EP2088459B1 - Bildmessungsvorrichtung - Google Patents

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Publication number
EP2088459B1
EP2088459B1 EP07831103.2A EP07831103A EP2088459B1 EP 2088459 B1 EP2088459 B1 EP 2088459B1 EP 07831103 A EP07831103 A EP 07831103A EP 2088459 B1 EP2088459 B1 EP 2088459B1
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European Patent Office
Prior art keywords
fly
optical system
eye integrator
zoom
image
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EP07831103.2A
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English (en)
French (fr)
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EP2088459A1 (de
EP2088459A4 (de
Inventor
Daisaku Mochida
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Nikon Corp
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Nikon Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0961—Lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses

Definitions

  • the present invention relates to an optical type image measuring apparatus which measures a specimen such as a machine component and a semiconductor chip.
  • a measuring microscope or an image measuring apparatus is widely spread as a measuring apparatus which measures a shape size of a workpiece of the specimen.
  • the specimen which is placed on a horizontally movable stage is enlarged and projected to an image picking-up apparatus through an optical system, and a surface shape, defect inspection, a coordinate, and dimensions of the specimen are measured by utilizing an image signal into which the projection image is converted.
  • Japanese Patent Publication Laid-Open No. 11-183124 discloses such a measuring apparatus.
  • US 6 292 306 B1 , US 2002/012164A1 , and US 2006/0114554 A1 disclose an image measuring apparatus comprising an image-formation optical system which includes an objective lens and a zoom optical system from a specimen side; and an illumination optical system which includes a light source, the illumination optical system illuminating the specimen through the objective lens, respectively.
  • the measuring apparatus includes a transmission illumination and an epi-illumination which are of an illumination system, and the epi-illumination is exclusively used when an opaque object such as a machine component is measured.
  • the epi-illumination includes a halogen lamp, a collector lens, and a condenser lens, and the object is illuminated in a telecentric manner through an objective lens.
  • an image-formation optical system includes an objective lens and an image-formation lens, and an image of the specimen is formed on the image picking-up.
  • an apparatus including a zoom optical system which can vary magnification according to dimensions of the specimen.
  • the illumination light in which a balance is established between a wide visual field on a zoom low-power side and high NA on a zoom high-power side is required in the illumination of the apparatus including the zoom optical system.
  • NA on the zoom high-power side insufficient or a neighborhood of the visual field becomes dark on the zoom low-power side.
  • LED is increasingly adopted as a light source of the illumination optical system. LED has various merits such as lower power consumption, a constant color temperature, and rapid responsibility compared with halogen lamps.
  • a light-emitting area is smaller than that of halogen lamps, the problems mentioned above become more evident.
  • an object of the invention is to provide an image measuring apparatus including a zoom optical system, the image measuring apparatus in which lack of NA and uneven visual field in the range of zoom low power to the zoom high power can be prevented using the epi-illumination in which a small-area light source such as LED is used.
  • the fly-eye integrator further satisfies expressions (Exp. 2) and (Exp. 3): ⁇ / f > DL / F ⁇ ⁇ NA L ⁇ F where F is focal distance of objective lens.
  • the image measuring apparatus includes an illumination relay lens between the objective lens and the fly-eye integrator.
  • the fly-eye integrator further satisfies expressions (2') and (3'): ⁇ / f ⁇ B > D L / F ⁇ ⁇ B ⁇ NA L ⁇ F
  • the invention can provide the image measuring apparatus including the zoom optical system, the image measuring apparatus in which lack of NA and uneven visual field in the range of zoom low power to the zoom high power can be prevented using the epi-illumination in which a small-area light source such as LED is used.
  • Fig. 1 is a view schematically showing an image measuring apparatus according to a first embodiment of the invention.
  • Light outgoing from LED 1 is collimated through a collector lens 2, and the light is incident to a fly-eye integrator 3.
  • the fly- eye integrator 3 is disposed at a focal position of an objective lens 9 in order to perform telecentric illumination.
  • An optical path of a light flux outgoing from the fly-eye integrator 3 is changed by a folding mirror 5 after having passed through a diffuser panel 4, the light flux is reflected by a coating of a polarization beam splitter 7 after having passed through a polarizing plate 6, and the light flux is guided into an image-formation optical system. Meanwhile, excessive light flux is blocked by an aperture stop 20. Then the light flux passes through the objective lens 9 and quarter- wave plate 10, and a specimen 11 is illuminated with the light flux.
  • the light diffracted from the specimen 11 is transmitted through the coating of the polarization beam splitter 7 after having passed through the quarter-wave plate 10 and the objective lens 9, and the light is incident to a zoom optical system 12.
  • the zoom optical system 12 has a function of changing image-formation magnification of the optical system according to dimensions of the specimen 11. Then the light is transmitted through an analyzer 13, and an image of the specimen is formed on CCD 15 by an image-formation lens 14.
  • the polarizing plate 6, the polarization beam splitter 7, the extinction filter 8, the quarter-wave plate 1o, and the analyzer 13 are disposed in order to reduce noises caused by surface reflection from the prism, the objective lens, and the like. Functions of the polarizing plate 6, the polarization beam splitter 7, the extinction filter 8, the quarter-wave plate 10, and the analyzer 13 will be described below.
  • the polarizing plate 6 is disposed toward an orientation in which linearly polarized light in a direction perpendicular to the paper sheet surface can be transmitted through the polarizing plate 6.
  • the analyzer 13 is disposed toward an orientation in which linearly polarized light in a direction parallel to the paper sheet surface can be transmitted through the analyzer 13.
  • the light transmitted through the polarizing plate 6 becomes the linearly polarized light in the direction perpendicular to the paper sheet surface, and the light is reflected by the polarization beam splitter 7.
  • a component slightly transmitted through the polarization beam splitter 7 is absorbed by the extinction filter 8.
  • the light reflected from the surfaces of the prism and objective lens is linearly polarized light in the direction perpendicular to the paper sheet surface, and therefore most of the light cannot travel in a straight line through the polarization beam splitter 7. Because a partially leak component which travels in the straight line cannot be transmitted through the analyzer 13, the surface reflection light cannot reach CCD 15.
