EP2145986B1 - Solution et procédé pour le dépôt électrochimique d'un métal sur un substrat - Google Patents
Solution et procédé pour le dépôt électrochimique d'un métal sur un substrat Download PDFInfo
- Publication number
- EP2145986B1 EP2145986B1 EP08075637A EP08075637A EP2145986B1 EP 2145986 B1 EP2145986 B1 EP 2145986B1 EP 08075637 A EP08075637 A EP 08075637A EP 08075637 A EP08075637 A EP 08075637A EP 2145986 B1 EP2145986 B1 EP 2145986B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- nickel
- silica particles
- solution
- nickel layer
- silica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 41
- 239000002184 metal Substances 0.000 title claims abstract description 41
- 238000000151 deposition Methods 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 title claims abstract description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 161
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 13
- 239000010703 silicon Substances 0.000 claims abstract description 13
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims abstract description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims abstract description 7
- 150000002500 ions Chemical class 0.000 claims abstract description 7
- XYFCBTPGUUZFHI-UHFFFAOYSA-O phosphonium Chemical compound [PH4+] XYFCBTPGUUZFHI-UHFFFAOYSA-O 0.000 claims abstract description 7
- VUEDNLCYHKSELL-UHFFFAOYSA-N arsonium Chemical compound [AsH4+] VUEDNLCYHKSELL-UHFFFAOYSA-N 0.000 claims abstract description 6
- 125000000524 functional group Chemical group 0.000 claims abstract description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 330
- 229910052759 nickel Inorganic materials 0.000 claims description 165
- 238000005260 corrosion Methods 0.000 claims description 24
- 230000007797 corrosion Effects 0.000 claims description 24
- 239000000126 substance Substances 0.000 claims description 15
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 claims description 5
- 125000000547 substituted alkyl group Chemical group 0.000 claims description 5
- 239000003153 chemical reaction reagent Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 125000003107 substituted aryl group Chemical group 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 3
- 125000001841 imino group Chemical group [H]N=* 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- 239000011148 porous material Substances 0.000 description 59
- 239000000243 solution Substances 0.000 description 52
- 239000002245 particle Substances 0.000 description 43
- 239000000377 silicon dioxide Substances 0.000 description 41
- 239000011651 chromium Substances 0.000 description 35
- 229910052804 chromium Inorganic materials 0.000 description 34
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 33
- 238000007747 plating Methods 0.000 description 31
- 239000003792 electrolyte Substances 0.000 description 26
- 239000000463 material Substances 0.000 description 18
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 16
- 239000000843 powder Substances 0.000 description 15
- 238000009713 electroplating Methods 0.000 description 14
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 14
- 125000000217 alkyl group Chemical group 0.000 description 13
- 125000003118 aryl group Chemical group 0.000 description 12
- 125000001072 heteroaryl group Chemical group 0.000 description 12
- 239000000203 mixture Substances 0.000 description 12
- 239000000654 additive Substances 0.000 description 11
- 239000008151 electrolyte solution Substances 0.000 description 11
- 229940021013 electrolyte solution Drugs 0.000 description 11
- 229910000831 Steel Inorganic materials 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 238000002474 experimental method Methods 0.000 description 10
- 239000010959 steel Substances 0.000 description 10
- 238000012360 testing method Methods 0.000 description 10
- 238000009826 distribution Methods 0.000 description 9
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 8
- -1 filtering earth Chemical compound 0.000 description 8
- 150000002430 hydrocarbons Chemical group 0.000 description 8
- 239000002253 acid Substances 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- CVHZOJJKTDOEJC-UHFFFAOYSA-N saccharin Chemical compound C1=CC=C2C(=O)NS(=O)(=O)C2=C1 CVHZOJJKTDOEJC-UHFFFAOYSA-N 0.000 description 7
- 229910000077 silane Inorganic materials 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- 238000013019 agitation Methods 0.000 description 6
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 6
- 239000004327 boric acid Substances 0.000 description 6
- 229910052681 coesite Inorganic materials 0.000 description 6
- 229910052906 cristobalite Inorganic materials 0.000 description 6
- 238000001465 metallisation Methods 0.000 description 6
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 6
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 6
- 239000011541 reaction mixture Substances 0.000 description 6
- 229910052682 stishovite Inorganic materials 0.000 description 6
- 229910052905 tridymite Inorganic materials 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- RNFNDJAIBTYOQL-UHFFFAOYSA-N chloral hydrate Chemical compound OC(O)C(Cl)(Cl)Cl RNFNDJAIBTYOQL-UHFFFAOYSA-N 0.000 description 5
- 229960002327 chloral hydrate Drugs 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 229910008051 Si-OH Inorganic materials 0.000 description 4
- 229910006358 Si—OH Inorganic materials 0.000 description 4
- 239000002585 base Substances 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 239000003002 pH adjusting agent Substances 0.000 description 4
- 208000014451 palmoplantar keratoderma and congenital alopecia 2 Diseases 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 229910052717 sulfur Inorganic materials 0.000 description 4
- 239000000454 talc Substances 0.000 description 4
- 229910052623 talc Inorganic materials 0.000 description 4
- 238000009827 uniform distribution Methods 0.000 description 4
- 230000004584 weight gain Effects 0.000 description 4
- 235000019786 weight gain Nutrition 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 238000007792 addition Methods 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 229910052593 corundum Inorganic materials 0.000 description 3
- IIWMSIPKUVXHOO-UHFFFAOYSA-N ethyl hexyl sulfate Chemical compound CCCCCCOS(=O)(=O)OCC IIWMSIPKUVXHOO-UHFFFAOYSA-N 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- 150000002815 nickel Chemical class 0.000 description 3
- 239000012811 non-conductive material Substances 0.000 description 3
- 239000006259 organic additive Substances 0.000 description 3
- 150000002894 organic compounds Chemical class 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000011593 sulfur Substances 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 description 3
- 125000006527 (C1-C5) alkyl group Chemical group 0.000 description 2
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000005995 Aluminium silicate Substances 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910052910 alkali metal silicate Inorganic materials 0.000 description 2
- 235000012211 aluminium silicate Nutrition 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- 239000002801 charged material Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000006482 condensation reaction Methods 0.000 description 2
- IDAGXRIGDWCIET-SDFKWCIISA-L disodium;(2s,3s,4s,5r)-2,3,4,5-tetrahydroxyhexanedioate Chemical compound [Na+].[Na+].[O-]C(=O)[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O IDAGXRIGDWCIET-SDFKWCIISA-L 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910001453 nickel ion Inorganic materials 0.000 description 2
