EP1508449B1 - Buse de jet d'encre avec chambre-actuateur magnétique - Google Patents

Buse de jet d'encre avec chambre-actuateur magnétique Download PDF

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Publication number
EP1508449B1
EP1508449B1 EP04024062A EP04024062A EP1508449B1 EP 1508449 B1 EP1508449 B1 EP 1508449B1 EP 04024062 A EP04024062 A EP 04024062A EP 04024062 A EP04024062 A EP 04024062A EP 1508449 B1 EP1508449 B1 EP 1508449B1
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EP
European Patent Office
Prior art keywords
ink
actuator
nozzle
ink jet
nozzle chamber
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP04024062A
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German (de)
English (en)
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EP1508449A1 (fr
Inventor
Kia Silverbrook
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Silverbrook Research Pty Ltd
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Silverbrook Research Pty Ltd
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Priority claimed from AUPO8047A external-priority patent/AUPO804797A0/en
Priority claimed from AUPO7936A external-priority patent/AUPO793697A0/en
Priority claimed from AUPO8053A external-priority patent/AUPO805397A0/en
Priority claimed from AUPO8055A external-priority patent/AUPO805597A0/en
Priority claimed from AUPO7933A external-priority patent/AUPO793397A0/en
Priority claimed from AUPO8044A external-priority patent/AUPO804497A0/en
Priority claimed from AUPO8066A external-priority patent/AUPO806697A0/en
Priority claimed from AUPO8035A external-priority patent/AUPO803597A0/en
Priority claimed from AUPO8076A external-priority patent/AUPO807697A0/en
Priority claimed from AUPO8067A external-priority patent/AUPO806797A0/en
Priority claimed from AUPO7949A external-priority patent/AUPO794997A0/en
Priority claimed from AUPO8069A external-priority patent/AUPO806997A0/en
Priority claimed from AUPO8048A external-priority patent/AUPO804897A0/en
Priority claimed from AUPO8072A external-priority patent/AUPO807297A0/en
Priority claimed from AUPO8071A external-priority patent/AUPO807197A0/en
Priority claimed from AUPO8070A external-priority patent/AUPO807097A0/en
Priority claimed from AUPO7935A external-priority patent/AUPO793597A0/en
Priority claimed from AUPO7950A external-priority patent/AUPO795097A0/en
Priority claimed from AUPO8054A external-priority patent/AUPO805497A0/en
Priority claimed from AUPO8001A external-priority patent/AUPO800197A0/en
Priority claimed from AUPO8059A external-priority patent/AUPO805997A0/en
Priority claimed from AUPO8065A external-priority patent/AUPO806597A0/en
Priority claimed from AUPO8056A external-priority patent/AUPO805697A0/en
Priority claimed from AUPO8004A external-priority patent/AUPO800497A0/en
Priority claimed from AUPO8060A external-priority patent/AUPO806097A0/en
Priority claimed from AUPO8063A external-priority patent/AUPO806397A0/en
Priority claimed from AUPO8041A external-priority patent/AUPO804197A0/en
Priority claimed from AUPO8077A external-priority patent/AUPO807797A0/en
Priority claimed from AUPO8049A external-priority patent/AUPO804997A0/en
Priority claimed from AUPO8075A external-priority patent/AUPO807597A0/en
Priority claimed from AUPO8036A external-priority patent/AUPO803697A0/en
Priority claimed from AUPO8061A external-priority patent/AUPO806197A0/en
Priority claimed from AUPO8058A external-priority patent/AUPO805897A0/en
Priority claimed from AUPO8073A external-priority patent/AUPO807397A0/en
Priority claimed from AUPP3982A external-priority patent/AUPP398298A0/en
Priority claimed from AUPP3983A external-priority patent/AUPP398398A0/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
    • B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17596—Ink pumps, ink valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/041—Electromagnetic transducer

