JP4170582B2 - インクジェット印字ノズル装置 - Google Patents
インクジェット印字ノズル装置 Download PDFInfo
- Publication number
- JP4170582B2 JP4170582B2 JP2000502941A JP2000502941A JP4170582B2 JP 4170582 B2 JP4170582 B2 JP 4170582B2 JP 2000502941 A JP2000502941 A JP 2000502941A JP 2000502941 A JP2000502941 A JP 2000502941A JP 4170582 B2 JP4170582 B2 JP 4170582B2
- Authority
- JP
- Japan
- Prior art keywords
- ink
- layer
- nozzle
- etching
- nozzle chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007641 inkjet printing Methods 0.000 title claims abstract description 25
- 230000033001 locomotion Effects 0.000 claims abstract description 55
- 238000007599 discharging Methods 0.000 claims description 30
- 238000007639 printing Methods 0.000 claims description 14
- 239000000696 magnetic material Substances 0.000 claims description 9
- 230000007423 decrease Effects 0.000 claims description 6
- 230000005291 magnetic effect Effects 0.000 abstract description 179
- 239000012530 fluid Substances 0.000 abstract description 11
- 230000004913 activation Effects 0.000 abstract description 5
- 238000004891 communication Methods 0.000 abstract description 5
- 238000003860 storage Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 1011
- 239000000976 ink Substances 0.000 description 731
- 238000004519 manufacturing process Methods 0.000 description 388
- 235000012431 wafers Nutrition 0.000 description 306
- 238000005530 etching Methods 0.000 description 288
- 239000000463 material Substances 0.000 description 247
- 238000000034 method Methods 0.000 description 215
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 195
- 229910052710 silicon Inorganic materials 0.000 description 195
- 239000010703 silicon Substances 0.000 description 195
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 161
- 229910052802 copper Inorganic materials 0.000 description 160
- 239000010949 copper Substances 0.000 description 160
- 230000008569 process Effects 0.000 description 122
- 150000004767 nitrides Chemical class 0.000 description 117
- 229910052581 Si3N4 Inorganic materials 0.000 description 99
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 96
- 229910052796 boron Inorganic materials 0.000 description 93
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 92
- 239000000758 substrate Substances 0.000 description 91
- 239000011521 glass Substances 0.000 description 83
- 229910052751 metal Inorganic materials 0.000 description 77
- 239000002184 metal Substances 0.000 description 77
- 238000010276 construction Methods 0.000 description 69
- 239000004065 semiconductor Substances 0.000 description 44
- 229910052782 aluminium Inorganic materials 0.000 description 39
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 39
- 230000004907 flux Effects 0.000 description 38
- 238000009713 electroplating Methods 0.000 description 37
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 36
- 239000004810 polytetrafluoroethylene Substances 0.000 description 36
- 239000004020 conductor Substances 0.000 description 35
- 238000005516 engineering process Methods 0.000 description 34
- 230000007246 mechanism Effects 0.000 description 33
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 31
- 239000012071 phase Substances 0.000 description 30
- 238000010586 diagram Methods 0.000 description 29
- 238000012360 testing method Methods 0.000 description 29
- 238000002161 passivation Methods 0.000 description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 25
- 230000004888 barrier function Effects 0.000 description 24
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 24
- 238000005192 partition Methods 0.000 description 21
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 20
- 229920005591 polysilicon Polymers 0.000 description 20
- 230000005499 meniscus Effects 0.000 description 19
