EP1650030B1 - Nozzle chamber with paddle vane and externally located thermal actuator - Google Patents

Nozzle chamber with paddle vane and externally located thermal actuator Download PDF

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Publication number
EP1650030B1
EP1650030B1 EP05109707A EP05109707A EP1650030B1 EP 1650030 B1 EP1650030 B1 EP 1650030B1 EP 05109707 A EP05109707 A EP 05109707A EP 05109707 A EP05109707 A EP 05109707A EP 1650030 B1 EP1650030 B1 EP 1650030B1
Authority
EP
European Patent Office
Prior art keywords
ink jet
nozzle arrangement
jet nozzle
ink
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP05109707A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1650030A1 (en
Inventor
Kia Silverbrook
Gregory Mcavoy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silverbrook Research Pty Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AUPO7937A external-priority patent/AUPO793797A0/en
Priority claimed from AUPO8038A external-priority patent/AUPO803897A0/en
Priority claimed from AUPO8033A external-priority patent/AUPO803397A0/en
Priority claimed from AUPO8078A external-priority patent/AUPO807897A0/en
Priority claimed from AUPO8039A external-priority patent/AUPO803997A0/en
Priority claimed from AUPO8034A external-priority patent/AUPO803497A0/en
Priority claimed from AUPO8062A external-priority patent/AUPO806297A0/en
Priority claimed from AUPO8040A external-priority patent/AUPO804097A0/en
Priority claimed from AUPO7941A external-priority patent/AUPO794197A0/en
Priority claimed from AUPO8057A external-priority patent/AUPO805797A0/en
Priority claimed from AUPO8051A external-priority patent/AUPO805197A0/en
Priority claimed from AUPO8043A external-priority patent/AUPO804397A0/en
Priority claimed from AUPO8052A external-priority patent/AUPO805297A0/en
Priority claimed from AUPO8056A external-priority patent/AUPO805697A0/en
Priority claimed from AUPO8001A external-priority patent/AUPO800197A0/en
Priority claimed from AUPO7945A external-priority patent/AUPO794597A0/en
Priority claimed from AUPO7951A external-priority patent/AUPO795197A0/en
Priority claimed from AUPO8079A external-priority patent/AUPO807997A0/en
Priority claimed from AUPO8006A external-priority patent/AUPO800697A0/en
Priority claimed from AUPO8068A external-priority patent/AUPO806897A0/en
Priority claimed from AUPO7933A external-priority patent/AUPO793397A0/en
Priority claimed from AUPO8010A external-priority patent/AUPO801097A0/en
Priority claimed from AUPO7946A external-priority patent/AUPO794697A0/en
Priority claimed from AUPO8045A external-priority patent/AUPO804597A0/en
Priority claimed from AUPO7948A external-priority patent/AUPO794897A0/en
Priority claimed from AUPO8064A external-priority patent/AUPO806497A0/en
Priority claimed from AUPO8042A external-priority patent/AUPO804297A0/en
Priority claimed from AUPO7952A external-priority patent/AUPO795297A0/en
Priority claimed from AUPO8011A external-priority patent/AUPO801197A0/en
Priority claimed from AUPO7943A external-priority patent/AUPO794397A0/en
Priority claimed from AUPO8050A external-priority patent/AUPO805097A0/en
Priority claimed from AUPO8075A external-priority patent/AUPO807597A0/en
Priority claimed from AUPO8002A external-priority patent/AUPO800297A0/en