Definitions

  • the present invention relates to the field of ink jet printing systems.
  • Ink jet printers themselves come in many different types.
  • the utilisation of a continuous stream ink in ink jet printing appears to date back to at least 1929 wherein US Patent No. 1941001 by Hansell discloses a simple form of continuous stream electro-static ink jet printing.
  • US Patent 3596275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also US Patent No. 3373437 by Sweet et al)
  • Piezo-electric ink jet printers are also one form of commonly utilized ink jet printing device. Piezo-electric systems are disclosed by Kyser et. al. in US Patent No. 3946398 (1970) which utilises a diaphragm mode of operation, by Zolten in US Patent 3683212 (1970) which discloses a squeeze mode of operation of a piezo electric crystal, Stemme in US Patent No. 3747120 (1972) discloses a bend mode of piezo-electric operation, Howkins in US Patent No. 4459601 discloses a Piezo electric push mode actuation of the ink jet stream and Fischbeck in US 4584590 which discloses a sheer mode type of piezo-electric transducer element.
  • the ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in US Patent 4490728. Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media.
  • Printing devices utilising the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.
  • WO97/12689 describes an inkjet nozzle comprising a deflectable membrane having a nozzle opening defined therein.
  • the membrane is laminated to a magnetic transducer, which may be actuated by another transducer placed behind a piece of paper.
  • a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction operation, durability and consumables.
  • esoteric techniques are also often utilized. These can include electroforming of nickel stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)), electro-discharge machining, laser ablation (U.S. Patent No. 5,208,604), micro-punching, etc.
  • the preferred embodiments and other embodiments will be discussed under separate headings with the heading including an IJ number for ease of reference.
  • the headings also include a type designator with T indicating thermal, S indicating shutter type and F indicating a field type.
  • an ink jet print head is constructed from a series of nozzle arrangements where each nozzle arrangement includes a magnetic plate actuator which is actuated by a coil which is pulsed so as to move the magnetic plate and thereby cause the ejection of ink.
  • the movement of the magnetic plate results in a leaf spring device being extended resiliently such that when the coil is deactivated, the magnetic plate returns to a rest position resulting in the ejection of a drop of ink from an aperture created within the plate.
  • an ink jet nozzle arrangement 4401 which includes a nozzle chamber 4402 which connects with an ink ejection nozzle 4403 such that, when in a quiescent position, an ink meniscus 4404 forms over the nozzle 4403.
  • the nozzle 4403 is formed in a magnetic nozzle plate 4405 which can be constructed from a ferrous material. Attached to the nozzle plate 4405 is a series of leaf springs e.g. 4406, 4407 which bias the nozzle plate 4405 away from a base plate 4409. Between the nozzle plate 4405 and the base plate 4409, there is provided a conductive coil 4410 which is interconnected and controlled via a lower circuitry layer 4411 which can comprise a standard CMOS circuitry layer.
  • the ink chamber 4402 is supplied with ink from a lower ink supply channel 4412 which is formed by etching through a wafer substrate 4413.
  • the wafer substrate 4413 can comprise a semiconductor wafer substrate.
  • the ink chamber 4402 is interconnected to the ink supply channel 4412 by means of a series of slots 4414 which can be etched through the CMOS layer 4411.
  • the area around the coil 4410 is hydrophobically treated so that, during operation, a small meniscus e.g. 4416, 4417 forms between the nozzle plate 4405 and base plate 4409.
  • the coil 4410 is energised. This results in a movement of the plate 4405 as illustrated in Fig. 328.
  • the general downward movement of the plate 4405 results in a substantial increase in pressure within nozzle chamber 4402.
  • the increase in pressure results in a rapid growth in the meniscus 4404 as ink flows out of the nozzle chamber 4403.
  • the movement of the plate 4405 also results in the springs 4406, 4407 undergoing a general resilient extension.
  • the small width of the slot 4414 results in minimal outflows of ink into the nozzle chamber 4412.
  • the coil 4410 is deactivated resulting in a return of the plate 4405 towards its quiescent position as a result of the springs 4406, 4407 acting on the nozzle plate 4405.
  • the return of the nozzle plate 4405 to its quiescent position results in a rapid decrease in pressure within the nozzle chamber 4402 which in turn results in a general back flow of ink around the ejection nozzle 4403.
  • the forward momentum of the ink outside the nozzle plate 4403 and the back suction of the ink around the ejection nozzle 4403 results in a drop 4419 being formed and breaking off so as to continue to the print media.
  • the surface tension characteristics across the nozzle 4403 result in a general inflow of ink from the ink supply channel 4412 until such time as the quiescent position of Fig. 327 is again reached.
  • a coil actuated magnetic ink jet print bead is formed for the adoption of ink drops on demand.
  • the area around the coil 4410 is hydrophobically treated so as to expel any ink from flowing into this area.
  • Fig. 330 there is illustrated a side perspective view, partly in section of a single nozzle arrangement constructed in accordance with the principles as previously outlined with respect to Fig. 327 to Fig. 329.
  • the arrangement 4401 includes a nozzle plate 4405 which is formed around an ink supply chamber 4402 and includes an ink ejection nozzle 4403.
  • a series of leaf spring elements 4406-4408 are also provided which can be formed from the same material as the nozzle plate 4405.
  • a base plate 4409 also is provided for encompassing the coil 4410.
  • the wafer 4413 includes a series of slots 4414 for the wicking and flowing of ink into nozzle chamber 4402 with the nozzle chamber 4402 being interconnected via the slots with an ink supply channel 4412.
  • the slots 4414 are of a thin elongated form so as to provide for fluidic resistance to a rapid outflow of fluid from the chamber 4402.
  • the coil 4410 is conductive interconnected at a predetermined portion (not shown) with a lower CMOS layer for the control and driving of the coil 4410 and movement of base plate 4405.
  • the plate 4409 can be broken into two separate semi- circular plates and the coil 4410 can have separate ends connected through one of the semi circular plates through to a lower CMOS layer.
  • an array of ink jet nozzle devices can be formed at a time on a single silicon wafer so as to form multiple printheads.
  • the presently disclosed ink jet printing technology is potentially suited to a wide range of printing system including: colour and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with inbuilt pagewidth printers, portable colour and monochrome printers, colour and monochrome copiers, colour and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic "minilabs", video printers, PhotoCD printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.