  • the specimen is illuminated with the illumination light transmitted through the quarter-wave plate 10, and the light diffracted from the specimen is transmitted through the quarter-wave plate again.
  • the linearly polarized light in the direction perpendicular to the paper sheet surface is rotated by 90 degrees to become the linearly polarized light in the direction parallel to the paper sheet surface. Therefore, the light reflected from the specimen 11 can be transmitted through the polarization beam splitter 7 and the analyzer 13 to reach CCD 15. The light transmitted through the analyzer 13 becomes the linearly polarized light.
  • a quarter-wave plate (not shown) is disposed at the back of the analyzer to convert the linearly polarized light into circularly polarized light.
  • the optical system also includes an auto focus system.
  • the light outgoing from a laser diode 16 is collected onto the specimen by a floodlight lens 17.
  • the light reflected from the specimen is transmitted through a light-receiving lens 18, and an image is formed on a two-divided sensor 19.
  • the image on the sensor is horizontally shifted when the position of the specimen is vertically shifted, which allows auto focus to be performed.
  • An obliquely incident type auto focus is used in the first embodiment.
  • a knife-edge type auto focus can also be used. In the knife-edge type auto focus, a half of the light transmitted through the objective lens 9 is hidden on a pupil.
  • D H is a necessary field diameter
  • NA L is a necessary numerical aperture
  • M is a necessary zoom variable-power ratio
  • NA H a numerical aperture NA H necessary for a zoom high-power side is empirically expressed as follows: NA H ⁇ NA L ⁇ M / 2
  • the high-power numerical aperture NA computed by the right side of the expression (4) becomes 0.135 in the case (1), and the high-power numerical aperture NA becomes 0.084 in the case (2). Therefore, it is found that the approximation of the expression (4) substantially holds.
  • Fig. 2 shows a conventional illumination optical system.
  • the illumination system is formed by combining a condenser lens 22 with the collector lens 2.
  • A is a light emission size and NAs is a numerical aperture of a light source
  • a condition that should be satisfied by the light source 21 in order to prevent lack of NA and uneven visual field in the range of the zoom lower power to the zoom high power is expressed as follows: A ⁇ NA s > D L ⁇ NA H
  • the expression (5) is not satisfied at all, and disadvantageously the neighborhood of the visual field becomes dark on the zoom low-power side or NA becomes insufficient on the high-power side.
  • Fig. 3 is a schematic diagram of the fly-eye integrator 3.
  • the fly-eye integrator 3 includes many lens elements 23.
  • Fig. 3 shows the fly-eye integrator whose lens element has a hexagonal shape. However, the lens element may have a square or circular shape. It is assumed that ⁇ is a diameter of a circle inscribed in the fly-eye integrator, ⁇ is a diameter of a circle inscribed in the lens element constituting the fly-eye integrator, and f is a focal distance.
  • the left side of the expression (1) can be increased.
  • the whole surface of the pseudo light source does not emit the light, but only a light source image located near the center of each element emits the light.
  • the light emitting points are discretely located in the pseudo light source.
  • ⁇ of the fly-eye integrator is excessively large, it is not necessary to illuminate the whole surface of the fly-eye integrator, but the left side of the expression (1) can apparently be decreased by using only a part of the fly-eye integrator. At this point, from the viewpoint of mechanical limitation, the fly-eye integrator can eccentrically be disposed.
  • the fly-eye integrator In the case where the fly-eye integrator is used, it is necessary to select the fly-eye integrator satisfying at least the expression (1). In the first embodiment, because the outgoing light of the fly eye is directly incident to the objective lens, as described below, the efficient illumination cannot be achieved simply by satisfying the expression (1).
  • the optical system having the zoom variable-power ratio of 10 times, the low- power NA of 0.027, the low-power field diameter of 17 mm, and the objective-lens focal distance of 90 mm is combined with the fly-eye integrator.
  • the fly-eye integrator has a device size of 40 mm, each element has a size of 2 mm, and each element has a focal distance of 7 mm.
  • Table 1 shows result in which the values are substituted into the expressions (1), (2), and (3). [Table 1] LEFT SIDE RIGHT SIDE SATISFIED? EXPRESSION(1) 11.4 4.6 OK EXPRESSION(2) 0.29 0.19 OK EXPRESSION(3) 2 2.4 OK
  • the result satisfies all the conditions, and the optical system in which lack of NA and uneven visual field in the range of zoom low power to the zoom high power are prevented can be formed using the fly-eye integrator.
  • Fig. 6 is a schematic diagram showing an image measuring apparatus according to a second embodiment of the invention.
  • the same component as that of Fig. 1 is designated by the same numeral.
  • the embodiment of Fig. 6 differs from the embodiment of Fig. 1 only in that an illumination relay lens 24 and a field stop 25 are located at the back of the fly-eye integrator 3. Therefore, the description of the same components is omitted and only the different components will be described.
  • the field stop cannot be disposed in the first embodiment of Fig. 1 , disadvantageously the illumination field becomes large beyond necessity to cause a stray light or a shape of the illumination field becomes a shape of the end face of each element constituting the fly-eye integrator.
  • a point conjugate to the specimen 11 can be formed using the relay lens 24, and the field stop 25 can be disposed at the conjugate point.
  • the use of the relay lens changes the magnification, assuming that B is magnification of the relay lens, the following relationships are obtained: NA FL ⁇ NA FL / B , that is , ⁇ / 2 ⁇ f ⁇ B ⁇ ⁇ ⁇ ⁇ B
  • the expressions (2') and (3') indicate that the fly-eye integrator can be used in the second embodiment using the relay lens having reduction magnification even if the fly-eye integrator cannot be used in the optical system of the first embodiment because the fly-eye integrator does not satisfy the expressions (2) and (3). That is, the second embodiment also has an effect of widening the application of the fly-eye integrator.
  • the optical system having the zoom variable-power ratio of 10 times, the low-power NA of 0.027, the low-power field diameter of 17 mm, and the objective-lens focal distance of 90 mm is combined with the fly-eye integrator.
  • the fly-eye integrator has a device size of 45 mm, each element has a size of 3 mm, and each element has a focal distance of 20 mm.
  • Table 2 shows result in which the values are substituted into the expressions (1), (2), and (3). [Table 2] LEFT SIDE RIGHT SIDE SATISFIED? EXPRESSION(1) 6.8 4.6 OK EXPRESSION(2) 0.15 0.19 NG EXPRESSION(3) 3 2.4 NG
  • the optical system in which lack of NA and uneven visual field are prevented in the range of the zoom low power to the zoom high power can be formed using the fly-eye integrator and the illumination relay lens. That is, even for the fly-eye integrator which cannot be used in the image measuring apparatus of the first embodiment, the fly-eye integrator can be used by the configuration of the image measuring apparatus of the second embodiment, and the application of the fly-eye integrator can be widened.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Claims (4)