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- UIIIBRHUICCMAI-UHFFFAOYSA-N prop-2-ene-1-sulfonic acid Chemical compound OS(=O)(=O)CC=C UIIIBRHUICCMAI-UHFFFAOYSA-N 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 239000013049 sediment Substances 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 125000004434 sulfur atom Chemical group 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- NLVXSWCKKBEXTG-UHFFFAOYSA-N vinylsulfonic acid Chemical compound OS(=O)(=O)C=C NLVXSWCKKBEXTG-UHFFFAOYSA-N 0.000 description 2
- 239000000080 wetting agent Substances 0.000 description 2
- 125000004178 (C1-C4) alkyl group Chemical group 0.000 description 1
- LBLYYCQCTBFVLH-UHFFFAOYSA-N 2-Methylbenzenesulfonic acid Chemical compound CC1=CC=CC=C1S(O)(=O)=O LBLYYCQCTBFVLH-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- 229910002012 Aerosil® Inorganic materials 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- YIDWDEDWGHUHEB-UHFFFAOYSA-N C#C.OC(=O)C1=CC=CC=C1O Chemical class C#C.OC(=O)C1=CC=CC=C1O YIDWDEDWGHUHEB-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 1
- 229910002054 SYLOID® 244 FP SILICA Inorganic materials 0.000 description 1
- 229910002808 Si–O–Si Inorganic materials 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 229920004482 WACKER® Polymers 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- MQRWBMAEBQOWAF-UHFFFAOYSA-N acetic acid;nickel Chemical compound [Ni].CC(O)=O.CC(O)=O MQRWBMAEBQOWAF-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000003125 aqueous solvent Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 229920006317 cationic polymer Polymers 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000002296 dynamic light scattering Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 125000002541 furyl group Chemical group 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- KXUSQYGLNZFMTE-UHFFFAOYSA-N hex-2-yne-1,1-diol Chemical compound CCCC#CC(O)O KXUSQYGLNZFMTE-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 238000004128 high performance liquid chromatography Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000005660 hydrophilic surface Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000010954 inorganic particle Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- CXIHYTLHIDQMGN-UHFFFAOYSA-L methanesulfonate;nickel(2+) Chemical compound [Ni+2].CS([O-])(=O)=O.CS([O-])(=O)=O CXIHYTLHIDQMGN-UHFFFAOYSA-L 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229940078494 nickel acetate Drugs 0.000 description 1
- 150000002816 nickel compounds Chemical class 0.000 description 1
- HKFZDVPCCOOGEV-UHFFFAOYSA-N nickel(3+);borate Chemical compound [Ni+3].[O-]B([O-])[O-] HKFZDVPCCOOGEV-UHFFFAOYSA-N 0.000 description 1
- 229910000008 nickel(II) carbonate Inorganic materials 0.000 description 1
- ZULUUIKRFGGGTL-UHFFFAOYSA-L nickel(ii) carbonate Chemical compound [Ni+2].[O-]C([O-])=O ZULUUIKRFGGGTL-UHFFFAOYSA-L 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002892 organic cations Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 125000006238 prop-1-en-1-yl group Chemical group [H]\C(*)=C(/[H])C([H])([H])[H] 0.000 description 1
- TVDSBUOJIPERQY-UHFFFAOYSA-N prop-2-yn-1-ol Chemical class OCC#C TVDSBUOJIPERQY-UHFFFAOYSA-N 0.000 description 1
- UOCCVDMCNJYVIW-UHFFFAOYSA-N prop-2-yne-1-sulfonic acid Chemical class OS(=O)(=O)CC#C UOCCVDMCNJYVIW-UHFFFAOYSA-N 0.000 description 1
- 125000004368 propenyl group Chemical group C(=CC)* 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- WWNBZGLDODTKEM-UHFFFAOYSA-N sulfanylidenenickel Chemical compound [Ni]=S WWNBZGLDODTKEM-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000001973 tert-pentyl group Chemical group [H]C([H])([H])C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
- 229910000368 zinc sulfate Inorganic materials 0.000 description 1
- 239000011686 zinc sulphate Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/10—Electroplating with more than one layer of the same or of different metals
- C25D5/12—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
- C25D5/14—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium two or more layers being of nickel or chromium, e.g. duplex or triplex layers
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D15/00—Electrolytic or electrophoretic production of coatings containing embedded materials, e.g. particles, whiskers, wires
- C25D15/02—Combined electrolytic and electrophoretic processes with charged materials
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D13/00—Electrophoretic coating characterised by the process
- C25D13/02—Electrophoretic coating characterised by the process with inorganic material
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/623—Porosity of the layers
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/627—Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
Definitions
- the present invention relates to a method of forming a corrosion-resistant nickel multilayer on a substrate.
- Such corrosion-resistant nickel multilayer systems are used, e.g ., in automotive industry, sanitary industry, furniture fitting industry, spectacles industry and for jewelry.
- the nickel multilayer normally consists of two or three nickel layers: an optional first layer having a rather noble (positive) electric potential, a second nickel layer which is a bright nickel layer and which is less noble than the first nickel layer and a third nickel layer which is plated on top of the second (bright) nickel layer.
- the second nickel layer may also be split into two nickel layers: a high sulfur nickel layer, which is very active and which is deposited on the first nickel layer and a further active, high leveling and bright nickel layer. Plating of the uppermost (third) nickel layer is performed while co-depositing particles which are incorporated into this third nickel layer. Finally a chromium layer is plated on top of the third nickel layer.
- the chromium layer contains holes (pores) due to the particles being incorporated into the third nickel layer. Any corrosive attack takes place through these holes and will first cause dissolution of the less noble second (bright) nickel layer. As long as the (top) third nickel layer and the chromium layer do not collapse, corrosion remains invisible. Corrosion stops at the first more noble nickel layer which protects the base material against any corrosion, and proceeds laterally until all less noble nickel in the second (bright) nickel layer is dissolved.
- the described system works on plated plastic articles where the metal layer plated first normally is copper as well as on steel parts. Its performance is checked by the CASS test (ASTM B368: Copper-Accelerated Acetic Acid-Salt Spray Testing). The result of this test is given as a rank between 1 and 10 where '10' means: no visible change compared to a surface without any corrosive attack and '1' denotes a destroyed surface. The test furthermore distinguishes between the appearance of a surface after prolonged corrosion, and the base material corrosion. It therefore gives a pair of numbers, e.g., 10/9 which means: no attack of the base material but some minor change of appearance of a surface.
- CASS testing correlates with the number of pores being produced in the chromium layer which are in turn due to the incorporation of inert particles into the third nickel layer ( E.P.Harbulak et al., "Chromium Microporosity and Active Sites", Plating and Surface Finishing, (1989) 58-61 ).