  • the embodiments of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular inkjet printing technologies are unlikely to be suitable.
  • thermal inkjet The most significant problem with thermal inkjet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal inkjet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.
  • piezoelectric inkjet The most significant problem with piezoelectric inkjet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per print head, but is a major impediment to the fabrication of pagewide print heads with 19,200 nozzles.
  • the inkjet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications.
  • new inkjet technologies have been created.
  • the target features include:
  • inkjet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems
  • the print head is designed to be a monolithic 0.5 micron CMOS chip with MEMS post processing.
  • the print head is 100 mm long with a width which depends upon the inkjet type.
  • the smallest print head designed is IJ38, which is 0.35 mm wide, giving a chip area of 35 square mm.
  • the print heads each contain 19,200 nozzles plus data and control circuitry.
  • Ink is supplied to the back of the print head by injection molded plastic ink channels.
  • the molding requires 50 micron features, which can be created using a lithographically micromachined insert in a standard injection molding tool.
  • Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer.
  • the print head is connected to the camera circuitry by tape automated bonding.
  • inkjet configurations can readily be derived from these 45 examples by substituting alternative configurations along one or more of the 11 axes.
  • Most of the IJ01 to IJ45 examples can be made into inkjet print heads with characteristics superior to any currently available inkjet technology.
  • Suitable applications include: Home printers, Office network printers, Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide form at printers, Notebook PC printers, Fax machines, Industrial printing systems, Photocopiers, Photographic minilabs etc.
  • Actuator mechanism (applied only to selected ink drops)
  • the conductive plates may be in a comb or honeycomb structure, or stacked to increase the surface area and therefore the force.
  • Low power consumption ⁇ Difficult to operate electrostatic devices in an aqueous environment ⁇ IJ02, IJ04 ⁇ Many ink types can be used ⁇
  • the electrostatic actuator will normally need to be separated from the ink ⁇ Fast operation ⁇ Very large area required to achieve high forces ⁇ High voltage drive transistors may be required ⁇ Full pagewidth print heads are not competitive due to actuator size Electrostatic pull on ink A strong electric field is applied to the ink, whereupon electrostatic attraction accelerates the ink towards the print medium.
  • Examples are: Samarium Cobalt (SaCo) and magnetic materials in the neodymium iron boron family (NdFeB, NdDyFeBNb, NdDyFeB, etc) ⁇ Low power consumption ⁇ Complex fabrication ⁇ IJ07, IJ10 ⁇ Many ink types can be used ⁇ Permanent magnetic material such as Neodymium Iron Boron (NdFeB) required.
  • SaCo Samarium Cobalt
  • NdDyFeBNb neodymium iron boron family
  • NdDyFeB neodymium iron boron family
  • NdFeB Neodymium Iron Boron
  • Pigmented inks are usually infeasible Curie temperature (around 540 K)
  • Soft magnetic core electro-magnetic A solenoid induced a magnetic field in a soft magnetic core or yoke fabricated from a ferrous material such as electroplated iron alloys such as CoNiFe [1], CoFe, or NiFe alloys.
  • the soft magnetic material is in two parts, which are normally held apart by a spring. When the solenoid is actuated, the two parts attract, displacing the ink.
  • the actuator uses the giant magnetostrictive effect of materials such as Terfenol-D (an alloy of terbium, dysprosium and iron developed at the Naval Ordnance Laboratory, hence Ter-Fe-NOL). For best efficiency, the actuator should be pre-stressed to approx, 8 MPa.
  • a heater fabricated from a conductive material is incorporated.
  • a 50 ⁇ m long PTFE bend actuator with polysilicon heater and 15 mW power input can provide 180 ⁇ N force and 10 ⁇ m deflection.
  • Actuator motions include: ⁇ High force can be generated ⁇ Requires special material (e.g.
  • the conducting polymer expands when resistively heated. ⁇ High force can be generated ⁇ Requires special materials development (High CTE conductive polymer) ⁇ IJ24
  • conducting dopants include: ⁇ Very low power consumption ⁇ Requires a PTFE deposition process, which is not yet standard in ULSI fabs 1) Carbon nanotubes ⁇ Many ink types can be used ⁇ PTFE deposition cannot be followed with high temperature (above 350 °C) processing 2) Metal fibers ⁇ Simple planar fabrication ⁇ Evaporation and CVD deposition techniques cannot be used 3) Conductive polymers such as doped polythiophene ⁇ Small chip area required for each actuator ⁇ Pigmented inks may be infeasible, as pigment particles may jam the bend actuator 4) Carbon granules ⁇ Fast operation ⁇ High efficiency ⁇ CMOS compatible voltages and currents ⁇ Easy extension from single nozzles to pagewidth print heads Shape memory alloy A shape memory alloy such as TiNi (also known as Nitinol
  • Linear Magnetic Actuator Linear magnetic actuators Include the Linear Induction Actuator (LIA), Linear Permanent Magnet Synchronous Actuator (LPMSA), Linear Reluctance Synchronous Actuator (LRSA), Linear Switched Reluctance Actuator (LSRA), and the Linear Step
  • Linear Magnetic actuators can be constructed with high thrust, long travel, and high efficiency using planar semiconductor fabrication techniques ⁇ Requires unusual semiconductor materials such as soft magnetic alloys (e.g. CoNiFe [1]) ⁇ IJ12 ⁇ Long actuator travel is available ⁇ Some varieties also require permanent magnetic materials such as Neodymium iron boron (NdFeB) ⁇ Medium force is available ⁇ Requires complex multi-phase drive circuitry ⁇ Low voltage operation ⁇ High current operation
  • Actuator directly pushes ink This is the simplest mode of operation: the actuator directly supplies sufficient kinetic energy to expel the drop. The drop must have a sufficient velocity to overcome the surface tension. ⁇ Simple operation. ⁇ Drop repetition rate is usually limited to less than 10 KHz.
  • thermally induced surface tension reduction of pressurized ink Selected drops are separated from the ink in the nozzle by contact with the print medium or a transfer roller.
  • Very simple print head fabrication can be used ⁇ Requires close proximity between the print head and the print media or transfer roller ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇
  • the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇ May require two print heads printing alternate rows of the image ⁇
  • Monolithic color print heads are difficult Electrostatic pull on ink
  • the drops to be printed are selected by some manner (e.g. thermally induced surface tension reduction of pressurized ink). Selected drops are separated from the ink in the nozzle by a strong electric field.