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 17
- 230000002209 hydrophobic effect Effects 0.000 description 17
- 238000012545 processing Methods 0.000 description 17
- 238000011161 development Methods 0.000 description 16
- 230000018109 developmental process Effects 0.000 description 16
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 16
- 230000009471 action Effects 0.000 description 15
- 238000005260 corrosion Methods 0.000 description 15
- 230000007797 corrosion Effects 0.000 description 15
- 230000009977 dual effect Effects 0.000 description 15
- 230000002441 reversible effect Effects 0.000 description 15
- 239000000377 silicon dioxide Substances 0.000 description 15
- 238000009826 distribution Methods 0.000 description 14
- 239000004033 plastic Substances 0.000 description 14
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 13
- 238000005452 bending Methods 0.000 description 13
- 239000010408 film Substances 0.000 description 13
- 239000003990 capacitor Substances 0.000 description 12
- 239000013078 crystal Substances 0.000 description 12
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 12
- 239000004642 Polyimide Substances 0.000 description 11
- 230000008859 change Effects 0.000 description 11
- 229920001721 polyimide Polymers 0.000 description 11
- -1 polytetrafluoroethylene Polymers 0.000 description 11
- 229910001329 Terfenol-D Inorganic materials 0.000 description 10
- 229910052681 coesite Inorganic materials 0.000 description 10
- 229910052906 cristobalite Inorganic materials 0.000 description 10
- 239000000806 elastomer Substances 0.000 description 10
- 229920001971 elastomer Polymers 0.000 description 10
- 229920000642 polymer Polymers 0.000 description 10
- 239000002356 single layer Substances 0.000 description 10
- 229910052682 stishovite Inorganic materials 0.000 description 10
- 229910052905 tridymite Inorganic materials 0.000 description 10
- 239000012790 adhesive layer Substances 0.000 description 9
- 238000013461 design Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 230000036961 partial effect Effects 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 8
- 229910000734 martensite Inorganic materials 0.000 description 8
- 238000010561 standard procedure Methods 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 7
- 229910001566 austenite Inorganic materials 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 7
- 229910052715 tantalum Inorganic materials 0.000 description 7
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 7
- ONRPGGOGHKMHDT-UHFFFAOYSA-N benzene-1,2-diol;ethane-1,2-diamine Chemical compound NCCN.OC1=CC=CC=C1O ONRPGGOGHKMHDT-UHFFFAOYSA-N 0.000 description 6
- 239000012212 insulator Substances 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000000926 separation method Methods 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 238000004804 winding Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000009499 grossing Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 230000009849 deactivation Effects 0.000 description 4
- 239000003302 ferromagnetic material Substances 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 229910001172 neodymium magnet Inorganic materials 0.000 description 4
- 229910001000 nickel titanium Inorganic materials 0.000 description 4
- 230000000284 resting effect Effects 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 230000009466 transformation Effects 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 238000011982 device technology Methods 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000000670 limiting effect Effects 0.000 description 3
