EP1510339A2 - Buse de jet d'encre actionnée par des impulsions magnétiques - Google Patents
Buse de jet d'encre actionnée par des impulsions magnétiques Download PDFInfo
- Publication number
- EP1510339A2 EP1510339A2 EP04024060A EP04024060A EP1510339A2 EP 1510339 A2 EP1510339 A2 EP 1510339A2 EP 04024060 A EP04024060 A EP 04024060A EP 04024060 A EP04024060 A EP 04024060A EP 1510339 A2 EP1510339 A2 EP 1510339A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- ink
- layer
- nozzle
- etching
- etch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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Images
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- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1648—Production of print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17596—Ink pumps, ink valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2002/041—Electromagnetic transducer
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
Applications Claiming Priority (73)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPO807697 | 1997-07-15 | ||
AUPO8070A AUPO807097A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ15) |
AUPO8060A AUPO806097A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM13) |
AUPO8055A AUPO805597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM07) |
AUPO807097 | 1997-07-15 | ||
AUPO807297 | 1997-07-15 | ||
AUPO804197 | 1997-07-15 | ||
AUPO793397 | 1997-07-15 | ||
AUPO804497 | 1997-07-15 | ||
AUPO805697 | 1997-07-15 | ||
AUPO7936A AUPO793697A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM02) |
AUPO804897 | 1997-07-15 | ||
AUPO806597 | 1997-07-15 | ||
AUPO8077A AUPO807797A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM25) |
AUPO805597 | 1997-07-15 | ||
AUPO8076A AUPO807697A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM16) |
AUPO804797 | 1997-07-15 | ||
AUPO793697 | 1997-07-15 | ||
AUPO8066A AUPO806697A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ01) |
AUPO8053A AUPO805397A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM08) |
AUPO8041A AUPO804197A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ25) |
AUPO7949A AUPO794997A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM12) |
AUPO8073A AUPO807397A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM15) |
AUPO805897 | 1997-07-15 | ||
AUPO800497 | 1997-07-15 | ||
AUPO794997 | 1997-07-15 | ||
AUPO8035A AUPO803597A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ06) |
AUPO803597 | 1997-07-15 | ||
AUPO800197 | 1997-07-15 | ||
AUPO8047A AUPO804797A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ05) |
AUPO8069A AUPO806997A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ11) |
AUPO805997 | 1997-07-15 | ||
AUPO8072A AUPO807297A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ02) |
AUPO7950A AUPO795097A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM11) |
AUPO8036A AUPO803697A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ13) |
AUPO806397 | 1997-07-15 | ||
AUPO807197 | 1997-07-15 | ||
AUPO803697 | 1997-07-15 | ||
AUPO804997 | 1997-07-15 | ||
AUPO807597 | 1997-07-15 | ||
AUPO806697 | 1997-07-15 | ||
AUPO8063A AUPO806397A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ08) |
AUPO8058A AUPO805897A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM26) |
AUPO8044A AUPO804497A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ07) |
AUPO806197 | 1997-07-15 | ||
AUPO807797 | 1997-07-15 | ||
AUPO8004A AUPO800497A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ26) |
AUPO8061A AUPO806197A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM04) |