  • Very simple print head fabrication can be used ⁇ Requires very high electrostatic field ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇
  • the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇ Electrostatic field for small nozzle sizes is above air breakdown ⁇ Tone-Jet ⁇ Electrostatic field may attract dust Magnetic pull on ink
  • the drops to be printed are selected by some manner (e.g. thermally induced surface tension reduction of pressurized ink). Selected drops are separated from the ink in the nozzle by a strong magnetic field acting on the magnetic ink.
  • Actuators with small travel can be used ⁇ Moving parts are required ⁇ IJ08, IJ15, IJ18, IJ19 ⁇ Actuators with small force can be used ⁇ Requires ink pressure modulator ⁇ High speed (>50 KHz) operation can be achieved ⁇ Friction and wear must be considered ⁇ Stiction is possible Pulsed magnetic pull on ink pusher A pulsed magnetic field attracts an 'ink pusher' at the drop ejection frequency. An actuator controls a catch, which prevents the ink pusher from moving when a drop is not to be ejected. ⁇ Extremely low energy operation is possible ⁇ Requires an external pulsed magnetic field ⁇ IJ10 ⁇ No heat dissipation problems ⁇ Requires special materials for both the actuator and the ink pusher ⁇ Complex construction
  • the ink pressure oscillation may be achieved by vibrating the print head, or preferably by an actuator in the ink supply.
  • Oscillating ink pressure can provide a refill pulse, allowing higher operating speed
  • Requires external ink pressure oscillator ⁇ Silverbrook, EP 0771 658 A2 and related patent applications
  • the actuators may operate with much lower energy
  • Acoustic lenses can be used to focus the sound on the nozzles
  • Acoustic reflections in the ink chamber must be designed for ⁇ IJ18, IJ19, IJ21 Media proximity
  • the print head is placed in close proximity to the print medium.
  • the actuator directly drives the drop ejection process.
  • Operational simplicity ⁇ Many actuator mechanisms have insufficient travel, or insufficient force, to efficiently drive the drop ejection process ⁇
  • Thermal Bubble Inkjet ⁇ IJ01, IJ02, IJ06, IJ07 ⁇ IJ16, IJ25, IJ26
  • Differential expansion bend actuator An actuator material expands more on one side than on the other. The expansion may be thermal, piezoelectric, magnetostrictive, or other mechanism.
  • ⁇ Provides greater travel in a reduced print head area ⁇ High stresses are involved ⁇ Piezoelectric ⁇
  • the bend actuator converts a high force low travel actuator mechanism to high travel, lower force mechanism.
  • Transient bend actuator A trilayer bend actuator where the two outside layers are identical. This cancels bend due to ambient temperature and residual stress. The actuator only responds to transient heating of one side or the other.
  • Each actuator need provide only a portion of the force required, ⁇ Increases the force available from an actuator ⁇ Actuator forces may not add linearly, reducing efficiency ⁇ IJ12, IJ13, IJ18, U20 ⁇ Multiple actuators can be positioned to control ink flow accurately ⁇ IJ22, IJ28, IJ42, U43 Linear Spring A linear spring is used to transform a motion with small travel and high force into a longer travel, lower force motion. ⁇ Matches low travel actuator with higher travel requirements ⁇ Requires print head area for the spring ⁇ IJ15 ⁇ Non-contact method of motion transformation Reverse spring The actuator loads a spring. When the actuator is turned off, the spring releases.
  • the actuator flexing is effectively converted from an even coiling to an angular bend, resulting in greater travel of the actuator tip.
  • Simple means of increasing travel of a bend actuator ⁇ Care must be taken not to exceed the elastic limit in the flexure area ⁇ IJ10, IJ19, U33 ⁇ Stress distribution is very uneven ⁇ Difficult to accurately model with finite element analysis Gears Gears can be used to increase travel at the expense of duration. Circular gears, rack and pinion, ratchets, and other gearing methods can be used.
  • Low force, low travel actuators can be used ⁇ Moving parts are required ⁇ IJ13 ⁇ Can be fabricated using standard surface MEMS processes ⁇ Several actuator cycles are required ⁇ More complex drive electronics ⁇ Complex construction ⁇ Friction, friction, and wear are possible Catch The actuator controls a small catch. The catch either enables or disables movement of an ink pusher that is controlled in a bulk manner. ⁇ Very low actuator energy ⁇ Complex construction ⁇ IJ10 ⁇ Very small actuator size ⁇ Requires external force ⁇ Unsuitable for pigmented inks Buckle plate A buckle plate can be used to change a slow actuator into a fast motion. It can also convert a high force, low travel actuator into a high travel, medium force motion.
  • acoustic lens is used to concentrate sound waves.
  • No moving parts Large area required ⁇ 1993 Hadimioglu et al, EUP 550,192 ⁇ Only relevant for acoustic ink jets ⁇ 1993 Elrod et al, EUP 572,220 Sharp conductive point A sharp point is used to concentrate an electrostatic field.
  • Simple construction ⁇ Difficult to fabricate using standard VLSI processes for a surface ejecting ink-jet ⁇ Tone-jet ⁇ Only relevant for electrostatic ink jets
  • Actuator motion Description Advantages Disadvantages: Volume expansion The volume of the actuator changes, pushing the ink in all directions. ⁇ Simple construction in the case of thermal ink jet ⁇ High energy is typically required to achieve volume expansion. This leads to thermal stress, cavitation, and kogation in thermal ink jet implementations ⁇ Hewlett-Packard Thermal Inkjet ⁇ Canon Bubblejet Linear, normal to chip surface The actuator moves in a direction normal to the print head surface.
  • the nozzle is typically in the line of movement ⁇ Efficient coupling to ink drops ejected normal to the surface ⁇
  • High fabrication complexity may be required to achieve perpendicular motion ⁇ IJ01, IJ02, IJ04, IJ07 ⁇ IJ11, IJ14 Linear, parallel to chip surface
  • the actuator moves parallel to the print head surface. Drop ejection may still be normal to the surface.
  • ⁇ Suitable for planar fabrication ⁇ Fabrication complexity ⁇ IJ12, U13, IJ15, U33, ⁇ Friction ⁇ IJ34, U35, IJ36 ⁇ Stiction Membrane push An actuator with a high force but small area is used to push a stiff membrane that is in contact with the ink.
  • the effective area of the actuator becomes the membrane area ⁇ Fabrication complexity ⁇ 1982 Howkins USP 4,459,601 ⁇ Actuator size ⁇ Difficulty of integration in a VLSI process
  • Rotary levers may be used to increase travel
  • Device complexity ⁇ IJ05, IJ08, IJ13, IJ28 ⁇ Small chip area requirements ⁇ May have friction at a pivot point Bend
  • the actuator bends when energized. This may be due to differential thermal expansion, piezoelectric expansion, magnetostriction, or other form of relative dimensional change. ⁇ A very small change in dimensions can be converted to a large motion.
  • the actuator ⁇ Requires the actuator to be made from at least two distinct layers, or to have a thermal difference across the actuator ⁇ 1970 Kyser et al USP 3,946,398 ⁇ 1973 Stemme USP 3,747,120 ⁇ IJ03, IJ09, IJ10, IJ19 ⁇ IJ23, IJ24, IJ25, U29 ⁇ IJ30, IJ31, IJ33, IJ34 ⁇ IJ35 Swivel