- 230000005389 magnetism Effects 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- HLXZNVUGXRDIFK-UHFFFAOYSA-N nickel titanium Chemical compound [Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ti].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni].[Ni] HLXZNVUGXRDIFK-UHFFFAOYSA-N 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000007645 offset printing Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 229920006132 styrene block copolymer Polymers 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 230000037303 wrinkles Effects 0.000 description 2
- PJWVRCBRZWEQHL-UHFFFAOYSA-N 2,3-bis(2-hydroxyphenyl)phenol Chemical compound OC1=CC=CC=C1C1=CC=CC(O)=C1C1=CC=CC=C1O PJWVRCBRZWEQHL-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- HZEWFHLRYVTOIW-UHFFFAOYSA-N [Ti].[Ni] Chemical compound [Ti].[Ni] HZEWFHLRYVTOIW-UHFFFAOYSA-N 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- 238000000347 anisotropic wet etching Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 150000001638 boron Chemical class 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000005660 hydrophilic surface Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000007648 laser printing Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002715 modification method Methods 0.000 description 1
- 239000002991 molded plastic Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000012781 shape memory material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000012899 standard injection Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
- B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1648—Production of print heads with thermal bend detached actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17596—Ink pumps, ink valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2002/041—Electromagnetic transducer
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
Applications Claiming Priority (73)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPO8076A AUPO807697A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM16) |
AUPO8073A AUPO807397A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM15) |
AUPO8056A AUPO805697A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ10) |
AUPO8065A AUPO806597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM06) |
AUPO7950A AUPO795097A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM11) |
AUPO8077A AUPO807797A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM25) |
AUPO8041A AUPO804197A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ25) |
AUPO8072A AUPO807297A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ02) |
AUPO8061A AUPO806197A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM04) |
AUPO7935A AUPO793597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM01) |
AUPO8075A AUPO807597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM17) |
AUPO8067A AUPO806797A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ16) |
AUPO8060A AUPO806097A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM13) |
AUPO8048A AUPO804897A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ14) |
AUPO8059A AUPO805997A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM14) |
AUPO7933A AUPO793397A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation_apparatus (IJM10) |
AUPO8070A AUPO807097A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ15) |
AUPO8035A AUPO803597A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ06) |
AUPO8054A AUPO805497A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM05) |
AUPO8069A AUPO806997A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ11) |
AUPO8001A AUPO800197A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ17) |
AUPO8058A AUPO805897A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM26) |
AUPO8055A AUPO805597A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM07) |
AUPO8071A AUPO807197A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ04) |
