EP1510341B1 - buse à jet d'encre avec obturateur électromagnétique - Google Patents

buse à jet d'encre avec obturateur électromagnétique Download PDF

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Publication number
EP1510341B1
EP1510341B1 EP04024065A EP04024065A EP1510341B1 EP 1510341 B1 EP1510341 B1 EP 1510341B1 EP 04024065 A EP04024065 A EP 04024065A EP 04024065 A EP04024065 A EP 04024065A EP 1510341 B1 EP1510341 B1 EP 1510341B1
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EP
European Patent Office
Prior art keywords
ink
nozzle
actuator
ink jet
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04024065A
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German (de)
English (en)
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EP1510341A2 (fr
EP1510341A3 (fr
Inventor
Kia Silverbrook
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Silverbrook Research Pty Ltd
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Silverbrook Research Pty Ltd
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Priority claimed from AUPO8001A external-priority patent/AUPO800197A0/en
Priority claimed from AUPO8036A external-priority patent/AUPO803697A0/en
Priority claimed from AUPO8055A external-priority patent/AUPO805597A0/en
Priority claimed from AUPO8047A external-priority patent/AUPO804797A0/en
Priority claimed from AUPO8048A external-priority patent/AUPO804897A0/en
Priority claimed from AUPO7933A external-priority patent/AUPO793397A0/en
Priority claimed from AUPO8044A external-priority patent/AUPO804497A0/en
Priority claimed from AUPO8066A external-priority patent/AUPO806697A0/en
Priority claimed from AUPO7936A external-priority patent/AUPO793697A0/en
Priority claimed from AUPO8076A external-priority patent/AUPO807697A0/en
Priority claimed from AUPO8067A external-priority patent/AUPO806797A0/en
Priority claimed from AUPO7949A external-priority patent/AUPO794997A0/en
Priority claimed from AUPO8069A external-priority patent/AUPO806997A0/en
Priority claimed from AUPO8059A external-priority patent/AUPO805997A0/en
Priority claimed from AUPO8072A external-priority patent/AUPO807297A0/en
Priority claimed from AUPO8035A external-priority patent/AUPO803597A0/en
Priority claimed from AUPO8070A external-priority patent/AUPO807097A0/en
Priority claimed from AUPO7935A external-priority patent/AUPO793597A0/en
Priority claimed from AUPO7950A external-priority patent/AUPO795097A0/en
Priority claimed from AUPO8054A external-priority patent/AUPO805497A0/en
Priority claimed from AUPO8065A external-priority patent/AUPO806597A0/en
Priority claimed from AUPO8056A external-priority patent/AUPO805697A0/en
Priority claimed from AUPO8071A external-priority patent/AUPO807197A0/en
Priority claimed from AUPO8053A external-priority patent/AUPO805397A0/en
Priority claimed from AUPO8004A external-priority patent/AUPO800497A0/en
Priority claimed from AUPO8060A external-priority patent/AUPO806097A0/en
Priority claimed from AUPO8063A external-priority patent/AUPO806397A0/en
Priority claimed from AUPO8041A external-priority patent/AUPO804197A0/en
Priority claimed from AUPO8077A external-priority patent/AUPO807797A0/en
Priority claimed from AUPO8049A external-priority patent/AUPO804997A0/en
Priority claimed from AUPO8075A external-priority patent/AUPO807597A0/en
Priority claimed from AUPO8073A external-priority patent/AUPO807397A0/en
Priority claimed from AUPO8061A external-priority patent/AUPO806197A0/en
Priority claimed from AUPO8058A external-priority patent/AUPO805897A0/en
Priority claimed from AUPP3982A external-priority patent/AUPP398298A0/en
Priority claimed from AUPP3983A external-priority patent/AUPP398398A0/en
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Publication of EP1510341A2 publication Critical patent/EP1510341A2/fr
Publication of EP1510341A3 publication Critical patent/EP1510341A3/fr
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
    • B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17596—Ink pumps, ink valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/041—Electromagnetic transducer