AUPO8059A AUPO805997A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM14) |
AUPO805397 | 1997-07-15 | ||
AUPO8056A AUPO805697A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ10) |
AUPO8049A AUPO804997A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ12) |
AUPO7933A AUPO793397A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation_apparatus (IJM10) |
AUPO8065A AUPO806597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM06) |
AUPO806097 | 1997-07-15 | ||
AUPO795097 | 1997-07-15 | ||
AUPO8071A AUPO807197A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ04) |
AUPO8054A AUPO805497A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM05) |
AUPO8048A AUPO804897A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ14) |
AUPO806997 | 1997-07-15 | ||
AUPO8001A AUPO800197A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ17) |
AUPO806797 | 1997-07-15 | ||
AUPO7935A AUPO793597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM01) |
AUPO8067A AUPO806797A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ16) |
AUPO8075A AUPO807597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM17) |
AUPO793597 | 1997-07-15 | ||
AUPO805497 | 1997-07-15 | ||
AUPO807397 | 1997-07-15 | ||
AUPP3982A AUPP398298A0 (en) | 1998-06-09 | 1998-06-09 | A method of manufacture of an image creation apparatus (ijm45) |
AUPP3983A AUPP398398A0 (en) | 1998-06-09 | 1998-06-09 | Image creation method and apparatus (ij45) |
AUPP398298 | 1998-06-09 | ||
AUPP398398 | 1998-06-09 | ||
EP98933350A EP0999933B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre, actionne par un champ magnetique |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98933350A Division EP0999933B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre, actionne par un champ magnetique |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1510339A2 true EP1510339A2 (fr) | 2005-03-02 |
EP1510339A3 EP1510339A3 (fr) | 2005-03-09 |
EP1510339B1 EP1510339B1 (fr) | 2007-01-24 |
Family
ID=27586944
Family Applications (11)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98933350A Expired - Lifetime EP0999933B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre, actionne par un champ magnetique |
EP04024060A Expired - Lifetime EP1510339B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre actionnée par des impulsions magnétiques |
EP04024066A Expired - Lifetime EP1508446B1 (fr) | 1997-07-15 | 1998-07-15 | Buse pour imprimante pour jet d'encre avec actionneur à solénoide |
EP04024061A Expired - Lifetime EP1508448B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre avec piston conique magnétique |
EP04024064A Expired - Lifetime EP1508445B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre avec actuateur à force Lorentz |
EP04024059A Expired - Lifetime EP1512535B1 (fr) | 1997-07-15 | 1998-07-15 | Imprimante à jet d'encre avec piston actionné par force magnétique |
EP04024062A Expired - Lifetime EP1508449B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre avec chambre-actuateur magnétique |
EP04024057A Expired - Lifetime EP1508443B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre avec piston activé par force electro-magnétique |
EP04024063A Expired - Lifetime EP1510340B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre avec piston fenté |
EP04024065A Expired - Lifetime EP1510341B1 (fr) | 1997-07-15 | 1998-07-15 | buse à jet d'encre avec obturateur électromagnétique |
EP04024058A Expired - Lifetime EP1508444B1 (fr) | 1997-07-15 | 1998-07-15 | Imprimante à jet d'encre avec plaques actionnées par force électrostatique |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98933350A Expired - Lifetime EP0999933B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre, actionne par un champ magnetique |
