EP1288502B1 - Turbo molecular pump - Google Patents

Turbo molecular pump Download PDF

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Publication number
EP1288502B1
EP1288502B1 EP02017820A EP02017820A EP1288502B1 EP 1288502 B1 EP1288502 B1 EP 1288502B1 EP 02017820 A EP02017820 A EP 02017820A EP 02017820 A EP02017820 A EP 02017820A EP 1288502 B1 EP1288502 B1 EP 1288502B1
Authority
EP
European Patent Office
Prior art keywords
stator
housing
turbomolecular pump
pump according
housing component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02017820A
Other languages
German (de)
French (fr)
Other versions
EP1288502A2 (en
EP1288502A3 (en
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1288502A2 publication Critical patent/EP1288502A2/en
Publication of EP1288502A3 publication Critical patent/EP1288502A3/en
Application granted granted Critical
Publication of EP1288502B1 publication Critical patent/EP1288502B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of the first protection claim.
  • Turbomolecular pump type vacuum pumps typically consist of a number of stages, each having rotor and stator disks arranged alternately one behind the other.
  • the rotor disks must rotate at high speed.
  • the drive energy required for this purpose is partly transformed into kinetic energy. A large part of it is released as heat loss.
  • Other unwanted heat quantities are released by storage (mechanical losses due to friction in ball bearings or electrical losses in magnetic bearings) or in the compression of gases.
  • stator and stator discs face each other over a large area, in this way a large part of the heat can be transferred from the rotor to the stator disks.
  • the stator discs are connected to the housing via spacers ( DE-OS 3722 164 ). Since here only minimal Resulting contact surfaces, the heat transfer from the stator to the housing and thus insufficient to the outside.
  • Turbomolecular pumps are increasingly being used in processes such. As chemical processes or in semiconductor manufacturing, where large amounts of process gases incurred. These gases are usually easily condensable, and all the more so at low temperatures. This results in substantial liquid and solid deposits and, ultimately, corrosion and etching which can destroy individual components or the entire pump.
  • the U.S. Patent 6,019,581 shows a turbomolecular pump with a housing surrounding the stator. Rotor and stator are designed on the inlet side as turbomolecular stages and on the vacuum side as Siegbahn stages.
  • a cooling water channel either in the support ring of the stator or in the housing component contributes to increasing the heat flow.
  • a heater can be accommodated very space-saving in the housing component or in the support ring.
  • the corresponding component is thermally insulated from the rest of the housing. A heating of the critical areas of the pump is possible without large heat conduction losses.
  • the support ring of the stator can be designed both as an inner and as an outer ring. This makes it possible to adapt the inventive arrangement different designs of the overall pump.
  • a gas friction pump is shown.
  • the housing 1 is provided with a suction opening 2 and a gas outlet opening 3.
  • the rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7.
  • the rotor disks 12 are fixed. These are provided with a pump-active structure and effect with the stator discs 14, which are also provided with a pump-active structure, the pumping effect.
  • Fig. 2 shows a section Fig. 1 ,
  • the higher pressure range facing stator 20 has an inner support ring 22. This is a large area connected to the housing member 24.
  • a cooling water channel 26 is incorporated.
  • this is mounted so that it makes contact with the Support ring 22 of the stator 20 has.
  • a cooling water channel can be located directly in the support ring 22 of the stator 20.
  • FIG. 3 an embodiment is shown in which the stator 20 and the housing member 24 are integrally formed.
  • the Fig. 4 shows an embodiment equipped with heater 30 embodiment.
  • the housing component is separated by a thermal insulation 32 from the rest of the housing.
  • An integral formation of stator 20 and housing member 24 is also possible according to the invention here.
  • a stator disc in which the support ring 23 is formed as an outer ring.
  • the support ring 23 is formed as an outer ring.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Description

Die Erfindung betrifft eine Turbomolekularpumpe nach dem Oberbegriff des 1. Schutzanspruches.The invention relates to a turbomolecular pump according to the preamble of the first protection claim.

