EP1508445B1 - Buse de jet d'encre avec actuateur à force Lorentz - Google Patents

Buse de jet d'encre avec actuateur à force Lorentz Download PDF

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Publication number
EP1508445B1
EP1508445B1 EP04024064A EP04024064A EP1508445B1 EP 1508445 B1 EP1508445 B1 EP 1508445B1 EP 04024064 A EP04024064 A EP 04024064A EP 04024064 A EP04024064 A EP 04024064A EP 1508445 B1 EP1508445 B1 EP 1508445B1
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EP
European Patent Office
Prior art keywords
ink
actuator
nozzle
ink jet
drop
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP04024064A
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German (de)
English (en)
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EP1508445A1 (fr
Inventor
Kia Silverbrook
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Silverbrook Research Pty Ltd
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Silverbrook Research Pty Ltd
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Priority claimed from AUPO8036A external-priority patent/AUPO803697A0/en
Priority claimed from AUPO8041A external-priority patent/AUPO804197A0/en
Priority claimed from AUPO8065A external-priority patent/AUPO806597A0/en
Priority claimed from AUPO8077A external-priority patent/AUPO807797A0/en
Priority claimed from AUPO8076A external-priority patent/AUPO807697A0/en
Priority claimed from AUPO7950A external-priority patent/AUPO795097A0/en
Priority claimed from AUPO8004A external-priority patent/AUPO800497A0/en
Priority claimed from AUPO8072A external-priority patent/AUPO807297A0/en
Priority claimed from AUPO8067A external-priority patent/AUPO806797A0/en
Priority claimed from AUPO8059A external-priority patent/AUPO805997A0/en
Priority claimed from AUPO8035A external-priority patent/AUPO803597A0/en
Priority claimed from AUPO8069A external-priority patent/AUPO806997A0/en
Priority claimed from AUPO8061A external-priority patent/AUPO806197A0/en
Priority claimed from AUPO8053A external-priority patent/AUPO805397A0/en
Priority claimed from AUPO8049A external-priority patent/AUPO804997A0/en
Priority claimed from AUPO8044A external-priority patent/AUPO804497A0/en
Priority claimed from AUPO8066A external-priority patent/AUPO806697A0/en
Priority claimed from AUPO8063A external-priority patent/AUPO806397A0/en
Priority claimed from AUPO8047A external-priority patent/AUPO804797A0/en
Priority claimed from AUPO8073A external-priority patent/AUPO807397A0/en
Priority claimed from AUPO8055A external-priority patent/AUPO805597A0/en
Priority claimed from AUPO7935A external-priority patent/AUPO793597A0/en
Priority claimed from AUPO8075A external-priority patent/AUPO807597A0/en
Priority claimed from AUPO7949A external-priority patent/AUPO794997A0/en
Priority claimed from AUPO8071A external-priority patent/AUPO807197A0/en
Priority claimed from AUPO8058A external-priority patent/AUPO805897A0/en
Priority claimed from AUPO8001A external-priority patent/AUPO800197A0/en
Priority claimed from AUPO8054A external-priority patent/AUPO805497A0/en
Priority claimed from AUPO8070A external-priority patent/AUPO807097A0/en
Priority claimed from AUPO8056A external-priority patent/AUPO805697A0/en
Priority claimed from AUPO7933A external-priority patent/AUPO793397A0/en
Priority claimed from AUPO8048A external-priority patent/AUPO804897A0/en
Priority claimed from AUPO7936A external-priority patent/AUPO793697A0/en
Priority claimed from AUPO8060A external-priority patent/AUPO806097A0/en
Priority claimed from AUPP3983A external-priority patent/AUPP398398A0/en
Priority claimed from AUPP3982A external-priority patent/AUPP398298A0/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
    • B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17596—Ink pumps, ink valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/041—Electromagnetic transducer

