WO2001002179A1 - Essai d'un microdispositif electromecanique - Google Patents

Essai d'un microdispositif electromecanique Download PDF

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Publication number
WO2001002179A1
WO2001002179A1 PCT/AU2000/000585 AU0000585W WO0102179A1 WO 2001002179 A1 WO2001002179 A1 WO 2001002179A1 AU 0000585 W AU0000585 W AU 0000585W WO 0102179 A1 WO0102179 A1 WO 0102179A1
Authority
WO
WIPO (PCT)
Prior art keywords
actuating arm
movement
pct
predetermined level
predetermined
Prior art date
Application number
PCT/AU2000/000585
Other languages
English (en)
Inventor
Kia Silverbrook
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AUPQ1309A external-priority patent/AUPQ130999A0/en
Priority to US09/575,177 priority Critical patent/US6382779B1/en
Priority claimed from US09/575,177 external-priority patent/US6382779B1/en
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Priority to EP00929097A priority patent/EP1206351B1/fr
Priority to AU47320/00A priority patent/AU761670B2/en
Priority to DE60039436T priority patent/DE60039436D1/de
Priority to CA 2414733 priority patent/CA2414733C/fr
Publication of WO2001002179A1 publication Critical patent/WO2001002179A1/fr
Priority to HK02108353.2A priority patent/HK1046668A1/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0451—Control methods or devices therefor, e.g. driver circuits, control circuits for detecting failure, e.g. clogging, malfunctioning actuator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04585—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on thermal bent actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14346—Ejection by pressure produced by thermal deformation of ink chamber, e.g. buckling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14354—Sensor in each pressure chamber