AUPO7949A AUPO794997A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM12) |
AUPO7936A AUPO793697A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM02) |
AUPO8053A AUPO805397A0 (en) | 1997-07-15 | 1997-07-15 | A method of manufacture of an image creation apparatus (IJM08) |
AUPO8004A AUPO800497A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ26) |
AUPO8049A AUPO804997A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ12) |
AUPO8044A AUPO804497A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ07) |
AUPO8066A AUPO806697A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ01) |
AUPO8036A AUPO803697A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ13) |
AUPO8063A AUPO806397A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ08) |
AUPO8047A AUPO804797A0 (en) | 1997-07-15 | 1997-07-15 | Image creation method and apparatus (IJ05) |
AU8059 | 1998-06-09 | ||
AU8067 | 1998-06-09 | ||
AU7950 | 1998-06-09 | ||
AU8061 | 1998-06-09 | ||
AU8044 | 1998-06-09 | ||
AU8055 | 1998-06-09 | ||
AU7935 | 1998-06-09 | ||
AU7949 | 1998-06-09 | ||
AU8056 | 1998-06-09 | ||
AU8065 | 1998-06-09 | ||
AU8076 | 1998-06-09 | ||
AU8073 | 1998-06-09 | ||
AU8054 | 1998-06-09 | ||
AU8058 | 1998-06-09 | ||
AU8001 | 1998-06-09 | ||
AU8077 | 1998-06-09 | ||
AU8066 | 1998-06-09 | ||
AU8047 | 1998-06-09 | ||
AUPP3982A AUPP398298A0 (en) | 1998-06-09 | 1998-06-09 | A method of manufacture of an image creation apparatus (ijm45) |
AU8060 | 1998-06-09 | ||
AU8069 | 1998-06-09 | ||
AU8075 | 1998-06-09 | ||
AU8071 | 1998-06-09 | ||
AU8004 | 1998-06-09 | ||
AU7936 | 1998-06-09 | ||
AU8035 | 1998-06-09 | ||
AU8048 | 1998-06-09 | ||
AU3983 | 1998-06-09 | ||
AU7933 | 1998-06-09 | ||
AUPP3983A AUPP398398A0 (en) | 1998-06-09 | 1998-06-09 | Image creation method and apparatus (ij45) |
AU3982 | 1998-06-09 | ||
AU8041 | 1998-06-09 | ||
AU8036 | 1998-06-09 | ||
AU8049 | 1998-06-09 | ||
AU8063 | 1998-06-09 | ||
AU8070 | 1998-06-09 | ||
AU8072 | 1998-06-09 | ||
AU8053 | 1998-06-09 | ||
PCT/AU1998/000548 WO1999003680A1 (fr) | 1997-07-15 | 1998-07-15 | Jet d'encre actionne par un champ |
Related Child Applications (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006270743A Division JP4137964B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェットノズル装置 |
JP2006270831A Division JP4173174B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェットノズル装置 |
JP2006270310A Division JP4185538B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェット印字ノズル装置 |
JP2006270641A Division JP4171037B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェット印字ノズル装置 |
JP2006270974A Division JP4137965B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェットノズル装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001510107A JP2001510107A (ja) | 2001-07-31 |
JP2001510107A5 JP2001510107A5 (fr) | 2006-07-06 |
JP4170582B2 true JP4170582B2 (ja) | 2008-10-22 |
Family
ID=27586944
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000502941A Expired - Fee Related JP4170582B2 (ja) | 1997-07-15 | 1998-07-15 | インクジェット印字ノズル装置 |
JP2006270641A Expired - Fee Related JP4171037B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェット印字ノズル装置 |
JP2006270743A Expired - Fee Related JP4137964B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェットノズル装置 |
JP2006270831A Expired - Fee Related JP4173174B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェットノズル装置 |
JP2006270974A Expired - Fee Related JP4137965B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェットノズル装置 |
JP2006270310A Expired - Fee Related JP4185538B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェット印字ノズル装置 |
Family Applications After (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006270641A Expired - Fee Related JP4171037B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェット印字ノズル装置 |
JP2006270743A Expired - Fee Related JP4137964B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェットノズル装置 |