Definitions

  • the present invention relates to the field of ink jet printing systems.
  • Ink jet printers themselves come in many different types.
  • the utilisation of a continuous stream ink in ink jet printing appears to date back to at least 1929 wherein US Patent No. 1941001 by Hansell discloses a simple form of continuous stream electro-static ink jet printing.
  • US Patent 3596275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also US Patent No. 3373437 by Sweet et al)
  • Piezo-electric ink jet printers are also one form of commonly utilized ink jet printing device. Piezo-electric systems are disclosed by Kyser et al. in US Patent No. 3946398 (1970) which utilises a diaphragm mode of operation, by Zolten in US Patent 3683212 (1970) which discloses a squeeze mode of operation of a piezo electric crystal, Stemme in US Patent No. 3747120 (1972) discloses a bend mode of piezo-electric operation, Howkins in US Patent No. 4459601 discloses a Piezo electric push mode actuation of the ink jet stream and Fischbeck in US 4584590 which discloses a sheer mode type of piezo-elechic transducer element
  • the ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in US Patent 4490728. Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media.
  • Printing devices utilising the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.
  • JP 2219655 describes an inkjet nozzle comprising a nozzle chamber having a thin wall moveable by a Lorentz force. Ink is supplied to the nozzle chamber via an aperture defined in a fixed sidewall of the chamber.
  • JP 4357039 describes an inkjet printing head, which ejects ink by a Lorentz force acting on a plurality of opposed tongue protrusions.
  • An opposed pair of tongue protrusion repel each when a current flows through them, which creates a pressure wave therebetween and causes ejection of ink.
  • JP 4129745 describes an inkjet nozzle comprising an internal diaphragm having associated wiring.
  • the diaphragm is displaceable, using a Lorentz force, by passing a current through the wiring, thereby causing ejection of ink from the nozzle.
  • a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction operation, durability and consumables.
  • mote esoteric techniques are also often utilized. These can include electroforming of nickel stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)), electro-discharge machining, laser ablation (U.S. Patent No. 5,208,604), micro-punching, etc.
  • the preferred embodiments and other embodiments will be discussed under separate headings with the heading including an IJ number for ease of reference.
  • the headings also include a type designator with T indicating thermal, S indicating shutter type and F indicating a field type.
  • An embodiment utilizes a Lorenz force on a current carrying wire in a magnetic field to actuate a diaphragm for the injection of ink from a nozzle chamber via a nozzle hole.
  • the magnetic field is static and is provided by a permanent magnetic yoke around the nozzles of an ink jet head.
  • Each ink jet nozzle 1510 includes a diaphragm 1511 of a corrugated form which is suspended over a nozzle chamber having a ink port 1513 for the injection of ink.
  • the diaphragm 1511 is constructed from a number of layers including a plane copper coil layer which consists of a large number of copper coils which form a circuit for the flow of electric current across the diaphragm 1511.
  • the electric current in the wires of the diaphragm coil section 1511 all Bowing in the same direction.
  • FIG. 283 is a perspective view of the current circuit utilised in the construction of a single ink jet nozzle, illustrating the corrugated structure of the traces in the diaphragm 1511 of Fig. 276.
  • a permanent magnetic yoke (not shown) is arranged so that the magnetic field, 1516, is in the plant of the chip's surface, perpendicular to the direction of current flow across the diaphragm coil 1511.
  • Fig. 277 there is illustrated a sectional view of the ink jet nozzle 1510 taken along the line A-A1 of Fig. 276 when the diaphragm 1511 has been activated by current flowing through coil wires 1514.
  • the diaphragm 1511 is forced generally in the direction of nozzle 1513 thereby resulting in ink within chamber 1518 being ejected out of port 1513.
  • the diaphragm 1511 and chamber 1518 are connected to an ink reservoir 1519 which, after the ejection of ink via port 1513, results in a refilling of chamber 1518 from ink reservoir 1519.
  • the movement of the diaphragm 1511 results from a Lorenz interaction between the coil current and the magnetic field.
  • the diaphragm 1511 is corrugated so that the diaphragm motion occurs as an elastic bending motion. This is important as a flat diaphragm may be prevented from flexing by tensile stress.
  • the drive transistor for that nozzle When data signals distributed on the print head indicate that a particular nozzle is to eject a drop of ink, the drive transistor for that nozzle is turned on. This energises the coil 1514, causing elastic deformation of the diaphragm 1511 downwards, ejecting ink. After approximately 3 ⁇ s, the coil current is turned off, and the diaphragm 1511 returns to its quiescent position. The diaphragm return 'sucks' some of the ink back into the nozzle, causing the ink ligament connecting the ink drop 1520 to the ink in the nozzle to thin. The forward velocity of the drop and backward velocity of the ink in the chamber 1518 are resolved by the ink drop 1520 breaking off from the ink in the nozzle.
  • the ink drop 1520 then continues towards the recording medium.
  • Ink refill of the nozzle chamber 1518 is via the two slots 1522, 1523 at either side of the diaphragm.
  • the ink refill is caused by the surface tension of the ink meniscus at the nozzle.
  • the corrugated diaphragm can be formed by depositing a resist layer 1530 on top of a sacrificial glass layer 1531.
  • the resist layer 1530 is exposed utilising a mask 1532 having a halftone pattern delineating the corrugations.
  • the resist 1530 contains the corruption pattern.
  • the resist layer 1530 and the sacrificial glass layer are then etched utilizing an etchant that erodes the resist 1530 at substantially the same rate as the sacrificial glass 1531.
  • a nitride passivation layer 1534 is deposited followed a copper layer 1535 which is patterned utilizing a coil mask.
  • a further nitride passivation layer 1536 follows on top of the copper layer 1535. Slots 1522, 1523 in the nitride layer at the side of the diaphragm can be etched (Fig. 276) and subsequently, the sacrificial glass layer can be etched away leaving the corrugated diaphragm.
  • Fig. 282 there is illustrated an exploded perspective view of the various layers of an ink jet nozzle 1510 which is constructed on a silicon water having a buried boron doped epitaxial layer 1540 which is back etched in a final processing step, including the etching of ink port 1513.
  • the silicon substrate 1541 is an anisotropically crystallographically etched so as to form the nozzle chamber structure.
  • CMOS layer 1542 On top of the silicon substrate layer 1541 is a CMOS layer 1542 which can comprise standard CMOS processing to form two level metal drive and control circuitry.
  • a first passivation layer which can comprise silicon nitride which protects the lower layers from any subsequent etching processes.
  • the copper layer 1545 having through holes eg. 1546 to the CMOS layer 1542 for the supply of current.
  • a second nitrate passivation layer 1547 which provides for protection of the copper layer from ink and provides insulation.