Definitions

  • This invention relates to a method of testing a micro electro-mechanical (MEM) device.
  • MEM micro electro-mechanical
  • the invention has application in ink ejection nozzles of the type that are fabricated by integrating the technologies applicable to micro electro-mechanical systems (MEMS) and complementary metal-oxide semiconductor (CMOS) integrated circuits, and the invention is hereinafter described in the context of that application.
  • MEMS micro electro-mechanical systems
  • CMOS complementary metal-oxide semiconductor
  • PCT/AUOO/00589 PCT/AU00/00583, PCT/AU00/00593, PCT/AU00/00590, - la - PCT/AUOO/00591, PCT/AU00/00592, PCT/AUOO/00584, PCT/AU00/00585, PCT/AU00/00586, PCT/AU00/00594, PCT/AU00/00595, PCT/AU00/00596, PCT/AU00/00597, PCT/AU00/00598, PCT/AUOO/00516, PCT/AU00/00517, PCT/AU00/00511, PCT/AU00/00501, PCT/AUOO/00502, PCT/AU00/00503, PCT/AU00/00504, PCT/AU00/00505, PCT/AU00/00506, PCT/AU00/00507, PCT/AUOO/00508, PCT/AUOO/00509, PCT/AU00/00510, PC
  • a high speed pagewidth inkjet printer has recently been developed by the present Applicant. This typically employs in the order of 51200 inkjet nozzles to print on A4 size paper to provide photographic quality image printing at 1600 dpi. In order to achieve this nozzle density, the nozzles are fabricated by integrating MEMS-CMOS technology.
  • a difficulty that flows from the fabrication of such a printer is that there is no convenient way of ensuring that all nozzles that extend across the printhead or, indeed, that are located on a given chip will perform identically, and this problem is exacerbated when chips that are obtained from different wafers may need to be assembled into a given printhead. Also, having fabricated a
  • the present invention may be defined broadly as providing a method of testing a micro electro-mechanical device of a type having a support structure, an actuating arm that is movable relative to the support structure under the influence of heat inducing current flow through the actuating arm, and a movement sensor associated with the actuating arm.
  • the method comprises the steps of: (a) passing at least one current pulse having a predetermined duration t p through the actuating arm, and (b) detecting for a predetermined level of movement of the actuating arm.
  • the invention as above defined permits factory or in-use testing of the micro electromechanical (MEM) device, to determine whether the actuating arm is or is not functioning in the required manner to meet operating conditions. In the event that a predetermined level of movement of the actuating arm does not occur with passing of a current pulse having a predetermined duration, the device will be rejected or put aside for modification.
  • MEM micro electromechanical
  • the testing method may be effected by passing a single current pulse having a predetermined duration t p through the actuating arm and detecting for the predetermined movement of the actuating arm.
  • a series of current pulses of successively increasing duration tp may be passed through the actuating arm (so as to induce successively increasing degrees of movement of the actuating arm) over a time period t. Then detection will be made for a predetermined level of movement of the actuating arm within a predetermined time window t w where t>tw>tp.
  • the testing method of the invention preferably is employed in relation to an MEM device in the form of a liquid ejector and most preferably in the form of an ink ejection nozzle that is operable to eject an ink droplet upon actuation of the actuating arm.
  • the second end of the actuating arm preferably is coupled to an integrally formed paddle which is employed to displace ink from a chamber into which the actuating arm extends.
  • the actuating arm most preferably is formed from two similarly shaped arm portions which are interconnected in interlapping relationship.
  • a first of the arm portions is connected to a current supply and is arranged in use to be heated by the current pulse or pulses having duration t p .
  • the second arm portion functions to restrain linear expansion of the actuating arm as a complete unit and heat induced elongation of the first arm - 3 - portion causes bending to occur along the length of the actuating arm.
  • the actuating arm is effectively caused to pivot with respect to the support structure with heating and cooling of the first portion of the actuating arm.
  • Figure 2 shows a plan view of the inkjet nozzle of Figure 1
  • Figure 3 shows a perspective view of an outer portion of an actuating arm and an ink ejecting paddle or of the inkjet nozzle, the actuating arm and paddle being illustrated independently of other elements of the nozzle,
  • Figure 4 shows an arrangement similar to that of Figure 3 but in respect of an inner portion of the actuating arm
  • Figure 5 shows an arrangement similar to that of Figures 3 and 4 but in respect of the complete actuating arm incorporating the outer and inner portions shown in Figures 3 and 4,
  • Figure 6 shows a detailed portion of a movement sensor arrangement that is shown encircled in Figure 5,
  • Figure 7 shows a sectional elevation view of the nozzle of Figure 1 but prior to charging with ink
  • Figure 8 shows a sectional elevation view of the nozzle of Figure 7 but with the actuating arm and paddle actuated to a test position
  • Figure 9 shows ink ejection from the nozzle when actuated under a test condition
  • Figure 10 shows a blocked condition of the nozzle when the actuating arm and paddle are actuated to an extent that normally would be sufficient to eject ink from the nozzle
  • Figure 11 shows a schematic representation of a portion of an electrical circuit that is embodied within the nozzle
  • Figure 12 shows an excitation-time diagram applicable to normal (ink ejecting) actuation of the nozzle actuating arm
  • Figure 13 shows an excitation-time diagram applicable to test actuation of the nozzle actuating arm
  • Figure 14 shows comparative displacement-time curves applicable to the excitation-time diagrams shown in Figures 12 and 13, - 4 -
  • Figure 15 shows an excitation-time diagram applicable to a testing procedure
  • Figure 16 shows a temperature-time diagram that is applicable to the nozzle actuating arm and which corresponds with the excitation-time diagram of Figure 15, and
  • Figure 17 shows a deflection-time diagram that is applicable to the nozzle actuating arm and which corresponds with the excitation/heating-time diagrams of Figures 15 and 16.
  • a single inkjet nozzle device is shown as a portion of a chip that is fabricated by integrating MEMS and CMOS technologies.
  • the complete nozzle device includes a support structure having a silicon substrate 20, a metal oxide semiconductor layer 21, a passivation layer 22, and a non-corrosive dielectric coating/chamber-defining layer 23.
