EP1288502B1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

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Publication number
EP1288502B1
EP1288502B1 EP02017820A EP02017820A EP1288502B1 EP 1288502 B1 EP1288502 B1 EP 1288502B1 EP 02017820 A EP02017820 A EP 02017820A EP 02017820 A EP02017820 A EP 02017820A EP 1288502 B1 EP1288502 B1 EP 1288502B1
Authority
EP
European Patent Office
Prior art keywords
stator
housing
turbomolecular pump
pump according
housing component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02017820A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1288502A2 (de
EP1288502A3 (de
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1288502A2 publication Critical patent/EP1288502A2/de
Publication of EP1288502A3 publication Critical patent/EP1288502A3/de
Application granted granted Critical
Publication of EP1288502B1 publication Critical patent/EP1288502B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of the first protection claim.
  • Turbomolecular pump type vacuum pumps typically consist of a number of stages, each having rotor and stator disks arranged alternately one behind the other.
  • the rotor disks must rotate at high speed.
  • the drive energy required for this purpose is partly transformed into kinetic energy. A large part of it is released as heat loss.
  • Other unwanted heat quantities are released by storage (mechanical losses due to friction in ball bearings or electrical losses in magnetic bearings) or in the compression of gases.
  • stator and stator discs face each other over a large area, in this way a large part of the heat can be transferred from the rotor to the stator disks.
  • the stator discs are connected to the housing via spacers ( DE-OS 3722 164 ). Since here only minimal Resulting contact surfaces, the heat transfer from the stator to the housing and thus insufficient to the outside.
  • Turbomolecular pumps are increasingly being used in processes such. As chemical processes or in semiconductor manufacturing, where large amounts of process gases incurred. These gases are usually easily condensable, and all the more so at low temperatures. This results in substantial liquid and solid deposits and, ultimately, corrosion and etching which can destroy individual components or the entire pump.
  • the U.S. Patent 6,019,581 shows a turbomolecular pump with a housing surrounding the stator. Rotor and stator are designed on the inlet side as turbomolecular stages and on the vacuum side as Siegbahn stages.
  • a cooling water channel either in the support ring of the stator or in the housing component contributes to increasing the heat flow.
  • a heater can be accommodated very space-saving in the housing component or in the support ring.
  • the corresponding component is thermally insulated from the rest of the housing. A heating of the critical areas of the pump is possible without large heat conduction losses.
  • the support ring of the stator can be designed both as an inner and as an outer ring. This makes it possible to adapt the inventive arrangement different designs of the overall pump.
  • a gas friction pump is shown.
  • the housing 1 is provided with a suction opening 2 and a gas outlet opening 3.
  • the rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7.
  • the rotor disks 12 are fixed. These are provided with a pump-active structure and effect with the stator discs 14, which are also provided with a pump-active structure, the pumping effect.
  • Fig. 2 shows a section Fig. 1 ,
  • the higher pressure range facing stator 20 has an inner support ring 22. This is a large area connected to the housing member 24.
  • a cooling water channel 26 is incorporated.
  • this is mounted so that it makes contact with the Support ring 22 of the stator 20 has.
  • a cooling water channel can be located directly in the support ring 22 of the stator 20.
  • FIG. 3 an embodiment is shown in which the stator 20 and the housing member 24 are integrally formed.
  • the Fig. 4 shows an embodiment equipped with heater 30 embodiment.
  • the housing component is separated by a thermal insulation 32 from the rest of the housing.
  • An integral formation of stator 20 and housing member 24 is also possible according to the invention here.
  • a stator disc in which the support ring 23 is formed as an outer ring.
  • the support ring 23 is formed as an outer ring.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP02017820A 2001-08-30 2002-08-08 Turbomolekularpumpe Expired - Lifetime EP1288502B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10142567 2001-08-30
DE10142567A DE10142567A1 (de) 2001-08-30 2001-08-30 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1288502A2 EP1288502A2 (de) 2003-03-05
EP1288502A3 EP1288502A3 (de) 2003-10-29
EP1288502B1 true EP1288502B1 (de) 2010-03-17

Family

ID=7697165

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02017820A Expired - Lifetime EP1288502B1 (de) 2001-08-30 2002-08-08 Turbomolekularpumpe

Country Status (4)

Country Link
US (1) US6824357B2 (ja)
EP (1) EP1288502B1 (ja)
JP (1) JP4262457B2 (ja)
DE (2) DE10142567A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US9279417B2 (en) 2013-04-26 2016-03-08 Sol-Electrica, Llc Solar power system
JP6735058B2 (ja) * 2013-07-31 2020-08-05 エドワーズ株式会社 真空ポンプ
DE102013220879A1 (de) * 2013-10-15 2015-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN116591994A (zh) * 2023-07-05 2023-08-15 合肥昱驰真空技术有限公司 一种新型磁悬浮复合分子泵

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
DE2757599A1 (de) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
JPH0689756B2 (ja) * 1986-05-02 1994-11-14 株式会社日立製作所 ドライ真空ポンプ
JPS63109299A (ja) * 1986-10-27 1988-05-13 Hitachi Ltd タ−ボ真空ポンプ
JPS63266190A (ja) * 1987-04-24 1988-11-02 Hitachi Ltd タ−ボ真空ポンプ
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
JPH01167497A (ja) * 1987-12-23 1989-07-03 Hitachi Ltd 真空ポンプ
JP2741863B2 (ja) * 1988-04-15 1998-04-22 株式会社日立製作所 ターボ真空ポンプ
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
FR2647853A1 (fr) * 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
JPH03124998A (ja) * 1989-10-06 1991-05-28 Hitachi Ltd ドライ真空ポンプ
JPH04112997A (ja) * 1990-09-03 1992-04-14 Matsushita Electric Ind Co Ltd 真空装置
EP0646220B1 (de) * 1992-06-19 1997-01-08 Balzers und Leybold Deutschland Holding Aktiengesellschaft Gasreibungsvakuumpumpe
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
US6019581A (en) 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
DE19702456B4 (de) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP3452468B2 (ja) * 1997-08-15 2003-09-29 株式会社荏原製作所 ターボ分子ポンプ
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen
DE19951954A1 (de) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE19956015A1 (de) * 1999-11-22 2001-05-23 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP2002155891A (ja) * 2000-11-22 2002-05-31 Seiko Instruments Inc 真空ポンプ
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
DE50214282D1 (de) 2010-04-29
US20030044270A1 (en) 2003-03-06
JP2003083282A (ja) 2003-03-19
JP4262457B2 (ja) 2009-05-13
DE10142567A1 (de) 2003-03-20
US6824357B2 (en) 2004-11-30
EP1288502A2 (de) 2003-03-05
EP1288502A3 (de) 2003-10-29

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