  • the nozzle 1510 can be formed as part of an array of nozzles formed on a single wafer. After construction, the wafer creating nozzles 1510 can be bonded to a second ink supply wafer having ink channels for the supply of ink such that the nozzle 1510 is effectively supplied with an ink reservoir on one side and ejects ink through the hole 1513 onto print media or the like on demand as required.
  • the nozzle chamber 1518 is formed using an anisotropic crystallographic etch of the silicon substrate. Etchant access to the substrate is via the slots 1522, 1523 at the sides of the diaphragm.
  • the device is manufactured on ⁇ 100> silicon (with a buried boron etch stop layer), but rotated 45° in relation to the ⁇ 010> and ⁇ 001> planes. Therefore, the ⁇ 111> planes which stop the crystallographic etch of the nozzle chamber form a 45° rectangle which superscribes the slot in the nitride layer. This etch will proceed quite slowly, due to limited access of etchant to the silicon. However, the etch can be performed at the same time as the bulk silicon etch which thins the wafer.
  • the drop firing rate is around 7 kHz.
  • the ink jet head is suitable for fabrication as a monolithic page wide print head. The illustration shows a single nozzle of a 1600 dpi print head in 'down shooter' configuration.
  • the presently disclosed ink jet printing technology is potentially suited to a wide range of printing system including: colour and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with inbuilt pagewidth printers, portable colour and monochrome printers, colour and monochrome copiers, colour and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copies, printers for digital photographic "minilabs", video printers, PhotoCD printers portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.
  • inventions of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular ink jet printing technologies are unlikely to be suitable:
  • thermal inkjet The most significant problem with thermal inkjet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal inkjet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.
  • piezoelectric inkjet The most significant problem with piezoelectric inkjet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per print head, but is a major impediment to the fabrication of pagewide print heads with 19,200 nozzles.
  • the inkjet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications.
  • new inkjet technologies have been created.
  • the target features include:
  • inkjet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems.
  • the print head is designed to be a monolithic 0.5 micron CMOS chip with MEMS post processing.
  • the print head is 100 mm long, with a width which depends upon the inkjet type.
  • the smallest print head designed is IJ38, which is 0.35 mm wide, giving a chip area of 35 square mm.
  • the print heads each contain 19,200 nozzles plus data and control circuitry.
  • Ink is supplied to the back of the print head by injection molded plastic ink channels.
  • the molding requires 50 micron features, which can be created using a lithographically micromachined insert in a standard injection molding tool.
  • Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer.
  • the print head is connected to the camera circuitry by tape automated bonding.
  • Actuator mechanism (18 types) Basic operation mode (7 types) Auxiliary mechanism (8 types) Actuator amplification or modification method (17 types) Actuator motion (19 types) Nozzle refill method (4 types) Method of restricting back-flow through inlet (10 types) Nozzle clearing method (9 types) Nozzle plate construction (9 types) Drop ejection direction (5 types) Ink type (7 types)
  • inkjet configurations can readily be derived from these 45 examples by substituting alternative configurations along one or more of the 11 axes.
  • Most of the IJ01 to IJ45 examples can be made into inkjet print heads with characteristics superior to any currently available inkjet technology.
  • Suitable applications include: Home printers, Office network printers, Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide format printers, Notebook PC printers, Fax machines, Industrial printing systems, Photocopiers, Photographic minilabs etc.
  • Actuator mechanism (applied only to selected ink drops)
  • Actuator Mechanism Description Advantages Disadvantages Examples Thermal bubble An electrothermal heater heats the ink to above boiling point, transferring significant heat to the aqueous ink. A bubble nucleates and quickly forms, expelling the ink. The efficiency of the process is low, with typically less than 0.05% of the electrical energy being transformed into kinetic energy of the drop.
  • Perovskite materials such as tin modified lead lantharium zirconate titanate exhibit large strains of up to 1% associated with the AFE to FE phase transition.
  • Low power consumption ⁇ Many ink types can be used ⁇ Fast operation ( ⁇ 1 ⁇ s) (PLZSnT) ⁇ Relatively high longitudinal strain ⁇ High efficiency ⁇ Electric field strength of around 3 V/ ⁇ m can be readily provided ⁇ Difficult to integrate with electronics ⁇ Unusual materials such as PLZSnT are required ⁇ Actuators require a large area ⁇ IJ04 Electrostatic plates Conductive plates are separated by a compressible or fluid dielectric (usually air). Upon application of a voltage, the plates attract each other and displace ink, causing drop ejection.
  • the conductive plates may be in a comb or honeycomb structure, or stacked to increase the surface area and therefore the force.
  • Low power consumption ⁇ Many ink types can be used ⁇ Fast operation ⁇ Difficult to operate electrostatic devices in an aqueous environment ⁇ The electrostatic actuator will normally need to be separated from the ink ⁇ Very large area required to achieve high forces ⁇ High voltage drive transistors may be required ⁇ Full pagewidth print heads are not competitive due to actuator size ⁇ IJ02, IJ04 Electrostatic pull an Ink A strong electric field is applied to the ink, whereupon electrostatic attraction accelerates the ink towards the print medium.
  • Examples are: Samarium Cobalt (SaCo) and magnetic materials in the neodymium iron boron family (NdFeB, NdDyFeBNb, NdDyFeB, etc) ⁇ Low power consumption ⁇ Many ink types can be used ⁇ Fast operation ⁇ High efficiency ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ Complex fabrication ⁇ Permanent magnetic material such as Neodymium Iron Boron (NdFeB) required.
  • SaCo Samarium Cobalt
  • NdDyFeBNb neodymium iron boron family
  • NdDyFeB neodymium iron boron family
  • NdFeB Neodymium Iron Boron
  • the actuator should be pre-stressed to approx. 8 MPa.
  • Many ink types can be used ⁇ Fast operation ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ High force is available ⁇ Force acts as a twisting motion ⁇ Unusual materials such as Terfenol-D are required ⁇ High local currents required ⁇ Copper metalization should be used for long electromigration lifetime and low resistivity ⁇ Pre-stressing may be required ⁇ Fischenbeck, USP 4,032,929 ⁇ IJ25 Surface tension reduction Ink under positive pressure is held in a nozzle by surface tension. The surface tension of the ink is reduced below the bubble threshold, causing the ink to egress from the nozzle.
  • a heater fabricated from a conductive material is incorporated.
  • a 50 ⁇ m long PTFE bend actuator with polysilicon heater and 15 mW power input can provide 180 ⁇ N force and 10 ⁇ m deflection.
  • Actuator motions include: 1) Bend 2) Push 3) Buckle 4) Rotate ⁇ High force can be generated ⁇ PTFE is a candidate for low dielectric constant insulation in ULSI ⁇ Very low power consumption ⁇ Many ink types can be used ⁇ Simple planar fabrication ⁇ Small chip area required for each actuator ⁇ Fast operation ⁇ High efficiency ⁇ CMOS compatible voltages and currents ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ Requires special material (e.g.