  • the actuator swivels around a central pivot. This motion is suitable where there are opposite forces applied to opposite sides of the paddle, e.g. Lorenz force.
  • the motion of the free end of the actuator ejects the ink.
  • Easy to fabricate as a planar VLSI process ⁇ Difficult to fabricate for non-planar devices ⁇ IJ17, IJ21, IJ34, IJ35 ⁇ Small area required, therefore low cost ⁇ Poor out-of-plane stiffness
  • Nozzle refill method Description Advantages Disadvantages Examples Surface tension After the actuator is energized, it typically returns rapidly to Its normal position. This rapid return sucks in air through the nozzle opening. The ink surface tension at the nozzle then exerts a small force restoring the meniscus to a minimum area.
  • Inlet filter is located between the ink inlet and the nozzle chamber.
  • the filter has a multitude of small holes or slots, restricting ink flow.
  • the filter also removes particles which may block the nozzle.
  • Nozzle Clearing method Description Advantages Disadvantages Examples Normal nozzle firing All of the nozzles are fired periodically, before the ink has a chance to dry. When not in use the nozzles are sealed (capped) against air. The nozzle firing is usually performed during a special clearing cycle, after first moving the print head to a cleaning station.
  • a high nozzle clearing capability can be achieved ⁇
  • High implementation cost if system does not already include an acoustic actuator ⁇ IJ08, IJ13, IJ15, IJ17 ⁇ May be implemented at very low cost in systems which already include acoustic actuators ⁇ IJ18, IJ19, IJ21
  • Nozzle clearing plate A microfabricated plate is pushed against the nozzles. The plate has a post for every nozzle.
  • the blade is usually fabricated from a flexible polymer, e.g. rubber or synthetic elastomer.
  • ⁇ Effective for planar print head surfaces ⁇ Difficult to use if print head surface is non-planar or very fragile ⁇ Many ink jet systems ⁇ Low cost ⁇ Requires mechanical parts ⁇ Blade can wear out in high volume print systems Separate ink boiling heater A separate heater is provided at the nozzle although the normal drop e-ection mechanism does not require it. The heaters do not require individual drive circuits, as many nozzles can be cleared simultaneously, and no imaging is required.
  • ⁇ Can be effective where other nozzle clearing methods cannot be used ⁇ Fabrication complexity ⁇ Can be used with many IJ series ink jets ⁇ Can be implemented at no additional cost in some inkjet configurations
  • Nozzle plate construction Description Advantages Disadvantages Examples Electroformed nickel A nozzle plate is separately fabricated from electroformed nickel, and bonded to the print head chip. ⁇ Fabrication simplicity ⁇ High temperatures and pressures are required to bond nozzle plate ⁇ Hewlett Packard Thermal inkjet ⁇ Minimum thickness constraints ⁇ Differential thermal expansion Laser ablated or drilled polymer Individual nozzle holes are ablated by an intense UV laser in a nozzle plate, which is typically a polymer such as polyimide or polysulphone ⁇ No masks required ⁇ Each hole must be individually formed ⁇ Canon Bubblejet ⁇ Can be quite fast ⁇ Special equipment required ⁇ 1988 Sercel et al., SPIE, Vol. 998 Excimer Beam Applications, pp.
  • Nozzles may be clogged by adhesive Glass capillaries Fine glass capillaries are drawn from glass tubing. This method has been used for making individual nozzles, but is difficult to use for bulk manufacturing of print heads with thousands of nozzles. ⁇ No expensive equipment required ⁇ Very small nozzle sizes are difficult to form ⁇ 1970 Zoltan USP 3,683,212 ⁇ Simple to make single nozzles ⁇ Not suited for mass production Monolithic, surface micro-machined using VLSI lithographic processes The nozzle plate is deposited as a layer using standard VLSI deposition techniques.
  • Nozzles are etched in the nozzle plate using VLSI lithography and etching.
  • High accuracy ( ⁇ 1 ⁇ m) ⁇ Requires sacrificial layer under the nozzle plate to form the nozzle chamber ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇ Monolithic ⁇ Surface may be fragile to the touch ⁇ IJ01, IJ02, U04, IJ11 ⁇ Low cost ⁇ IJ12, IJ17, IJ18, IJ20 ⁇ Existing processes can be used ⁇ IJ22, IJ24, IJ27, IJ28 ⁇ IJ29, IJ30, IJ31, U32 ⁇ IJ33, IJ34, IJ36, IJ37 ⁇ IJ38, IJ39, IJ40, IJ41 ⁇ IJ42, IJ43, IJ44 Monolithic, etched through substrate The nozzle plate is a buried etch stop in the wafer.
  • Nozzle chambers are etched in the front of the wafer, and the wafer is thinned from the back side. Nozzles are then etched in the etch stop layer.
  • High accuracy ( ⁇ 1 ⁇ m) ⁇ Requires long etch times ⁇ IJ03, IJ05, IJ06, IJ07 ⁇ Monolithic ⁇ Requires a support wafer ⁇ IJ08, IJ09, IJ10, IJ13 ⁇ Low cost ⁇ IJ14, IJ15, IJ16, IJ19 ⁇ No differential expansion ⁇ IJ21, IJ23, IJ25, IJ26 No nozzle plate Various methods have been tried to eliminate the nozzles entirely, to prevent nozzle clogging.
  • Edge Ink flow is along the surface of the chip, and ink drops are ejected from the chip edge.
  • Simple construction ⁇ Nozzles limited to edge ⁇ Canon Bubblejet ⁇ No silicon etching required ⁇ High resolution is difficult 1979 Endo et al GB patent 2,007,162 ⁇ Good heat sinking via substrate ⁇
  • Fast color printing requires one print head per color ⁇ Xerox heater-in-pit 1990 Hawkins et al USP 4,899,181 ⁇ Mechanically strong ⁇ Tone-jet ⁇ Ease of chip handing Surface ('roof shooter') Ink flow is along the surface of the chip, and ink drops are ejected from the chip surface, normal to the plane of the chip.
  • Aqueous, dye Water based ink which typically contains: water, dye, surfactant, humectant, and biocide.
  • Modem ink dyes have high water-fastness, light fastness ⁇ Environmentally friendly ⁇ Slow drying ⁇ Most existing inkjets ⁇ No odor ⁇ Corrosive ⁇ All U series ink jets ⁇ Bleeds on paper ⁇ Silverbrook, EP 0771 658 A2 and related patentapplications ⁇ May strikethrough ⁇ Cockles paper
  • Aqueous, pigment Water based ink which typically contains: water, pigment, surfactant, humectant, and biocide. Pigments have an advantage in reduced bleed, wicking and strikethrough.
  • ink jet printers A large number of new forms of ink jet printers have been developed to facilitate alternative ink jet technologies for the image processing and data distribution system. Various combinations of ink jet devices can be included in printer devices incorporated as part of the present invention.
  • the present application may utilize advanced semiconductor fabrication techniques in the construction of large arrays of ink jet printers.
  • the present application may utilize an ink delivery system to the ink jet head.
  • the present application may utilize advanced semiconductor microelectromechanical techniques in the construction of large arrays of ink jet printers.
  • the present application may include the utilization of a disposable camera system.
  • the present application may include the utilization of a data distribution system.
  • the present application may include the utilization of camera and data processing techniques such as an Artcam type device.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)