JP2006270831A Expired - Fee Related JP4173174B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェットノズル装置 |
JP2006270974A Expired - Fee Related JP4137965B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェットノズル装置 |
JP2006270310A Expired - Fee Related JP4185538B2 (ja) | 1997-07-15 | 2006-10-02 | インクジェット印字ノズル装置 |
Country Status (4)
Country | Link |
---|---|
EP (11) | EP1512535B1 (fr) |
JP (6) | JP4170582B2 (fr) |
AT (8) | ATE352422T1 (fr) |
WO (1) | WO1999003680A1 (fr) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7410243B2 (en) * | 1997-07-15 | 2008-08-12 | Silverbrook Research Pty Ltd | Inkjet nozzle with resiliently biased ejection actuator |
US6855264B1 (en) | 1997-07-15 | 2005-02-15 | Kia Silverbrook | Method of manufacture of an ink jet printer having a thermal actuator comprising an external coil spring |
US7753491B2 (en) | 1997-07-15 | 2010-07-13 | Silverbrook Research Pty Ltd | Printhead nozzle arrangement incorporating a corrugated electrode |
AUPP654598A0 (en) | 1998-10-16 | 1998-11-05 | Silverbrook Research Pty Ltd | Micromechanical device and method (ij46h) |
US7328975B2 (en) * | 1997-07-15 | 2008-02-12 | Silverbrook Research Pty Ltd | Injet printhead with thermal bend arm exposed to ink flow |
US7360871B2 (en) * | 1997-07-15 | 2008-04-22 | Silverbrook Research Pty Ltd | Inkjet chamber with ejection actuator between inlet and nozzle |
AUPP922399A0 (en) * | 1999-03-16 | 1999-04-15 | Silverbrook Research Pty Ltd | A method and apparatus (ij46p2) |
AUPP993099A0 (en) * | 1999-04-22 | 1999-05-20 | Silverbrook Research Pty Ltd | A micromechancial device and method(ij46p2b) |
AU2004202252B2 (en) * | 1999-04-22 | 2005-06-30 | Silverbrook Research Pty Ltd | Liquid ejection using a micro-electromechanical device |
WO2001002179A1 (fr) * | 1999-06-30 | 2001-01-11 | Silverbrook Research Pty Ltd | Essai d'un microdispositif electromecanique |
US6382779B1 (en) | 1999-06-30 | 2002-05-07 | Silverbrook Research Pty Ltd | Testing a micro electro- mechanical device |
AU761820B2 (en) * | 1999-06-30 | 2003-06-12 | Silverbrook Research Pty Ltd | Calibrating a micro electro-mechanical device |
AUPQ130999A0 (en) | 1999-06-30 | 1999-07-22 | Silverbrook Research Pty Ltd | A method and apparatus (IJ47V11) |
AU761821B2 (en) * | 1999-06-30 | 2003-06-12 | Silverbrook Research Pty Ltd | Fault detection in a micro electro-mechanical device |
AU761670B2 (en) * | 1999-06-30 | 2003-06-05 | Silverbrook Research Pty Ltd | Testing a micro electro-mechanical device |
ATE488817T1 (de) | 1999-09-17 | 2010-12-15 | Silverbrook Res Pty Ltd | Verfahren und system zur instruktion eines computers |
DE60039312D1 (de) * | 2000-04-18 | 2008-08-07 | Silverbrook Res Pty Ltd | Tintenstrahlausstosser |
US20050134660A1 (en) | 2002-08-19 | 2005-06-23 | Kia Silverbrook | Ink supply system for multiple ink printing |
US6428133B1 (en) | 2000-05-23 | 2002-08-06 | Silverbrook Research Pty Ltd. | Ink jet printhead having a moving nozzle with an externally arranged actuator |
WO2001089839A1 (fr) | 2000-05-23 | 2001-11-29 | Silverbrook Research Pty. Ltd. | Tete d'impression a jet d'encre comportant une buse mobile a actionneur externe |
US6557970B2 (en) | 2000-05-23 | 2003-05-06 | Silverbrook Research Pty Ltd | Nozzle guard for a printhead |
US6526658B1 (en) | 2000-05-23 | 2003-03-04 | Silverbrook Research Pty Ltd | Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator |
US6921153B2 (en) | 2000-05-23 | 2005-07-26 | Silverbrook Research Pty Ltd | Liquid displacement assembly including a fluidic sealing structure |
ATE367266T1 (de) | 2000-05-24 | 2007-08-15 | Silverbrook Res Pty Ltd | Herstellungsverfahren für einen tintenstrahldruckkopf mit bewegender düse und externem betätiger |