- the electric potential difference established between the first (semi-bright) nickel layer and the second (bright) nickel layer is adjusted to be in a range of from 90 mV to 140 mV.
- the electric potential and the resulting potential difference are determined using the STEP test (ASTM B764: "Simultaneous Thickness and Electrochemical Potential Determination of Individual Layers in Multilayer Nickel Deposit”).
- the third nickel layer must be more noble than the second nickel layer, as the third nickel layer with its tiny pores has to cover the second (bright) nickel layer without experiencing any dissolution once corrosion takes place.
- a potential difference between the third nickel layer and the second nickel layer in a range of from 20 mV to 60 mV normally is adjusted.
- WO 2005/106106 A1 discloses an aqueous dispersion for the use as a finishing agent for textiles, wherein the dispersion contains a pyrogenically produced, aggregated dioxide powder and a cationic polymer which is soluble in the dispersion.
- EP 1 894 888 A1 1 discloses an aqueous silica dispersion which is cationically stabilized. Such dispersion is mentioned to be used as a paint to be applied on paper, foils and onto other printing media, as a coating on a substrate like wood, plastics, metal, textiles and foils for improving the mechanical and optical properties thereof, as a coating on foils for improving the separation of two foils from each other and in grinding and polishing agents.
- DE 24 32 724 A1 refers to a nickel deposition solution comprising alkali metal silicates and kaolin to form particles in the deposited nickel layer.
- the alkali metal silicates are reported to change the charge of the kaolin particles in order to make the incorporation thereof into the nickel deposit possible.
- US 4,655,882 A discloses a process for manufacturing zinc-silica composite plated steel.
- the galvanization bath contains ions of zinc, for example ZnSO 4 , and silica particles. After electrochemical deposition of the zinc-silica composite plated steel silane coupling treatment is performed with alkoxysilane.
- GB 1 421 975 A discloses a process for the deposition on a surface of a metallic coating.
- the deposition is carried out from an aqueous bath, more especially by means of electroplating.
- the solution contains ions of the metal, for example NiSO 4 and a finely-divided solid, for example silicon carbide or other non-metallic, for example oxides.
- the aqueous bath contains an amino-organosilicon compound, which contains at least one H 2 N-group. The amino-organosilicon compound is preferably reacted with the solid.
- an object of the present invention is to provide a solution for electrochemically depositing a metal on a substrate.
- Another object of the present invention is to provide a method of electrochemically depositing a metal on a substrate.
- An even further object of the present invention is to provide a method of forming a corrosion-resistant nickel multilayer on a substrate.
- An even further object of the present invention is to provided means to improve uniformity of resistance to corrosion attack to the surface of a metallic coating, in particular of a nickel coating, even more particularly of a nickel coating coated with a chromium coating.
- a further object of the present invention is to provide means to improve uniformity of pores formed in the chromium coating and in particular to provide means to improve uniformity of distribution of non-conductive particles incorporated into a nickel layer which is deposited directly underneath the chromium coating.
- an object of the present invention is to provide a solution and a method for electrochemically depositing a metal, more specifically nickel, on a substrate which contains silica particles which are co-deposited with nickel.
- Alkyl may be substituted, wherein at least one hydrogen atom thereof is substituted by any radical group like aryl, heteroaryl, OR, NR'R", COOR, CONR'R", wherein R, R' and R" are independently selected from hydrogen, alkyl, aryl and heteroaryl.
- Aryl means an aromatic C 5 -C 12 hydrocarbon moiety which may be substituted or unsubstituted.
- substituted aryl at least one hydrogen atom thereof is substituted by any radical group like, alkyl, aryl, heteroaryl, OR, NR'R", COOR, CONR'R", wherein R, R', R" are independently selected from hydrogen, alkyl, aryl and heteroaryl. Most preferably aryl is phenyl.
- Heteroaryl means an aromatic moiety having 5 to 12 ring members and having as the ring members, in addition to carbon atoms, at least one of N, S and O atoms. Heteroaryl moieties may be unsubstituted or substituted. In substituted heteroaryl, at least one hydrogen atom is substituted by any functional group like alkyl, aryl, heteroaryl, OR, NR'R", COOR, CONR'R", wherein R, R', R" are independently selected from hydrogen, alkyl, aryl and heteroaryl. Most preferably heteroaryl is pyridyl, pyrryl, thiophenyl, furanyl, pyrazoyl and the like.
- Amino means the moiety -NR'R", wherein R' and R" are independently selected from the group comprising hydrogen, alkyl, aryl, heteroaryl or, alternatively, may form one single divalent group to be with the N atom a ring moiety.
- Silica roughly is silicon dioxide. Silica particles may vary, depending on the method of production thereof, in terms of particles' size, degree of agglomeration, degree of crystallinity, specific surface area thereof, porosity and the like. “Silica” in accordance with the present invention may also be understood as a material which consists of particles of any other material like alumina, wherein these particles of the other material are completely covered with the silica material, such that the particles' surface predominately behaves like a silica surface. Silica is commercially available under trade names like Aerosil® (Evonik Degussa), HDK® (Wacker Chemie) and Cab-O-Sil® (Cabot). Silica may be crystalline or amorphous. Silica may also be provided as a colloid.
- the invention makes use of particles having an improved performance regarding their behavior in metal electrolytes, preferably nickel electrolytes and in an electric field.
- the particles allow the creation of high pore counts and a wide range of pore sizes.
- the positive electric charge on the silica particles is imparted to the silica particles by providing same with at least one silicon containing organic moiety thus giving the silica particles this positive electric charge while being in contact with the solution.
- One aspect of the present invention is therefore to provide a solution for electrochemically depositing nickel on a substrate, said solution containing nickel ions to be deposited, and silica particles, wherein at least one silicon containing organic moiety is provided which imparts the silica particles a positive electric charge while being in contact with the solution.
- Said at least one silicon containing organic moiety comprises at least one functional group selected from the group comprising amino, quaternized ammonium, quaternized phosphonium and quaternized arsonium and is preferably bonded to the silica particles.
- the at least one functional group imparts the silica particles the positive electric charge as required while being in contact with said solution.
- Another aspect of the present invention is to provide a method of electrochemically depositing a metal on a substrate, said method comprising the following method steps: (a) contacting the substrate and at least one anode with the solution for electrochemically depositing a metal according to the present invention and (b) applying an electric current to flow through the substrate and the at least one anode so that metal is deposited on the substrate.
- a nickel layer produced in accordance with the method of the present invention and by using the solution of the present invention is deposited as a part of a nickel multilayer structure, e.g ., a two-, three or four layered nickel multilayer structure, which is preferably superposed by a chromium layer.
