AU761670B2

AU761670B2 - Testing a micro electro-mechanical device

Info

Publication number: AU761670B2
Application number: AU47320/00A
Authority: AU
Inventors: Kia Silverbrook
Original assignee: Silverbrook Research Pty Ltd
Current assignee: Silverbrook Research Pty Ltd
Priority date: 1999-06-30
Filing date: 2000-05-24
Publication date: 2003-06-05
Anticipated expiration: 2020-05-24
Also published as: AU4732000A

Description

WO 01/02179 WO 0102179PCT/AUOO/00585

I-

TESTING A MICRO ELECTRO-MECHANICAL

DEVICE

FIELD OF THE INVENTION This invention relates to a method of testing a micro electro-mechanical (MEM) device. The invention has application in ink ejection nozzles of the type that are fabricated by integrating the technologies applicable to micro electro-mechanical systems (MEMS) and complementary metal-oxide semiconductor (CMOS) integrated circuits, and the invention is hereinafter described in the context of that application. However, it will be understood that the invention does have broader application, to the testing of various types of MEM devices for various purposes.

CO-PENDING APPLICATIONS Various methods, systems and apparatus relating to the present invention are disclosed in the following co-pending applications filed by the applicant or assignee of the present invention simultaneously with the present application: PCT/AUOO/005 18, PCT/AUOO/005 19, PCT/AUOO/00520, PCT/AUOO/0052 1, PCT/AUOO/00522, PCT/AUOO/00523, PCT/AUOO/00524, PCT/AUOO/00525, PCT/AUOO/00526, PCT/AUOO/00527, PCT/AUOO/00528, PCTAUQOO5 29, PCT/AUOO/00530, PCT/AUOO/0053 1, PCT/AUO0/00532, PCT/AUOO/0053 3, PCT/AUOO/00534, PCT/AUOO/005 35, PCT/AUOO/0053 6, PCT/AUOO/005 37, PCT/AUOO/0053 8, PCT/AUOO/005 39, PCT/AUOO/00540, PCT/AUOO/0054 I, PCT/AUO0/00542, PCT/AUOO/00543, PCT/AUOO/00544, PCT/AUOO/00545, PCT/AUOO/00547, PCT/AUOO/00546, PCT/AUOO/005 54, PCT/AUOO/005 56, PCT/AUOO/0055 7, PCT/AUOO/0055 8, PCT/AUOO/005 59, PCT/AUOO/00560, PCT/AUOO/00561, PCT/AUOO/00562, PCT/AUOO/00563, PCT/AUOO/005 64, PCT/AUOO/00565, PCT/AUOO/00566, PCT/AU0O/00567, PCT/AUOO/00568, PCT/AUOO/00569, PCT/AUOO/O05 70, PCT/AUOO/0057 1, PCT/AUOO/00572, PCT/AUOO/00573, PCT/AUOO/00574, PCT/AUOO/005 75, PCT/AUOO/005 76, PCT/AUOO/00577, PCT/AUOO/005 78, PCTIAUOO/005 79, PCT/AUOO/0058 1, PCT/AUOO/00580, PCT/AUOO/00582, PCTIAUOOIOO587, PCT/AUOO/00588, PCT/AUOO/00589, PCT/AUOO/005 83. PCT/AUOO/00593, PCT/AU0O/00590, RECTIFIED SHEET (RULE 91) WO 01/02179 PCT/AU00/00585 la- PCT/AU00/00591, PCT/AU00/00592, PCT/AU00/00584, PCT/AU00/00585, PCT/AU00/00586, PCT/AU00/00594, PCT/AUOO/00595, PCT/AU00/00596, PCT/AU00/00597, PCT/AU00O/00598, PCT/AU00/00516, PCT/AU00/00517, PCT/AU00/00511, PCT/AU00/00501, PCT/AU00/00502, PCT/AU00/00503, PCT/AU00/00504, PCT/AU00/00505, PCT/AUOO/00506, PCT/AU00/00507, PCT/AU00/00508, PCT/AUOO/00509, PCT/AU00/00510, PCT/AU00/00512, PCT/AU00/00513, PCT/AUOO/00514, PCT/AU00/00515 The disclosures of these co-pending applications are incorporated herein by crossreference.

BACKGROUND OF THE INVENTION A high speed pagewidth inkjet printer has recently been developed by the present Applicant. This typically employs in the order of 51200 inkjet nozzles to print on A4 size paper to provide photographic quality image printing at 1600 dpi. In order to achieve this nozzle density, the nozzles are fabricated by integrating MEMS-CMOS technology.