Family Applications After (9)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04024066A Expired - Lifetime EP1508446B1 (fr) | 1997-07-15 | 1998-07-15 | Buse pour imprimante pour jet d'encre avec actionneur à solénoide |
EP04024061A Expired - Lifetime EP1508448B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre avec piston conique magnétique |
EP04024064A Expired - Lifetime EP1508445B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre avec actuateur à force Lorentz |
EP04024059A Expired - Lifetime EP1512535B1 (fr) | 1997-07-15 | 1998-07-15 | Imprimante à jet d'encre avec piston actionné par force magnétique |
EP04024062A Expired - Lifetime EP1508449B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre avec chambre-actuateur magnétique |
EP04024057A Expired - Lifetime EP1508443B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre avec piston activé par force electro-magnétique |
EP04024063A Expired - Lifetime EP1510340B1 (fr) | 1997-07-15 | 1998-07-15 | Buse de jet d'encre avec piston fenté |
EP04024065A Expired - Lifetime EP1510341B1 (fr) | 1997-07-15 | 1998-07-15 | buse à jet d'encre avec obturateur électromagnétique |
EP04024058A Expired - Lifetime EP1508444B1 (fr) | 1997-07-15 | 1998-07-15 | Imprimante à jet d'encre avec plaques actionnées par force électrostatique |
Country Status (4)
Country | Link |
---|---|
EP (11) | EP0999933B1 (fr) |
JP (6) | JP4170582B2 (fr) |
AT (8) | ATE352423T1 (fr) |
WO (1) | WO1999003680A1 (fr) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7328975B2 (en) * | 1997-07-15 | 2008-02-12 | Silverbrook Research Pty Ltd | Injet printhead with thermal bend arm exposed to ink flow |
US7753491B2 (en) | 1997-07-15 | 2010-07-13 | Silverbrook Research Pty Ltd | Printhead nozzle arrangement incorporating a corrugated electrode |
AUPP654598A0 (en) | 1998-10-16 | 1998-11-05 | Silverbrook Research Pty Ltd | Micromechanical device and method (ij46h) |
US7360871B2 (en) * | 1997-07-15 | 2008-04-22 | Silverbrook Research Pty Ltd | Inkjet chamber with ejection actuator between inlet and nozzle |
US6188415B1 (en) | 1997-07-15 | 2001-02-13 | Silverbrook Research Pty Ltd | Ink jet printer having a thermal actuator comprising an external coil spring |
US7410243B2 (en) | 1997-07-15 | 2008-08-12 | Silverbrook Research Pty Ltd | Inkjet nozzle with resiliently biased ejection actuator |
AUPP922399A0 (en) * | 1999-03-16 | 1999-04-15 | Silverbrook Research Pty Ltd | A method and apparatus (ij46p2) |
AU2004202252B2 (en) * | 1999-04-22 | 2005-06-30 | Silverbrook Research Pty Ltd | Liquid ejection using a micro-electromechanical device |
AUPP993099A0 (en) * | 1999-04-22 | 1999-05-20 | Silverbrook Research Pty Ltd | A micromechancial device and method(ij46p2b) |
AUPQ130999A0 (en) * | 1999-06-30 | 1999-07-22 | Silverbrook Research Pty Ltd | A method and apparatus (IJ47V11) |
AU761820B2 (en) * | 1999-06-30 | 2003-06-12 | Silverbrook Research Pty Ltd | Calibrating a micro electro-mechanical device |
AU761821B2 (en) * | 1999-06-30 | 2003-06-12 | Silverbrook Research Pty Ltd | Fault detection in a micro electro-mechanical device |
US6382779B1 (en) | 1999-06-30 | 2002-05-07 | Silverbrook Research Pty Ltd | Testing a micro electro- mechanical device |
AU761670B2 (en) * | 1999-06-30 | 2003-06-05 | Silverbrook Research Pty Ltd | Testing a micro electro-mechanical device |
WO2001002179A1 (fr) * | 1999-06-30 | 2001-01-11 | Silverbrook Research Pty Ltd | Essai d'un microdispositif electromecanique |