  • PTFE Requires a PTFE deposition process, which is not yet standard in ULSI fabs ⁇ PTFE deposition cannot be followed with high temperature (above 350 °C) processing ⁇ Pigmented inks may be infeasible, as pigment particles may jam the bend actuator ⁇ IJ09,IJ17,IJ18, IJ20 ⁇ IJ21, IJ22, IJ23, IJ24 ⁇ IJ27, IJ28, IJ29, IJ30 ⁇ IJ31, IJ42, IJ43, IJ44 Conductive polymer thermoelastic actuator A polymer with a high coefficient of thermal expansion (such as PTFE) is doped with conducting substances to increase its conductivity to about 3 orders of magnitude below that of copper.
  • the conducting polymer expands when resistively heated.
  • conducting dopants include: 1) Carbon nanotubes 2) Metal fibers 3) Conductive polymers such as doped polythiophene 4) Carbon granules ⁇ High force can be generated ⁇ Very low power consumption ⁇ Many ink types can be used ⁇ Simple planar fabrication ⁇ Small chip area required for each actuator ⁇ Fast operation ⁇ High efficiency ⁇ CMOS compatible voltages and currents ⁇ Easy extension from single nozzles to pagewidth print heads ⁇ Requires special materials development (High CTE conductive polymer) ⁇ Requires a PTFE deposition process, which is not yet standard in ULSI fabs ⁇ PTFE deposition cannot be followed with high temperature (above 350 °C) processing ⁇ Evaporation and CVD deposition techniques cannot be used ⁇ Pigmented inks may be infeasible, as pigment particles may jam the bend actuator ⁇ IJ24 Shape memory alloy A shape memory alloy such as TiNi (also known as Nitinol
  • Linear Magnetic Actuator Linear magnetic actuators include the Linear Induction Actuator (LIA), Linear Permanent Magnet Synchronous Actuator (LPMSA), Linear Reluctance Synchronous Actuator (LRSA), Linear Switched Reluctance Actuator (LSRA), and the Linear Step
  • Linear Magnetic actuators can be constructed with high thrust, long travel, and high efficiency using planar semiconductor fabrication techniques ⁇ Long actuator travel is available ⁇ Medium force is available ⁇ Low voltage operation ⁇ Requires unusual semiconductor materials such as soft magnetic alloys (e.g. CoNiFe [1]) ⁇ Some varieties also require permanent magnetic materials such as Neodymium iron boron (NdFeB) ⁇ Requires complex multi-phase drive circuitry ⁇ High current operation ⁇ IJ12
  • Actuator directly pushes ink This is the simplest mode of operation: the actuator directly supplies sufficient kinetic energy 10 expel the drop. The drop must have a sufficient velocity to overcome the surface tension. ⁇ Simple operation. ⁇ No external fields required ⁇ Satellite drops can be avoided if drop velocity is less than 4 m/s ⁇ Can be efficient, depending upon the actuator used ⁇ Drop repetition rate is usually limited to less than 10 kHz.
  • Satellite drops usually form if drop velocity is greater than 4.5 m/s ⁇
  • the drops to be printed are selected by some manner (e.g.
  • thermally induced surface tension reduction of pressurized ink Selected drops are separated from the ink in the nozzle by contact with the print medium or a transfer roller.
  • Very simple print head fabrication can be used ⁇
  • the drop selection means does not need to provide the energy required to separate the drop from the nozzle ⁇
  • Requires close proximity between the print head and the print media or transfer roller ⁇ May require two print heads printing alternate rows of the image ⁇
  • Monolithic color print heads are difficult ⁇ Silverbrook, EP 0771 658 A2 and related patent applications
  • Electrostatic pull on ink The drops to be printed are selected by some manner (e.g. thermally induced surface tension reduction of pressurized ink).
  • Very simple print head fabrication can be used ⁇
  • the drop selection means does not need to provide the energy requited to separate the drop from the nozzle ⁇
  • Requires magnetic ink ⁇
  • Ink colors other than black are difficult ⁇
  • Requires very high magnetic fields ⁇ Silverbrook, EP 0771 658 A2 and related patent applications Shutter
  • the actuator moves a shutter to block ink flow to the nozzle.
  • the ink pressure is pulsed at a multiple of the drop ejection frequency.
  • Actuators with small travel can be used
  • Actuators with small force can be used
  • High speed (>50 KHz) operation can be achieved
  • Moving parts are required
  • Requires ink pressure modulator ⁇ Friction and wear must be considered
  • Stiction is possible
  • Pulsed magnetic pull on ink pusher A pulsed magnetic field attracts an 'ink pusher' at the drop ejection frequency.
  • An actuator controls a catch, which prevents the ink pusher from moving when a drop is not to be ejected.
  • Extremely low energy operation is possible
  • No heat dissipation problems ⁇ Requires an external pulsed magnetic field
  • Requires special materials for both the actuator and the ink pusher ⁇ Complex construction ⁇ IJ10
  • the ink pressure oscillation may be achieved by vibrating the print head, or preferably by an actuator in the ink supply.
  • ⁇ Oscillating ink pressure can provide a refill pulse, allowing higher operating speed ⁇
  • the actuators may operate with much lower energy ⁇
  • Acoustic lenses can be used to focus the sound on the nozzles ⁇
  • Requires external ink pressure oscillator ⁇
  • Ink pressure phase and amplitude must be carefully controlled ⁇ Acoustic reflections in the ink chamber must be designed for ⁇ Silverbrook, EP 0771 658 A2 and related patent applications ⁇ IJ08, IJ13, IJ15, IJ17 ⁇ IJ18, IJ19, IJ21 Media proximity The print head is placed in close proximity to the print medium.
  • the actuator directly drives the drop ejection process.
  • Operational simplicity ⁇ Many actuator mechanisms have insufficient travel, or insufficient force, to efficiently drive the drop ejection process ⁇
  • Thermal Bubble inkjet ⁇ IJ01, IJ02, U06, U07 ⁇ IJ16, IJ25, IJ26
  • Differential expansion bend actuator An actuator material expands more on one side than on the other. The expansion may be thermal, piezoelectric, magnetostrictive, or other mechanism.
  • ⁇ Provides greater travel in a reduced print head area ⁇
  • the bend actuator converts a high force low travel actuator mechanism to high travel, lower force mechanism.
  • Transient bend actuator A trilayer bend actuator where the two outside layers are identical. This cancels bend due to ambient temperature and residual stress. The actuator only responds to transient heating of one side or the other.
  • ⁇ Increases the force available from an actuator ⁇
  • Multiple actuators can be positioned to control ink Bow accurately ⁇
  • Actuator forces may not add linearly, reducing efficiency ⁇ IJ12, IJ13, IJ18, IJ20 ⁇ IJ22, IJ28, U42, IJ43 Linear Spring
  • a linear spring is used to transform a motion with small travel and high force into a longer travel, lower force motion.
  • Matches low travel actuator with higher travel requirements ⁇
  • Non-contact method of motion transformation ⁇ Requires print head area for the spring ⁇ IJ15 Reverse spring The actuator loads a spring.
  • the actuator flexing is effectively converted from an even coiling to an angular bend, resulting in greater travel of the actuator tip.
  • ⁇ Simple means of increasing travel of a bend actuator ⁇ Care must be taken not to exceed the clastic limit in the flexure area ⁇ Stress distribution is very uneven ⁇ Difficult to accurately model with finite element analysis ⁇ IJ10, IJ19, IJ33 Gean Gears can be used to increase travel at the expense of duration. Circular gears, rack and pinion, ratchets, and other gearing methods can be used.