Priority claimed from AUPO7944A external-priority patent/AUPO794497A0/en
Priority claimed from AUPO8007A external-priority patent/AUPO800797A0/en
Priority claimed from AUPO8008A external-priority patent/AUPO800897A0/en
Priority claimed from AUPO8037A external-priority patent/AUPO803797A0/en
Priority claimed from AUPO8046A external-priority patent/AUPO804697A0/en
Priority claimed from AUPO7947A external-priority patent/AUPO794797A0/en
Priority claimed from AUPO8074A external-priority patent/AUPO807497A0/en
Priority claimed from AUPO8503A external-priority patent/AUPO850397A0/en
Priority claimed from AUPO9391A external-priority patent/AUPO939197A0/en
Priority claimed from AUPO9389A external-priority patent/AUPO938997A0/en
Priority claimed from AUPO9390A external-priority patent/AUPO939097A0/en
Priority claimed from AUPO9392A external-priority patent/AUPO939297A0/en
Priority claimed from AUPO9393A external-priority patent/AUPO939397A0/en
Priority claimed from AUPP0873A external-priority patent/AUPP087397A0/en
Priority claimed from AUPP0888A external-priority patent/AUPP088897A0/en
Priority claimed from AUPP0892A external-priority patent/AUPP089297A0/en
Priority claimed from AUPP0890A external-priority patent/AUPP089097A0/en
Priority claimed from AUPP0889A external-priority patent/AUPP088997A0/en
Priority claimed from AUPP0875A external-priority patent/AUPP087597A0/en
Priority claimed from AUPP0872A external-priority patent/AUPP087297A0/en
Priority claimed from AUPP0874A external-priority patent/AUPP087497A0/en
Priority claimed from AUPP0882A external-priority patent/AUPP088297A0/en
Priority claimed from AUPP0893A external-priority patent/AUPP089397A0/en
Priority claimed from AUPP0894A external-priority patent/AUPP089497A0/en
Priority claimed from AUPP0891A external-priority patent/AUPP089197A0/en
Priority claimed from AUPP1396A external-priority patent/AUPP139698A0/en
Priority claimed from AUPP1398A external-priority patent/AUPP139898A0/en
Priority claimed from AUPP2591A external-priority patent/AUPP259198A0/en
Priority claimed from AUPP2593A external-priority patent/AUPP259398A0/en
Priority claimed from AUPP2592A external-priority patent/AUPP259298A0/en
Priority claimed from AUPP3983A external-priority patent/AUPP398398A0/en
Priority claimed from AUPP3990A external-priority patent/AUPP399098A0/en
Priority claimed from AUPP3989A external-priority patent/AUPP398998A0/en
Priority claimed from AUPP3986A external-priority patent/AUPP398698A0/en
Priority claimed from AUPP3985A external-priority patent/AUPP398598A0/en
Priority claimed from AUPP3991A external-priority patent/AUPP399198A0/en
Priority claimed from AUPP3987A external-priority patent/AUPP398798A0/en
Priority claimed from AUPP3984A external-priority patent/AUPP398498A0/en
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Publication of EP1650030A1 publication Critical patent/EP1650030A1/en
Application granted granted Critical
Publication of EP1650030B1 publication Critical patent/EP1650030B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
    • B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17596—Ink pumps, ink valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/041—Electromagnetic transducer