KR100752253B1 (ko) | 1999-09-17 | 2007-08-29 | 실버브룩 리서치 피티와이 리미티드 | 컴퓨터의 명령을 위한 방법 및 시스템 |
US7287839B2 (en) | 2002-08-19 | 2007-10-30 | Silverbrook Research Pty Ltd | Inkjet printhead having bicuspid valved ink ejection arrangement |
DE60039312D1 (de) * | 2000-04-18 | 2008-08-07 | Silverbrook Res Pty Ltd | Tintenstrahlausstosser |
US6428133B1 (en) | 2000-05-23 | 2002-08-06 | Silverbrook Research Pty Ltd. | Ink jet printhead having a moving nozzle with an externally arranged actuator |
US6526658B1 (en) | 2000-05-23 | 2003-03-04 | Silverbrook Research Pty Ltd | Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator |
US6557970B2 (en) | 2000-05-23 | 2003-05-06 | Silverbrook Research Pty Ltd | Nozzle guard for a printhead |
US6921153B2 (en) | 2000-05-23 | 2005-07-26 | Silverbrook Research Pty Ltd | Liquid displacement assembly including a fluidic sealing structure |
WO2001089842A1 (fr) | 2000-05-24 | 2001-11-29 | Silverbrook Research Pty. Ltd. | Joint etanche fluidique pour un assemblage de buse de jet d'encre |
AU2000247313B2 (en) | 2000-05-24 | 2004-10-21 | Memjet Technology Limited | Ink jet printhead having a moving nozzle with an externally arranged actuator |
CN100398321C (zh) | 2000-05-24 | 2008-07-02 | 西尔弗布鲁克研究有限公司 | 具有外装喷嘴控制器的喷墨喷嘴组件 |
CN100417523C (zh) * | 2000-05-24 | 2008-09-10 | 西尔弗布鲁克研究有限公司 | 带有隔离的喷嘴控制器的喷墨打印头 |
US6364460B1 (en) | 2000-06-13 | 2002-04-02 | Chad R. Sager | Liquid delivery system |
JP2004500995A (ja) * | 2000-06-30 | 2004-01-15 | シルバーブルック リサーチ ピーティワイ リミテッド | 耐座屈性サーマルベンドアクチュエータ |
AU2006225215B2 (en) * | 2000-06-30 | 2009-04-09 | Zamtec Limited | An ink ejector for an inkjet printer with an arm and paddle arrangement |
CN100335278C (zh) * | 2000-06-30 | 2007-09-05 | 西尔弗布鲁克研究有限公司 | 热弯作动器抗扭曲装置 |
SG165980A1 (en) * | 2000-06-30 | 2010-11-29 | Silverbrook Res Pty Ltd | A micro-electromechanical actuator with buckle-resistant properties |
US7066577B2 (en) | 2004-07-19 | 2006-06-27 | Silverbrook Research Pty Ltd | Pressure enhancing formations in an ink jet printhead |
AU2004203502B2 (en) * | 2000-10-20 | 2004-09-30 | Zamtec Limited | Nozzle for an ink jet printhead |
US6406129B1 (en) * | 2000-10-20 | 2002-06-18 | Silverbrook Research Pty Ltd | Fluidic seal for moving nozzle ink jet |
US6623101B1 (en) | 2000-10-20 | 2003-09-23 | Silverbrook Research Pty Ltd | Moving nozzle ink jet |
US6505916B1 (en) | 2000-10-20 | 2003-01-14 | Silverbrook Research Pty Ltd | Nozzle poker for moving nozzle ink jet |
US6863379B2 (en) | 2002-11-23 | 2005-03-08 | Silverbrook Research Pty Ltd | Ink jet printhead that includes nozzles having pressure-enhancing formations |
US6350015B1 (en) * | 2000-11-24 | 2002-02-26 | Xerox Corporation | Magnetic drive systems and methods for a micromachined fluid ejector |
US6561627B2 (en) * | 2000-11-30 | 2003-05-13 | Eastman Kodak Company | Thermal actuator |
US6572218B2 (en) * | 2001-01-24 | 2003-06-03 | Xerox Corporation | Electrostatically-actuated device having a corrugated multi-layer membrane structure |
US6508947B2 (en) * | 2001-01-24 | 2003-01-21 | Xerox Corporation | Method for fabricating a micro-electro-mechanical fluid ejector |
KR100757363B1 (ko) * | 2002-11-21 | 2007-09-11 | 실버브룩 리서치 피티와이 리미티드 | 유체씨일을 구비한 잉크 젯 노즐 조립체 |
JP3912267B2 (ja) * | 2002-11-29 | 2007-05-09 | ソニー株式会社 | 液滴吐出装置、検査用チップ処理装置、液滴吐出方法、検査用チップ処理方法 |
US8234998B2 (en) | 2006-09-08 | 2012-08-07 | Massachusetts Institute Of Technology | Automated layer by layer spray technology |
KR100973979B1 (ko) * | 2008-08-22 | 2010-08-05 | 한국과학기술원 | 전자기력을 이용한 다축 구동기 |