- a further aspect of the present invention is to provide a method of forming a corrosion-resistant nickel multilayer on a substrate, wherein the method comprises the following method steps: (a) depositing a first nickel layer having a first electric potential, (b) depositing a second nickel layer having a second electric potential which is more negative than the first electric potential ( i.e ., the second nickel layer is less noble than the first nickel layer) over the first nickel layer, and (c) depositing a third nickel layer using the solution for electrochemically depositing a metal of the invention over the second nickel layer.
- silica In water, silica will normally develop a negative net charge, and therefore will not be transferred to the cathode where it is intended to produce pores. Instead it will be transferred to the anode and at elevated concentrations might even block the anode bags.
- at least one organic moiety which imparts the silica particles a positive electric charge when being in contact with the solution, a uniform high pore count in the chromium layer is achieved.
- Such advantage is combined with silica having other advantages over other material particles to be incorporated into the third nickel layer, these other advantages being that silica is highly porous and that it exhibits a hydrophilic surface.
- Porous hydrophilic silica (or glass particles) (which are commercially available in almost any size or porosity) is chosen instead of ground alumina or minerals like talc, because it is easily dispersible in water or electrolyte for a long time.
- High porosity of the silica particles offers the additional benefit of attributing the particles a low specific gravity which in turn causes more uniform distribution thereof in the plating solution because of a lower tendency to sediment. This in turn makes sophisticated and complicated air injection into the bath solution unnecessary which would otherwise be required to keep the particles suspended.
- silica particles are not prone to precipitation in water. For this reason silica particles can be applied to an eieciroiyie solution as suspension which makes replenishment very simple and reliable. While other inorganic material, especially talc, at slightly elevated pore concentration ( e.g ., > 20,000 cm -2 ) causes a hazy chromium deposit, the newly invented powder does not produce any visible haze even at a pore count which is much higher than 100,000 cm -2 .
- a further great advantage of the present invention is the commercial availability of a huge number of different types of silica.
- Silica particles having a porosity and size in a wide range are available and can easily be provided with the silicon containing organic moieties as desired. Because the particles after modification with the organic moieties have a defined positive electric charge, the pore count may simply be adjusted by setting the current density and by adjusting the concentration of the modified silica particles in the metal electrolyte, in particular nickel electrolyte. There is no requirement to provide a sophisticated and complicated architecture of air agitation which would lead to unpredictable results.
- the organic moieties are silicon containing organic moieties. Silanes and siloxanes or the like as silicon containing organic compounds are easily reacted to form the silicon containing organic moieties attached, preferably covalently bonded, to the surface of the silica particles.
- the at least one organic moiety is bound to the silica particles.
- a chemical (covalent) bond is formed between corresponding reactive centers on the organic moiety on the one hand and the silica surface on the other hand.
- Chemical bonding ensures that the moieties imparting the silica particles the positive charge are not desorbed or otherwise peeled away from the silica particles.
- the positive charge delivered to the silica particles by the organic moieties is constant and does not depend from any surface effects like an equilibrium which forms in the electrolyte deposition solution.
- the organic moieties have a positive electric charge on at least one of the atoms thereof, i.e ., on a nitrogen or phosphorus or arsenic atom.
- the positive electric charge may be provided by a chemical radical which is part of the organic moiety which forms or has a positive electric charge.
- the latter embodiment of chemical radicals possess a permanent positive electric charge, i.e ., ammonium, phosphonium and arsonium radicals. Chemical radicals form such positive electric charge only under the conditions of metal plating, i.e ., due to the pH conditions present in the metal plating solution. Chemical radicals which form such positive electric charge are for example amine radicals.
- such positive electric charge is formed or provided by at least one functional group selected from the group comprising amino, quaternized ammonium, quaternized phosphonium and quaternized arsonium.
- quaternized ammonium, quaternized phosphonium and quaternized arsonium feature a permanent positive electric charge
- amino features a positive electric charge only if the pH of the metal deposition solution is below a certain threshold value, which may be defined to be pH about 7, more preferably pH about 6, even more preferably pH about 5.5, even more preferably pH about 5 and most preferably pH about 4.5.
- the lower limit of the pH of the metal deposition solution will depend on the type of the metal deposition solution and will be pH about 0, more preferably pH about 1, even more preferably pH about 2, even more preferably pH about 3, even more preferably pH about 3.5 and most preferably pH about 4.
- positive charges are introduced into silica particles by bonding a silane, an aminosilane for example, to the silica particles' surface.
- a silane may be bonded to the silica particles' surface which has at least one of ammonium, phosphonium and arsonium groups or which does not have such groups when the silane is bonded to the silica particles' surface, but wherein such onium groups are formed thereafter, i.e., when the silanes have already been bonded to the silica particles' surface.
- the at least one organic moiety is formed by a reaction of the silica particles with a reagent, wherein the reagent has general chemical Formula I, II, III or IV: (R 1 O) 3 Si-R 2 -QR 3 R 4 I (R 1 O) 3 Si-R 2 -Q 4 R 3 R 4 R 5 II (R 1 O) 2 Si-R 2 -(QR 3 R 4 ) 2 III (R 1 O) 2 Si-R 2 -(Q + R 3 R 4 R 5 ) 2 IV wherein
- silica particles provided with the organic moiety show an overwhelming effect: Only 50 mg/I of silica modified with this material may produce more than 100,000 pores per square centimeter when being co-deposited into a nickel layer. While other material particles require a concentration of > 300 mg/l and a careful air distribution in the electrolyte, porous silica provided with the organic moiety does not need any care for the air agitation or the air distribution.
- the at least one organic moiety is formed by a reaction of the silica particles with (3-aminopropyl)triethoxysilane.
- Such reaction is believed to be a condensation reaction at the silica particles' surface which normally has, due to hydrolysis, Si-OH group which are exposed at the surface thereof.
- Such condensation reaction of the compound having general chemical Formula I with the silica particles' surface Si-OH groups may be as follows: Si-OH + (R 1 O) 3 Si-R 2 -NR 3 R 4 ⁇ Si-O-Si(OR 1 ) 2 -R 2 -NR 3 R 4 + R 1 -OH
- the silica particles provided with the organic moiety may be produced by reacting the silica particles with a silane compound by mixing same in a non-aqueous solvent, like acetone or chloroform and left to react the reaction mixture for a short time period, one hour for example. Then a precipitate formed in the reaction mixture can be separated, by filtration for example.
- a silane is mixed with an acid in an aqueous medium. Then silica is dispersed in this reaction mixture, while preferably stirring the reaction mixture.