Claims (10)

  1. Agencement de buse de jet d'encre (4401) pour l'éjection d'encre depuis une buse de jet d'encre comprenant:
    un substrat (4413) ;
    une bobine conductrice (4410) pouvant fonctionner d'une manière commandée ;
    un actionneur magnétique mobile formant une chambre de buse d'encre (4402) entre ledit substrat (4413) et ledit actionneur (4405), ledit actionneur magnétique mobile comprenant en outre une buse d'éjection d'encre (4403) définie dans celui-ci ; dans lequel des variations dans le niveau d'excitation de ladite bobine conductrice (4410) provoquent un mouvement dudit actionneur magnétique (4405) d'une première position vers une deuxième position, provoquant ainsi une éjection en conséquence d'encre depuis la chambre de buse (4402) comme résultat de fluctuation dans la pression d'encre à l'intérieur de la chambre de buse,
    caractérisé en ce que :
    ladite bobine conductrice (4410) est formée sur ledit substrat (4413) ;
    ledit actionneur magnétique mobile (4405) entoure ladite bobine conductrice (4410).
  2. Agencement de buse de jet d'encre (4401) comme revendiqué dans la revendication 1 comprenant en outre un canal de fourniture d'encre (4412) interconnectant à ladite chambre de buse (4402) pour fournir à nouveau de l'encre à ladite chambre de buse.
  3. Agencement de buse de jet d'encre (4401) comme revendiqué dans l'une quelconque des revendications 1 ou 2 dans lequel ledit actionneur magnétique mobile (4405) est mobile d'une première position ayant un volume de chambre de buse expansé vers une deuxième position ayant un volume de chambre de buse contracté, par l'opération de ladite bobine conductrice (4410).
  4. Agencement de buse de jet d'encre (4401) comme revendiqué dans la revendication 3 comprenant en outre :
    au moins un élément élastique (4406) fixé audit actionneur magnétique mobile (4405), de manière à biaiser ledit actionneur magnétique mobile, dans sa position de repos, à ladite première position.
  5. Agencement de buse de jet d'encre (4401) comme revendiqué dans la revendication 4 dans lequel au moins un élément élastique (4406) comporte un ressort à lames.
  6. Agencement de buse de jet d'encre (4401) comme revendiqué dans la revendication 2 dans lequel ladite interconnexion comprend une série de fentes allongées (4414) gravées dans ledit substrat.
  7. Agencement de buse de jet d'encre (4401) comme revendiqué dans la revendication 1 dans lequel ledit substrat (4413) comporte une galette de silicium et ledit canal de fourniture d'encre (4412) est gravé à travers ladite galette.
  8. Agencement de buse de jet d'encre (4401) comme revendiqué dans l'une quelconque des revendications 1 à 7 dans laquelle une fente est définie entre ledit actionneur magnétique (4405) et ledit substrat (4413) et les parties de l'actionneur à proximité de ladite fente sont traitées de manière hydrophobe de manière à minimiser les effets de mèche à travers ladite fente.
  9. Agencement de buse de jet d'encre (4401) comme revendiqué dans l'une quelconque des revendication 1 à 8 comprenant en outre une plaque de base magnétique (4409) située entre ladite bobine conductrice (4410) et ledit substrat (4413).
  10. Agencement de buse de jet d'encre (4401) comme revendiqué dans la revendication 9 dans laquelle ledit actionneur magnétique (4405) et lesdites plaques de base (4409) enclavent sensiblement ladite bobine conductrice (4410)
EP04024062A 1997-07-15 1998-07-15 Buse de jet d'encre avec chambre-actuateur magnétique Expired - Lifetime EP1508449B1 (fr)