  • the nozzle device incorporates an ink chamber 24 which is connected to a source (not shown) of ink and, located above the chamber, a nozzle chamber 25.
  • a nozzle opening 26 is provided in the chamber-defining layer 23 to permit displacement of ink droplets toward paper or other medium (not shown) onto which ink is to be deposited.
  • a paddle 27 is located between the two chambers 24 and 25 and, when in its quiescent position, as indicated in Figures 1 and 7, the paddle 27 effectively divides the two chambers 24 and 25.
  • the paddle 27 is coupled to an actuating arm 28 by a paddle extension 29 and a bridging portion 30 of the dielectric coating 23.
  • the actuating arm 28 is formed (i.e. deposited during fabrication of the device) to be pivotable with respect to the support structure or substrate 20. That is, the actuating arm has a first end that is coupled to the support structure and a second end 38 that is movable outwardly with respect to the support structure.
  • the actuating arm 28 comprises outer and inner arm portions 31 and 32.
  • the outer arm portion 31 is illustrated in detail and in isolation from other components of the nozzle device in the perspective view shown in Figure 3.
  • the inner arm portion 32 is illustrated in a similar way in Figure 4.
  • the complete actuating arm 28 is illustrated in perspective in Figure 5, as well as in Figures 1, 7, 8, 9 and 10.
  • the inner portion 32 of the actuating arm 28 is formed from a titamum-aluminium-nitride (TiAl)N deposit during formation of the nozzle device and it is connected electrically to a current source 33, as illustrated schematically in Figure 11, within the CMOS structure.
  • a current source 33 as illustrated schematically in Figure 11, within the CMOS structure.
  • the electrical connection is made to end terminals 34 and 35, and application of a pulsed excitation voltage to the terminals results in pulsed current flow through the inner portion only of the actuating arm 28.
  • the current flow causes rapid resistance heating within the inner portion 32 of the actuating arm and consequential momentary elongation of that portion of the arm.
  • the outer arm portion 31 of the actuating arm 28 is mechanically coupled to but electrically - 5 - isolated from the inner arm portion 32 by posts 36. No current-induced heating occurs within the outer arm portion 31 and, as a consequence, voltage induced current flow through the inner arm portion 32 causes momentary bending of the complete actuating arm 28 in the manner indicated in Figures 8, 9 and 10 of the drawings. This bending of the actuating arm 28 is equivalent to pivotal movement of the arm with respect to the substrate 20 and it results in displacement of the paddle 27 within the chambers 24 and 25.
  • the movement sensor comprises a moving contact element 37 that is formed integrally with the inner portion 32 of the actuating arm 28 and which is electrically active when current is passing through the inner portion of the actuating arm.
  • the moving contact element 37 is positioned adjacent the second end 38 of the actuating arm and, thus, with a voltage V applied to the end terminals 34 and 35, the moving contact element will be at a potential of approximately V/2.
  • the movement sensor also comprises a fixed contact element 39 which is formed integrally with the
  • CMOS layer 22 and which is positioned to be contacted by the moving contact element 37 when the actuating arm 28 pivots upwardly to a predetermined extent.
  • the fixed contact element is connected electrically to amplifier elements 40 and to a microprocessor arrangement 41, both of which are shown in Figure 11 and the component elements of which are embodied within the CMOS layer 22 of the device.
  • Figure 12 shows an excitation-time diagram that is applicable to effecting actuation of the actuator arm 28 and the paddle 27 from a quiescent to a lower-than-normal ink ejecting position.
  • the displacement of the paddle 27 resulting from the excitation of Figure 12 is indicated by the lower graph 42 in Figure 14, and it can be seen that the maximum extent of displacement is less than the optimum level that is shown by the displacement line 43.
  • Figure 13 shows an expanded excitation-time diagram that is applicable to effecting - 6 - actuation of the actuator arm 28 and the paddle 27 to an excessive extent, such as is indicated in Figures 8 and 9.
  • the displacement of the paddle 27 resulting from the excitation of Figure 13 is indicated by the upper graph 44 in Figure 14, from which it can be seen that the maximum displacement level is greater than the optimum level indicated by the displacement line 43.
  • Figures 15, 16 and 17 shows plots of excitation voltage, actuator arm temperature and paddle deflection against time for successively increasing durations of excitation applied to the actuating arm 28. These plots have relevance to testing of the nozzle device.
  • a series of current pulses of successively increasing duration t p are induced to flow through the actuating arm 28 over a time period t.
  • the duration t p is controlled to increase with time as indicated graphically in Figure 15.
  • Each current pulse induces momentary heating in the actuating arm 28 and a consequential temperature rise in the actuating arm, followed by a temperature fall on expiration of the pulse duration. As indicated in Figure 16, the temperature rises to successively higher levels with the increase in pulse durations as shown in Figure 15.
  • the actuator arm 28 will move (i.e. pivot) to successively increasing degrees, some of which will be below that required to cause contact to be made between the moving and fixed contact elements 37 and 39, and others of which will be above that required to cause contact to be made between the moving and fixed contact elements. This is indicated by the "test level" line shown in Figure 17.
  • the microprocessor 41 is employed to detect for a predetermined level of movement of the actuating arm 28 (i.e. the "test level") within a predetermined time window t w that falls within the testing time t. This is then correlated with the pulse duration t p that induces the required movement within the time window, and this in turn provides indication as to the appropriate working condition of the nozzle device.
  • a single pulse such as that shown in Figure 12 may be employed to induce heating of the actuating arm 28 and to effect a consequential temperature rise, which will be followed by a temperature drop on expiration of the (single) pulse duration.
  • the microprocessor 41 will be employed to detect for a predetermined level of movement of the actuating arm resulting from the single current pulse so that, in effect, a Go/No-go test is performed.