AU4732600A (en) | 2000-05-24 | 2001-12-03 | Silverbrook Res Pty Ltd | Fluidic seal for an ink jet nozzle assembly |
CN100417523C (zh) * | 2000-05-24 | 2008-09-10 | 西尔弗布鲁克研究有限公司 | 带有隔离的喷嘴控制器的喷墨打印头 |
US6364460B1 (en) | 2000-06-13 | 2002-04-02 | Chad R. Sager | Liquid delivery system |
IL153433A (en) * | 2000-06-30 | 2005-09-25 | Silverbrook Res Pty Ltd | Buckle resistant thermal bend actuators |
CN100335278C (zh) * | 2000-06-30 | 2007-09-05 | 西尔弗布鲁克研究有限公司 | 热弯作动器抗扭曲装置 |
AU2006225215B2 (en) * | 2000-06-30 | 2009-04-09 | Zamtec Limited | An ink ejector for an inkjet printer with an arm and paddle arrangement |
SG165980A1 (en) * | 2000-06-30 | 2010-11-29 | Silverbrook Res Pty Ltd | A micro-electromechanical actuator with buckle-resistant properties |
US6406129B1 (en) * | 2000-10-20 | 2002-06-18 | Silverbrook Research Pty Ltd | Fluidic seal for moving nozzle ink jet |
US7066577B2 (en) | 2004-07-19 | 2006-06-27 | Silverbrook Research Pty Ltd | Pressure enhancing formations in an ink jet printhead |
AU2004203502B2 (en) * | 2000-10-20 | 2004-09-30 | Zamtec Limited | Nozzle for an ink jet printhead |
US6623101B1 (en) * | 2000-10-20 | 2003-09-23 | Silverbrook Research Pty Ltd | Moving nozzle ink jet |
US6505916B1 (en) | 2000-10-20 | 2003-01-14 | Silverbrook Research Pty Ltd | Nozzle poker for moving nozzle ink jet |
US6863379B2 (en) | 2002-11-23 | 2005-03-08 | Silverbrook Research Pty Ltd | Ink jet printhead that includes nozzles having pressure-enhancing formations |
US6350015B1 (en) * | 2000-11-24 | 2002-02-26 | Xerox Corporation | Magnetic drive systems and methods for a micromachined fluid ejector |
US6561627B2 (en) * | 2000-11-30 | 2003-05-13 | Eastman Kodak Company | Thermal actuator |
US6572218B2 (en) * | 2001-01-24 | 2003-06-03 | Xerox Corporation | Electrostatically-actuated device having a corrugated multi-layer membrane structure |
US6508947B2 (en) * | 2001-01-24 | 2003-01-21 | Xerox Corporation | Method for fabricating a micro-electro-mechanical fluid ejector |
KR100757363B1 (ko) * | 2002-11-21 | 2007-09-11 | 실버브룩 리서치 피티와이 리미티드 | 유체씨일을 구비한 잉크 젯 노즐 조립체 |
JP3912267B2 (ja) * | 2002-11-29 | 2007-05-09 | ソニー株式会社 | 液滴吐出装置、検査用チップ処理装置、液滴吐出方法、検査用チップ処理方法 |
EP2082075B1 (fr) | 2006-09-08 | 2017-05-17 | Massachusetts Institute of Technology | Technologie de pulvérisation couche par couche automatisée |
KR100973979B1 (ko) * | 2008-08-22 | 2010-08-05 | 한국과학기술원 | 전자기력을 이용한 다축 구동기 |
KR102022392B1 (ko) | 2012-12-11 | 2019-11-05 | 삼성디스플레이 주식회사 | 노즐프린터 |
KR20140094957A (ko) | 2013-01-23 | 2014-07-31 | 삼성디스플레이 주식회사 | 노즐프린터용 노즐유닛 및 이를 구비하는 노즐프린터 |
CN104401129B (zh) * | 2014-11-21 | 2016-08-24 | 常俊环 | 大字符喷码机喷头 |
DE102015225726A1 (de) * | 2015-12-17 | 2017-06-22 | Ksb Aktiengesellschaft | Pumpe mit verformbarem Förderelement |
US10589980B2 (en) * | 2017-04-07 | 2020-03-17 | Texas Instruments Incorporated | Isolated protrusion/recession features in a micro electro mechanical system |
CN109144885B (zh) * | 2017-06-27 | 2022-04-29 | 北京忆恒创源科技股份有限公司 | 固态存储设备的垃圾回收方法与固态存储设备 |
GB2573117B (en) * | 2018-04-24 | 2021-02-17 | Adey Holdings 2008 Ltd | Magnetic filter |
KR20200085510A (ko) * | 2019-01-07 | 2020-07-15 | 에스케이하이닉스 주식회사 | 데이터 저장 장치 및 동작 방법과, 이를 위한 컨트롤러 |
CN110389317B (zh) * | 2019-06-03 | 2021-08-10 | 广州南盾通讯设备有限公司 | 一种对散序对象快速定位的低功耗柜体及定位方法 |
CN112652529B (zh) * | 2019-10-09 | 2022-03-22 | 长鑫存储技术有限公司 | 半导体器件及半导体器件的电容孔制备方法 |
CN112787237B (zh) * | 2021-01-16 | 2023-06-23 | 四川省盛源鑫智能电气有限责任公司 | 基于拨动机构的电气自动化控制柜 |
CN113607122B (zh) * | 2021-08-23 | 2022-11-25 | 中国建筑第八工程局有限公司 | 箱型钢板墙内部校正用的智能小车、设备及方法 |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4032929A (en) * | 1975-10-28 | 1977-06-28 | Xerox Corporation | High density linear array ink jet assembly |
DE2700010A1 (de) * | 1976-01-15 | 1977-07-21 | Xerox Corp | Geraet zur erzeugung von abtrennbaren fluessigkeitstroepfchen und antriebselemente dafuer |