Vakuumpumpen vom Typ einer Turbomolekularpumpe bestehen in der Regel aus einer Anzahl von Stufen, welche jeweils Rotor- und Statorscheiben aufweisen, die abwechselnd hintereinander angeordnet sind. Um optimale Pumpeigenschaften, wie max. Gasdurchsatz und max. Kompression zu erreichen, müssen die Rotorscheiben mit hoher Geschwindigkeit umlaufen. Die zu diesem Zweck benötigte Antriebsenergie wird zum Teil in kinetische Energie verwandelt. Ein großer Teil davon wird als Verlustwärme freigesetzt. Weitere unerwünschte Wärmemengen werden frei durch die Lagerung (mechanische Verluste durch Reibung in Kugellagern oder elektrische Verluste in Magnetlagern) oder bei der Kompression von Gasen. Dadurch besteht die Gefahr der Überhitzung von kritischen Bauteilen. Dies muss unbedingt verhindert werden. Dazu ist es notwendig, eine effektive Wärmeabfuhr bereitzustellen.Turbomolecular pump type vacuum pumps typically consist of a number of stages, each having rotor and stator disks arranged alternately one behind the other. For optimal pumping properties, such as max. Gas throughput and max. To achieve compression, the rotor disks must rotate at high speed. The drive energy required for this purpose is partly transformed into kinetic energy. A large part of it is released as heat loss. Other unwanted heat quantities are released by storage (mechanical losses due to friction in ball bearings or electrical losses in magnetic bearings) or in the compression of gases. There is a risk of overheating of critical components. This must be prevented at all costs. For this it is necessary to provide an effective heat dissipation.

Die Wärmeübertragung im Vakuum von Rotor- auf Statorbauteile erfolgt im Wesentlichen durch Strahlung. Da sich Rotor- und Statorscheiben großflächig gegenüberstehen, kann auf diese Weise ein großer Teil der Wärme von den Rotorauf die Statorscheiben übertragen werden. Die Statorscheiben sind über Distanzringe mit dem Gehäuse verbunden ( DE-OS 3722 164 ). Da sich hier nur minimale Berührungsflächen ergeben, ist die Wärmeübertragung von den Statorscheiben auf das Gehäuse und somit nach außen unzureichend.The heat transfer in the vacuum from rotor to stator components takes place essentially by radiation. Since rotor and stator discs face each other over a large area, in this way a large part of the heat can be transferred from the rotor to the stator disks. The stator discs are connected to the housing via spacers ( DE-OS 3722 164 ). Since here only minimal Resulting contact surfaces, the heat transfer from the stator to the housing and thus insufficient to the outside.

Ein weiterer Gesichtspunkt, der als Grundlage der Aufgabenstellung anzusehen ist, ergibt sich aus folgenden Fakten:Another aspect to be considered as the basis of the task results from the following facts:

Turbomolekularpumpen kommen zunehmend zur Anwendung bei Verfahren wie z. B. chemischen Prozessen oder in der Halbleiterfertigung, bei denen große Mengen von Prozessgasen anfallen. Diese Gase sind in der Regel leicht kondensierbar, und dies umso mehr bei tiefen Temperaturen. Dadurch kommt es zu Flüssigkeits- und Feststoffabscheidungen in beträchtlichem Ausmaß und schließlich zu Korrosions- und Ätzvorgängen, welche zur Zerstörung einzelner Bauteile oder der ganzen Pumpe führen können.Turbomolecular pumps are increasingly being used in processes such. As chemical processes or in semiconductor manufacturing, where large amounts of process gases incurred. These gases are usually easily condensable, and all the more so at low temperatures. This results in substantial liquid and solid deposits and, ultimately, corrosion and etching which can destroy individual components or the entire pump.

Durch Aufheizen der entsprechenden Bereiche können Flüssigkeits- und Feststoffabscheidungen weitgehend verhindert werden ( DE-OS 197 02 456 ). Die Heizung erfolgt durch entsprechende Bauelemente, welche am oder im Gehäuse der Pumpe angebracht sind. Da durch die herkömmliche Bauweise, wie oben beschrieben, die Berührungsflächen zwischen Gehäuse, Distanzringen und Statorscheiben minimal sind, ist die Wärmeübertragung vom Gehäuse auf die Statorscheiben unbefriedigend.By heating the corresponding areas, liquid and solid deposits can be largely prevented ( DE-OS 197 02 456 ). The heating is done by appropriate components, which are mounted on or in the housing of the pump. Since the contact surfaces between the housing, spacer rings and stator disks are minimal due to the conventional construction, as described above, the heat transfer from the housing to the stator disks is unsatisfactory.

Diese beiden Gesichtspunkte, nämlich Übertragung von Wärme von Statorscheiben auf das Gehäuse und in umgekehrter Richtung, sind kritische Vorgänge für den sicheren und zuverlässigen Betrieb einer Turbomolekularpumpe und führen beide zur gleichen Aufgabenstellung. Diese liegt der Konstruktion einer Turbomolekularpumpe zugrunde, bei welcher der Wärmeübergang vom Gehäuse auf die Statorscheiben und umgekehrt deutlich verbessert werden soll.These two aspects, namely transfer of heat from stator disks to the housing and in the reverse direction, are critical processes for the safe and reliable operation of a turbomolecular pump and carry both to the same task. This is based on the construction of a turbomolecular pump, in which the heat transfer from the housing to the stator and vice versa should be significantly improved.

