parallel to the axis of rotation 38 of the working wheels 18, 22, but offset from this. In particular, the axes of rotation 38, 39 of the working wheels 18, 22 may be slightly tilted against each other to allow the entry of the workpieces in the working gap.
- the deburring brushes 44 protrude beyond the plane of the working surface 36 of the working disk 22 with their bristles.
- the workpieces thus come in the course of their processing in the device in contact with the above Entgratungsbürsten 44 and are deburred in this way during their processing simultaneously.
- the integration of the deburring means 44 shown in FIGS. 3 and 4 into the working surface 36 the working disk 22 is particularly suitable for use in a device with planetary kinematics, as shown for example in Figure 1.
- FIGS. 5 and 6 show a working disk 22 according to a further exemplary embodiment.
- the deburring brushes 44 are arranged outside the working surface 36 on the working disk 22.
- the Entgratungsbürsten 44 are annularly circumferentially disposed on the outer periphery 48 of the working disk 22 and secured in a manner not shown.
- the attachment may be provided on the work disk 22 or otherwise independent of the work disk 22.
- the workpieces held in the guide disk 40 come into or out of the work gap formed between the work surfaces 34, 36 in the course of their rotation with the guide disk 40 into the area of action of the deburring brushes 44 and are correspondingly deburred.
- deburring means 44 may also be arranged in an annular manner on the inner periphery 50 of the working disk 22.
- the embodiment shown in FIGS. 5 and 6 is particularly suitable for use in a device as shown schematically in FIG.
- the Entgratungsbürsten 44 shown in the figures are adjustable in height, so that even with a wear of the brush 44 at any time a sufficient projection of the Entgratungsbürsten 44 is ensured beyond the working surface level out into the working gap. In the example shown, this supernatant is set between 0.1 and 1 mm.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008063228A DE102008063228A1 (de) | 2008-12-22 | 2008-12-22 | Vorrichtung zur beidseitigen schleifenden Bearbeitung flacher Werkstücke |
PCT/EP2009/008184 WO2010072289A1 (de) | 2008-12-22 | 2009-11-18 | Vorrichtung zur beidseitigen schleifenden bearbeitung flacher werkstücke |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2376257A1 true EP2376257A1 (de) | 2011-10-19 |
EP2376257B1 EP2376257B1 (de) | 2013-01-02 |
Family
ID=42102187
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09795315A Not-in-force EP2376257B1 (de) | 2008-12-22 | 2009-11-18 | Vorrichtung zur beidseitigen schleifenden bearbeitung flacher werkstücke |
Country Status (8)
Country | Link |
---|---|
US (1) | US9004981B2 (de) |
EP (1) | EP2376257B1 (de) |
JP (1) | JP5360623B2 (de) |
KR (1) | KR20110096153A (de) |
CN (1) | CN102264508B (de) |
DE (1) | DE102008063228A1 (de) |
SG (1) | SG172157A1 (de) |
WO (1) | WO2010072289A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102962753A (zh) * | 2012-10-12 | 2013-03-13 | 飞迅科技(苏州)有限公司 | 万向抛光机构 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102013007951A1 (de) | 2012-05-03 | 2013-11-07 | Emil Nickisch GmbH | Vorrichtung zum gleichzeitigen Entgraten und/oder Oberflächenbearbeiten von Werkstückober- und Unterseite |
US9017141B2 (en) * | 2013-01-04 | 2015-04-28 | White Drive Products, Inc. | Deburring machine and method for deburring |
US9427841B2 (en) * | 2013-03-15 | 2016-08-30 | Ii-Vi Incorporated | Double-sided polishing of hard substrate materials |
JP2015030058A (ja) * | 2013-08-02 | 2015-02-16 | 信越半導体株式会社 | ドレッシング方法及びドレッシング装置 |
CN104002227A (zh) * | 2014-04-30 | 2014-08-27 | 深圳市大族激光科技股份有限公司 | 不锈钢镜面研磨方法 |
CN104924197A (zh) * | 2015-05-28 | 2015-09-23 | 海宁奇晟轴承有限公司 | 一种自动双盘研磨机 |
CN108608314B (zh) * | 2018-06-08 | 2019-10-11 | 大连理工大学 | 一种用于双面电化学机械抛光平面构件的设备及方法 |
CN110293481B (zh) * | 2019-06-26 | 2021-12-24 | 西安奕斯伟材料科技有限公司 | 一种研磨设备和研磨设备的清洁方法 |
CN111906625B (zh) * | 2020-06-29 | 2022-06-24 | 陈正林 | 一种木剑磨砂装置 |
CN112108949B (zh) * | 2020-09-10 | 2022-05-20 | 肇庆中彩机电技术研发有限公司 | 一种精密轴承宽度研磨装置及其研磨方法 |
CN113843678A (zh) * | 2021-10-15 | 2021-12-28 | 广东鸿特精密技术(台山)有限公司 | 一种去除工件正反面毛刺的抛光机 |
CN115042029A (zh) * | 2022-08-12 | 2022-09-13 | 潍坊谷合传动技术有限公司 | 一种用于车桥组件端面精加工的打磨抛光装置 |
CN116197762B (zh) * | 2023-04-20 | 2023-08-08 | 瑞安市江南铝业有限公司 | 一种铝合金工件表面去毛刺装置 |
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-
2008
- 2008-12-22 DE DE102008063228A patent/DE102008063228A1/de not_active Withdrawn
-
2009
- 2009-11-18 US US13/141,126 patent/US9004981B2/en not_active Expired - Fee Related
- 2009-11-18 WO PCT/EP2009/008184 patent/WO2010072289A1/de active Application Filing
- 2009-11-18 CN CN200980151756.3A patent/CN102264508B/zh not_active Expired - Fee Related
- 2009-11-18 SG SG2011043569A patent/SG172157A1/en unknown
- 2009-11-18 KR KR1020117015853A patent/KR20110096153A/ko not_active Application Discontinuation
- 2009-11-18 JP JP2011541131A patent/JP5360623B2/ja not_active Expired - Fee Related
- 2009-11-18 EP EP09795315A patent/EP2376257B1/de not_active Not-in-force
Non-Patent Citations (1)
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See references of WO2010072289A1 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102962753A (zh) * | 2012-10-12 | 2013-03-13 | 飞迅科技(苏州)有限公司 | 万向抛光机构 |
Also Published As
Publication number | Publication date |
---|---|
US9004981B2 (en) | 2015-04-14 |
SG172157A1 (en) | 2011-07-28 |
KR20110096153A (ko) | 2011-08-29 |
JP2012513310A (ja) | 2012-06-14 |
WO2010072289A1 (de) | 2010-07-01 |
CN102264508A (zh) | 2011-11-30 |
EP2376257B1 (de) | 2013-01-02 |
US20110300785A1 (en) | 2011-12-08 |
JP5360623B2 (ja) | 2013-12-04 |
DE102008063228A1 (de) | 2010-06-24 |
CN102264508B (zh) | 2013-12-18 |
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