Definitions

  • the present invention relates to the field of ink jet printing systems.
  • US Patent 3596275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilised by several manufacturers including Elmjet and Scitex (see also US Patent No. 3373437 by Sweet et al )
  • Piezo-electric ink jet printers are also one form of commonly utilised ink jet printing device. Piezo-electric systems are disclosed by Kyser et. al. in US Patent No. 3946398 (1970 ) which utilises a diaphragm mode of operation, by Zolten in US Patent 3683212 (1970 ) which discloses a squeeze mode of operation of a piezo electric crystal, Stemme in US Patent No. 3747120 (1972 ) discloses a bend mode of piezo-electric operation, Howkins in US Patent No. 4459601 discloses a Piezo electric push mode actuation of the ink jet stream and Fischbeck in US 4584590 which discloses a sheer mode type of piezo-electric transducer element.
  • the ink jet printing techniques include those disclosed by Endo et at in GB 2007162 (1979 ) and Vaught et al in US Patent 4490728 . Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media.
  • Printing devices utilising the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.
  • EP-A-0506232 discloses a valve for a drop on demand ink jet printer employing a lever seal in a housing to control the frequency and quantity of ink delivered to a printing material such as paper.
  • JP 4118241 Another prior art apparatus is disclosed in JP 4118241 .
  • esoteric techniques are also often utilised. These can include electroforming of nickel stage ( Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985 )), electro-discharge machining, laser ablation ( U.S. Patent No. 5,208,604 ), micro-punching, etc.
  • a sacrificial material to build up a mechanical system, within the sacrificial material being subsequently etched away so as to release the required mechanical structure.
  • a suitable common sacrificial material includes silicon dioxide which can be etched away in hydrofluoric acid.
  • MEMS devices are often constructed on silicon wafers having integral electronics such as, for example, using a multi-level metal CMOS layer.
  • the CMOS process includes the construction of multiple layers which may include the utilization of materials which can be attacked by the sacrificial etchant. This often necessitates the construction of passivation layers using extra processing steps so as to protect other layers from possible unwanted attack by a sacrificial etchant.
  • the present invention provides an ink jet nozzle arrangement in accordance with the claims which follow.
  • a nozzle chamber having ink within it and a thermal actuator device interconnected to a paddle the thermal actuator device being actuated so as to eject from the nozzle chamber.
  • An embodiment includes a particular thermal actuator structure which includes a series of tapered actuator heater arms for providing conductive heating of a conductive trace.
  • the actuator arm is interconnected to a paddle by a slotted wall in the nozzle chamber.
  • the actuator arm has a mating shape so as to mate substantially with the surfaces of the slot in the nozzle chamber wall.
  • a nozzle chamber 4001 is provided filled with ink 4002 by means of an ink inlet channel 4003 which can be etched through a wafer substrate on which the nozzle chamber 4001 rests.
  • the nozzle chamber 4001 further includes an ink ejection aperture 4004 around which an ink meniscus forms.
  • a paddle type device 4007 which is interconnected to an actuator arm 4008 through a slot in the wall of the nozzle chamber 4001.
  • the actuator arm 4008 includes a heater means eg. 4009 located adjacent to a post end portion 4010 of the actuator arm.
  • the post 4010 being fixed to a substrate.
  • the heater means 4009 is heated so as to undergo thermal expansion.
  • the heater means itself or the other portions of the actuator arm 4008 are built from materials having a high bend efficiency.
  • a suitable material for the heater elements is a copper nickel alloy which can be formed so as to bend a glass material.
  • the heater means is ideally located adjacent the post end portion 4010 such that the effects of activation are magnified at the paddle end 4007 such that small thermal expansions near post 4010 result in large movements of the paddle end.
  • the heating 4009 and consequential paddle movement causes a general increase in pressure around the ink meniscus 4005 which expands, as illustrated in Fig. 571 , in a rapid manner.
  • the heater current is pulsed and ink is ejected out of the nozzle 4004 in addition to flowing in from the ink channel 4003.
  • the paddle 4007 is deactivated to again return to its quiescent position.
  • the deactivation causes a general reflow of the ink into the nozzle chamber.
  • the forward momentum of the ink outside the nozzle rim and the corresponding backflow results in a general necking and breaking off of the drop 4012 which proceeds to the print media.
  • the collapsed meniscus 4005 results in a general sucking of ink into the nozzle chamber 4002 via the in flow channel 4003.
  • the nozzle chamber is refilled such that the position in Fig. 570 is again reached and the nozzle chamber is subsequently ready for the ejection of another drop of ink.
  • Fig. 573 there is illustrated a view of a single nozzle arrangements of an embodiment.