A difficulty that flows from the fabrication of such a printer is that there is no convenient way of ensuring that all nozzles that extend across the printhead or, indeed, that are located on a given chip will perform identically, and this problem is exacerbated when chips that are obtained from different wafers may need to be assembled into a given printhead. Also, having fabricated a RECTIFIED SHEET (RULE 91) WO 01/02179 WO 0102179PCT/AUOO/00585 -2from different wafers may need to be assembled into a given printhead. Also,. having fabricated a complete printhead from a plurality of chips, it is difficult to determine the energy level required for actuating individual nozzles and for evaluating the continuing performance of a given nozzle.

SUMMARY OF THE INVENTION The present invention may be defined broadly as providing a method of testing a micro electro-mechanical device of a type having a support structure, an actuating arn that is movable relative to the support structure under the influence of heat inducing current flow through the actuating arm, and a movement sensor associated with the actuating arm. The method comprises the steps of: passing at least one current pulse having a predetermined duration tp through the actuating arm, and detecting for a predetermined level of movement of the actuating arm.

The invention as above defined permits factory or in-use testing of the micro electromechanical (MEM) device, to determine whether the actuating arm is or is not functioning in the required manner to meet operating conditions. In the event that a predetermined level of movement of the actuating arm does not occur with passing of a current pulse having a predetermined duration, the device will be rejected or put aside for modification.

PREFERRED FEATURES OF THE INVENTION The testing method may be effected by passing a single current pulse having a predetermined duration tp through the actuating arm and detecting for the predetermined movement of the actuating arm. Alternatively, a series of current pulses of successively increasing duration t, may be passed through the actuating ann (so as to induce successively increasing degrees of movement of the actuating ann) over a time period t. Then detection will be made for a predetermined level of movement of the actuating ann within a predetermined time window tU where t>t 4t.

The testing method of the invention preferably is employed in relation to an MEM device in the form of a liquid ejector and most preferably in the form of an ink ejection nozzle that is operable to eject an ink droplet upon actuation of the actuating ann. In this latter preferred form of the invention, the second end of the actuating ann preferably is coupled to an integrally formed paddle which is employed to displace ink from a chamber into which the actuating ann extends.

The actuating arm most preferably is formed from two similarly shaped ann portions which are interconnected in interlapping relationship. In this embodiment of the invention, a first of the arm portions is connected to a current supply and is arranged in use to be heated by the current pulse or pulses having duration tp. However, the second arm portion functions to restrain linear expansion of the actuating ann as a complete unit and heat induced elongation of the first arm WO 01/02179 PTAO/08 PCT/AUOO/00585 -3portion causes bending to occur along the length of the actuating arn. Thus, the actuating arm is effectively caused to pivot with respect to the support structure with heating and cooling of the first portion of the actuating arm.

The invention will be more fully understood from the following description of a preferred embodiment of a testing method as applied to an inkjet nozzle as illustrated in the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS In the drawings:- Figure I shows a highly magnified cross-sectional elevation view of a portion of the inkjet nozzle, Figure 2 shows a plan view of the inkjet nozzle of Figure 1, Figure 3 shows a perspective view of an outer portion of an actuating arm and an ink ejecting paddle or of the inkjet nozzle, the actuating arm and paddle being illustrated independently of other elements of the nozzle, Figure 4 shows an arrangement similar to that of Figure 3 but in respect of an inner portion of the actuating anm, Figure 5 shows an arrangement similar to that of Figures 3 and 4 but in respect of the complete actuating arm incorporating the outer and inner portions shown in Figures 3 and 4, Figure 6 shows a detailed portion of a movement sensor arrangement that is shown encircled in Figure Figure 7 shows a sectional elevation view of the nozzle of Figure 1 but prior to charging with ink, Figure 8 shows a sectional elevation view of the nozzle of Figure 7 but with the actuating arm and paddle actuated to a test position, Figure 9 shows ink ejection from the nozzle when actuated under a test condition, Figure 10 shows a blocked condition of the nozzle when the actuating arm and paddle are actuated to an extent that normally would be sufficient to eject ink from the nozzle, Figure 11I shows a schematic representation of a portion of an electrical circuit that is embodied within the nozzle, Figure 12 shows an excitation-time diagram applicable to normal (ink ejecting) actuation of the nozzle actuating ann, Figure 13 shows an excitation-time diagram applicable to test actuation of the nozzle actuating arm, Figure 14 shows comparative displacement-time curves applicable to the excitation-time diagrams shown in Figures 12 and 13, WO 01/02179 WO 0102179PCT/AU00/00585 -4- Figure 15 shows an excitation-time diagram applicable to a testing procedure, Figure 16 shows a temperature-time diagram that is applicable to the nozzle actuating arn and which corresponds with the excitation-time diagram of Figure 15, and Figure 17 shows a deflection-time diagram that is applicable to the nozzle actuating arm and which corresponds with the excitation/heating-time diagrams of Figures 15 and 16.

DETAILED DESCRIPTION OF THE INVENTION As illustrated with approximately 3000x magnification in Figure I and other relevant drawing figures, a single inkj et nozzle device is shown as a portion of a chip that is fabricated by integrating MEMS and CMOS technologies. The complete nozzle device includes a support structure having a silicon substrate 20, a metal oxide semiconductor layer 2 1, a passivation layer 22, and a non-corrosive dielectric coating/chamber-defining layer 23.

The nozzle device incorporates an ink chamber 24 which is connected to a source (not shown) of ink and, located above the chamber, a nozzle chamber 25. A nozzle opening 26 is provided in the chamber-defining layer 23 to permit displacement of ink droplets toward paper or other medium (not shown) onto which ink is to be deposited. A paddle 27 is located between the two chambers 24 and 25 and, when in its quiescent position, as indicated in Figures I and 7, the paddle 27 effectively divides the two chambers 24 and The paddle 27 is coupled to an actuating ann 28 by a paddle extension 29 and a bridging portion 30 of the dielectric coating 23.

The actuating arm 28 is formed deposited during fabrication of the device) to be pivotable with respect to the support structure or substrate 20. That is, the actuating arm has a first end that is coupled to the support structure and a second end 38 that is movable outwardly with respect to the support structure. The actuating arm 28 comprises outer and inner arm portions 31 and 32. The outer arm portion 31 is illustrated in detail and in isolation from other components of the nozzle device in the perspective view shown in Figure 3. The inner arm portion 32 is illustrated in a similar way in Figure 4. The complete actuating arm 28 is illustrated in perspective in Figure as well as in Figures 1, 7, 8, 9 and The inner portion 32 of the actuating arm 28 is formed from a titanium-aluminium-nitride (TiAl)N deposit during formation of the nozzle device and it is connected electrically to a current source 33, as illustrated schematically in Figure 11, within the CMOS structure. The electrical connection is made to end terminals 34 and 35, and application of a pulsed excitation voltage to the terminals results in pulsed current flow through the inner portion only of the actuating arn 28. The current flow causes rapid resistance heating within the inner portion 32 of the actuating arm and consequential momentary elongation of that portion of the arm.

The outer arm portion 31 of the actuating arm 28 is mechanically coupled to but electrically WO 01102179 WO 0102179PCT/AUOO/00585 isolated from the inner arm portion 32 by posts 36. No current-induced heating occurs within the outer arm portion 31 and, as a consequence, voltage induced current flow through the inner arm portion 32 causes momentary bending of the complete actuating arm 28 in the manner indicated in Figures 8, 9 and 10 of the drawings. This bending of the actuating arm 28 is equivalent to pivotal movement of the arn with respect to the substrate 20 and it results in displacement of the paddle 27 within the chambers 24 and An integrated movement sensor is provided within the device in order to determine the degree or rate of pivotal movement of the actuating arm 28 and in order to permit testing of the device.

The movement sensor comprises a moving contact element 37 that is formed integrally with the inner portion 32 of the actuating arm 28 and which is electrically active when current is passing through the inner portion of the actuating arm. The moving contact element 37 is positioned adjacent the second end 3 8 of the actuating arm and, thus, with a voltage V applied to the end terminals 34 and 35, the moving contact element will be at a potential of approximately V/2. The movement sensor also comprises a fixed contact element 39 which is formed integrally with the CMOS layer 22 and which is positioned to be contacted by the moving contact element 37 when the actuating arm 28 pivots upwardly to a predetermined extent. The fixed contact element is connected electrically to amplifier elements 40 and to a microprocessor arrangement 4 1, both of which are shown in Figure I11 and the component elements of which are embodied within the CMOS layer 22 of the device.

When the actuator arm 28'and, hence, the paddle 27 are in the quiescent position, as shown in Figures 1 and 7, no contact is made between the moving and fixed contact elements 37 and 39.

At the other extreme, when excess movement of the actuator arm and the paddle occurs, as indicated in Figures 8 and 9, contact is made between the moving and fixed contact elements 37 and 39. When the actuator arm 28 and the paddle 27 are actuated to a normal extent sufficient to expel ink from the nozzle, no contact is made between the moving and fixed contact elements. That is, with normal ejection of the ink from the chamber 25, the actuator arm 28 and the paddle 27 are moved to a position partway between the positions that are illustrated in Figures 7 and 8. This (intermediate) position is indicated in Figure 10, although as a consequence of a blocked nozzle rather than during normal ejection of ink from the nozzle.