  • Low force, low travel actuators can be used ⁇ Can be fabricated using standard surface MEMS processes ⁇ Moving parts are required ⁇ Several actuator cycles are required ⁇ More complex drive electronics ⁇ Complex construction ⁇ Friction, friction, and wear are possible ⁇ IJ13 Catch The actuator controls a small catch. The catch either enables or disables movement of an ink pusher that is controlled in a bulk manner. ⁇ Very low actuator energy ⁇ Very small actuator size ⁇ Complex construction ⁇ Requires external force ⁇ Unsuitable for pigmented inks ⁇ IJ10 Buckle plate A buckle plate can be used to change a slow actuator into a fast motion. It can also convert a high force, low travel actuator into a high travel, medium force motion.
  • acoustic lens is used to concentrate sound Waves.
  • No moving parts Large area required ⁇ Only relevant for acoustic ink jets ⁇ 1993 Hadimioglu et al, EUP 550,192 ⁇ 1993 Elrod et al, BUP 572,220 Sharp conductive point A sharp point is used to concentrate an electrostatic field.
  • Simple construction ⁇ Difficult to fabricate using standard VLSI processes for a surface ejecting ink-jet ⁇ Only relevant for electrostatic ink jets ⁇ Tone-jet
  • Actuator motion Description Advantages Disadvantages: Volume expansion
  • the volume of the actuator changes, pushing the ink in all directions.
  • ⁇ Simple construction in the case of thermal ink jet ⁇ High energy is typically required to achieve volume expansion. This leads to thermal stress, cavitation, and kogation in thermal ink jet implementations ⁇ Hewlett-Packard Thermal Inkjet ⁇ Canon Bubblejet Linear, normal to chip surface
  • the actuator moves in a direction normal to the print head surface.
  • the nozzle is typically in the line of movement.
  • the effective area of the actuator becomes the membrane area ⁇ Fabrication complexity ⁇ Actuator size ⁇ Difficulty of integration in a VLSI process ⁇ 1982 Howkins USP 4,459,601 Rotary
  • the actuator causes the rotation of some element, such a grill or impeller ⁇ Rotary levers may be used to increase travel ⁇ Small chip area requirements ⁇
  • Device complexity ⁇ May have friction at a pivot point ⁇ IJ05, IJ08, IJ13, IJ28 Bend The actuator bends when energized. This may be due to differential thermal expansion, piezoelectric expansion, magnetostriction, or other form of relative dimensional change. ⁇ A very small change in dimensions can be converted to a large motion.
  • the actuator ⁇ Requires the actuator to be made from at least two distinct layers, or to have a thermal difference across the actuator ⁇ 1970 Kyser et al USP 3,946,398 ⁇ 1973 Stemme USP 3,747,120 ⁇ IJ03, IJ09, IJ10, IJ19 ⁇ IJ23, IJ24, IJ25, IJ29 ⁇ IJ30, IJ31, IJ33, IJ34 ⁇ IJ35 Swivel
  • the actuator swivels around a central pivot. This motion is suitable where there are opposite forces applied to opposite sides of the paddle, e.g. Lorenz force.
  • Nozzle refill method Description Advantages Disadvantages Examples Surface tension After the actuator is energized, it typically returns rapidly to its normal position. This return sucks in air through the nozzle opening. The ink surface tension at the nozzle then exerts a small force restoring the meniscus to a minimum area.
  • a filter is located between the ink inlet and the nozzle chamber.
  • the filter has a multitude of small holes or slots, restricting ink flow.
  • the filter also removes particles which may block the nozzle.
  • ⁇ Additional advantage of ink filtration ⁇ Ink filter may be fabricated with no additional process steps ⁇ Restricts refill rate ⁇ May result in complex construction ⁇ IJ04, IJ12, IJ24, IJ27 ⁇ IJ29, IJ30 Small inlet compared to nozzle The ink inlet channel to the nozzle chamber has a substantially smaller cross section than that of the nozzle, resulting in easier ink egress out of the nozzle than out of the inlet. ⁇ Design simplicity ⁇ Restricts refill rate ⁇ May result in a relatively large chip area ⁇ Only partially effective ⁇ IJ02, IJ37, IJ44 Inlet shutter A secondary actuator controls the position of a shutter, closing off the ink inlet when the main actuator is energized.
  • Nozzle Clearing method Description Advantages Disadvantages Examples Normal nozzle firing All of the nozzles are fired periodically, before the ink has a chance to dry. When not in use the nozzles are sealed (capped) against air. The nozzle firing is usually performed during a special clearing cycle, after first moving the print head to a cleaning station.
  • a high nozzle clearing capability can be achieved ⁇ May be implemented at very low cost in systems which already include acoustic actuators ⁇ High implementation cost if system does not already include an acoustic actuator ⁇ IJ08, IJ13, IJ15, IJ17 ⁇ IJ18, IJ19, IJ21 Nozzle clearing plate A microfabricated plate is pushed against the nozzles. The plate has a post for every nozzle.
  • Nozzle plate construction Description Advantages Disadvantages Examples Electroformed nickel A nozzle plate is separately fabricated from electroformed nickel, and bonded to the print head chip. ⁇ Fabrication simplicity ⁇ High temperatures and pressures are required to bond nozzle plate ⁇ Minimum thickness constraints ⁇ Differential thermal expansion ⁇ Hewlett Packard Thermal Inkjet Laser ablated or drilled polymer Individual nozzle boles are ablated by an intense UV laser in a nozzle plate, which is typically a polymer such as polyimide or polysulphone ⁇ No masks required ⁇ Can be quite fast ⁇ Some control over nozzle profile is possible ⁇ Equipment required is relatively low cost ⁇ Each hole must be individually formed ⁇ Special equipment required ⁇ Slow where there are many thousands of nozzles per print head ⁇ May produce thin burrs at exit holes ⁇ Canon Bubblejet ⁇ 1988 Sercel et al., SPIE, Vol.
  • Nozzle chambers are etched in the front of the wafer, and the wafer is thinned from the back side. Nozzles are then etched in the etch stop layer.
  • High accuracy ( ⁇ 1 ⁇ m) ⁇ Monolithic ⁇ Low cost ⁇ No differential expansion ⁇ Requires long etch times ⁇ Requires a support wafer ⁇ IJ03, IJ05, IJ06, IJ07 ⁇ IJ08, IJ09, IJ10, IJ13 ⁇ IJ14, IJ15, IJ16, IJ19 ⁇ IJ21, IJ23, IJ25, IJ26 No nozzle plate Various methods have been tried to eliminate the nozzles entirely, to prevent nozzle clogging.
  • Aqueous, dye Water based ink which typically contains: water, dye, surfactant, humectant, and biocide.
  • Modem ink dyes have high water- fastness, light fastness ⁇
  • Environmentally friendly ⁇ No odor ⁇ Slow drying ⁇ Corrosive ⁇ Bleeds on paper ⁇ May strikethrough ⁇ Cockles paper ⁇
  • Most existing inkjets ⁇ All IJ series ink jets ⁇ Silverbrook, EP 0771 658 A2 and related patent applications
  • Aqueous, pigment Water based ink which typically contains: water, pigment, surfactant, humectant, and biocide. Pigments have an advantage in reduced bleed, wicking and strikethrough.
  • ink jet printers A large number of new forms of ink jet printers have been developed to facilitate alternative ink jet technologies for the image processing and data distribution system. Various combinations of ink jet devices can be included in printer devices incorporated as part of the present invention.
  • the present application may utilize advanced semiconductor fabrication techniques in the construction of large arrays of ink jet printers.
  • the present application may utilize an ink delivery system to the ink jet head.
  • the present application may utilize advanced semiconductor microelectromechanical techniques in the construction of large arrays of ink jet printers.
  • the present application may include the utilization of a disposable camera system.
  • the present application may include the utilization of a data distribution system.
  • the present application may include the utilization of camera and data processing techniques such as an Artcam type device.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)