JPS5559972A (en) * | 1978-10-28 | 1980-05-06 | Seiko Epson Corp | Ink jet recording head |
US4210920A (en) * | 1979-01-31 | 1980-07-01 | The Mead Corporation | Magnetically activated plane wave stimulator |
US4460905A (en) * | 1982-03-29 | 1984-07-17 | Ncr Corporation | Control valve for ink jet nozzles |
DE3245283A1 (de) * | 1982-12-07 | 1984-06-07 | Siemens AG, 1000 Berlin und 8000 München | Anordnung zum ausstoss von fluessigkeitstroepfchen |
DE3302617C2 (de) * | 1983-01-27 | 1987-04-23 | Domino Printing Sciences Plc, Cambridge | Farbspritzkopf |
JPS60131254A (ja) * | 1983-12-20 | 1985-07-12 | Ricoh Co Ltd | インクジエツト噴射ヘツド |
DE3445720A1 (de) * | 1984-12-14 | 1986-06-19 | Siemens AG, 1000 Berlin und 8000 München | Anordnung zum ausstoss von einzeltroepfchen aus austrittsoeffnungen eines tintenschreibkopfes |
SE447222B (sv) * | 1984-12-21 | 1986-11-03 | Swedot System Ab | Elektromagnetiskt manovrerbar ventilanordning, serskilt for alstring av droppar i en vetskestralskrivare |
US4618808A (en) * | 1985-01-30 | 1986-10-21 | International Business Machines Corporation | Electromagnetic actuator system using stepper motor with closed loop position sensing, electronic commutation and dynamic position and anomaly correction |
GB8507688D0 (en) * | 1985-03-25 | 1985-05-01 | Lane International Ltd John | Fluid applicator |
US4723131A (en) * | 1986-09-12 | 1988-02-02 | Diagraph Corporation | Printhead for ink jet printing apparatus |
JPH0234342A (ja) * | 1988-07-25 | 1990-02-05 | Seiko Epson Corp | インクジェットヘッド |
JPH02150353A (ja) * | 1988-11-30 | 1990-06-08 | Nec Home Electron Ltd | インクジェットヘッド |
GB8828047D0 (en) * | 1988-12-01 | 1989-01-05 | Willett Int Ltd | Method of operating valve |
JPH02219655A (ja) * | 1989-02-20 | 1990-09-03 | Sharp Corp | インクジェットヘッド |
JPH02273241A (ja) * | 1989-04-14 | 1990-11-07 | Ricoh Co Ltd | インクジェット記録装置 |
JPH0365349A (ja) * | 1989-08-03 | 1991-03-20 | Matsushita Electric Ind Co Ltd | インクジェットヘッド |
JP2839345B2 (ja) * | 1989-09-11 | 1998-12-16 | 松下電器産業株式会社 | インク記録装置 |
JPH04126255A (ja) * | 1990-09-18 | 1992-04-27 | Seiko Epson Corp | インクジェットヘッド |
US5534900A (en) * | 1990-09-21 | 1996-07-09 | Seiko Epson Corporation | Ink-jet recording apparatus |
JPH04129745A (ja) * | 1990-09-21 | 1992-04-30 | Seiko Epson Corp | インクジェットヘッド |
JPH04357039A (ja) * | 1991-06-03 | 1992-12-10 | Rohm Co Ltd | インクジェットプリントヘッド |
JPH04368851A (ja) * | 1991-06-17 | 1992-12-21 | Seiko Epson Corp | 磁場発生基板及びそれを用いたインクジェットヘッド |
GB9121851D0 (en) * | 1991-10-15 | 1991-11-27 | Willett Int Ltd | Device |
DE4139731A1 (de) * | 1991-12-03 | 1993-06-09 | Inno-Print Verpackungs- + Beschriftungssysteme Gmbh, 5060 Bergisch Gladbach, De | Tintenstrahl-matrixdrucker aus einzelelementen |
JPH05318724A (ja) * | 1992-05-19 | 1993-12-03 | Seikosha Co Ltd | インクジェット記録装置 |
JPH06106725A (ja) * | 1992-08-14 | 1994-04-19 | Ricoh Co Ltd | 静電変形型インクジェットによる記録方法及び静電変形型インクジェットヘッド |
JPH06134985A (ja) * | 1992-10-28 | 1994-05-17 | Ricoh Co Ltd | 1ドット多値が可能な記録装置及び1ドット多値が可能な記録方法 |
JPH06336011A (ja) * | 1993-05-31 | 1994-12-06 | Sharp Corp | プリントヘッド装置 |
EP0671271B1 (fr) * | 1994-03-09 | 2000-07-05 | Seiko Epson Corporation | Appareil d'enregistrement à jet d'encre |
US5828394A (en) * | 1995-09-20 | 1998-10-27 | The Board Of Trustees Of The Leland Stanford Junior University | Fluid drop ejector and method |
-
1998
- 1998-07-15 EP EP04024059A patent/EP1512535B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024061A patent/EP1508448B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024065A patent/EP1510341B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP98933350A patent/EP0999933B1/fr not_active Expired - Lifetime
- 1998-07-15 AT AT04024065T patent/ATE352422T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024060A patent/EP1510339B1/fr not_active Expired - Lifetime