  • the arrangement of Fig. 573 has a number in the structures which aid and assist in the low energy operation of the paddle.
  • the actuator 4008 includes a series of tapered heater sections eg. 4015 which comprise an upper glass portion (amorphous silicon dioxide) 4016 formed on top of a titanium nitride layers 4017.
  • a copper nickel alloy layer hereinafter called cupronickel
  • the titanium nitride layer 4017 is in a tapered form and, as such, resistive heating takes place near the post end portion 4010. Adjacent titanium nitride/glass portions are interconnected at block portion 4019 which also provides for a mechanical structural support for the actuator arm.
  • the heater means ideally includes a plurality of tapered portions 4015 which are elongated and spaced apart such that, upon heating, the bending force exhibited along the axis of the actuator arm is maximized.
  • the slots between adjacent tapered portions allow for slight differential operation of each thermal actuator with respect to adjacent actuators.
  • the block portion 4019 is interconnected to an arm portion 4020.
  • the arm 4020 is in turn connected to the paddle 4007 inside the nozzle chamber 4001 by means of a slot eg. 4022 formed in the side of the nozzle chamber 4001.
  • the formation of the slot 4022 is designed generally to mate with the surfaces of the arm 4020 so as to minimise opportunities for the outflow of ink around this arm.
  • the ink is held generally within the nozzle chamber 4001 via surface tension effects around the slot 4022.
  • a conductive current is passed through the titanium nitride layer 4017 via vias within the block portion 4010 connecting to a lower CMOS layer 4006 which provides for the necessary power and control circuitry for the nozzle arrangement.
  • the conductive current results in heating of the nitride layer 4017 adjacent to the post portion 4010 which results in a general upward bending of the arm 4008 and the consequential ejection of ink out of the nozzle 4004.
  • the ejected drop being printed on page in the usual manner for an inkjet printer as previously described.
  • an array of ink ejection devices can be subsequently formed so as to create a single printhead.
  • Fig. 574 there is illustrated an array views which comprises multiple ink ejection nozzle arrangements 4001 laid out in interleaved lines so as to form a printhead array.
  • different types of arrays can be formulated including full color arrays etc.
  • An embodiment achieves a particular balance between utilisation of the standard semi-conductor processing material such as titanium nitride and glass in a MEMS process.
  • the standard semi-conductor processing material such as titanium nitride and glass in a MEMS process.
  • the skilled person may make other choices of materials and design features where the economics are justified.
  • a copper nickel alloy of 50% copper and 50% nickel may be more advantageously deployed as the conductive heating compound as it is likely to have higher levels of bend efficiency.
  • other design structures may be employed where it is not necessary to provide for such a simple form of manufacture.
  • a nozzle chamber having ink within it and a thermal actuator device interconnected to a panel the thermal actuator device being actuated so as to eject ink from the nozzle chamber.
  • An embodiment includes a particular thermal actuator structure which includes a tapered heater structure arms for providing positional heating of a conductive heater layer row.
  • the actuator arm is interconnected to a paddle by a slotted wall in the nozzle chamber.
  • the actuator arm has a mating shape so as to mate substantially with the surfaces of the slot in the nozzle chamber wall.
  • a nozzle chamber 4101 is provided filled with ink 4102 by means of an ink inlet channel 4103 which can be etched through a wafer substrate on which the nozzle chamber 4101 rests.
  • the nozzle chamber 4101 includes an ink ejection aperture 4104 around which an ink meniscus forms.
  • a paddle type device 4107 which is interconnected to an actuator arm 4108 through a slot in the wall of the nozzle chamber 4101.
  • the actuator arm 4108 includes a heater means eg. 4109 located adjacent to a post end portion 4110 of the actuator arm.
  • the post 4110 being fixed to a substrate.
  • the heater means 4109 is heated so as to undergo thermal expansion.
  • the heater means itself or the other portions of the actuator arm 4108 are built from materials having a high bend efficiency.
  • a suitable material for the heater elements is a copper nickel alloy which can be formed so as to bend a glass material.
  • the heater means is ideally located adjacent the post end portion 4110 such that the effects of activation are magnified at the paddle end 4107 such that small thermal expansions near post 4110 result in large movements of the paddle end.
  • the heating 4109 causes a general increase in pressure around the ink meniscus 4105 which expands, as illustrated in Fig. 587 , in a rapid manner.
  • the heater current is pulsed and ink is ejected out of the nozzle 4104 in addition to flowing in from the ink channel 4103. Subsequently, the paddle 4107 is deactivated to again return to its quiescent position. The deactivation causes a general reflow of the ink into the nozzle chamber.
