EP1941558A4 - Piezoelektrische einrichtung, verfahren zum betätigen dieser, piezoelektrische vorrichtung und flüssigkeits-abgabevorrichtung - Google Patents

Piezoelektrische einrichtung, verfahren zum betätigen dieser, piezoelektrische vorrichtung und flüssigkeits-abgabevorrichtung

Info

Publication number
EP1941558A4
EP1941558A4 EP06798230A EP06798230A EP1941558A4 EP 1941558 A4 EP1941558 A4 EP 1941558A4 EP 06798230 A EP06798230 A EP 06798230A EP 06798230 A EP06798230 A EP 06798230A EP 1941558 A4 EP1941558 A4 EP 1941558A4
Authority
EP
European Patent Office
Prior art keywords
piezoelectric
actuating
same
liquid discharge
piezoelectric device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP06798230A
Other languages
English (en)
French (fr)
Other versions
EP1941558A1 (de
Inventor
Yukio Sakashita
Takamichi Fujii
Yoshikazu Hishinuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Publication of EP1941558A1 publication Critical patent/EP1941558A1/de
Publication of EP1941558A4 publication Critical patent/EP1941558A4/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
EP06798230A 2005-09-26 2006-09-15 Piezoelektrische einrichtung, verfahren zum betätigen dieser, piezoelektrische vorrichtung und flüssigkeits-abgabevorrichtung Ceased EP1941558A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005277108 2005-09-26
JP2006188765A JP4237208B2 (ja) 2005-09-26 2006-07-10 圧電素子及びその駆動方法、圧電装置、液体吐出装置
PCT/JP2006/318791 WO2007034903A1 (en) 2005-09-26 2006-09-15 Piezoelectric device, method of actuating the same, piezoelectric apparatus, and liquid discharge apparatus

Publications (2)

Publication Number Publication Date
EP1941558A1 EP1941558A1 (de) 2008-07-09
EP1941558A4 true EP1941558A4 (de) 2011-11-23

Family

ID=37888946

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06798230A Ceased EP1941558A4 (de) 2005-09-26 2006-09-15 Piezoelektrische einrichtung, verfahren zum betätigen dieser, piezoelektrische vorrichtung und flüssigkeits-abgabevorrichtung

Country Status (6)

Country Link
US (1) US7845767B2 (de)
EP (1) EP1941558A4 (de)
JP (1) JP4237208B2 (de)
KR (1) KR101325552B1 (de)
CN (1) CN101273478B (de)
WO (1) WO2007034903A1 (de)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
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US7918542B2 (en) 2006-09-15 2011-04-05 Fujifilm Corporation Perovskite oxide, process for producing the perovskite oxide, piezoelectric body, piezoelectric device, and liquid discharge device
JP5546105B2 (ja) 2007-01-19 2014-07-09 富士フイルム株式会社 ペロブスカイト型酸化物とその製造方法、圧電体膜、圧電素子、液体吐出装置
EP1986245B1 (de) * 2007-04-26 2015-08-26 FUJIFILM Corporation Piezoelektrischer Körper, piezoelektrische Vorrichtung und Flüssigkeitsausstoßvorrichtung
JP5307986B2 (ja) 2007-05-07 2013-10-02 富士フイルム株式会社 圧電素子とその製造方法、及び液体吐出装置
JP2008311634A (ja) * 2007-05-14 2008-12-25 Fujifilm Corp 圧電素子及びその駆動方法、圧電装置、液体吐出装置
JP5495512B2 (ja) * 2007-05-30 2014-05-21 キヤノン株式会社 圧電素子の製造方法
JP5253894B2 (ja) * 2007-06-08 2013-07-31 富士フイルム株式会社 強誘電体膜、圧電素子、及び液体吐出装置
JP5253895B2 (ja) * 2007-06-08 2013-07-31 富士フイルム株式会社 強誘電体膜、圧電素子、及び液体吐出装置
JP4993294B2 (ja) * 2007-09-05 2012-08-08 富士フイルム株式会社 ペロブスカイト型酸化物、強誘電体膜とその製造方法、強誘電体素子、及び液体吐出装置
JP4931148B2 (ja) * 2007-10-02 2012-05-16 富士フイルム株式会社 ペロブスカイト型酸化物積層体及び圧電素子、液体吐出装置
EP2202815B1 (de) 2007-10-16 2019-04-10 Murata Manufacturing Co. Ltd. Schwingungsgerät und piezoelektrische pumpe
JP5426861B2 (ja) * 2007-10-24 2014-02-26 富士フイルム株式会社 強誘電性酸化物とその製造方法、圧電体、圧電素子
JP5507097B2 (ja) * 2008-03-12 2014-05-28 富士フイルム株式会社 ペロブスカイト型酸化物とその製造方法、圧電体、圧電素子、液体吐出装置
EP2269965B1 (de) * 2008-03-26 2016-02-10 TDK Corporation Piezoelektrische keramik und piezoelektrische keramikzusammensetzung
JP5345868B2 (ja) * 2008-03-31 2013-11-20 富士フイルム株式会社 ペロブスカイト型酸化物膜、強誘電体、圧電素子、液体吐出装置
JP5394765B2 (ja) * 2008-03-31 2014-01-22 富士フイルム株式会社 ペロブスカイト型酸化物膜、強誘電体、圧電素子、液体吐出装置
JP2010010654A (ja) * 2008-05-28 2010-01-14 Fujifilm Corp ペロブスカイト型酸化物膜、強誘電体、圧電素子、液体吐出装置
JP5446146B2 (ja) * 2008-07-01 2014-03-19 日立金属株式会社 圧電薄膜素子、センサ及びアクチュエータ
JP5313792B2 (ja) 2008-07-17 2013-10-09 富士フイルム株式会社 ペロブスカイト型酸化物、酸化物組成物、酸化物体、圧電素子、及び液体吐出装置
JP5329863B2 (ja) 2008-07-31 2013-10-30 富士フイルム株式会社 圧電素子及び圧電素子の製造方法、液体吐出装置
JP5444662B2 (ja) 2008-08-25 2014-03-19 ソニー株式会社 圧電デバイスの製造方法
JP4500870B2 (ja) 2008-09-16 2010-07-14 富士フイルム株式会社 ペロブスカイト型酸化膜の評価方法
JP5733374B2 (ja) * 2008-09-19 2015-06-10 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター装置
US8400047B2 (en) * 2009-03-12 2013-03-19 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric device, and method of producing the piezoelectric device
JP5679694B2 (ja) * 2009-05-20 2015-03-04 キヤノン株式会社 圧電材料
US9154107B2 (en) * 2009-05-28 2015-10-06 Northrop Grumman Systems Corporation Lateral over-moded bulk acoustic resonators
JP5616130B2 (ja) * 2009-06-08 2014-10-29 富士フイルム株式会社 圧電素子及びそれを備えた圧電アクチュエータ、液体吐出装置、発電装置
JP5471612B2 (ja) * 2009-06-22 2014-04-16 日立金属株式会社 圧電性薄膜素子の製造方法及び圧電薄膜デバイスの製造方法
JP5681398B2 (ja) 2009-07-09 2015-03-04 富士フイルム株式会社 ペロブスカイト型酸化物、強誘電体組成物、圧電体、圧電素子、及び液体吐出装置
JP2009293130A (ja) * 2009-08-26 2009-12-17 Fujifilm Corp ペロブスカイト型酸化物、強誘電体膜、強誘電体素子、及び液体吐出装置
JP2011071389A (ja) * 2009-09-28 2011-04-07 Fujifilm Corp タイヤ内電力発生装置及び該装置を用いたタイヤモニタリングシステム
JP5616171B2 (ja) * 2009-09-28 2014-10-29 富士フイルム株式会社 高分子複合圧電体及びそれを用いた圧電素子
JP5577844B2 (ja) 2009-11-02 2014-08-27 セイコーエプソン株式会社 液体噴射装置
JP5621964B2 (ja) 2009-11-02 2014-11-12 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置及び圧電素子並びに超音波デバイス
JP2011207202A (ja) 2009-11-02 2011-10-20 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置及び圧電素子並びに圧電材料
JP5754619B2 (ja) * 2010-03-02 2015-07-29 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外センサー
JP2011181866A (ja) * 2010-03-04 2011-09-15 Fujifilm Corp 積層構造体及びそれを用いた圧電デバイス
JP5534179B2 (ja) * 2010-03-09 2014-06-25 セイコーエプソン株式会社 圧電体膜、圧電素子、液体噴射ヘッド及び液体噴射装置
JP2011187790A (ja) * 2010-03-10 2011-09-22 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置、および圧電素子
JP5614531B2 (ja) * 2010-03-12 2014-10-29 セイコーエプソン株式会社 液体噴射ヘッド及びそれを用いた液体噴射装置並びに圧電素子
JP2011211143A (ja) * 2010-03-12 2011-10-20 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置並びに圧電素子
JP5375688B2 (ja) * 2010-03-16 2013-12-25 セイコーエプソン株式会社 液体噴射ヘッド、圧電素子および圧電アクチュエーター
JP2011233813A (ja) * 2010-04-30 2011-11-17 Seiko Epson Corp 液体噴射ヘッド、圧電素子、圧電アクチュエーター及び液体噴射装置
JP5616126B2 (ja) 2010-05-27 2014-10-29 富士フイルム株式会社 ペロブスカイト型酸化物、酸化物組成物、酸化物体、圧電素子、及び液体吐出装置
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JP5740951B2 (ja) * 2010-12-09 2015-07-01 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電素子、赤外線センサー及び超音波センサー
CN102529373B (zh) * 2010-12-10 2015-06-03 精工爱普生株式会社 液体喷射头、液体喷射装置、压电元件以及压电陶瓷
JP5773127B2 (ja) * 2011-01-24 2015-09-02 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電素子、超音波デバイス及びｉｒセンサー
JP2012054560A (ja) * 2011-09-02 2012-03-15 Seiko Epson Corp 圧電素子の製造方法、インクジェット式記録ヘッドの製造方法およびインクジェットプリンタの製造方法
JP2015038953A (ja) * 2013-06-28 2015-02-26 セイコーエプソン株式会社 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置
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JP5761540B2 (ja) * 2013-06-28 2015-08-12 セイコーエプソン株式会社 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置
CN103708739A (zh) * 2013-07-02 2014-04-09 济南大学 一种锌掺杂的钛酸铋钠薄膜及其低温制备方法
JP5916667B2 (ja) * 2013-07-17 2016-05-11 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
JP5916668B2 (ja) * 2013-07-17 2016-05-11 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
US9022532B1 (en) * 2013-10-21 2015-05-05 Tdk Corporation Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and ink-jet printer device
JP6519735B2 (ja) * 2014-03-24 2019-05-29 セイコーエプソン株式会社 圧電素子及び圧電素子応用デバイス
US10427981B2 (en) 2014-12-26 2019-10-01 Seiko Epson Corporation Piezoelectric material, method of manufacturing the same, piezoelectric element, and piezoelectric element application device
US10355196B2 (en) * 2016-02-10 2019-07-16 Seiko Epson Corporation Piezoelectric element, piezoelectric element application device, and method of manufacturing piezoelectric element
WO2018234069A1 (en) 2017-06-22 2018-12-27 OCE Holding B.V. METHOD FOR MANUFACTURING INK JET PRINTING HEAD AND INK JET PRINTING HEAD WITH INDUCED CRYSTALLINE PHASE CHANGE ACTUATION
CN113248248A (zh) * 2020-08-13 2021-08-13 深圳先进技术研究院 固溶体多铁薄膜、制备方法及应用于5g存储技术的电子器件
CN114436654B (zh) * 2022-02-07 2022-10-28 哈尔滨工业大学 具有高相变温度、优异抗疲劳性和高机电性能的弛豫铁电铅基陶瓷材料及制备方法和应用

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Also Published As

Publication number Publication date
JP4237208B2 (ja) 2009-03-11
CN101273478B (zh) 2010-05-19
KR101325552B1 (ko) 2013-11-06
US20090267998A1 (en) 2009-10-29
CN101273478A (zh) 2008-09-24
WO2007034903A1 (en) 2007-03-29
EP1941558A1 (de) 2008-07-09
US7845767B2 (en) 2010-12-07
KR20080063354A (ko) 2008-07-03
JP2007116091A (ja) 2007-05-10

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