- EP 1 894 888 A1 More elaborate and diverse embodiments and examples of preparing the silica particles modified by bonding one or a plurality of different aminosilanes to the surface thereof are disclosed in EP 1 894 888 A1 , wherein the type of diverse silica sources and types, the solvent used to react the silica particles with the aminosilanes, the acid used in the reaction mixture as well as the pH prevailing during the reaction step, the type of aminosilane compounds (R a SiX (4-a) ), wherein one or a plurality of such aminosilanes are used to be bonded to the silica particles' surface, the concentration and ratio of concentrations of silica and aminosilanes, the operations for reacting the silica particles with the aminosilanes (mixing, stirring), the concentration of the silica particles suspended in the reaction mixture, the type of additives added to the product being obtained and the like from EP 1 894 888 A1 are referred to be incorporated into the description of the present application.
- the silica particles used in accordance with the present invention preferably have a specific surface area of up to 300 m 2 /g.
- the lower limit of the specific surface area preferably is 40 m 2 /g. More preferably the upper limit is 250 m 2 /g and the lower limit is 140 m 2 /g.
- the upper and lower limit of the ranges given herein above may be combined to give any range.
- the above values for the specific surface area are chosen to give an optimum positive surface charge once the silica particles have been reacted to have the organic moiety be bonded to the surface thereof.
- the specific surface area is determined using the BET method.
- the silica particles preferably have a mean diameter in a range of from 0.3 ⁇ m to 15 ⁇ m, more preferably of from 0.6 ⁇ m to 12 ⁇ m and most preferably of from 0.6 ⁇ m to 5 ⁇ m.
- mean diameter is defined here as the d 50 value of the particle size distribution obtained by, e.g ., dynamic laser scattering measurement. Such methods for determination of particle size distributions are known to the person skilled in the art.
- the lower limit of the mean diameter is preferably 0.3 ⁇ m and more preferably 0.6 ⁇ m.
- the upper limit is preferably 15 ⁇ m, more preferably 12 and most preferably 5 ⁇ m.
- the upper and lower limit of the mean diameter may be combined to give any range having these limits.
- the above mean values for the mean diameter are chosen to give an optimum dispersibility (uniform distribution) in the dispersant (metal deposition bath).
- Silica may be contained in the electrolyte solution of the invention at a concentration of from 2 mg/l to 10 g/l, more preferably from 10 mg/l to 1 g/I, even more preferably from 20 to 500 mg/l and most preferably from 35 to 100 mg/l.
- the lower limit of this concentration may be 2 mg/l, more preferably 10 mg/l, even more preferably 20 mg/l and most preferably 35 mg/l and the upper limit of this concentration may be 10 g/l, more preferably 1 g/I, even more preferably 500 mg/l and most preferably 100 mg/l.
- the lower and upper limit values may be combined in any way to give a preferred concentration range. Concentration of silica in the electrolyte solution may be about 50 mg/l.
- Metal may be deposited onto the substrate using direct current or pulsed current, including unipolar or bipolar pulsed current. Alternatively, metal may be deposited using a sequence of time periods wherein direct current time periods alternate with pulsed current time periods.
- Plating may furthermore be performed in a conventional plant using dip tanks and racks holding the articles to be plated and dipping same into the electrolyte solution of the invention contained in such tanks with anodes facing the articles to be plated. The articles may also be contained in drums which are dipped into the plating solution. Alternatively, the articles to be plated may be placed and treated in a conveyorized plating plant which uses trays to accommodate the articles.
- the anodes may be placed at one or, preferably, at both sides of the articles to be plated and may be soluble anodes, i.e ., anodes which dissolve due to the electroplating operation because they are made substantially from the same metal as the metal being deposited. Or the anodes are made from a material which does not dissolve during the electroplating operation, i.e ., is inert against the solution and under the plating conditions. Plating is performed using more or less vigorous agitation of the solution, including air injection.
- the substrate may be any work piece suitable to plate a metal layer, e.g ., a work piece made of metal or a work piece made of plastics material or of any other non-conductive material.
- a nonconducting substrate may first be plated with any ground metal plating with or without applying electric current, i.e ., by immersion plating or electroless plating. Thereafter, the metal layer is plated using the solution according to the invention. And finally, other metal layers may be plated on top of the metal layer plated with the solution of the invention.
- the plating solution preferably contains a pH adjusting agent, like an acid or a buffer.
- the metal to be deposited is nickel.
- Nickel may be provided to the metal deposition solution as a nickel ion source, more specifically as a nickel salt and most preferably as nickel sulfate, nickel chloride, nickel carbonate, nickel acetate, nickel borate, nickel sulfamate, nickel methane sulfonate.
- the metal, preferably nickel, deposition solution may further contain at least one acid, preferably an inorganic acid and most preferably an acid which has a counter anion which is common with the counter anion of the nickel salt, for example sulfuric acid, sulfamic acid, methane sulfonic acid, boric acid and acetic acid.
- the metal, preferably nickel, deposition solution of the invention contains boric acid as the acid or pH adjusting agent.
- the acid can furthermore be understood to be identical with the pH adjusting agent or be part of the pH adjusting agent, wherein the latter may be a buffer mixture.
- the metal, preferably nickel, deposition solution contains additives which serve the control of the metal deposition bath, like organic compounds which influence metal deposit properties, like brightness, leveling, corrosion behavior (electric potential of corrosion) and the like.
- additives which serve the control of the metal deposition bath, like organic compounds which influence metal deposit properties, like brightness, leveling, corrosion behavior (electric potential of corrosion) and the like.
- Such compounds may be unsaturated compounds like vinyl sulfonic acid, allylsulfonic acid, further chloralhydrate and organic compounds having sulfur atoms in a low oxidation state, like saccharine.
- a nickel multilayer may be deposited onto a substrate surface.
- a chromium layer may be deposited on top of the nickel multilayer.
- Such nickel multilayer and chromium layer are well-known in the art to be largely corrosion-resistant.
- the nickel multilayer generally consists of two or three nickel layers: an optional first nickel layer having a rather noble (positive) electric potential, a second nickel layer which is a bright nickel layer and which is less noble than the first nickel layer and a third nickel layer which is plated on top of the second (bright) nickel layer.
- a chromium layer may be deposited on top of the third nickel layer with co-deposited silica particles contained therein.
- the first nickel layer may be deposited using a so-called Watts electrolyte which contains nickel chloride, nickel sulfate and boric acid, for example about 60 g NiCl 2 ⁇ 6 H 2 O, 270 g NiSO 4 ⁇ 6 H 2 O and 45 g boric acid per liter plating solution.