  • the forward momentum of the ink outside the nozzle rim and the corresponding backflow results in a general necking and breaking off of the drop 4112 which proceeds to the print media.
  • the collapsed meniscus 4105 results in a general sucking of ink into the nozzle chamber 4102 via the in flow channel 4103.
  • the nozzle chamber is refilled such that the position in Fig. 586 is again reached and the nozzle chamber is subsequently ready for the ejection of another drop of ink.
  • a single nozzle arrangement 4120 of an embodiment includes an actuator arm 4121 which includes a bottom arm 4122 which is constructed from a conductive material such as a copper nickel alloy (hereinafter called cupronickel) or titanium nitride (TiN).
  • the layer 4122 as will become more apparent hereinafter includes a tapered end portion near the end post 4124. The tapering of the layer 4122 near this end means that any conductive resistive heating occurs near the post portion 4124.
  • the layer 4122 is connected to the lower CMOS layers 4126 which are formed in the standard manner on a silicon substrate surface 4127.
  • the actuator arm 4121 is interconnected to an ejection paddle which is located within a nozzle chamber 4128.
  • the nozzle chamber includes an ink ejection nozzle 4129 from which ink is ejected an includes a convoluted slot arrangement 4130 which is constructed such that the actuator arm 4121 is able to move up and down whilst causing minimal pressure fluctuations in the area of the nozzle chamber 4128 around the slotted interconnect 4130.
  • Fig. 590 illustrates a sectional view through a single nozzle and illustrates more clearly the internal structure of the nozzle chamber which includes the paddle 4132 attached to the actuator arm 4121 by means of arm 4133.
  • the actuator arm 4121 includes, as noted previously, a bottom conductive strip portion 4122. Additionally, a second top strip portion 4125 is also provided.
  • a second layer 4125 of the same material as the first layer 4122 allows for more accurate control of the actuator position as will be described with reference to Fig. 591 and Fig. 592 .
  • Fig. 591 there is illustrated the example where a high Young's Modulus material 4140 is deposited utilizating standard semiconductor deposition techniques and on top of which is further deposited a second layer 4141 having a much lower Young's Modulus.
  • the deposition is likely to occur at a high temperature.
  • the two layers are likely to have different coefficients of thermal expansion and different Young's Modulus.
  • the thermal stresses are likely to cause bending of the two layers of material as shown 4142.
  • one important attribute of an embodiments includes the slotted arrangement 4130.
  • the slotted arrangement results in the actuator arm 4121 moving up and down thereby causing the paddle 4132 to also move up and down resulting in the ejection of ink.
  • the slotted arrangements 4130 results in minimum ink outflow through the actuator arm interconnection and also results in minimal pressure increases in this area.
  • the base 4133 of the actuator arm is extended out so as to form an extended interconnect with the paddle surface thereto providing for better attachment.
  • the face 4133 is connected to a block arm 4136 which is provided to provide a high degree of rigidity.
  • the actuator arm 4136 and the wall of the nozzle chamber 4128 have a general corrugated nature so as to reduce any flow of ink through the interconnection.
  • the exterior surface of the nozzle chamber adjacent the block portion 4136 has a rim eg. 4138 so to minimize wicking of ink outside of the nozzle chamber.
  • a pit 4137 is also provided for this purpose. The pit 4137 being formed in the lower CMOS layers 4126.
  • An ink supply channel 4139 is provided by means of back etching through the wafer to the back surface of the nozzle.
  • micro-electro mechanical techniques for a general introduction to a micro-electro mechanical system (MEMS) reference is made to standard proceedings in this field including the proceeding of the SPIE (International Society for Optical Engineering) including volumes 2642 and 2882 which contain the proceedings of recent advances and conferences in this field.
  • SPIE International Society for Optical Engineering
  • the heater element has a tapered portion adjacent the post 4173 so as to ensure maximum heating occurs near the post.
  • inkjet printhead structures can be formed.
  • a portion of a single color printhead having two spaced apart rows 4190, 4191, with the two rows being interleaved so as to provide for a complete line of ink to be ejected in two stages.
  • a guide rail 4192 is provided for proper alignment of a TAB film with bond pads 4193.
  • a second protective barrier 4194 can also preferably be provided.
  • adjacent actuator arms are interleaved and reversed.
  • Fig. 603 there is illustrated a full color printhead arrangement which includes three series of inkjet nozzles 4194, 4196, one each devoted to a separate color. Again, guide rails 4198, 4199 are provided in addition to bond pads, eg. 4200.
  • Fig. 604 there is illustrated a general plan of the layout of a portion of a full color printhead which clearly illustrates the interleaved nature of the actuator arms.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP05109707A 1997-07-15 1998-07-15 Nozzle chamber with paddle vane and externally located thermal actuator Expired - Lifetime EP1650030B1 (en)