Claims (8)

  1. Agencement de buse de jet d'encre (1510), ladite buse comprenant :
    une chambre de buse (1518) ayant un port d'éjection d'encre (1513) et ayant une paroi mobile (1511) incluant une bobine électromagnétique (1514), ladite chambre de buse étant dans un champ magnétique tel que, suite à l'activation de ladite bobine électromagnétique, ladite paroi mobile subit une force de lorenz et est mise en mouvement de manière à résulter en l'éjection de l'encre de ladite chambre de buse par ledit port d'éjection d'encre,
    caractérisé en ce que la paroi mobile interconnecte ladite chambre de buse (1518) avec une chambre de fourniture d'encre (1519) et ladite chambre de buse est remplie à partir de ladite chambre de fourniture d'encre suite à ladite éjection d'encre.
  2. Un agencement de buse de jet d'encre (1510) tel que revendiqué dans la revendication 1 dans lequel l'activation provoque une courbure de ladite paroi mobile.
  3. Agencement de buse de jet d'encre (1510) comme revendiqué dans la revendication 1 ou 2 dans lequel ladite paroi mobile (1511) est ondulée pour fournir un mouvement de courbure élastique.
  4. Agencement de buse de jet d'encre (1510) comme revendiqué dans l'une quelconque des revendications 1 à 3, dans lequel le remplissage de ladite chambre de buse (1518) a eu lieu par deux fentes (1522, 1523) de chaque côté de ladite paroi mobile (1511).
  5. Agencement de buse de jet d'encre (1510) comme revendiqué dans les revendications 1 à 4 dans lequel ladite bobine électromagnétique (1514) comporte plusieurs couches.
  6. Agencement de buse de jet d'encre (1510) comme revendiqué dans l'une quelconque des revendications 1 à 5 dans lequel la bobine électromagnétique (1514) comporte substantiellement du cuivre.
  7. Agencement de buse de jet d'encre (1510) comme revendiqué dans l'une quelconque des revendications 1 à 6 dans lequel ledit champ magnétique est permanent.
  8. Agencement de buse de jet d'encre (1510) comme revendiqué dans la revendication 7 dans lequel ledit champ magnétique est fourni par des aimants néodyme fer bore.
EP04024064A 1997-07-15 1998-07-15 Buse de jet d'encre avec actuateur à force Lorentz Expired - Lifetime EP1508445B1 (fr)

Applications Claiming Priority (73)

Application Number Priority Date Filing Date Title
AUPO8076A AUPO807697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM16)
AUPO793597 1997-07-15
AUPO7950A AUPO795097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM11)
AUPO8004A AUPO800497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ26)
AUPO8041A AUPO804197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ25)
AUPO804997 1997-07-15
AUPO793397 1997-07-15
AUPO8067A AUPO806797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ16)
AUPO806197 1997-07-15
AUPO807397 1997-07-15
AUPO794997 1997-07-15
AUPO8059A AUPO805997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM14)
AUPO806397 1997-07-15
AUPO805997 1997-07-15
AUPO806097 1997-07-15
AUPO805697 1997-07-15
AUPO8035A AUPO803597A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ06)
AUPO8069A AUPO806997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ11)
AUPO806997 1997-07-15
AUPO793697 1997-07-15
AUPO8055A AUPO805597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM07)
AUPO795097 1997-07-15
AUPO805897 1997-07-15
AUPO807597 1997-07-15
AUPO8053A AUPO805397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM08)
AUPO806797 1997-07-15
AUPO8049A AUPO804997A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ12)
AUPO8044A AUPO804497A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ07)
AUPO803597 1997-07-15
AUPO8066A AUPO806697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ01)
AUPO8063A AUPO806397A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ08)
AUPO8047A AUPO804797A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ05)
AUPO805497 1997-07-15
AUPO8073A AUPO807397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM15)
AUPO8036A AUPO803697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ13)
AUPO805597 1997-07-15
AUPO8072A AUPO807297A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ02)
AUPO8065A AUPO806597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM06)
AUPO800497 1997-07-15
AUPO7949A AUPO794997A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM12)
AUPO807097 1997-07-15
AUPO805397 1997-07-15
AUPO8071A AUPO807197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ04)
AUPO8058A AUPO805897A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM26)
AUPO807297 1997-07-15
AUPO804197 1997-07-15
AUPO8001A AUPO800197A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ17)
AUPO803697 1997-07-15
AUPO8054A AUPO805497A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM05)
AUPO8070A AUPO807097A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ15)
AUPO8056A AUPO805697A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ10)
AUPO7933A AUPO793397A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation_apparatus (IJM10)
AUPO8048A AUPO804897A0 (en) 1997-07-15 1997-07-15 Image creation method and apparatus (IJ14)
AUPO7936A AUPO793697A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM02)
AUPO806597 1997-07-15
AUPO8060A AUPO806097A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM13)
AUPO8075A AUPO807597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM17)
AUPO807697 1997-07-15
AUPO804797 1997-07-15
AUPO7935A AUPO793597A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM01)
AUPO807797 1997-07-15
AUPO804497 1997-07-15
AUPO806697 1997-07-15
AUPO804897 1997-07-15
AUPO800197 1997-07-15
AUPO8061A AUPO806197A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM04)
AUPO807197 1997-07-15
AUPO8077A AUPO807797A0 (en) 1997-07-15 1997-07-15 A method of manufacture of an image creation apparatus (IJM25)
AUPP3983A AUPP398398A0 (en) 1998-06-09 1998-06-09 Image creation method and apparatus (ij45)
AUPP398298 1998-06-09
AUPP3982A AUPP398298A0 (en) 1998-06-09 1998-06-09 A method of manufacture of an image creation apparatus (ijm45)
AUPP398398 1998-06-09
EP98933350A EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP98933350A Division EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique

Publications (2)

Publication Number Publication Date
EP1508445A1 EP1508445A1 (fr) 2005-02-23
EP1508445B1 true EP1508445B1 (fr) 2007-01-31

Family

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Family Applications (11)

Application Number Title Priority Date Filing Date
EP04024059A Expired - Lifetime EP1512535B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec piston actionné par force magnétique
EP04024061A Expired - Lifetime EP1508448B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston conique magnétique
EP04024065A Expired - Lifetime EP1510341B1 (fr) 1997-07-15 1998-07-15 buse à jet d'encre avec obturateur électromagnétique
EP98933350A Expired - Lifetime EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique
EP04024060A Expired - Lifetime EP1510339B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre actionnée par des impulsions magnétiques
EP04024058A Expired - Lifetime EP1508444B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec plaques actionnées par force électrostatique
EP04024064A Expired - Lifetime EP1508445B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec actuateur à force Lorentz
EP04024066A Expired - Lifetime EP1508446B1 (fr) 1997-07-15 1998-07-15 Buse pour imprimante pour jet d'encre avec actionneur à solénoide
EP04024057A Expired - Lifetime EP1508443B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston activé par force electro-magnétique
EP04024063A Expired - Lifetime EP1510340B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston fenté
EP04024062A Expired - Lifetime EP1508449B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec chambre-actuateur magnétique

Family Applications Before (6)

Application Number Title Priority Date Filing Date
EP04024059A Expired - Lifetime EP1512535B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec piston actionné par force magnétique
EP04024061A Expired - Lifetime EP1508448B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston conique magnétique
EP04024065A Expired - Lifetime EP1510341B1 (fr) 1997-07-15 1998-07-15 buse à jet d'encre avec obturateur électromagnétique
EP98933350A Expired - Lifetime EP0999933B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre, actionne par un champ magnetique
EP04024060A Expired - Lifetime EP1510339B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre actionnée par des impulsions magnétiques
EP04024058A Expired - Lifetime EP1508444B1 (fr) 1997-07-15 1998-07-15 Imprimante à jet d'encre avec plaques actionnées par force électrostatique

Family Applications After (4)

Application Number Title Priority Date Filing Date
EP04024066A Expired - Lifetime EP1508446B1 (fr) 1997-07-15 1998-07-15 Buse pour imprimante pour jet d'encre avec actionneur à solénoide
EP04024057A Expired - Lifetime EP1508443B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston activé par force electro-magnétique
EP04024063A Expired - Lifetime EP1510340B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec piston fenté
EP04024062A Expired - Lifetime EP1508449B1 (fr) 1997-07-15 1998-07-15 Buse de jet d'encre avec chambre-actuateur magnétique

Country Status (4)

Country Link
EP (11) EP1512535B1 (fr)
JP (6) JP4170582B2 (fr)
AT (8) ATE352422T1 (fr)
WO (1) WO1999003680A1 (fr)

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Also Published As

Publication number Publication date
EP1510339B1 (fr) 2007-01-24
JP4137964B2 (ja) 2008-08-20
EP1510340A2 (fr) 2005-03-02
EP1512535B1 (fr) 2007-12-26
EP1508443A3 (fr) 2005-03-16
EP1508443B1 (fr) 2007-03-07
JP4173174B2 (ja) 2008-10-29
EP1508449A1 (fr) 2005-02-23
EP1508444A3 (fr) 2005-03-16
EP1510340A3 (fr) 2005-03-09
JP4170582B2 (ja) 2008-10-22
EP0999933A4 (fr) 2000-12-20
JP2007062380A (ja) 2007-03-15
JP2007062381A (ja) 2007-03-15
EP1510339A2 (fr) 2005-03-02
JP2007062382A (ja) 2007-03-15
WO1999003680A1 (fr) 1999-01-28
JP4185538B2 (ja) 2008-11-26
ATE353053T1 (de) 2007-02-15
EP1510341A3 (fr) 2005-03-16
EP1510341A2 (fr) 2005-03-02
ATE352421T1 (de) 2007-02-15
EP0999933A1 (fr) 2000-05-17
EP1508444B1 (fr) 2007-11-21
EP1508448A1 (fr) 2005-02-23
EP1508445A1 (fr) 2005-02-23
ATE289922T1 (de) 2005-03-15
JP2007062383A (ja) 2007-03-15
EP1510341B1 (fr) 2007-01-24
ATE352422T1 (de) 2007-02-15
EP0999933B1 (fr) 2005-03-02
EP1508443A2 (fr) 2005-02-23
ATE355972T1 (de) 2007-03-15
ATE352423T1 (de) 2007-02-15
ATE381991T1 (de) 2008-01-15
EP1508446A1 (fr) 2005-02-23
EP1508446B1 (fr) 2007-01-10
EP1510339A3 (fr) 2005-03-09
ATE352420T1 (de) 2007-02-15
JP2007062379A (ja) 2007-03-15
EP1508448B1 (fr) 2007-01-17
EP1508444A2 (fr) 2005-02-23
EP1512535A1 (fr) 2005-03-09
JP4171037B2 (ja) 2008-10-22
EP1508449B1 (fr) 2007-01-24
EP1510340B1 (fr) 2007-01-24
JP4137965B2 (ja) 2008-08-20
JP2001510107A (ja) 2001-07-31

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