Landscapes

  • Ink Jet (AREA)

Abstract

L'invention concerne un procédé d'essai d'un microdispositif électromécanique tel qu'une buse à jet d'encre, munie d'un bras de commande destiné à déplacer une palette de déplacement d'encre lorsqu'un courant électrique à induction de chaleur passe par le bras de commande, et comprenant également un capteur de mouvement associé au bras de commande. Le procédé consiste à faire passer par le bras de commande une impulsion de courant à durée prédéterminée ou une série d'impulsions de courant dont les durées augmentent successivement, et à détecter un niveau de mouvement prédéterminé du bras de commande.
PCT/AU2000/000585 1999-06-30 2000-05-24 Essai d'un microdispositif electromecanique WO2001002179A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US09/575,177 US6382779B1 (en) 1999-06-30 2000-05-23 Testing a micro electro- mechanical device
EP00929097A EP1206351B1 (fr) 1999-06-30 2000-05-24 Essai d'un microdispositif electromecanique
AU47320/00A AU761670B2 (en) 1999-06-30 2000-05-24 Testing a micro electro-mechanical device
DE60039436T DE60039436D1 (de) 1999-06-30 2000-05-24 Prüfung einer mikroelektromechanischen vorrichtung
CA 2414733 CA2414733C (fr) 1999-06-30 2000-05-24 Essai d'un microdispositif electromecanique
HK02108353.2A HK1046668A1 (zh) 1999-06-30 2002-11-19 測試微電機裝置的方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AUPQ1309A AUPQ130999A0 (en) 1999-06-30 1999-06-30 A method and apparatus (IJ47V11)
AUPQ1309 1999-06-30
US09/575,177 US6382779B1 (en) 1999-06-30 2000-05-23 Testing a micro electro- mechanical device

Publications (1)

Publication Number Publication Date
WO2001002179A1 true WO2001002179A1 (fr) 2001-01-11

Family

ID=25646089

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AU2000/000585 WO2001002179A1 (fr) 1999-06-30 2000-05-24 Essai d'un microdispositif electromecanique

Country Status (2)

Country Link
EP (1) EP1206351B1 (fr)
WO (1) WO2001002179A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107462172A (zh) * 2017-09-19 2017-12-12 徐工集团工程机械有限公司 喷嘴开口度检测装置、炮头和消防水炮

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999003680A1 (fr) * 1997-07-15 1999-01-28 Silverbrook Research Pty. Limited Jet d'encre actionne par un champ
WO1999003681A1 (fr) * 1997-07-15 1999-01-28 Silverbrook Research Pty. Limited Jet d'encre a commande thermique

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0887186B1 (fr) * 1997-06-27 2001-11-07 STMicroelectronics S.r.l. Tête à jet d'encre intégrée et son procédé de fabrication

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999003680A1 (fr) * 1997-07-15 1999-01-28 Silverbrook Research Pty. Limited Jet d'encre actionne par un champ
WO1999003681A1 (fr) * 1997-07-15 1999-01-28 Silverbrook Research Pty. Limited Jet d'encre a commande thermique

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1206351A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107462172A (zh) * 2017-09-19 2017-12-12 徐工集团工程机械有限公司 喷嘴开口度检测装置、炮头和消防水炮
CN107462172B (zh) * 2017-09-19 2024-02-02 江苏徐工工程机械研究院有限公司 喷嘴开口度检测装置、炮头和消防水炮

Also Published As

Publication number Publication date
EP1206351A4 (fr) 2003-03-12
EP1206351A1 (fr) 2002-05-22
EP1206351B1 (fr) 2008-07-09

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