EP1288502A2 - Turbomolekularpumpe - Google Patents
Turbomolekularpumpe Download PDFInfo
- Publication number
- EP1288502A2 EP1288502A2 EP02017820A EP02017820A EP1288502A2 EP 1288502 A2 EP1288502 A2 EP 1288502A2 EP 02017820 A EP02017820 A EP 02017820A EP 02017820 A EP02017820 A EP 02017820A EP 1288502 A2 EP1288502 A2 EP 1288502A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- stator
- housing
- turbomolecular pump
- pump according
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
Definitions
- the invention relates to a turbomolecular pump according to the preamble of FIG. Protection claim.
- Vacuum pumps of the turbomolecular pump type usually consist of a number of stages, each having rotor and stator discs, the are arranged alternately one behind the other.
- the rotor disks must revolve at high speed.
- the drive energy required for this purpose is partly transformed into kinetic energy.
- a big part of it will be released as heat loss.
- More unwanted amounts of heat are released by the storage (mechanical losses due to friction in ball bearings or electrical losses in magnetic bearings) or in the compression of gases. Thereby There is a risk of overheating of critical components. This is essential be prevented. For this it is necessary to provide an effective heat dissipation.
- stator and stator discs are large In this way, a large part of the heat from the rotor can rise up the stator discs are transmitted.
- the stator disks are via spacer rings connected to the housing (DE-OS 3722 164). Since here only minimal Resulting contact surfaces, the heat transfer from the stator discs on the housing and thus insufficient to the outside.
- Turbomolecular pumps are increasingly being used in processes such.
- a cooling water channel either in the support ring of the stator or in the housing component contributes to increasing the heat flow.
- the stator can in the housing component or in the support ring a Heating can be accommodated very space-saving.
- the corresponding component is thermally insulated from the rest of the housing. A heating up The critical areas of the pump is thus possible without large heat conduction losses.
- the supporting ring of the stator disc can be used both as an inner and as an outer ring be educated. This makes it possible, the inventive arrangement adapt to different designs of the overall pump.
- Fig. 1 shows the overall view of a turbomolecular pump with the inventive Arrangement.
- FIGS. 2 to 5 each show a detail of FIG. 1 with different embodiments the invention.
- a gas friction pump is shown.
- the housing 1 is provided with a suction opening 2 and a gas outlet opening 3 is provided.
- the rotor shaft 4 is in Bearings 5 and 6 fixed and is driven by the motor 7.
- On the rotor shaft 4 the rotor disks 12 are fixed. These are with a pump active structure provided and effect with the stator discs 14, which also with a pump active structure are provided, the pumping effect.
- Fig. 2 shows a detail of Fig. 1 with the arrangement according to the invention.
- the higher pressure range facing stator 20 has an inner support ring 22. This is a large area connected to the housing member 24.
- a cooling water channel 26 is incorporated.
- this is mounted so that it has contact with the support ring 22 of the stator 20.
- a cooling water channel can be located directly in the support ring 22 of the stator 20.
- FIG. 3 an embodiment is shown in which the stator 20 and the housing member 24 are integrally formed.
- FIG. 4 shows an embodiment equipped with heater 30.
- the housing component For a targeted thermal treatment is the housing component by a thermal insulation 32nd separated from the rest of the housing.
- a one-piece design of stator 20th and housing member 24 is also possible according to the invention here.
- a stator in which the Support ring 23 is formed as an outer ring.
- the Support ring 23 is formed as an outer ring.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Description
Die dem höheren Druckbereich zugewandte Statorscheibe 20 weist einen inneren Tragring 22 auf. Dieser ist großflächig mit dem Gehäusebauteil 24 verbunden. Hierin ist in einer weiteren Ausgestaltungsform der Erfindung ein Kühlwasserkanal 26 eingearbeitet. Vorteilhafter Weise ist dieser so angebracht, dass er Kontakt mit dem Tragring 22 der Statorscheibe 20 hat. Alternativ kann sich ein Kühlwasserkanal direkt in dem Tragring 22 der Statorscheibe 20 befinden.
Claims (8)
- Turbomolekularpumpe mit einem Gehäuse (1), in welchem Rotor- (12) und Statorscheiben (14) abwechselnd hintereinander angeordnet sind, wobei diese mit auf Tragringen (16, 18) angebrachten Schaufeln versehen sind, dadurch gekennzeichnet, dass die dem höheren Druckbereich zugewandte Statorscheibe (20) mit ihrem Tragring (22) großflächig mit einem Gehäusebauteil (24) verbunden ist.
- Turbomolekularpumpe mit einem Gehäuse (1), in welchem Rotor- (12) und Statorscheiben (14) abwechselnd hintereinander angeordnet sind, wobei diese mit auf Tragringen (16, 18) angebrachten Schaufeln versehen sind, dadurch gekennzeichnet, dass der Tragring (22) der dem höheren Druckbereich zugewandten Statorscheibe (20) und das Gehäusebauteil (24) einstückig ausgebildet sind.
- Turbomolekularpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass das Gehäusebauteil (24) mit einem Kühlwasserkanal (26) versehen ist.
- Turbomolekularpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die dem höheren Druckbereich zugewandte Statorscheibe (20) mit einem Kühlwasserkanal (26) versehen ist.
- Turbomolekularpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass das Gehäusebauteil (24) mit einer Heizung (30) versehen ist.
- Turbomolekularpumpe nach Anspruch 5, dadurch gekennzeichnet, dass das Gehäusebauteil (24) vom übrigen Gehäuse (1) thermisch isoliert ist.
- Turbomolekularpumpe nach einem der Ansprüche 1 - 6, dadurch gekennzeichnet, dass der Tragring der Statorscheibe (20) als Innenring (22) ausgebildet ist.
- Turbomolekularpumpe nach einem der Ansprüche 1 - 6, dadurch gekennzeichnet, dass der Tragring der Statorscheibe (20) als Außenring (23) ausgebildet ist.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10142567A DE10142567A1 (de) | 2001-08-30 | 2001-08-30 | Turbomolekularpumpe |
DE10142567 | 2001-08-30 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1288502A2 true EP1288502A2 (de) | 2003-03-05 |
EP1288502A3 EP1288502A3 (de) | 2003-10-29 |
EP1288502B1 EP1288502B1 (de) | 2010-03-17 |
Family
ID=7697165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02017820A Expired - Lifetime EP1288502B1 (de) | 2001-08-30 | 2002-08-08 | Turbomolekularpumpe |
Country Status (4)
Country | Link |
---|---|
US (1) | US6824357B2 (de) |
EP (1) | EP1288502B1 (de) |
JP (1) | JP4262457B2 (de) |
DE (2) | DE10142567A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105358835A (zh) * | 2013-07-31 | 2016-02-24 | 埃地沃兹日本有限公司 | 真空泵 |
EP3608545A1 (de) * | 2013-10-15 | 2020-02-12 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7717684B2 (en) * | 2003-08-21 | 2010-05-18 | Ebara Corporation | Turbo vacuum pump and semiconductor manufacturing apparatus having the same |
US8221098B2 (en) * | 2009-03-09 | 2012-07-17 | Honeywell International Inc. | Radial turbomolecular pump with electrostatically levitated rotor |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
US9279417B2 (en) | 2013-04-26 | 2016-03-08 | Sol-Electrica, Llc | Solar power system |
CN116591994A (zh) * | 2023-07-05 | 2023-08-15 | 合肥昱驰真空技术有限公司 | 一种新型磁悬浮复合分子泵 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6019581A (en) | 1995-08-08 | 2000-02-01 | Leybold Aktiengesellschaft | Friction vacuum pump with cooling arrangement |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4140441A (en) * | 1977-04-11 | 1979-02-20 | Patterson Williams G | Turbomolecular pump lubrication system |
DE2757599A1 (de) * | 1977-12-23 | 1979-06-28 | Kernforschungsz Karlsruhe | Turbo-molekularpumpe |
JPH0689756B2 (ja) * | 1986-05-02 | 1994-11-14 | 株式会社日立製作所 | ドライ真空ポンプ |
JPS63109299A (ja) * | 1986-10-27 | 1988-05-13 | Hitachi Ltd | タ−ボ真空ポンプ |
JPS63266190A (ja) * | 1987-04-24 | 1988-11-02 | Hitachi Ltd | タ−ボ真空ポンプ |
JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
JPH01167497A (ja) * | 1987-12-23 | 1989-07-03 | Hitachi Ltd | 真空ポンプ |
JP2741863B2 (ja) * | 1988-04-15 | 1998-04-22 | 株式会社日立製作所 | ターボ真空ポンプ |
FR2634829B1 (fr) * | 1988-07-27 | 1990-09-14 | Cit Alcatel | Pompe a vide |
FR2647853A1 (fr) * | 1989-06-05 | 1990-12-07 | Cit Alcatel | Pompe primaire seche a deux etages |
JPH03124998A (ja) * | 1989-10-06 | 1991-05-28 | Hitachi Ltd | ドライ真空ポンプ |
JPH04112997A (ja) * | 1990-09-03 | 1992-04-14 | Matsushita Electric Ind Co Ltd | 真空装置 |
JP3616639B2 (ja) * | 1992-06-19 | 2005-02-02 | ウナクシス ドイチュラント ホールディング ゲゼルシャフト ミット ベシュレンクテル ハフツング | 気体摩擦真空ポンプ |
WO1994007033A1 (en) * | 1992-09-23 | 1994-03-31 | United States Of America As Represented By The Secretary Of The Air Force | Turbo-molecular blower |
US5618167A (en) * | 1994-07-28 | 1997-04-08 | Ebara Corporation | Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing |
JP3160504B2 (ja) * | 1995-09-05 | 2001-04-25 | 三菱重工業株式会社 | ターボ分子ポンプ |
DE19702456B4 (de) * | 1997-01-24 | 2006-01-19 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP3452468B2 (ja) * | 1997-08-15 | 2003-09-29 | 株式会社荏原製作所 | ターボ分子ポンプ |
GB9725146D0 (en) * | 1997-11-27 | 1998-01-28 | Boc Group Plc | Improvements in vacuum pumps |
DE19937392A1 (de) * | 1999-08-07 | 2001-02-08 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit pumpaktiven Elementen |
DE19951954A1 (de) * | 1999-10-28 | 2001-05-03 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE19956015A1 (de) * | 1999-11-22 | 2001-05-23 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE10008691B4 (de) * | 2000-02-24 | 2017-10-26 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
DE10056144A1 (de) * | 2000-11-13 | 2002-05-23 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
JP2002155891A (ja) * | 2000-11-22 | 2002-05-31 | Seiko Instruments Inc | 真空ポンプ |
DE10107341A1 (de) * | 2001-02-16 | 2002-08-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
2001
- 2001-08-30 DE DE10142567A patent/DE10142567A1/de not_active Withdrawn
-
2002
- 2002-08-08 EP EP02017820A patent/EP1288502B1/de not_active Expired - Lifetime
- 2002-08-08 DE DE50214282T patent/DE50214282D1/de not_active Expired - Lifetime
- 2002-08-19 JP JP2002238025A patent/JP4262457B2/ja not_active Expired - Fee Related
- 2002-08-27 US US10/229,679 patent/US6824357B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6019581A (en) | 1995-08-08 | 2000-02-01 | Leybold Aktiengesellschaft | Friction vacuum pump with cooling arrangement |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105358835A (zh) * | 2013-07-31 | 2016-02-24 | 埃地沃兹日本有限公司 | 真空泵 |
EP3029328A4 (de) * | 2013-07-31 | 2017-03-22 | Edwards Japan Limited | Vakuumpumpe |
US10954962B2 (en) | 2013-07-31 | 2021-03-23 | Edwards Japan Limited | Vacuum pump |
EP3608545A1 (de) * | 2013-10-15 | 2020-02-12 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
Also Published As
Publication number | Publication date |
---|---|
US20030044270A1 (en) | 2003-03-06 |
US6824357B2 (en) | 2004-11-30 |
EP1288502A3 (de) | 2003-10-29 |
JP4262457B2 (ja) | 2009-05-13 |
DE50214282D1 (de) | 2010-04-29 |
JP2003083282A (ja) | 2003-03-19 |
EP1288502B1 (de) | 2010-03-17 |
DE10142567A1 (de) | 2003-03-20 |
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