  1. Bildmessvorrichtung zum Messen einer Probe (11) aufweisend:
    ein bildformendes optisches System, welches eine Objektivlinse (9) und ein optisches Zoomsystem (12) von der Probenseite aufweist,
    ein optisches Beleuchtungssystem, welches eine Lichtquelle (1) aufweist, wobei das optische Beleuchtungssystem die Probe (11) durch die Objektivlinse (9) beleuchtet, und
    Kopplungsmittel (7), die zwischen der Objektivlinse (9) und dem optischen Zoomsystem (12) zum Einkoppeln des Beleuchtungslichts in das bildformende optische System angeordnet sind,
    dadurch gekennzeichnet, dass das optische Beleuchtungssystem einen Facettenauge-Integrator (3) aufweist und der Facettenauge-Integrator (3) eine Ungleichung (Exp. 1) erfüllt: A × φ / f > M × D L × NA L
    Figure imgb0024
     wobei
    A die Größe einer Pseudolichtquelle ist, die an einer Ausgangsendfläche des Facettenauge-Integrators (3) von Linsenelementen (23) des Facettenauge-Integrators (3) gebildet ist, die von der Lichtquelle (1) beleuchtet werden,
    φ der Durchmesser von Innkreisen in Endflächen der Linsenelemente (23) ist, die den Facettenauge-Integrator (3) bilden,
    f der Fokusabstand der Linsenelemente (23) ist, die den Facettenauge-Integrator (3) bilden,
    M das Verhältnis von Zoomvariable zu Energie des bildformenden optischen Systems ist,
    DL der Felddurchmesser des bildformenden optischen Systems auf der Probenseite der Objektivlinse (9) ist, wobei das optische Zoomsystem (12) bei geringer Zoomenergie ist, und
    NAL die numerische Apertur des bildformenden optischen Systems auf der Probenseite der Objektivlinse (9) ist, wobei das optische Zoomsystem (12) bei niedriger Zoomenergie ist.
  2. Bildmessvorrichtung nach Anspruch 1, wobei der Facettenauge-Integrator (3) ferner Ungleichungen (Exp. 2) und (Exp. 3) erfüllt: φ / f > D L / F
    Figure imgb0025
     φ < NA L × F
    Figure imgb0026
     wobei F der Fokusabstand der Objektivlinse (9) ist.
  3. Bildmessvorrichtung nach Anspruch 1, aufweisend eine Beleuchtung-Verstärkungslinse (24) zwischen der Objektivlinse (9) und dem Facettenauge-Integrator (3).
  4. Bildmessvorrichtung nach Anspruch 3, wobei der Facettenauge-Integrator (3) ferner die Ungleichungen (Exp 2') und (Exp. 3') erfüllt: φ / f × B > D L / F
    Figure imgb0027
     φ × B < NA L × F
    Figure imgb0028
    wobei F der Fokusabstand der Objektivlinse (9), und
    B die Vergrößerung der Verstärkungslinse (24) ist.
EP07831103.2A 2006-11-22 2007-11-02 Bildmessungsvorrichtung Active EP2088459B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006315382 2006-11-22
PCT/JP2007/071369 WO2008062651A1 (fr) 2006-11-22 2007-11-02 Dispositif de mesure d'image

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EP2088459A4 EP2088459A4 (de) 2010-01-13
EP2088459B1 true EP2088459B1 (de) 2016-06-15

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EP (1) EP2088459B1 (de)
JP (1) JP5012810B2 (de)
KR (1) KR101376632B1 (de)
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WO (1) WO2008062651A1 (de)

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JP2009069691A (ja) * 2007-09-14 2009-04-02 Olympus Corp 顕微鏡照明装置
JP2010133840A (ja) * 2008-12-05 2010-06-17 Nokodai Tlo Kk 形状測定装置及び形状測定方法
US20100277794A1 (en) * 2009-04-30 2010-11-04 Olympus Corporation Microscope
JP5415850B2 (ja) * 2009-07-08 2014-02-12 オリンパス株式会社 観察装置
JP5558162B2 (ja) * 2010-03-29 2014-07-23 オリンパス株式会社 落射蛍光照明装置、及び、それを用いた蛍光顕微鏡
JP5494678B2 (ja) * 2011-02-17 2014-05-21 株式会社ニコン 照明光学系およびプロジェクタ装置
JP6223695B2 (ja) * 2013-03-05 2017-11-01 シナジーオプトシステムズ株式会社 位置検出装置および位置検出方法
JP6225517B2 (ja) * 2013-07-08 2017-11-08 株式会社リコー 液滴吐出状態検出装置および画像形成装置
US9625726B2 (en) * 2014-12-05 2017-04-18 Kla-Tencor Corp. Lens array-based illumination for wafer inspection

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EP2088459A1 (de) 2009-08-12
KR101376632B1 (ko) 2014-03-19
WO2008062651A1 (fr) 2008-05-29
EP2088459A4 (de) 2010-01-13
CN101542352A (zh) 2009-09-23
CN101542352B (zh) 2011-01-12
US8120844B2 (en) 2012-02-21
KR20090082195A (ko) 2009-07-29
JPWO2008062651A1 (ja) 2010-03-04
US20090225412A1 (en) 2009-09-10
JP5012810B2 (ja) 2012-08-29

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