- This bath typically contains besides salicylic acid ethyne derivatives like hexynediol or butynediol or propargyl alcohol derivatives as additives or a mixture of a plurality of additives.
- the second nickel layer may be deposited using a Watts electrolyte which differs from the electrolyte used to deposit the first nickel layer by using typically sulfur containing compounds like toluene sulfonic acid or propargylsulfonates and in addition saccharine instead of salicylic acid as the additive or a mixture of a plurality of additives.
- the third nickel layer may be deposited using a Watts nickel electrolyte as in the case of depositing the first and second nickel layers, but additionally contains saccharine or a salt thereof and chloralhydrate as a mixture of additives and further silica as described to form the pores. All the electrolyte solutions mentioned may additionally contain further additives, like a brightener or a wetting agent like ethylhexylsulfate pH of the electrolyte solution may be from 2.5 - 6, more preferably from 3 - 4.5 and most preferably 4.0. Temperature of the electrolyte during the nickel electroplating operation may be elevated, such as 40 - 70°C, more specifically 50 - 60°C and most preferably 55°C.
- Example 1 Preparation of silica particles modified by bonding an aminosilane to the surface thereof and use thereof in a nickel electroplating bath:
- a rectangular PVC tank equipped with two nickel anodes at opposite sides was filled with 2 I of a Watts nickel electrolyte (60 g/l NiCl 2 ⁇ 6 H 2 O, 270 g/l NiSO 4 ⁇ 6 H 2 O, 45 g/l boric acid).
- the electrolyte was heated to 55°C. It was then adjusted by the addition of 0.2 ml/l of a solution of a wetting agent based on ethylhexylsulfate, 0.7 g/l sodium saccharate, 50 mg/l chloralhydrate and a brightener.
- To the 2 II electrolyte 100 mg of the modified silica were added. The solution remained clear without any noticeable turbidity. The agitation of the solution was achieved by only slight moderate air agitation.
- Rectangular steel panels were pretreated properly and plated with approximately 10 ⁇ m semi-bright nickel and approximately 10 ⁇ m bright nickel. Such prepared panels were then plated in the above described electrolyte at a current density of 3 A/dm 2 for three minutes and afterwards for three minutes in a conventionally available chromium electrolyte (Unichrome® 843 of Atotech).
- Average thickness of the chromium layer was found to be 0.23 ⁇ m on the edges of the panels and 0.16 ⁇ m in the middle of the panels. Total thickness of all nickel layers was 17 ⁇ m / 25 ⁇ m.
- the electric potential between the semi-bright nickel layer and the bright nickel layer was in the range of from 121 mV to 135 mV, and the potential between the last two nickel layers (between second and third nickel layer) was in a range of from 28 mV top 35 mV.
- the average pore count was 55,000 cm -2 . After 198 hours CASS testing the ranking (average of five independent inspectors) for appearance was 9.33 and for protection was 9.72.
- Syloid 244FP (Grace, peak volume 15.2% at 3.3 ⁇ m) was dried at 110°C in an oven for two hours.
- the silica powder lost 4.2 % weight.
- 5.0 ml (3-aminopropyl)triethoxysilane were dissolved in 100 ml chloroform (HPLC grade, water ⁇ 0.001 %) and poured over 15 g of the silica powder in a PP bottle which then was tightly closed.
- the opaque gel after short reaction time turned to a slurry. After one hour, the suspension was poured over a filter paper in a Buchner funnel, the chloroform was sucked off by vacuum and the remaining material was carefully washed with chloroform. The resulting material was again dried at 110°C until its weight did not change anymore. The weight gain after the reaction was 9.5 %.
- Example 3 Preparation of silica particles modified by bonding an aminosilane to the surface thereof and use thereof in a nickel electroplating bath:
- a stock of 5 I Watts nickel electrolyte one liter was adjusted with saccharine, surfactant and brightener as is already described in example 1.
- the adjusted electrolyte was used to plate micro-porous nickel within three minutes at 2 A cell current. The amount of pores versus current was then calculated.
- Fig. 1 shows the relationship obtained of the pore count vs.
- the pore count for conventional silica particles in the nickel electroplating bath is about 27,000 cm -2 at a current density of 5 A/dm 2
- the pore obtained with silica particles modified with the silicon containing organic moieties according to the invention is about 50,000 cm -2 at the same current density.
- Example 4 (Use of the modified silica in a nickel electroplating bath):
- a rectangular tank filled with 2 liter nickel electrolyte as described in Example 1 was used to plate a micro-discontinuous nickel layer over panels previously plated with approximately 10 ⁇ m of bright nickel at different concentrations of powder SD-530 modified with aminosilane as was described in Example 1.
- a ratio of pore count vs. concentration of the powder as shown in Fig. 2 was obtained. This ratio is linear up to high values of powder concentration and pore count, respectively. Pore count has been found to rise to about 200,000 cm -2 if a powder concentration of 100 mg/l is used and is expected to even rise further if the concentration is increased.
- a nickel electrolyte was prepared as described in Example 1. The plating was repeated in the same plating tank. This time SD-530 powder was used without silane-modification. The electrolyte contained 2 g/l powder. The pore count was found to be only 2,300 cm -2 .
- Example 6 (Use of the modified silica in a nickel electroplating bath):
- a 250 I tank was filled with a Watts nickel solution (concentrations of main components, NiCl 2 , NiSO 4 , boric acid, as in Example 1). The solution was heated to 55°C and adjusted as described in Example 1 with organic additives like surfactant, saccharine and brightener. After adjusting the pH to 4.2 and after addition of 50 mg/l of modified silica powder, a bent panel ( Fig. 3 ) was fixed in the middle of the tank parallel to the anodes and plating was started at a current density of 5 A/dm 2 . Plating took place for three minutes. The panel then was rinsed and chromium plated. Afterwards, the panel was cut into pieces and the pores in the chromium surface were counted after copper plating (Dubpernell-Test). Pore counts according to the Table 1 were obtained.
- Example 7 (Use of the modified silica in a nickel electroplating bath):
- a nickel multilayer and chromium layer on top of the nickel multilayer was deposited on a bent steel plate (as shown in Fig. 4 ). Experiments were performed in 100 I tanks.
- a first nickel plating step an about 16 ⁇ m thick semi-bright nickel layer was deposited (20 min @ 4 A/dm 2 ) on the steel plate from a commercially available semi-bright nickel plating bath (Duplalux® Step, Atotech). Thereafter, an about 8 ⁇ m thick bright nickel layer was deposited (10 min @ 4 A/dm 2 ) on top of the first nickel layer from a commercially available bright nickel plating bath (Makrolux® NF, Atotech). The electric potential of this second nickel layer was determined to be 140 mV with respect to the first nickel layer. Thereafter, an about 2 ⁇ m thick nickel layer was deposited (4 min @ 3 A/dm 2 ) on top of the bright nickel layer while silica was incorporated into this third nickel layer.
- the solution to deposit this nickel layer was the same as that of Example 1, but instead of ethylhexylsulfate, sodium saccharate and chloralhydrate as the additives an unsaturated carboxylic acid (allyl carboxylic acid, vinyl carboxylic acid), saccharine and a brightener (Makrolux®, Atotech) were contained in the plating solution. Different silica types were used in this case as given in Table 2. The electric potential of this third nickel layer was determined to be 30 mV with respect to the second nickel layer.
- the anodes used in all nickel plating steps were nickel pieces containing sulfur which were held in baskets.
- chromium layer was deposited (4 min @ 10 A/dm 2 ) on top of the third nickel layer from a commercially available chromium plating bath (Glanzchrombad Cr 843, Atotech).
- Example 8 (Use of the modified silica in a nickel electroplating bath):
- Table 1 (Pore counts in bent panel from Example 6): Area Pore count [cm -2 ] A 57,000 B 27,000 C 43,000 D 47,000 E 42,000 Table 2 (Particle types from Example 7): Experiment Particles used Experiment a) (Invention) Silica modified with an aminosilane (according to EP 1 894 888 A1 ) Experiment b) (Prior Art) Mixture of talc and silica particles which not have been modified Experiment c) (Prior Art) Mixture of alumina and silica particles which have not been modified Experiment d) (Prior Art) Mixture of alumina and silica particles which have not been modified Table 3 (Pore counts [cm -2 ] from Example 7): Particle Type Point 1 *) Point 2 *) Point 3 *) Point 4 *) Point 5 *) Mean Value Standard Deviation a) 11,400 16,700 30,700 42,700 26,400 25,580 12,247 Invention b) 2,400 4,400 59,300
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Laminated Bodies (AREA)
- Electrodes Of Semiconductors (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Cell Electrode Carriers And Collectors (AREA)
- Battery Electrode And Active Subsutance (AREA)
Claims (5)
- Procédé de formation d'une multicouche de nickel résistant à la corrosion sur un substrat, dans lequel le procédé comprend les étapes de procédé suivantes : (a) le dépôt d'une première couche de nickel possédant un premier potentiel électrique, (b) le dépôt d'une deuxième couche de nickel possédant un second potentiel électrique, lequel étant plus négatif que le premier potentiel électrique, sur la première couche de nickel et (c) le dépôt d'une troisième couche de nickel sur la deuxième couche de nickel en utilisant une solution pour déposer par voie électrochimique un métal sur un substrat, ladite solution contenant des ions du métal à déposer et des particules de silice, dans lesquelles au moins un fragment organique contenant du silicium est fourni sur lesdites particules de silice, ledit fragment organique contenant du silicium comprenant au moins un groupe fonctionnel choisi dans le groupe comprenant un amino, un ammonium quaternaire, un phosphonium quaternaire et un arsonium quaternaire qui confère aux particules de silice une charge électrique positive au contact de ladite solution.
- Procédé de formation d'une multicouche de nickel résistant à la corrosion sur un substrat selon la revendication 1, caractérisé en ce que le au moins un fragment organique est formé par une réaction des particules de silice avec un réactif, dans lequel le réactif possède la formule chimique générale I, II, III ou IV :
(R1O)3Si-R2-QR3R4 I
(R1O)3Si-R2-Q+R3R4R5 II
(R1O)2Si-R2-(QR3R4)2 III
(R1O)2Si-R2-(Q+R3R4R5)2 IV
dans lesquellesQ est N (azote), P (phosphore) ou As (arsenic),R1 et R2, indépendamment l'un de l'autre, sont un alkyle non substitué ou substitué,R3, R4 et R5 sont un hydrogène, un alkyle non substitué ou substitué, un aryle non substitué ou substitué, où R3, R4 et R5 peuvent, indépendamment les uns des autres, contenir en outre au moins un radical fonctionnel comprenant des fragments amino et imino. - Procédé de formation d'une multicouche de nickel résistant à la corrosion sur un substrat selon l'une quelconque des revendications précédentes, caractérisé en ce que le au moins un fragment organique est formé par une réaction des particules de silice avec le (3-amino-propyl) triéthoxysilane.
- Procédé de formation d'une multicouche de nickel résistant à la corrosion sur un substrat selon l'une quelconque des revendications précédentes, caractérisé en ce que les particules de silice possèdent une surface spécifique allant jusqu'à 300 m2/g.
- Procédé de formation d'une multicouche de nickel résistant à la corrosion sur un substrat selon l'une quelconque des revendications précédentes, caractérisé en ce que les particules de silice possèdent un diamètre moyen dans une plage allant de 0,3 µm à 15 µm.