Die US-Patentschrift 6,019,581 zeigt eine Turbomolekularpumpe mit einem den Stator umgebenden Gehäuse. Rotor und Stator sind einlassseitig als Turbomolekularstufen und vorvakuumseitig als Siegbahnstufen ausgeführt.The U.S. Patent 6,019,581 shows a turbomolecular pump with a housing surrounding the stator. Rotor and stator are designed on the inlet side as turbomolecular stages and on the vacuum side as Siegbahn stages.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Schutzanspruches gelöst. Die Ansprüche 2-7 stellen weitere Ausgestaltungsformen der Erfindung dar.The problem is solved by the characterizing features of the first protection claim. The claims 2-7 represent further embodiments of the invention.

Durch einstückige Ausführung von letzt Statorsaheibe und Gehäusebauteil wird ein deutlich besserer Wärmeübergang als bei früheren Konstruktionen erreicht. In Verbindung mit großen, sich gegenüberstehenden Flächen von Statorscheibe und Rotorscheibe wird der Gesamtwärmefluss vom Rotor zum Gehäuse und umgekehrt wesentlich erhöht. Diese erfinderischen Maßnahmen ermöglichen es, bei gleicher Rotortemperatur eine größere Gasmenge zu fördern.By one-piece design of last Statorsaheibe and housing component a significantly better heat transfer is achieved than in previous designs. In conjunction with large, opposing surfaces of stator and rotor disk, the total heat flow from the rotor to the housing and vice versa is substantially increased. These inventive measures make it possible to promote a larger amount of gas at the same rotor temperature.

Ein Kühlwasserkanal entweder in dem Tragring der Statorscheibe oder im Gehäusebauteil trägt zur Vergrößerung des Wärmeflusses bei.A cooling water channel either in the support ring of the stator or in the housing component contributes to increasing the heat flow.

Zum Aufheizen des Stators kann im Gehäusebauteil oder auch im Tragring eine Heizung sehr platzsparend untergebracht werden. Hierzu ist es vorteilhaft, dass das entsprechende Bauteil vom übrigen Gehäuse thermisch isoliert ist. Eine Aufheizung der kritischen Bereiche der Pumpe wird so ohne große Wärmeleitungsverluste möglich.To heat the stator, a heater can be accommodated very space-saving in the housing component or in the support ring. For this purpose, it is advantageous that the corresponding component is thermally insulated from the rest of the housing. A heating of the critical areas of the pump is possible without large heat conduction losses.

Der Tragring der Statorscheibe kann sowohl als Innen- als auch als Außenring ausgebildet sein. Dadurch wird es ermöglicht, die erfinderische Anordnung unterschiedlichen Bauweisen der Gesamtpumpe anzupassen.The support ring of the stator can be designed both as an inner and as an outer ring. This makes it possible to adapt the inventive arrangement different designs of the overall pump.

Anhand der Figuren 1 - 5 soll die Erfindung näher erläutert werden.

  • Fig. 1 zeigt die Gesamtansicht einer Turbomolekularpumpe.
  • Fig. 2, 4, und 5 zeigen jeweils einen Ausschnitt aus Fig. 1 mit unterschiedlichen Ausführungsformen.
  • Fig. 3 zeigt einen Ausschnitt aus Fig.1 mit der Ausführungsform der Erfindung.
Based on Figures 1 - 5 the invention will be explained in more detail.
  • Fig. 1 shows the overall view of a turbomolecular pump.
  • Fig. 2 . 4, and 5 each show a section Fig. 1 with different embodiments.
  • Fig. 3 shows a section Fig.1 with the embodiment of the invention.

In Fig. 1 ist eine Gasreibungspumpe dargestellt. Das Gehäuse 1 ist mit einer Ansaugöffnung 2 und einer Gasaustrittsöffnung 3 versehen. Die Rotorwelle 4 ist in Lagern 5 und 6 fixiert und wird durch den Motor 7 angetrieben. Auf der Rotorwelle 4 sind die Rotorscheiben 12 befestigt. Diese sind mit einer pumpaktiven Struktur versehen und bewirken mit den Statorscheiben 14, welche ebenfalls mit einer pumpaktiven Struktur versehen sind, den Pumpeffekt.In Fig. 1 a gas friction pump is shown. The housing 1 is provided with a suction opening 2 and a gas outlet opening 3. The rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7. On the rotor shaft 4, the rotor disks 12 are fixed. These are provided with a pump-active structure and effect with the stator discs 14, which are also provided with a pump-active structure, the pumping effect.

Fig. 2 zeigt einen Ausschnitt aus Fig. 1. Die dem höheren Druckbereich zugewandte Statorscheibe 20 weist einen inneren Tragring 22 auf. Dieser ist großflächig mit dem Gehäusebauteil 24 verbunden. Hierin ist in einer weiteren Ausgestaltungsform der Erfindung ein Kühlwasserkanal 26 eingearbeitet. Vorteilhafter Weise ist dieser so angebracht, dass er Kontakt mit dem Tragring 22 der Statorscheibe 20 hat. Alternativ kann sich ein Kühlwasserkanal direkt in dem Tragring 22 der Statorscheibe 20 befinden. Fig. 2 shows a section Fig. 1 , The higher pressure range facing stator 20 has an inner support ring 22. This is a large area connected to the housing member 24. Herein, in a further embodiment of the invention, a cooling water channel 26 is incorporated. Advantageously, this is mounted so that it makes contact with the Support ring 22 of the stator 20 has. Alternatively, a cooling water channel can be located directly in the support ring 22 of the stator 20.

In Fig. 3 ist eine Ausführungsform gezeigt, bei der die Statorscheibe 20 und das Gehäusebauteil 24 einstückig ausgebildet sind.In Fig. 3 an embodiment is shown in which the stator 20 and the housing member 24 are integrally formed.

Die Fig. 4 zeigt eine mit Heizung 30 ausgerüstete Ausführungsform. Für eine gezielte thermische Behandlung ist das Gehäusebauteil durch eine thermische Isolation 32 vom übrigen Gehäuse getrennt. Eine einstückige Ausbildung von Statorscheibe 20 und Gehäusebauteil 24 ist auch hier erfindungsgemäß möglich.The Fig. 4 shows an embodiment equipped with heater 30 embodiment. For a targeted thermal treatment, the housing component is separated by a thermal insulation 32 from the rest of the housing. An integral formation of stator 20 and housing member 24 is also possible according to the invention here.

Bei der Ausführungsform in Fig. 5 ist eine Statorscheibe dargestellt, bei der der Tragring 23 als Außenring ausgebildet ist. Mit dieser Ausführungsform können alle oben beschriebenen Merkmale, wie einstückige Bauweise mit dem Gehäusebauteil, Kühlwasserkanal, Heizung und thermische Isolation, ebenfalls verwirklicht sein.In the embodiment in Fig. 5 a stator disc is shown, in which the support ring 23 is formed as an outer ring. With this embodiment, all the features described above, such as one-piece construction with the housing component, cooling water channel, heating and thermal insulation, also be realized.

Claims (7)

  1. Turbomolecular pump having a housing (1), in which rotor disks (12) and stator disks (14) are arranged alternately in succession, wherein these are provided with blades fitted on retaining rings (16, 18), characterized in that the retaining ring (22) of the last stator disk (20) facing the higher pressure region and a housing component (24) are of an integral construction.
  2. Turbomolecular pump according to claim 1, characterized in that the housing component (24) is provided with a cooling water channel (26).
  3. Turbomolecular pump according to claim 1, characterized in that the stator disk (20) facing the higher pressure region is provided with a cooling water channel (26).
  4. Turbomolecular pump according to claim 1, characterized in that the housing component (24) is provided with a heating device (30).
  5. Turbomolecular pump according to claim 4, characterized in that the housing component (24) is thermally insulated from the rest of the housing (1).
  6. Turbomolecular pump according to one of claims 1 - 5, characterized in that the retaining ring of the stator disk (20) takes the form of an inner ring (22).
  7. Turbomolecular pump according to one of claims 1 - 5, characterized in that the retaining ring of the stator disk (20) takes the form of an outer ring (23).
EP02017820A 2001-08-30 2002-08-08 Turbo molecular pump Expired - Lifetime EP1288502B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10142567A DE10142567A1 (en) 2001-08-30 2001-08-30 Turbo molecular pump
DE10142567 2001-08-30

Publications (3)

Publication Number Publication Date
EP1288502A2 EP1288502A2 (en) 2003-03-05
EP1288502A3 EP1288502A3 (en) 2003-10-29
EP1288502B1 true EP1288502B1 (en) 2010-03-17

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EP02017820A Expired - Lifetime EP1288502B1 (en) 2001-08-30 2002-08-08 Turbo molecular pump

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US (1) US6824357B2 (en)
EP (1) EP1288502B1 (en)
JP (1) JP4262457B2 (en)
DE (2) DE10142567A1 (en)

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CN116591994A (en) * 2023-07-05 2023-08-15 合肥昱驰真空技术有限公司 Novel magnetic suspension compound molecular pump

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Also Published As

Publication number Publication date
US20030044270A1 (en) 2003-03-06
JP4262457B2 (en) 2009-05-13
DE10142567A1 (en) 2003-03-20
DE50214282D1 (en) 2010-04-29
US6824357B2 (en) 2004-11-30
JP2003083282A (en) 2003-03-19
EP1288502A2 (en) 2003-03-05
EP1288502A3 (en) 2003-10-29

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