KR102022392B1 (ko) | 2012-12-11 | 2019-11-05 | 삼성디스플레이 주식회사 | 노즐프린터 |
KR20140094957A (ko) | 2013-01-23 | 2014-07-31 | 삼성디스플레이 주식회사 | 노즐프린터용 노즐유닛 및 이를 구비하는 노즐프린터 |
CN104401129B (zh) * | 2014-11-21 | 2016-08-24 | 常俊环 | 大字符喷码机喷头 |
DE102015225726A1 (de) * | 2015-12-17 | 2017-06-22 | Ksb Aktiengesellschaft | Pumpe mit verformbarem Förderelement |
US10589980B2 (en) * | 2017-04-07 | 2020-03-17 | Texas Instruments Incorporated | Isolated protrusion/recession features in a micro electro mechanical system |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3245283A1 (de) * | 1982-12-07 | 1984-06-07 | Siemens AG, 1000 Berlin und 8000 München | Anordnung zum ausstoss von fluessigkeitstroepfchen |
JPS60131254A (ja) * | 1983-12-20 | 1985-07-12 | Ricoh Co Ltd | インクジエツト噴射ヘツド |
JPH04368851A (ja) * | 1991-06-17 | 1992-12-21 | Seiko Epson Corp | 磁場発生基板及びそれを用いたインクジェットヘッド |
JPH05318724A (ja) * | 1992-05-19 | 1993-12-03 | Seikosha Co Ltd | インクジェット記録装置 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4032929A (en) * | 1975-10-28 | 1977-06-28 | Xerox Corporation | High density linear array ink jet assembly |
DE2700010A1 (de) * | 1976-01-15 | 1977-07-21 | Xerox Corp | Geraet zur erzeugung von abtrennbaren fluessigkeitstroepfchen und antriebselemente dafuer |
JPS5559972A (en) * | 1978-10-28 | 1980-05-06 | Seiko Epson Corp | Ink jet recording head |
US4210920A (en) * | 1979-01-31 | 1980-07-01 | The Mead Corporation | Magnetically activated plane wave stimulator |
US4460905A (en) * | 1982-03-29 | 1984-07-17 | Ncr Corporation | Control valve for ink jet nozzles |
DE3302617A1 (de) * | 1983-01-27 | 1984-08-02 | Cyklop International Emil Hoffmann KG, 5000 Köln | Farbspritzkopf |
DE3445720A1 (de) * | 1984-12-14 | 1986-06-19 | Siemens AG, 1000 Berlin und 8000 München | Anordnung zum ausstoss von einzeltroepfchen aus austrittsoeffnungen eines tintenschreibkopfes |
SE447222B (sv) * | 1984-12-21 | 1986-11-03 | Swedot System Ab | Elektromagnetiskt manovrerbar ventilanordning, serskilt for alstring av droppar i en vetskestralskrivare |
US4618808A (en) * | 1985-01-30 | 1986-10-21 | International Business Machines Corporation | Electromagnetic actuator system using stepper motor with closed loop position sensing, electronic commutation and dynamic position and anomaly correction |
GB8507688D0 (en) * | 1985-03-25 | 1985-05-01 | Lane International Ltd John | Fluid applicator |
US4723131A (en) * | 1986-09-12 | 1988-02-02 | Diagraph Corporation | Printhead for ink jet printing apparatus |
JPH0234342A (ja) * | 1988-07-25 | 1990-02-05 | Seiko Epson Corp | インクジェットヘッド |
JPH02150353A (ja) * | 1988-11-30 | 1990-06-08 | Nec Home Electron Ltd | インクジェットヘッド |
GB8828047D0 (en) * | 1988-12-01 | 1989-01-05 | Willett Int Ltd | Method of operating valve |
JPH02219655A (ja) * | 1989-02-20 | 1990-09-03 | Sharp Corp | インクジェットヘッド |
JPH02273241A (ja) * | 1989-04-14 | 1990-11-07 | Ricoh Co Ltd | インクジェット記録装置 |
JPH0365349A (ja) * | 1989-08-03 | 1991-03-20 | Matsushita Electric Ind Co Ltd | インクジェットヘッド |
JP2839345B2 (ja) * | 1989-09-11 | 1998-12-16 | 松下電器産業株式会社 | インク記録装置 |
JPH04126255A (ja) * | 1990-09-18 | 1992-04-27 | Seiko Epson Corp | インクジェットヘッド |
US5534900A (en) * | 1990-09-21 | 1996-07-09 | Seiko Epson Corporation | Ink-jet recording apparatus |
JPH04129745A (ja) * | 1990-09-21 | 1992-04-30 | Seiko Epson Corp | インクジェットヘッド |
JPH04357039A (ja) * | 1991-06-03 | 1992-12-10 | Rohm Co Ltd | インクジェットプリントヘッド |
GB9121851D0 (en) * | 1991-10-15 | 1991-11-27 | Willett Int Ltd | Device |
DE4139731A1 (de) * | 1991-12-03 | 1993-06-09 | Inno-Print Verpackungs- + Beschriftungssysteme Gmbh, 5060 Bergisch Gladbach, De | Tintenstrahl-matrixdrucker aus einzelelementen |
JPH06106725A (ja) * | 1992-08-14 | 1994-04-19 | Ricoh Co Ltd | 静電変形型インクジェットによる記録方法及び静電変形型インクジェットヘッド |
JPH06134985A (ja) * | 1992-10-28 | 1994-05-17 | Ricoh Co Ltd | 1ドット多値が可能な記録装置及び1ドット多値が可能な記録方法 |
JPH06336011A (ja) * | 1993-05-31 | 1994-12-06 | Sharp Corp | プリントヘッド装置 |
DE69517720T2 (de) * | 1994-03-09 | 2001-02-01 | Seiko Epson Corp | Tintenstrahlaufzeichnungsgerät |
US5828394A (en) * | 1995-09-20 | 1998-10-27 | The Board Of Trustees Of The Leland Stanford Junior University | Fluid drop ejector and method |
-
1998
- 1998-07-15 EP EP98933350A patent/EP0999933B1/fr not_active Expired - Lifetime
- 1998-07-15 JP JP2000502941A patent/JP4170582B2/ja not_active Expired - Fee Related
- 1998-07-15 EP EP04024060A patent/EP1510339B1/fr not_active Expired - Lifetime
- 1998-07-15 AT AT04024062T patent/ATE352423T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024066A patent/EP1508446B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024061A patent/EP1508448B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024064A patent/EP1508445B1/fr not_active Expired - Lifetime
- 1998-07-15 AT AT04024060T patent/ATE352420T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024059A patent/EP1512535B1/fr not_active Expired - Lifetime
- 1998-07-15 AT AT04024059T patent/ATE381991T1/de not_active IP Right Cessation
- 1998-07-15 AT AT04024057T patent/ATE355972T1/de not_active IP Right Cessation
- 1998-07-15 AT AT98933350T patent/ATE289922T1/de not_active IP Right Cessation
- 1998-07-15 AT AT04024065T patent/ATE352422T1/de not_active IP Right Cessation
- 1998-07-15 WO PCT/AU1998/000548 patent/WO1999003680A1/fr active IP Right Grant
- 1998-07-15 AT AT04024064T patent/ATE353053T1/de not_active IP Right Cessation
- 1998-07-15 AT AT04024063T patent/ATE352421T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024062A patent/EP1508449B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024057A patent/EP1508443B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024063A patent/EP1510340B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024065A patent/EP1510341B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024058A patent/EP1508444B1/fr not_active Expired - Lifetime
-
2006
- 2006-10-02 JP JP2006270974A patent/JP4137965B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270743A patent/JP4137964B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270831A patent/JP4173174B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270310A patent/JP4185538B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270641A patent/JP4171037B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3245283A1 (de) * | 1982-12-07 | 1984-06-07 | Siemens AG, 1000 Berlin und 8000 München | Anordnung zum ausstoss von fluessigkeitstroepfchen |
JPS60131254A (ja) * | 1983-12-20 | 1985-07-12 | Ricoh Co Ltd | インクジエツト噴射ヘツド |
JPH04368851A (ja) * | 1991-06-17 | 1992-12-21 | Seiko Epson Corp | 磁場発生基板及びそれを用いたインクジェットヘッド |
JPH05318724A (ja) * | 1992-05-19 | 1993-12-03 | Seikosha Co Ltd | インクジェット記録装置 |
Non-Patent Citations (3)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 009, no. 294 (M-431), 20 November 1985 (1985-11-20) & JP 60 131254 A (RICOH KK), 12 July 1985 (1985-07-12) * |
PATENT ABSTRACTS OF JAPAN vol. 017, no. 248 (M-1411), 18 May 1993 (1993-05-18) & JP 04 368851 A (SEIKO EPSON CORP), 21 December 1992 (1992-12-21) * |
PATENT ABSTRACTS OF JAPAN vol. 018, no. 133 (M-1571), 4 March 1994 (1994-03-04) & JP 05 318724 A (SEIKOSHA CO LTD), 3 December 1993 (1993-12-03) * |
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