Priority Applications (12)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP08075637A EP2145986B1 (fr) | 2008-07-15 | 2008-07-15 | Solution et procédé pour le dépôt électrochimique d'un métal sur un substrat |
AT08075637T ATE462025T1 (de) | 2008-07-15 | 2008-07-15 | Lösung und verfahren zur elektrochemischen abscheidung eines metalls auf ein substrat |
ES08075637T ES2339614T3 (es) | 2008-07-15 | 2008-07-15 | Solucion y metodo para depositar electroquimicamente un metal sobre un sustrato. |
PL08075637T PL2145986T3 (pl) | 2008-07-15 | 2008-07-15 | Roztwór i sposób elektrochemicznego osadzania metalu na substracie |
DE602008000878T DE602008000878D1 (de) | 2008-07-15 | 2008-07-15 | Lösung und Verfahren zur elektrochemischen Abscheidung eines Metalls auf ein Substrat |
BRPI0915785A BRPI0915785A2 (pt) | 2008-07-15 | 2009-07-10 | método para depositar eletroquimicamente um metal sobre um substrato |
KR1020117000690A KR20110039438A (ko) | 2008-07-15 | 2009-07-10 | 기재에 금속을 전해 증착하는 방법 |
CN2009801225315A CN102066622B (zh) | 2008-07-15 | 2009-07-10 | 在基材上电化学沉积金属的方法 |
US12/994,325 US20110132766A1 (en) | 2008-07-15 | 2009-07-10 | Method for Electrochemically Depositing a Metal on a Substrate |
PCT/EP2009/005192 WO2010006800A1 (fr) | 2008-07-15 | 2009-07-10 | Procédé de dépôt électrochimique d'un métal sur un substrat |
CA2723827A CA2723827A1 (fr) | 2008-07-15 | 2009-07-10 | Procede de depot electrochimique d'un metal sur un substrat |
JP2011517816A JP5674655B2 (ja) | 2008-07-15 | 2009-07-10 | 基材上に金属を電着する方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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EP08075637A EP2145986B1 (fr) | 2008-07-15 | 2008-07-15 | Solution et procédé pour le dépôt électrochimique d'un métal sur un substrat |
Publications (2)
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EP2145986A1 EP2145986A1 (fr) | 2010-01-20 |
EP2145986B1 true EP2145986B1 (fr) | 2010-03-24 |
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EP08075637A Active EP2145986B1 (fr) | 2008-07-15 | 2008-07-15 | Solution et procédé pour le dépôt électrochimique d'un métal sur un substrat |
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US (1) | US20110132766A1 (fr) |
EP (1) | EP2145986B1 (fr) |
JP (1) | JP5674655B2 (fr) |
KR (1) | KR20110039438A (fr) |
CN (1) | CN102066622B (fr) |
AT (1) | ATE462025T1 (fr) |
BR (1) | BRPI0915785A2 (fr) |
CA (1) | CA2723827A1 (fr) |
DE (1) | DE602008000878D1 (fr) |
ES (1) | ES2339614T3 (fr) |
PL (1) | PL2145986T3 (fr) |
WO (1) | WO2010006800A1 (fr) |
Families Citing this family (16)
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US20110155582A1 (en) | 2009-11-18 | 2011-06-30 | Tremmel Robert A | Semi-Bright Nickel Plating Bath and Method of Using Same |
EP2551375A1 (fr) * | 2011-07-26 | 2013-01-30 | Atotech Deutschland GmbH | Composition de bain pour placage autocatalytique de nickel |
US8871077B2 (en) * | 2011-10-14 | 2014-10-28 | GM Global Technology Operations LLC | Corrosion-resistant plating system |
JP6024714B2 (ja) * | 2013-10-03 | 2016-11-16 | トヨタ自動車株式会社 | 成膜用ニッケル溶液およびこれを用いた成膜方法 |
DE102014207778B3 (de) * | 2014-04-25 | 2015-05-21 | Kiesow Dr. Brinkmann GmbH & Co. KG | Verwendung einer Mischung zur Verwendung in einem galvanischen Bad oder eines galvanischen Bades zur Herstellung einer Glanznickelschicht sowie Verfahren zur Herstellung eines Artikels mit einer Glanznickelschicht |
US20170096732A1 (en) * | 2014-06-23 | 2017-04-06 | Hewlett-Packard Development Company, L.P. | Multilayer coatings on substrates |
US10899932B2 (en) | 2014-10-24 | 2021-01-26 | Basf Se | Non-amphoteric, quaternisable and water-soluble polymers for modifying the surface charge of solid particles |
CN104790004A (zh) * | 2015-03-11 | 2015-07-22 | 嘉兴敏惠汽车零部件有限公司 | 镀镍和\或铬部件及其制造方法 |
JP6524939B2 (ja) * | 2016-02-26 | 2019-06-05 | 豊田合成株式会社 | ニッケルめっき皮膜及びその製造方法 |
EP3456870A1 (fr) * | 2017-09-13 | 2019-03-20 | ATOTECH Deutschland GmbH | Bain et procédé de remplissage d'une tranchée ou d'un accès d'interconnexion verticale d'une pièce à usiner, de nickel ou d'un alliage de nickel |
PL238262B1 (pl) * | 2017-12-04 | 2021-08-02 | Zakl Wyrobow Galanteryjnych Spolka Z Ograniczona Odpowiedzialnoscia | Sposób elektrochemicznego wytwarzania wielowarstwowych powłok metalicznych, zwłaszcza niklowych, o zwiększonej odporności na korozję |
CN108914173B (zh) * | 2018-07-13 | 2021-03-23 | 中国科学院金属研究所 | 一种含有二氧化硅颗粒的铁镍复合镀层的制备方法 |
CN109183131B (zh) * | 2018-07-16 | 2020-06-16 | 东南大学 | 一种SiO2基复合超疏水金属表面的制备方法 |
CN112899741B (zh) * | 2021-01-21 | 2022-03-15 | 长春理工大学 | 在金属表面加工二氧化硅-镍复合疏水耐腐蚀涂层的方法 |
CN113436775B (zh) * | 2021-06-23 | 2022-11-08 | 中国核动力研究设计院 | 一种无衬底超薄镍-63放射源的制备方法 |
CN115012008B (zh) * | 2022-03-31 | 2023-09-19 | 九牧厨卫股份有限公司 | 一种提高附着力的环保复合涂镀层及其制备方法 |
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-
2008
- 2008-07-15 AT AT08075637T patent/ATE462025T1/de active
- 2008-07-15 EP EP08075637A patent/EP2145986B1/fr active Active
- 2008-07-15 ES ES08075637T patent/ES2339614T3/es active Active
- 2008-07-15 PL PL08075637T patent/PL2145986T3/pl unknown
- 2008-07-15 DE DE602008000878T patent/DE602008000878D1/de active Active
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2009
- 2009-07-10 CA CA2723827A patent/CA2723827A1/fr not_active Abandoned
- 2009-07-10 JP JP2011517816A patent/JP5674655B2/ja active Active
- 2009-07-10 US US12/994,325 patent/US20110132766A1/en not_active Abandoned
- 2009-07-10 KR KR1020117000690A patent/KR20110039438A/ko not_active Application Discontinuation
- 2009-07-10 WO PCT/EP2009/005192 patent/WO2010006800A1/fr active Application Filing
- 2009-07-10 BR BRPI0915785A patent/BRPI0915785A2/pt not_active IP Right Cessation
- 2009-07-10 CN CN2009801225315A patent/CN102066622B/zh active Active
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KR20110039438A (ko) | 2011-04-18 |
DE602008000878D1 (de) | 2010-05-06 |
JP5674655B2 (ja) | 2015-02-25 |
CN102066622A (zh) | 2011-05-18 |
CN102066622B (zh) | 2013-03-27 |
ATE462025T1 (de) | 2010-04-15 |
CA2723827A1 (fr) | 2010-01-21 |
PL2145986T3 (pl) | 2010-09-30 |
US20110132766A1 (en) | 2011-06-09 |
JP2011528063A (ja) | 2011-11-10 |
ES2339614T3 (es) | 2010-05-21 |
BRPI0915785A2 (pt) | 2015-11-10 |
EP2145986A1 (fr) | 2010-01-20 |
WO2010006800A1 (fr) | 2010-01-21 |
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