Applications Claiming Priority (72)

Application Number Priority Date Filing Date Title
AUPO7947A AUPO794797A0 (en) 1997-07-15 1997-07-15 A device (MEMS07)
AUPO7943A AUPO794397A0 (en) 1997-07-15 1997-07-15 A device (MEMS01)
AUPO8033A AUPO803397A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ19)
AUPO8078A AUPO807897A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM09)
AUPO8039A AUPO803997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ24)
AUPO8034A AUPO803497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ23)
AUPO8062A AUPO806297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ22)
AUPO8040A AUPO804097A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ03)
AUPO7941A AUPO794197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM24)
AUPO8057A AUPO805797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ09)
AUPO8051A AUPO805197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM27)
AUPO8043A AUPO804397A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ28)
AUPO8052A AUPO805297A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM20)
AUPO8056A AUPO805697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ10)
AUPO8001A AUPO800197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ17)
AUPO7945A AUPO794597A0 (en) 1997-07-15 1997-07-15 A device (MEMS08)
AUPO7951A AUPO795197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM22)
AUPO8079A AUPO807997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM18)
AUPO8006A AUPO800697A0 (en) 1997-07-15 1997-07-15 A device (MEMS02)
AUPO8068A AUPO806897A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ21)
AUPO7933A AUPO793397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation_apparatus (IJM10)
AUPO8010A AUPO801097A0 (en) 1997-07-15 1997-07-15 A device (MEMS05)
AUPO7946A AUPO794697A0 (en) 1997-07-15 1997-07-15 A device (MEMS10)
AUPO8045A AUPO804597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM28)
AUPO7948A AUPO794897A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM21)
AUPO8064A AUPO806497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ30)
AUPO8042A AUPO804297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ29)
AUPO7952A AUPO795297A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM29)
AUPO8011A AUPO801197A0 (en) 1997-07-15 1997-07-15 A device (MEMS06)
AUPO8038A AUPO803897A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ18)
AUPO8050A AUPO805097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM19)
AUPO8075A AUPO807597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM17)
AUPO8002A AUPO800297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ20)
AUPO7944A AUPO794497A0 (en) 1997-07-15 1997-07-15 A device (MEMS09)
AUPO8007A AUPO800797A0 (en) 1997-07-15 1997-07-15 A device (MEMS03)
AUPO8008A AUPO800897A0 (en) 1997-07-15 1997-07-15 A device (MEMS04)
AUPO8037A AUPO803797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ27)
AUPO8046A AUPO804697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM30)
AUPO7937A AUPO793797A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM03)
AUPO8074A AUPO807497A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM23)
AUPO8503A AUPO850397A0 (en) 1997-08-11 1997-08-11 A method of manufacture of an image creation apparatus (ijm30a)
AUPO9391A AUPO939197A0 (en) 1997-09-23 1997-09-23 Image creation method and apparatus (IJ32)
AUPO9389A AUPO938997A0 (en) 1997-09-23 1997-09-23 Image creation method and apparatus (IJ31)
AUPO9390A AUPO939097A0 (en) 1997-09-23 1997-09-23 A method of manufacture of an image creation apparatus (IJM31)
AUPO9392A AUPO939297A0 (en) 1997-09-23 1997-09-23 A method of manufacture of an image creation apparatus (IJM32)
AUPO9393A AUPO939397A0 (en) 1997-09-23 1997-09-23 A device and method (MEMS11)
AUPP0892A AUPP089297A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ38)
AUPP0888A AUPP088897A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ33)
AUPP0873A AUPP087397A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ36)
AUPP0890A AUPP089097A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ35)
AUPP0889A AUPP088997A0 (en) 1997-12-12 1997-12-12 A method of manufacture of an image creation apparatus (IJM35)
AUPP0875A AUPP087597A0 (en) 1997-12-12 1997-12-12 A device (MEMS12)
AUPP0872A AUPP087297A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJM36)
AUPP0874A AUPP087497A0 (en) 1997-12-12 1997-12-12 A method of manufacture of an image creation apparatus (IJM38)
AUPP0882A AUPP088297A0 (en) 1997-12-12 1997-12-12 A method of manufacture of an image creation apparatus (IJM37)
AUPP0893A AUPP089397A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ37)
AUPP0894A AUPP089497A0 (en) 1997-12-12 1997-12-12 An interconnection system (MEMS13)
AUPP0891A AUPP089197A0 (en) 1997-12-12 1997-12-12 Image creation method and apparatus (IJ34)
AUPP1396A AUPP139698A0 (en) 1998-01-19 1998-01-19 A method of manufacture of an image creation apparatus (ijm39)
AUPP1398A AUPP139898A0 (en) 1998-01-19 1998-01-19 An image creation method and apparatus (ij39)
AUPP2591A AUPP259198A0 (en) 1998-03-25 1998-03-25 Image creation method and apparatus (IJM41)
AUPP2593A AUPP259398A0 (en) 1998-03-25 1998-03-25 Image creation method and apparatus (IJ41)
AUPP2592A AUPP259298A0 (en) 1998-03-25 1998-03-25 Image creation method and apparatus (IJ40)
AUPP3983A AUPP398398A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij45)
AUPP3990A AUPP399098A0 (en) 1998-06-09 1998-06-09 A method of manufacture of image creation apparatus (ijm42)
AUPP3989A AUPP398998A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm40)
AUPP3986A AUPP398698A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm43)
AUPP3985A AUPP398598A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij44)
AUPP3991A AUPP399198A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij42)
AUPP3987A AUPP398798A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij43)
AUPP3984A AUPP398498A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm44)
EP98933352A EP0999934B1 (en) 1997-07-15 1998-07-15 A thermally actuated ink jet

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP98933352A Division EP0999934B1 (en) 1997-07-15 1998-07-15 A thermally actuated ink jet

Publications (2)

Publication Number Publication Date
EP1650030A1 EP1650030A1 (en) 2006-04-26
EP1650030B1 true EP1650030B1 (en) 2008-09-24

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Family Applications (5)

Application Number Title Priority Date Filing Date
EP98933352A Expired - Lifetime EP0999934B1 (en) 1997-07-15 1998-07-15 A thermally actuated ink jet
EP05109701A Expired - Lifetime EP1640162B1 (en) 1997-07-15 1998-07-15 Inkjet nozzle arrangement having paddle forming a portion of a wall
EP05109756A Expired - Lifetime EP1650031B1 (en) 1997-07-15 1998-07-15 Ink jet nozzle with slotted sidewall and moveable vane
EP05109707A Expired - Lifetime EP1650030B1 (en) 1997-07-15 1998-07-15 Nozzle chamber with paddle vane and externally located thermal actuator
EP05109700A Expired - Lifetime EP1637330B1 (en) 1997-07-15 1998-07-15 Thermal actuator with corrugated heater element

Family Applications Before (3)

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EP98933352A Expired - Lifetime EP0999934B1 (en) 1997-07-15 1998-07-15 A thermally actuated ink jet
EP05109701A Expired - Lifetime EP1640162B1 (en) 1997-07-15 1998-07-15 Inkjet nozzle arrangement having paddle forming a portion of a wall
EP05109756A Expired - Lifetime EP1650031B1 (en) 1997-07-15 1998-07-15 Ink jet nozzle with slotted sidewall and moveable vane

Family Applications After (1)

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EP05109700A Expired - Lifetime EP1637330B1 (en) 1997-07-15 1998-07-15 Thermal actuator with corrugated heater element

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EP (5) EP0999934B1 (es)
JP (1) JP4160250B2 (es)
AT (4) ATE409119T1 (es)
ES (1) ES2302134T3 (es)
WO (1) WO1999003681A1 (es)

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ATE409119T1 (de) 2008-10-15
EP1640162B1 (en) 2007-03-28
ATE386638T1 (de) 2008-03-15
EP1637330A1 (en) 2006-03-22
JP4160250B2 (ja) 2008-10-01
ES2302134T3 (es) 2008-07-01
ATE358019T1 (de) 2007-04-15
EP1640162A1 (en) 2006-03-29
EP1650031A1 (en) 2006-04-26
EP0999934B1 (en) 2005-10-26
EP1637330B1 (en) 2007-04-18
JP2003521389A (ja) 2003-07-15
EP1650030A1 (en) 2006-04-26
EP1650031B1 (en) 2008-02-20
EP0999934A4 (en) 2001-06-27
ATE359915T1 (de) 2007-05-15
WO1999003681A1 (en) 1999-01-28
EP0999934A1 (en) 2000-05-17

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