Definitions

  • the present invention relates to the field of ink jet printing systems.
  • Ink jet printers themselves come in many different types.
  • the utilisation of a continuous stream ink in ink jet printing appears to date back to at least 1929 wherein US Patent No. 1941001 by Hansell discloses a simple form of continuous stream electro-static ink jet printing.
  • US Patent 3596275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also US Patent No. 3373437 by Sweet et al)
  • Piezo-electric ink jet printers are also one form of commonly utilized ink jet printing device. Piezo-electric systems are disclosed by Kyser et. al. in US Patent No. 3946398 (1970) which utilises a diaphragm mode of operation, by Zolten in US Patent 3683212 (1970) which discloses a squeeze mode of operation of a piezo electric crystal, Stemme in US Patent No. 3747120 (1972) discloses a bend mode of piezo-electric operation, Howkins in US Patent No. 4459601 discloses a Piezo electric push mode actuation of the ink jet stream and Fischbeck in US 4584590 which discloses a sheer mode type of piezo-electric transducer element.
  • the ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in US Patent 4490728. Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media.
  • Printing devices utilising the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.
  • US 4,723,131 describes a printhead comprising a plurality of nozzles and a membrane providing a flexible closure between an ink supply and each nozzle.
  • the membrane may be actuated by a solenoid to allow ink to flow to a nozzle
  • GB 2262152 describes a solenoid valve for an inkjet nozzle.
  • a plunger reciprocates inside a bore and can be electromagnetically actuated to provide a closure over an outlet to a nozzle.
  • US 4,210,920 discloses an ink jet printer with an ink reservoir that is held under fluctuating pressure. Drops are ejected through nozzle chambers. A catcher is provided between nozzles and media, attracting non-print-drops electrostatically.
  • a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction operation, durability and consumables.
  • esoteric techniques are also often utilized. These can include electroforming of nickel stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)), electro-discharge machining, laser ablation (U.S. Patent No. 5,208,604), micro-punching, etc.
  • the invention provides an ink jet nozzle according to claim 1.
  • Advantageous embodiments are provided in the dependent claims.
  • the preferred embodiments and other embodiments will be discussed under separate headings with the heading including an U number for ease of reference.
  • the headings also include a type designator with T indicating thermal, S indicating shutter type and F indicating a field type.
  • a shutter is actuated by means of a magnetic coil, the coil being utilized to move an attached shutter to thereby cause the shutter to open or close.
  • the shutter is disposed between an ink reservoir having an oscillating ink pressure and a nozzle chamber having an ink ejection port defined therein for the ejection of ink.
  • ink is allowed to flow from the ink reservoir through to the nozzle chamber and thereby cause an ejection of ink from the ink ejection port.
  • the shutter is closed, the nozzle chamber remains in a stable state such that no ink is ejected from the chamber.
  • a single inkjet nozzle arrangement 710 in a closed position.
  • the arrangement 710 includes a series of shutters 711 which are located above corresponding apertures to a nozzle chamber.
  • the ink jet nozzle 710 is illustrated in an open position which also illustrates the apertures 712 providing a fluid interconnection to a nozzle chamber 713 and an ink ejection port 714.
  • the shutters e.g. 711 are interconnected together and further connected to an arm 716 which is pivotally mounted about a pivot point 717 about which the shutters e.g. 711 rotate.
  • the shutter 711 and arm 716 are constructed from nickel iron (NiFe) so as to be magnetically attracted to an electromagnetic device 719.
  • the electromagnetic device 719 comprises a NiFe core 720 around which is constructed a copper coil 721.
  • the copper coil 721 is connected to a lower drive layer via vias 723,724.
  • the coil 719 is activated by sending a current through the coil 721 which results in its magnification and corresponding attraction in the areas 726,727.
  • the high levels of attraction are due to its close proximity to the ends of the electromagnet 719. This results in a general rotation of the surfaces 726,727 around the pivot point 717 which in turn results in a corresponding rotation of the shutter from a closed to an open position.
  • a number of coiled springs 730-732 are also provided.
  • the coiled springs store energy as a consequence of the rotation of the shutter 711.
  • the coil springs 730-732 act to return the shutter to its closed position.
  • the opening and closing of the shutter 711 allows for the flow of ink to the ink nozzle chamber for a subsequent ejection.
  • the coil 719 is activated rotating the arm 716 bringing the surfaces 726,727 into close contact with the electromagnet 719.
  • the surfaces 726,727 are kept in contact with the electromagnet 719 by means of utilisation of a keeper current which, due the close proximity between the surfaces is substantially less than that required to initially move the arm 716.
  • the shutter 711 is maintained in the plane by means of a guide 734 which overlaps slightly with an end portion of the shutter 711.
  • a nozzle arrangement 710 in accordance with an embodiment.
  • the bottom level consists of a boron doped silicon layer 740 which can be formed from constructing a buried epitaxial layer within a selected wafer and then back etching utilising the boron doped layer as an etch stop. Subsequently, there is provided a silicon layer 741 which includes a crystallographically etched pit forming the nozzle chamber 713. On top of the silicon layer 741 there is constructed a 2 micron silicon dioxide layer 742 which includes the nozzle chamber pit opening whose side walls are passivated by a subsequent nitride layer.
  • nitride layer 744 On top of the silicon dioxide layer 742 is constructed a nitride layer 744 which provides passivation of the lower silicon dioxide layer and also provides a base on which to construct the electromagnetic portions and the shutter.
  • the nitride layer 744 and lower silicon dioxide layer having suitable vias for the interconnection to the ends of the electromagnetic circuit for the purposes of supplying power on demand to the electromagnetic circuit
  • a copper layer 745 is provided.
  • the copper layer providing a base wiring layer for the electromagnetic array in addition to a lower portion of the pivot 717 and a lower portion of the copper layer being utilised to form a part of the construction of the guide 734.
  • a NiFe layer 747 is provided which is utilized for the formation of the internal portions 720 of the electromagnet, in addition to the pivot, aperture arm and shutter 711 in addition to a portion of the guide 734, in addition to the various spiral springs.
  • a copper layer 749 for providing the top and side windings of the coil 721 in addition to providing the formation of the top portion of guide 734.
  • Each of the layers 745,747 can be conductively insulated from its surroundings where required through the utilisation of a nitride passivation layer (not shown). Further, a top passivation layer can be provided to cover the various top layers which will be exposed to the ink within the ink reservoir and nozzle chamber.
  • the various levels 745,749 can be formed through the utilisation of supporting sacrificial structures which are subsequently sacrificially etched away to leave the operable device.
  • the presently disclosed ink jet printing technology is potentially suited to a wide range of printing system including: colour and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with inbuilt pagewidth printers, portable colour and monochrome printers, colour and monochrome copiers, colour and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic "minilabs", video printers, PhotoCD printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.
  • the embodiments of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular ink jet printing technologies are unlikely to be suitable.
  • thermal inkjet The most significant problem with thermal inkjet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal inkjet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.
  • piezoelectric inkjet The most significant problem with piezoelectric inkjet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per print head, but is a major impediment to the fabrication of pagewide print heads with 19,200 nozzles.
  • the inkjet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications.
  • new inkjet technologies have been created.
  • the target features include:
  • inkjet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems
  • the print head is designed to be a monolithic 0.5 micron CMOS chip with MEMS post processing.
  • the print head is 100 mm long, with a width which depends upon the inkjet type.
  • the smallest print head designed is IJ38, which is 0.35 mm wide, giving a chip area of 35 square mm.
  • the print heads each contain 19,200 nozzles plus data and control circuitry.
  • Ink is supplied to the back of the print head by injection molded plastic ink channels.
  • the molding requires 50 micron features, which can be created using a lithographically micromachined insert in a standard injection molding tool.
  • Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer.
  • the print head is connected to the camera circuitry by tape automated bonding.
  • inkjet configurations can readily be derived from these 45 examples by substituting alternative configurations along one or more of the 11 axes.
  • Most of the IJ01 to IJ45 examples can be made into inkjet print heads with characteristics superior to any currently available inkjet technology.
  • Suitable applications include: Home printers, Office network printers, Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide format printers, notebook PC printers, Fax machines. Industrial printing systems, Photocopiers, Photographic minilabs etc.
  • Perovskite materials such as tin modified lead lanthanum zirconate titanate (PLZSnT) exhibit large strains of up to 1% associated with the AFE to FE phase transition.
  • ⁇ Low power consumption ⁇ Many ink types can be used ⁇ Fast operation ( ⁇ 1 ⁇ s) ⁇ Relatively high longitudinal strain ⁇ High efficiency ⁇ Electric field strength of around 3 V/ ⁇ m can be readily provided ⁇ Difficult to integrate with electronics ⁇ Unusual materials such as PLZSnT are used required ⁇ Actuators require a large area ⁇ IJ04 Electrostatic plates Conductive plates are separated by a compressible or fluid dielectric (usually air).
  • the conductive plates may be in a comb or honeycomb structure, or stacked to increase the surface area and therefore the force.
  • Low power consumption ⁇ Many ink types can be used ⁇
  • Fast operation ⁇ Difficult to operate electrostatic devices in an aqueous environment ⁇
  • the electrostatic actuator will normally need to be separated from the ink ⁇
  • Very large area required to achieve high forces ⁇
  • High voltage drive transistors may be required ⁇
  • Full pagewidth print heads are not competitive due to actuator size ⁇ IJ02, IJ04 Electrostatic pull on ink A strong electric field is applied to the ink, whereupon electrostatic attraction accelerates the ink towards the print medium.
  • Examples are: Samarium Cobalt (SaCo) and magnetic materials in the neodymium iron boron family (NdFeB, NdDyFeBNb, NdDyFeB, etc) ⁇ Low power consumption ⁇ Many ink types can be used ⁇ Fast operation ⁇ High efficiency ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ Complex fabrication ⁇ Permanent magnetic material such as used Neodymium Iron Boron (NdFeB) required.
  • SaCo Samarium Cobalt
  • NdDyFeBNb neodymium iron boron family
  • NdDyFeB neodymium iron boron family
  • NdFeB Neodymium Iron Boron
  • the actuator should be pre-stressed to approx. 8 MPa.
  • Many ink types can be used ⁇ Fast operation ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ High force is available ⁇ Force acts as a twisting motion ⁇ Unusual materials such as Terfenol-D are required ⁇ High local currents required ⁇ Copper metalization should be used for long electromigration lifetime and low resistivity ⁇ Pre-stressing may be required ⁇ Fischenbeck, USP 4,032,929 ⁇ IJ25 Surface tension reduction Ink under positive pressure is held in a nozzle by surface tension. The surface tension of the ink is reduced below the bubble threshold, causing the ink to egress from the nozzle.
  • a heater fabricated from a conductive material is incorporated.
  • a 50 ⁇ m long PTFE bend actuator with polysilicon heater and 15 mW power input can provide 180 ⁇ N force and 10 ⁇ m deflection.
  • Actuator motions include: 1) Bend 2) Push 3) Buckle 4) Rotate ⁇ High force can be generated ⁇ PTFE is a candidate for low dielectric constant insulation in ULSI ⁇ Very low power consumption ⁇ Many ink types can be used ⁇ Simple planar fabrication ⁇ Small chip area required for each actuator ⁇ Fast operation ⁇ High efficiency ⁇ CMOS compatible voltages and currents ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ Requires special material (e.g.
  • PTFE Requires a PTFE deposition process, which is not yet standard in ULSI fabs ⁇ PTFE deposition cannot be followed with high temperature (above 350 °C) processing ⁇ Pigmented inks may be infeasible, as pigment particles may jam the bend actuator ⁇ IJ09, IJ17, IJ18, IJ20 ⁇ IJ21, IJ22, IJ23, IJ24 ⁇ IJ27, IJ28, IJ29, IJ30 ⁇ IJ31, IJ42, IJ43, IJ44 Conductive polymer thermoelastic actuator A polymer with a high coefficient of thermal expansion (such as PTFE) is doped with conducting substances to increase its conductivity to about 3 orders of magnitude below that of copper.
  • the conducting polymer expands when resistively heated.
  • conducting dopants include: 1) Carbon nanotubes 2) Metal fibers 3) Conductive polymers such as doped polythiophene 4) Carbon granules ⁇ High force can be generated ⁇ Very low power consumption ⁇ Many ink types can be used ⁇ Simple planar fabrication ⁇ Small chip area required for each actuator ⁇ Fast operation ⁇ High efficiency ⁇ CMOS compatible voltages and currents ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ Requires special materials development (High CTE conductive polymer) ⁇ Requires a PTFE deposition process, which is not yet standard in ULSI fabs ⁇ PTFE deposition cannot be followed with high temperature (above 350 °C) processing ⁇ Evaporation and CVD deposition techniques cannot be used ⁇ Pigmented inks may be infeasible, as pigment particles may jam the bend actuator ⁇ IJ24 Shape memory alloy A shape memory alloy such as TiNi (also known as Nitinol
  • Linear Magnetic Actuator Linear magnetic actuators include the Linear Induction Actuator (LIA), Linear Permanent Magnet Synchronous Actuator (LPMSA), Linear Reluctance Synchronous Actuator (LRSA), Linear Switched Reluctance Actuator (LSRA), and the
  • Linear Magnetic actuators can be constructed with high thrust, long travel, and high efficiency using planar semiconductor fabrication techniques ⁇ Long actuator travel is available ⁇ Medium force is available ⁇ Low voltage operation ⁇ Requires unusual semiconductor materials such as soft magnetic alloys (e.g. CoNiFe [1]) ⁇ Some varieties also require permanent magnetic materials such as Neodymium iron boron (NdFeB) ⁇ Requires complex multi-phase drive circuitry ⁇ High current operation ⁇ IJ12 Basic operation mode Operational mode Description Advantages Disadvantages Examples Actuator directly pushes ink This is the simplest mode of operation: the actuator directly supplies sufficient kinetic energy to expel the drop. The drop must have a sufficient velocity to overcome the surface tension. ⁇ Simple operation.
  • Very simple print head fabrication can be used ⁇
  • the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇
  • Electrostatic field for small nozzle sizes is above air breakdown ⁇
  • Electrostatic field may attract dust ⁇
  • Silverbrook, EP 0771 658 A2 and related patent applications ⁇ Tone-Jet Magnetic pull on ink
  • the drops to be printed are selected by some manner (e.g. thermally induced surface tension reduction of pressurized ink). Selected drops are separated from the ink in the nozzle by a strong magnetic field acting on the magnetic ink.
  • Very simple print head fabrication can be used ⁇
  • the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇
  • Requires magnetic ink ⁇
  • Ink colors other than black are difficult ⁇
  • Requires very high magnetic fields ⁇
  • Silverbrook, EP 0771 658 A2 and related patent applications Shutter The actuator moves a shutter to block ink flow to the nozzle.
  • the ink pressure is pulsed at a multiple of the drop ejection frequency.
  • Actuators with small travel can be used
  • Actuators with small force can be used
  • High speed (>50 KHz) operation can be achieved
  • Moving parts are required
  • Requires ink pressure modulator ⁇ Friction and wear must be considered
  • Stiction is possible
  • IJ08, IJ15, IJ18, IJ19 Pulsed magnetic pull on ink pusher A pulsed magnetic field attracts an 'ink pusher' at the drop ejection frequency.
  • An actuator controls a catch, which prevents the ink pusher from moving when a drop is not to be ejected.
  • the ink pressure oscillates, providing much of the drop ejection energy.
  • the actuator selects which drops are to be fired by selectively blocking or enabling nozzles.
  • the ink pressure oscillation may be achieved by vibrating the print head, or preferably by an actuator in the ink supply.
  • ⁇ Oscillating ink pressure can provide a refill pulse, allowing higher operating speed ⁇
  • the actuators may operate with much lower energy ⁇
  • Acoustic lenses can be used to focus the sound on the nozzles ⁇
  • Requires external ink pressure oscillator ⁇
  • Ink pressure phase and amplitude must be carefully controlled ⁇
  • Acoustic reflections in the ink chamber must be designed for ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇ IJ08, IJ13, IJ15, IJ17 ⁇ IJ18, IJ19, IJ21 Media proximity
  • the print head is placed in close proximity to the print medium. Selected drops protrude from the print head further than unselected drops, and contact the print medium. The drop soaks into the medium fast enough to cause drop separation.
  • the bend actuator converts a high force low travel actuator mechanism to high travel, lower force mechanism, ⁇ High stresses are involved ⁇ Care must be taken that the materials do not delaminate ⁇ Residual bend resulting from high temperature or high stress during formation ⁇ Piezoelectric ⁇ IJ03, IJ09, IJ17- IJ24 ⁇ IJ27, IJ29-IJ39, IJ42, ⁇ IJ43, IJ44 Transient bend actuator A trilayer bend actuator where the two outside layers are identical. This cancels bend due to ambient temperature and residual stress. The actuator only responds to transient heating of one side or the other.
  • Actuator forces may not add linearly, reducing efficiency ⁇ IJ12, IJ13, IJ18, IJ20 ⁇ IJ22, IJ28, IJ42, IJ43 Linear Spring
  • a linear spring is used to transform a motion with small travel and high force into a longer travel, lower force motion.
  • Matches low travel actuator with higher travel requirements ⁇
  • Non-contact method of motion transformation ⁇ Requires print head area for the spring
  • IJ15 Reverse spring The actuator loads a spring. When the actuator is turned off, the spring releases. This can reverse the force/distance curve of the actuator to make it compatible with the force/time requirements of the drop ejection.
  • the catch either enables or disables movement of an ink pusher that is controlled in a bulk manner.
  • Very low actuator energy ⁇ Very small actuator size ⁇ Complex construction ⁇ Requires external force ⁇ Unsuitable for pigmented inks ⁇ IJ10 Buckle plate
  • a buckle plate can be used to change a slow actuator into a fast motion. It can also convert a high force, low travel actuator into a high travel, medium force motion.
  • Very fast movement achievable ⁇ Must stay within elastic limits of the materials for long device life ⁇ High stresses involved ⁇ Generally, high power requirement ⁇ S. Hirata et al, "An Ink-jet Head ", Proc. IEEE MEMS, Feb. 1996, pp 418-423.
  • IJ18, IJ27 Tapered magnetic pole A tapered magnetic pole can increase travel at the expense of force.
  • ⁇ Linearizes the magnetic force/distance curve ⁇ Complex construction ⁇ IJ14 Lever A lever and fulcrum is used to transform a motion with small travel and high force into a motion with longer travel and lower force. The lever can also reverse the direction of travel.
  • a small angular deflection of the actuator results in a rotation of the impeller vanes, which push the ink against stationary vanes and out of the nozzle.
  • ⁇ High mechanical advantage ⁇
  • the ratio of force to travel of the actuator can be matched to the nozzle requirements by varying the number of impeller vanes ⁇
  • Complex construction ⁇
  • Unsuitable for pigmented inks ⁇ IJ28 Acoustic lens A refractive or diffractive (e.g. zone plate) acoustic lens is used to concentrate sound waves.
  • the effective area of the actuator becomes the membrane area ⁇ Fabrication complexity ⁇ Actuator size ⁇ Difficulty of integration in a VLSI process ⁇ 1982 Howkins USP 4,459,601 Rotary
  • the actuator causes the rotation of some element, such a grill or impeller ⁇ Rotary levers may be used to increase travel ⁇ Small chip area requirements ⁇
  • Device complexity ⁇ May have friction at a pivot point ⁇ IJ05, IJ08, IJ13, IJ28 Bend The actuator bends when energized. This may be due to differential thermal expansion, piezoelectric expansion, magnetostriction, or other form of relative dimensional change. ⁇ A very small change in dimensions can be converted to a large motion.
  • the slower refill process is unrestricted, and does not result in eddies.
  • the refill rate is not as restricted as the long inlet method.
  • Reduces crosstalk ⁇ Design complexity ⁇ May increase fabrication complexity (e.g. Tektronix hot melt Piezoelectric print heads). ⁇ HP Thermal Ink Jet ⁇ Tektronix piezoelectric ink jet Flexible flap restricts inlet In this method recently disclosed by Canon, the expanding actuator (bubble) pushes on a flexible flap that restricts the inlet.
  • a filter is located between the ink inlet and the nozzle chamber.
  • the filter has a multitude of small holes or slots, restricting ink flow.
  • the filter also removes particles which may block the nozzle.
  • ⁇ Additional advantage of ink filtration ⁇ Ink filter may be fabricated with no additional process steps ⁇ Restricts refill rate ⁇ May result in complex construction ⁇ IJ04, IJ12, IJ24, IJ27 ⁇ IJ29, IJ30 Small inlet compared to nozzle The ink inlet channel to the nozzle chamber has a substantially smaller cross section than that of the nozzle, resulting in easier ink egress out of the nozzle than out of the inlet. ⁇ Design simplicity ⁇ Restricts refill rate ⁇ May result in a relatively large chip area ⁇ Only partially effective ⁇ IJ02, IJ37, IJ44 Inlet shutter A secondary actuator controls the position of a shutter, closing off the ink inlet when the main actuator is energized.
  • a high nozzle clearing capability can be achieved ⁇ May be implemented at very low cost in systems which already include acoustic actuators ⁇ High implementation cost if system does not already include an acoustic actuator ⁇ IJ08, IJ13, IJ15, IJ17 ⁇ IJ18, IJ19, IJ21 Nozzle clearing plate A microfabricated plate is pushed against the nozzles. The plate has a post for every nozzle.
  • the blade is usually fabricated from a flexible polymer, e.g. rubber or synthetic elastomer.
  • ⁇ Effective for planar print head surfaces ⁇
  • Low cost ⁇ Difficult to use if print head surface is non-planar or very fragile ⁇
  • Requires mechanical parts ⁇ Blade can wear out in high volume print systems ⁇
  • Many ink jet systems Separate ink boiling heater A separate heater is provided at the nozzle although the normal drop e-ection mechanism does not require it. The heaters do not require individual drive circuits, as many nozzles can be cleared simultaneously, and no imaging is required.
  • Nozzle chambers are etched in the front of the wafer, and the wafer is thinned from the back side. Nozzles are then etched in the etch stop layer.
  • High accuracy ( ⁇ 1 ⁇ m) ⁇ Monolithic ⁇ Low cost ⁇ No differential expansion ⁇ Requires long etch times ⁇ Requires a support wafer ⁇ IJ03, IJ05, IJ06, IJ07 ⁇ IJ08, IJ09, IJ10, IJ13 ⁇ IJ14, IJ15, IJ16, IJ19 ⁇ IJ21, IJ23, IJ25, IJ26 No nozzle plate Various methods have been tried to eliminate the nozzles entirety, to prevent nozzle clogging.
  • Example Aqueous, dye Water based ink which typically contains: water, dye, surfactant, humectant, and biocide.
  • Modern ink dyes have high water-fastness, light fastness ⁇ Environmentally friendly ⁇ No odor ⁇ Slow drying ⁇ Corrosive ⁇ Bleeds on paper ⁇ May strikethrough ⁇ Cockles paper ⁇ Most existing inkjets ⁇ All U series ink jets ⁇ Silverbrook, EP 0771 658 A2 and related patent applications Aqueous, pigment Water based ink which typically contains: water, pigment, surfactant, humectant, and biocide. Pigments have an advantage in reduced bleed, wicking and strikethrough.
  • ink jet printers A large number of new forms of ink jet printers have been developed to facilitate alternative ink jet technologies for the image processing and data distribution system. Various combinations of ink jet devices can be included in printer devices incorporated as part of the present invention.
  • the present application may utilize advanced semiconductor fabrication techniques in the construction of large arrays of ink jet printers.
  • the present application may utilize an ink delivery system to the ink jet head.
  • the present application may utilize advanced semiconductor microelectromechanical techniques in the construction of large arrays of ink jet printers.
  • the present application may include the utilization of a disposable camera system
  • the present application may include the utilization of a data distribution system
  • the present application may include the utilization of camera and data processing techniques

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)

Claims (10)

  1. Buse de jet d'encre (710) comprenant :
    un réservoir d'encre ayant des moyens pour fournir une alimentation en encre sous une pression fluctuante ;
    une chambre de buse (713) ayant un port d'éjection d'encre (714) pour l'éjection de gouttes d'encre sur un support d'impression ; et
    des moyens d'obturation (711, 716) interconnectant ledit réservoir et ladite chambre de buse (713), lesdits moyens d'obturation pouvant être actionnés au moyen d'une commande électromagnétique de manière à commander l'éjection d'encre depuis ledit port d'éjection d'encre (714), dans lequel lesdits moyens d'obturation (711, 716) sont mobiles à travers une ouverture dans une paroi de ladite chambre de buse (713).
  2. Buse de jet d'encre (710) comme revendiqué dans la revendication 1, dans laquelle lesdits moyens d'obturation comportent un bras (716) interconnecté à au moins un obturateur (711).
  3. Buse de jet d'encre (710) comme revendiqué dans la revendication 2 comportant en outre un électro-aimant (719) pour déplacer ledit bras (716), ouvrant ainsi un canal pour le flux d'encre.
  4. Buse de jet d'encre (710) comme revendiqué dans la revendication 3 dans laquelle ledit électro-aimant (719) inclut une première (726) et une seconde (727) extrémités et dans laquelle chacune desdites extrémités est positionnée à proximité proche dudit bras (716) et ladite commande électromagnétique inclut un rapprochement dudit bras de chacune des deux dites extrémités.
  5. Buse de jet d'encre (710) comme revendiqué dans la revendication 2 dans laquelle ledit bras (716) est pivoté entre lesdites première et deuxième extrémités (726, 727) dudit électro-aimant (719).
  6. Buse de jet d'encre (710) comme revendiqué dans l'une quelconque des revendications 3 à 5 dans lequel l'électro-aimant (719) a une forme de spirale.
  7. Buse de jet d'encre (710) comme revendiqué dans l'une quelconque des revendications 1 à 6 comprenant en outre
    des moyens élastiques (730) connectés auxdits moyens d'obturation, lesdits moyens élastiques étant élastiquement déformés par ladite commande électromagnétique et lesdits moyens élastiques fonctionnant pour revenir à un état initial suite à la désactivation desdits moyens d'obturation de manière à restreindre le flux suivant de fluide depuis ledit réservoir d'encre vers ladite chambre de buse (713).
  8. Buse de jet d'encre (710) comme revendiqué dans la revendication 7 dans laquelle lesdits moyens élastiques comportent un ressort à bobine (730).
  9. Buse de jet d'encre (710) comme revendiqué dans l'une quelconque des revendications 3 à 8 dans laquelle ledit électro-aimant (719) est formé en utilisant des techniques de fabrication de semi-conducteur d'une bobine de cuivre (721) entourant un noyau en métal doux (720).
  10. Buse de jet d'encre (710) comme revendiqué dans la revendication 9 dans laquelle ladite bobine de cuivre (721) est formée en utilisant un procédé de damasquinage.
EP04024065A 1997-07-15 1998-07-15 buse à jet d'encre avec obturateur électromagnétique Expired - Lifetime EP1510341B1 (fr)

Applications Claiming Priority (73)

Application Number Priority Date Filing Date Title
AUPO7933A AUPO793397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation_apparatus (IJM10)
AUPO8044A AUPO804497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ07)
AUPO8066A AUPO806697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ01)
AUPO7936A AUPO793697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM02)
AUPO804197 1997-07-15
AUPO800497 1997-07-15
AUPO793597 1997-07-15
AUPO805397 1997-07-15
AUPO8076A AUPO807697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM16)
AUPO793397 1997-07-15
AUPO8067A AUPO806797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ16)
AUPO805497 1997-07-15
AUPO806197 1997-07-15
AUPO794997 1997-07-15
AUPO807097 1997-07-15
AUPO805697 1997-07-15
AUPO7949A AUPO794997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM12)
AUPO800197 1997-07-15
AUPO8069A AUPO806997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ11)
AUPO8059A AUPO805997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM14)
AUPO8072A AUPO807297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ02)
AUPO8071A AUPO807197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ04)
AUPO8070A AUPO807097A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ15)
AUPO7935A AUPO793597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM01)
AUPO807197 1997-07-15
AUPO7950A AUPO795097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM11)
AUPO795097 1997-07-15
AUPO8054A AUPO805497A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM05)
AUPO8001A AUPO800197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ17)
AUPO804797 1997-07-15
AUPO8047A AUPO804797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ05)
AUPO8035A AUPO803597A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ06)
AUPO8053A AUPO805397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM08)
AUPO806797 1997-07-15
AUPO8004A AUPO800497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ26)
AUPO805597 1997-07-15
AUPO806997 1997-07-15
AUPO803597 1997-07-15
AUPO807297 1997-07-15
AUPO804997 1997-07-15
AUPO805997 1997-07-15
AUPO806597 1997-07-15
AUPO8060A AUPO806097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM13)
AUPO8063A AUPO806397A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ08)
AUPO8041A AUPO804197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ25)
AUPO806097 1997-07-15
AUPO8077A AUPO807797A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM25)
AUPO807597 1997-07-15
AUPO793697 1997-07-15
AUPO8049A AUPO804997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ12)
AUPO804497 1997-07-15
AUPO8075A AUPO807597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM17)
AUPO8036A AUPO803697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ13)
AUPO8061A AUPO806197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM04)
AUPO807697 1997-07-15
AUPO8058A AUPO805897A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM26)
AUPO805897 1997-07-15
AUPO806397 1997-07-15
AUPO806697 1997-07-15
AUPO8073A AUPO807397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM15)
AUPO8056A AUPO805697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ10)
AUPO8065A AUPO806597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM06)
AUPO807797 1997-07-15
AUPO807397 1997-07-15
AUPO8048A AUPO804897A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ14)
AUPO804897 1997-07-15
AUPO8055A AUPO805597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM07)
AUPO803697 1997-07-15
AUPP3982A AUPP398298A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm45)
AUPP398398 1998-06-09
AUPP398298 1998-06-09
AUPP3983A AUPP398398A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij45)
EP98933350A EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique

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EP98933350A Division EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique

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EP1510341A2 EP1510341A2 (fr) 2005-03-02
EP1510341A3 EP1510341A3 (fr) 2005-03-16
EP1510341B1 true EP1510341B1 (fr) 2007-01-24

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EP04024058A Expired - Lifetime EP1508444B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec plaques actionnées par force électrostatique
EP98933350A Expired - Lifetime EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique
EP04024063A Expired - Lifetime EP1510340B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston fenté
EP04024064A Expired - Lifetime EP1508445B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec actuateur à force Lorentz
EP04024057A Expired - Lifetime EP1508443B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston activé par force electro-magnétique
EP04024061A Expired - Lifetime EP1508448B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston conique magnétique
EP04024059A Expired - Lifetime EP1512535B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec piston actionné par force magnétique
EP04024065A Expired - Lifetime EP1510341B1 (fr) 1997-07-15 1998-07-15 buse à jet d'encre avec obturateur électromagnétique
EP04024066A Expired - Lifetime EP1508446B1 (fr) 1997-07-15 1998-07-15 Buse pour imprimante pour jet d'encre avec actionneur à solénoide
EP04024060A Expired - Lifetime EP1510339B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre actionnée par des impulsions magnétiques
EP04024062A Expired - Lifetime EP1508449B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec chambre-actuateur magnétique

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EP04024058A Expired - Lifetime EP1508444B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec plaques actionnées par force électrostatique
EP98933350A Expired - Lifetime EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique
EP04024063A Expired - Lifetime EP1510340B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston fenté
EP04024064A Expired - Lifetime EP1508445B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec actuateur à force Lorentz
EP04024057A Expired - Lifetime EP1508443B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston activé par force electro-magnétique
EP04024061A Expired - Lifetime EP1508448B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston conique magnétique
EP04024059A Expired - Lifetime EP1512535B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec piston actionné par force magnétique

Family Applications After (3)

Application Number Title Priority Date Filing Date
EP04024066A Expired - Lifetime EP1508446B1 (fr) 1997-07-15 1998-07-15 Buse pour imprimante pour jet d'encre avec actionneur à solénoide
EP04024060A Expired - Lifetime EP1510339B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre actionnée par des impulsions magnétiques
EP04024062A Expired - Lifetime EP1508449B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec chambre-actuateur magnétique

Country Status (4)

Country Link
EP (11) EP1508444B1 (fr)
JP (6) JP4170582B2 (fr)
AT (8) ATE289922T1 (fr)
WO (1) WO1999003680A1 (fr)

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Also Published As

Publication number Publication date
JP2007062381A (ja) 2007-03-15
EP1508443A2 (fr) 2005-02-23
JP4185538B2 (ja) 2008-11-26
WO1999003680A1 (fr) 1999-01-28
EP0999933A4 (fr) 2000-12-20
EP1508444B1 (fr) 2007-11-21
JP2001510107A (ja) 2001-07-31
JP2007062379A (ja) 2007-03-15
ATE289922T1 (de) 2005-03-15
ATE355972T1 (de) 2007-03-15
EP1508448A1 (fr) 2005-02-23
JP2007062383A (ja) 2007-03-15
JP2007062380A (ja) 2007-03-15
EP1508443A3 (fr) 2005-03-16
EP1510341A2 (fr) 2005-03-02
EP0999933A1 (fr) 2000-05-17
EP1508445A1 (fr) 2005-02-23
EP1510340A3 (fr) 2005-03-09
EP1512535A1 (fr) 2005-03-09
EP1510341A3 (fr) 2005-03-16
JP4173174B2 (ja) 2008-10-29
EP1508449B1 (fr) 2007-01-24
EP0999933B1 (fr) 2005-03-02
ATE381991T1 (de) 2008-01-15
EP1510339A2 (fr) 2005-03-02
EP1510340B1 (fr) 2007-01-24
JP4137964B2 (ja) 2008-08-20
JP4170582B2 (ja) 2008-10-22
EP1508445B1 (fr) 2007-01-31
JP4171037B2 (ja) 2008-10-22
EP1508444A2 (fr) 2005-02-23
EP1508449A1 (fr) 2005-02-23
EP1508446B1 (fr) 2007-01-10
ATE352420T1 (de) 2007-02-15
ATE353053T1 (de) 2007-02-15
EP1508443B1 (fr) 2007-03-07
JP4137965B2 (ja) 2008-08-20
EP1510340A2 (fr) 2005-03-02
JP2007062382A (ja) 2007-03-15
EP1512535B1 (fr) 2007-12-26
ATE352422T1 (de) 2007-02-15
EP1510339B1 (fr) 2007-01-24
ATE352423T1 (de) 2007-02-15
EP1508448B1 (fr) 2007-01-17
EP1508446A1 (fr) 2005-02-23
EP1508444A3 (fr) 2005-03-16
ATE352421T1 (de) 2007-02-15
EP1510339A3 (fr) 2005-03-09

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