Applications Claiming Priority (73)

Application Number Priority Date Filing Date Title
AUPO7933A AUPO793397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation_apparatus (IJM10)
AUPO8044A AUPO804497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ07)
AUPO8066A AUPO806697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ01)
AUPO7936A AUPO793697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM02)
AUPO804197 1997-07-15
AUPO800497 1997-07-15
AUPO793597 1997-07-15
AUPO805397 1997-07-15
AUPO8076A AUPO807697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM16)
AUPO793397 1997-07-15
AUPO8067A AUPO806797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ16)
AUPO805497 1997-07-15
AUPO806197 1997-07-15
AUPO794997 1997-07-15
AUPO807097 1997-07-15
AUPO805697 1997-07-15
AUPO7949A AUPO794997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM12)
AUPO800197 1997-07-15
AUPO8069A AUPO806997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ11)
AUPO8059A AUPO805997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM14)
AUPO8072A AUPO807297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ02)
AUPO8071A AUPO807197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ04)
AUPO8070A AUPO807097A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ15)
AUPO7935A AUPO793597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM01)
AUPO807197 1997-07-15
AUPO7950A AUPO795097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM11)
AUPO795097 1997-07-15
AUPO8054A AUPO805497A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM05)
AUPO8001A AUPO800197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ17)
AUPO804797 1997-07-15
AUPO8047A AUPO804797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ05)
AUPO8035A AUPO803597A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ06)
AUPO8053A AUPO805397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM08)
AUPO806797 1997-07-15
AUPO8004A AUPO800497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ26)
AUPO805597 1997-07-15
AUPO806997 1997-07-15
AUPO803597 1997-07-15
AUPO807297 1997-07-15
AUPO804997 1997-07-15
AUPO805997 1997-07-15
AUPO806597 1997-07-15
AUPO8060A AUPO806097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM13)
AUPO8063A AUPO806397A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ08)
AUPO8041A AUPO804197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ25)
AUPO806097 1997-07-15
AUPO8077A AUPO807797A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM25)
AUPO807597 1997-07-15
AUPO793697 1997-07-15
AUPO8049A AUPO804997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ12)
AUPO804497 1997-07-15
AUPO8075A AUPO807597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM17)
AUPO8036A AUPO803697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ13)
AUPO8061A AUPO806197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM04)
AUPO807697 1997-07-15
AUPO8058A AUPO805897A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM26)
AUPO805897 1997-07-15
AUPO806397 1997-07-15
AUPO806697 1997-07-15
AUPO8073A AUPO807397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM15)
AUPO8056A AUPO805697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ10)
AUPO8065A AUPO806597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM06)
AUPO807797 1997-07-15
AUPO807397 1997-07-15
AUPO8048A AUPO804897A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ14)
AUPO804897 1997-07-15
AUPO8055A AUPO805597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM07)
AUPO803697 1997-07-15
AUPP3982A AUPP398298A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm45)
AUPP398398 1998-06-09
AUPP398298 1998-06-09
AUPP3983A AUPP398398A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij45)
EP98933350A EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP98933350A Division EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique

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Publication Number Publication Date
EP1508449A1 EP1508449A1 (fr) 2005-02-23
EP1508449B1 true EP1508449B1 (fr) 2007-01-24

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Family Applications (11)

Application Number Title Priority Date Filing Date
EP04024058A Expired - Lifetime EP1508444B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec plaques actionnées par force électrostatique
EP98933350A Expired - Lifetime EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique
EP04024063A Expired - Lifetime EP1510340B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston fenté
EP04024064A Expired - Lifetime EP1508445B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec actuateur à force Lorentz
EP04024057A Expired - Lifetime EP1508443B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston activé par force electro-magnétique
EP04024061A Expired - Lifetime EP1508448B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston conique magnétique
EP04024059A Expired - Lifetime EP1512535B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec piston actionné par force magnétique
EP04024065A Expired - Lifetime EP1510341B1 (fr) 1997-07-15 1998-07-15 buse à jet d'encre avec obturateur électromagnétique
EP04024066A Expired - Lifetime EP1508446B1 (fr) 1997-07-15 1998-07-15 Buse pour imprimante pour jet d'encre avec actionneur à solénoide
EP04024060A Expired - Lifetime EP1510339B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre actionnée par des impulsions magnétiques
EP04024062A Expired - Lifetime EP1508449B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec chambre-actuateur magnétique

Family Applications Before (10)

Application Number Title Priority Date Filing Date
EP04024058A Expired - Lifetime EP1508444B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec plaques actionnées par force électrostatique
EP98933350A Expired - Lifetime EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique
EP04024063A Expired - Lifetime EP1510340B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston fenté
EP04024064A Expired - Lifetime EP1508445B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec actuateur à force Lorentz
EP04024057A Expired - Lifetime EP1508443B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston activé par force electro-magnétique
EP04024061A Expired - Lifetime EP1508448B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston conique magnétique
EP04024059A Expired - Lifetime EP1512535B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec piston actionné par force magnétique
EP04024065A Expired - Lifetime EP1510341B1 (fr) 1997-07-15 1998-07-15 buse à jet d'encre avec obturateur électromagnétique
EP04024066A Expired - Lifetime EP1508446B1 (fr) 1997-07-15 1998-07-15 Buse pour imprimante pour jet d'encre avec actionneur à solénoide
EP04024060A Expired - Lifetime EP1510339B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre actionnée par des impulsions magnétiques

Country Status (4)

Country Link
EP (11) EP1508444B1 (fr)
JP (6) JP4170582B2 (fr)
AT (8) ATE289922T1 (fr)
WO (1) WO1999003680A1 (fr)

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Also Published As

Publication number Publication date
JP2007062381A (ja) 2007-03-15
EP1508443A2 (fr) 2005-02-23
JP4185538B2 (ja) 2008-11-26
WO1999003680A1 (fr) 1999-01-28
EP0999933A4 (fr) 2000-12-20
EP1508444B1 (fr) 2007-11-21
JP2001510107A (ja) 2001-07-31
JP2007062379A (ja) 2007-03-15
ATE289922T1 (de) 2005-03-15
ATE355972T1 (de) 2007-03-15
EP1508448A1 (fr) 2005-02-23
JP2007062383A (ja) 2007-03-15
JP2007062380A (ja) 2007-03-15
EP1508443A3 (fr) 2005-03-16
EP1510341A2 (fr) 2005-03-02
EP0999933A1 (fr) 2000-05-17
EP1508445A1 (fr) 2005-02-23
EP1510340A3 (fr) 2005-03-09
EP1512535A1 (fr) 2005-03-09
EP1510341B1 (fr) 2007-01-24
EP1510341A3 (fr) 2005-03-16
JP4173174B2 (ja) 2008-10-29
EP0999933B1 (fr) 2005-03-02
ATE381991T1 (de) 2008-01-15
EP1510339A2 (fr) 2005-03-02
EP1510340B1 (fr) 2007-01-24
JP4137964B2 (ja) 2008-08-20
JP4170582B2 (ja) 2008-10-22
EP1508445B1 (fr) 2007-01-31
JP4171037B2 (ja) 2008-10-22
EP1508444A2 (fr) 2005-02-23
EP1508449A1 (fr) 2005-02-23
EP1508446B1 (fr) 2007-01-10
ATE352420T1 (de) 2007-02-15
ATE353053T1 (de) 2007-02-15
EP1508443B1 (fr) 2007-03-07
JP4137965B2 (ja) 2008-08-20
EP1510340A2 (fr) 2005-03-02
JP2007062382A (ja) 2007-03-15
EP1512535B1 (fr) 2007-12-26
ATE352422T1 (de) 2007-02-15
EP1510339B1 (fr) 2007-01-24
ATE352423T1 (de) 2007-02-15
EP1508448B1 (fr) 2007-01-17
EP1508446A1 (fr) 2005-02-23
EP1508444A3 (fr) 2005-03-16
ATE352421T1 (de) 2007-02-15
EP1510339A3 (fr) 2005-03-09

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