Figure 12 shows an excitation-time diagram that is applicable to effecting actuation of the actuator arm 28 and the paddle 27 from a quiescent to a lower-than-normal ink ejecting position.

The displacement of the paddle 27 resulting from the excitation of Figure 12 is indicated by the lower graph 42 in Figure 14, and it can be seen that the maximum extent of displacement is less than the optimum level that is shown by the displacement line 43.

Figure 13 shows an expanded excitation-time diagram that is applicable to effecting WO 01/02179 PTAO/08 PCT/AUOO/00585 -6actuation of the actuator arm 28 and the paddle 27 to an excessive ex-tent, such as is indicated in Figures 8 and 9. The displacement of the paddle 27 resulting from the excitation of Figure 13 is indicated by the upper graph 44 in Figure 14, from which it can be seen that the maximum displacement level is greater than the optimum level indicated by the displacement line 43.

Figures 15, 16 and 17 shows plots of excitation voltage, actuator arm temperature and paddle deflection against time for successively increasing durations of excitation applied to the actuating arn 28. These plots have relevance to testing of the nozzle device.

When testing the nozzle device, or each nozzle device in an array of such devices, a series of current pulses of successively increasing duration t, are induced to flaw through the actuating arm 28 over a time period t. The duration is controlled to increase with time as indicated graphically in Figure Each current pulse induces momentary heating in the actuating arm 28 and a consequential temperature rise in the actuating arm, followed by a temperature fall on expiration of the pulse duration. As indicated in Figure 16, the temperature rises to successively higher levels with the increase in pulse durations as shown in Figure I1S.

As a result, as indicated in Figure 17, the actuator arm 28 will move pivot) to successively increasing degrees, some of which will be below that required to cause contact to be made between the moving and fixed contact elements 37 and 39, and others of which will be above that required to cause contact to be made between the moving and fixed contact elements. This is indicated by the "test level" line shown in Figure 17.

The microprocessor 41 is employed to detect for a predetermined level of movement of the actuating anm 28 the "test level") within a predetermined time window that falls within the testing time t. This is then correlated with the pulse duration tp that induces the required movement within the time window, and this in turn provides indication as to the appropriate working condition of the nozzle device.

As an alternative, simplified test procedure, a single pulse, such as that shown in Figure 12 may be employed to induce heating of the actuating ann 28 and to effect a consequential temperature rise, which will be followed by a temperature drop on expiration of the (single) pulse duration. Then, the microprocessor 41 will be employed to detect for a predetermined level of movement of the actuating arm resulting from the single current pulse so that, in effect, a Go/No-go test is performed.

Variations and modifications may be made in respect of the device as described above as a preferred embodiment of the invention without departing from the scope of the appended claims.

Claims

1. A method of testing a micro electro-mechanical device of a type having a support structure, an actuating arm that is movable relative to the support structure under the influence of heat inducing current flow through the actuating arm, and a movement sensor associated with the actuating arm; the method comprising the steps of: passing at least one current pulse having a predetermined duration tp through the actuating arm, and detecting for a predetermined level of movement of the actuating arm.

2. The method as claimed in claim 1 when employed in relation to a liquid ejection nozzle having a liquid receiving chamber from which the liquid is ejected with movement of the actuating arm.

3. The method as claimed in claim 1 when employed in relation to an ink ejection nozzle having an ink receiving chamber from which the ink is ejected with movement of the actuating arm.

4. The method as claimed in claim 3 wherein the movement sensor comprises a moving contact element formed integrally with the actuating arm, a fixed contact element formed integrally with the support structure and electrical circuit elements embodied within the support structure, and wherein the predetermined level of movement of the actuating armnn is detected by contact made between the fixed and moving contact elements.

5. The method as claimed in claim 4 wherein the movement sensor includes a microprocessor that detects for the predetermined level of movement of the actuating arm and correlates the predetermined level of movement of the actuating arm with the predetermined duration of the current pulse.

6. The method as claimed in claim 1 wherein a series of the current pulses having successively increasing durations tp are passed through the actuating arm (so as to induce successively increasing degrees of movement of the actuating arm) over a time period t, and wherein detection is made for a predetermined level of movement of the actuating arm within a predetermined time window t, where t>tw>tp.

7. The method as claimed in claim 6 wherein the movement sensor includes a WO 01/02179 PCT/AU00/00585 -8- microprocessor that detects for the predetermined level of movement of the actuating arm within the predetermined time window t. and correlates the predetermined level of movement with a pulse duration tp that induces the predetermined movement within the time window tw.