- 1998-07-15 AT AT98933350T patent/ATE289922T1/de not_active IP Right Cessation
- 1998-07-15 JP JP2000502941A patent/JP4170582B2/ja not_active Expired - Fee Related
- 1998-07-15 AT AT04024064T patent/ATE353053T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024058A patent/EP1508444B1/fr not_active Expired - Lifetime
- 1998-07-15 AT AT04024060T patent/ATE352420T1/de not_active IP Right Cessation
- 1998-07-15 AT AT04024063T patent/ATE352421T1/de not_active IP Right Cessation
- 1998-07-15 AT AT04024057T patent/ATE355972T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024064A patent/EP1508445B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024066A patent/EP1508446B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024057A patent/EP1508443B1/fr not_active Expired - Lifetime
- 1998-07-15 AT AT04024059T patent/ATE381991T1/de not_active IP Right Cessation
- 1998-07-15 EP EP04024063A patent/EP1510340B1/fr not_active Expired - Lifetime
- 1998-07-15 EP EP04024062A patent/EP1508449B1/fr not_active Expired - Lifetime
- 1998-07-15 AT AT04024062T patent/ATE352423T1/de not_active IP Right Cessation
- 1998-07-15 WO PCT/AU1998/000548 patent/WO1999003680A1/fr active IP Right Grant
-
2006
- 2006-10-02 JP JP2006270641A patent/JP4171037B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270743A patent/JP4137964B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270831A patent/JP4173174B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270974A patent/JP4137965B2/ja not_active Expired - Fee Related
- 2006-10-02 JP JP2006270310A patent/JP4185538B2/ja not_active Expired - Fee Related
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4170582B2 (ja) | インクジェット印字ノズル装置 | |
US7934806B2 (en) | Inkjet nozzle incorporating piston actuator | |
JP4160250B2 (ja) | 熱動作インクジェット | |
US6171875B1 (en) | Method of manufacture of a radial back-curling thermoelastic ink jet printer | |
US6228668B1 (en) | Method of manufacture of a thermally actuated ink jet printer having a series of thermal actuator units | |
JP2003521389A5 (fr) | ||
US6612687B2 (en) | Moving nozzle ink jet printing mechanism | |
US6190931B1 (en) | Method of manufacture of a linear spring electromagnetic grill ink jet printer | |
AU2005242168B2 (en) | Ink jet nozzle with slotted sidewall and moveable vane | |
US8366243B2 (en) | Printhead integrated circuit with actuators proximate exterior surface | |
US8117751B2 (en) | Method of forming printhead by removing sacrificial material through nozzle apertures | |
EP1647402B1 (fr) | Dispositif de buse de jet d'encre avec mécanisme d'actuation dans la chambre entre buse et ravitaillement d'encre | |
EP1652671A1 (fr) | Chambre de buse de jet d'encre avec deux trous d'éjection de liquide et avec pagaie mobile |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20050711 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050714 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050714 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20050711 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20050711 |
|
A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20060515 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080117 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080129 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080424 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080805 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080807 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110815 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120815 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120815 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130815 Year of fee payment: 5 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees | ||
R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |