EP1818970A3 - Verfahren zur Präparation einer Probe für elektronenmikroskopische Untersuchungen, sowie dabei verwendete Probenträger und Transporthalter - Google Patents

Verfahren zur Präparation einer Probe für elektronenmikroskopische Untersuchungen, sowie dabei verwendete Probenträger und Transporthalter Download PDF

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Publication number
EP1818970A3
EP1818970A3 EP07008533A EP07008533A EP1818970A3 EP 1818970 A3 EP1818970 A3 EP 1818970A3 EP 07008533 A EP07008533 A EP 07008533A EP 07008533 A EP07008533 A EP 07008533A EP 1818970 A3 EP1818970 A3 EP 1818970A3
Authority
EP
European Patent Office
Prior art keywords
sample
carrier
preparing
electron microscopic
microscopic investigation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07008533A
Other languages
English (en)
French (fr)
Other versions
EP1818970A2 (de
EP1818970B1 (de
Inventor
Claus Dr. Burkhardt
Wilfried Dr. Nisch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Microscopy GmbH
Original Assignee
Carl Zeiss NTS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2003144643 external-priority patent/DE10344643B4/de
Application filed by Carl Zeiss NTS GmbH filed Critical Carl Zeiss NTS GmbH
Publication of EP1818970A2 publication Critical patent/EP1818970A2/de
Publication of EP1818970A3 publication Critical patent/EP1818970A3/de
Application granted granted Critical
Publication of EP1818970B1 publication Critical patent/EP1818970B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32—Polishing; Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
    • H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching for microworking, e.g. etching of gratings, trimming of electrical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31742—Etching microareas for repairing masks
    • H01J2237/31744—Etching microareas for repairing masks introducing gas in vicinity of workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers

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  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Robotics (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Ein Verfahren dient zur Präparation einer Probe (12) für elektronenmikroskopische Untersuchungen, insbesondere mit einem Transmissionselektronenmikroskop (TEM). Es umfasst die Schritte: a) ein die zu präparierende Probe (12) an einer Probenstelle (11) enthaltendes Substrat (10) wird in einer Vakuumkammer (32) bereitgestellt, b) auf eine Oberfläche (16) der Probenstelle (11) wird eine Schutzschicht (21) aufgebracht, c) die unter der Schutzschicht (21) befindliche Probe (12) wird durch einen Ionenstrahl (19) von dem Substrat (10) abgetrennt, wobei die Schutzschicht (21) als Maske dient, und d) die abgetrennte Probe (12) wird in der Vakuumkammer (32) von dem Substrat (10) entfernt. Dabei wird in Schritt c) oder d) die Probe (12) durch Adhäsion an eine hydrophile Fläche (57) eines von einem Manipulator (38) bewegten Transporthalters (53) erfasst (Fig. 8).
EP20070008533 2003-09-17 2004-09-16 Verfahren zur Präparation einer Probe für elektronenmikroskopische Untersuchungen, sowie dabei verwendete Probenträger und Transporthalter Active EP1818970B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2003144643 DE10344643B4 (de) 2003-09-17 2003-09-17 Verfahren zur Präparation einer Probe für elektronenmikroskopische Untersuchungen, sowie dabei verwendete Probenträger
EP04765266A EP1665320B1 (de) 2003-09-17 2004-09-16 Verfahren zur präparation einer probe für elektronenmikroskopische untersuchungen, sowie dabei verwendete probenträger und transporthalter

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP04765266A Division EP1665320B1 (de) 2003-09-17 2004-09-16 Verfahren zur präparation einer probe für elektronenmikroskopische untersuchungen, sowie dabei verwendete probenträger und transporthalter

Publications (3)

Publication Number Publication Date
EP1818970A2 EP1818970A2 (de) 2007-08-15
EP1818970A3 true EP1818970A3 (de) 2009-09-16
EP1818970B1 EP1818970B1 (de) 2014-11-12

Family

ID=34353096

Family Applications (2)

Application Number Title Priority Date Filing Date
EP04765266A Active EP1665320B1 (de) 2003-09-17 2004-09-16 Verfahren zur präparation einer probe für elektronenmikroskopische untersuchungen, sowie dabei verwendete probenträger und transporthalter
EP20070008533 Active EP1818970B1 (de) 2003-09-17 2004-09-16 Verfahren zur Präparation einer Probe für elektronenmikroskopische Untersuchungen, sowie dabei verwendete Probenträger und Transporthalter

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP04765266A Active EP1665320B1 (de) 2003-09-17 2004-09-16 Verfahren zur präparation einer probe für elektronenmikroskopische untersuchungen, sowie dabei verwendete probenträger und transporthalter

Country Status (6)

Country Link
US (1) US7375325B2 (de)
EP (2) EP1665320B1 (de)
JP (1) JP4628361B2 (de)
AT (1) ATE364895T1 (de)
DE (2) DE10362116B4 (de)
WO (1) WO2005033650A2 (de)

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JP4772638B2 (ja) * 2006-10-06 2011-09-14 住友ゴム工業株式会社 メッシュおよびゴム切片の観察方法
JP2008111735A (ja) * 2006-10-31 2008-05-15 Sii Nanotechnology Inc 試料操作装置
JP2008171800A (ja) * 2006-10-31 2008-07-24 Fei Co 荷電粒子ビーム処理用保護層
EP1953789A1 (de) * 2007-02-05 2008-08-06 FEI Company Verfahren zum Abdünnen einer Probe und Probenträger zu Ausführung dieses Verfahrens
US7834315B2 (en) 2007-04-23 2010-11-16 Omniprobe, Inc. Method for STEM sample inspection in a charged particle beam instrument
US8191168B2 (en) * 2007-11-06 2012-05-29 Sii Nanotechnology Inc. Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope
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WO2010014252A2 (en) * 2008-08-01 2010-02-04 Omniprobe, Inc. Grid holder for stem analysis in a charged particle instrument
US8143593B2 (en) * 2008-10-20 2012-03-27 Brookhaven Science Associates, Llc Transmission electron microscope sample holder with optical features
EP2373134A1 (de) * 2008-12-26 2011-10-05 JX Nippon Mining & Metals Corporation Gewalzte kupferfolie oder elektrolyt-kupferfolie für elektronische schaltungen sowie verfahren zum aufbau einer elektronischen schaltung mit der gewalzten kupferfolie oder elektrolyt-kupferfolie
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DE102010032894B4 (de) 2010-07-30 2013-08-22 Carl Zeiss Microscopy Gmbh Tem-Lamelle, Verfahren zu ihrer Herstellung und Vorrichtung zum Ausführen des Verfahrens
FR2965102B1 (fr) * 2010-09-17 2016-12-16 Centre Nat De La Rech Scient (Cnrs) Canon a electrons emettant sous haute tension, destine notamment a la microscopie electronique
US8258473B2 (en) * 2010-11-12 2012-09-04 Nanotem, Inc. Method and apparatus for rapid preparation of multiple specimens for transmission electron microscopy
US8604446B2 (en) 2011-08-08 2013-12-10 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of The University Of Oregon Devices and methods for cryo lift-out with in situ probe
DE102013012225A1 (de) 2013-07-23 2015-01-29 Carl Zeiss Microscopy Gmbh Verfahren zur TEM-Lamellen-Herstellung und Anordnung für TEM-Lamellen-Schutzvorrichtung
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WO2017031310A1 (en) * 2015-08-18 2017-02-23 The Regents Of The University Of California Nanoparticle detection
CN105158516B (zh) * 2015-08-20 2018-10-16 上海华力微电子有限公司 一种集成电路分析中透射电镜平面样品的制备方法
EP3613543A1 (de) * 2018-08-21 2020-02-26 FEI Company Ladungspartikelmikroskop mit manipulatorvorrichtung und verfahren zur herstellung einer probe mit diesem ladungspartikelmikroskop
CN110246735B (zh) * 2019-05-20 2024-06-07 北京工业大学 一种转移微纳样品的结构及制备方法及使用方法
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Also Published As

Publication number Publication date
WO2005033650A3 (de) 2005-12-08
EP1818970A2 (de) 2007-08-15
JP4628361B2 (ja) 2011-02-09
EP1665320B1 (de) 2007-06-13
EP1818970B1 (de) 2014-11-12
DE10362116B4 (de) 2008-08-28
US20060261270A1 (en) 2006-11-23
DE502004004108D1 (de) 2007-07-26
US7375325B2 (en) 2008-05-20
WO2005033650A2 (de) 2005-04-14
ATE364895T1 (de) 2007-07-15
JP2007506078A (ja) 2007-03-15
EP1665320A2 (de) 2006-06-07

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