EP1236906B1 - Turbomolecular pump - Google Patents

Turbomolecular pump Download PDF

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Publication number
EP1236906B1
EP1236906B1 EP02001844A EP02001844A EP1236906B1 EP 1236906 B1 EP1236906 B1 EP 1236906B1 EP 02001844 A EP02001844 A EP 02001844A EP 02001844 A EP02001844 A EP 02001844A EP 1236906 B1 EP1236906 B1 EP 1236906B1
Authority
EP
European Patent Office
Prior art keywords
components
housing
gas outlet
outlet opening
higher pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02001844A
Other languages
German (de)
French (fr)
Other versions
EP1236906A1 (en
Inventor
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1236906A1 publication Critical patent/EP1236906A1/en
Application granted granted Critical
Publication of EP1236906B1 publication Critical patent/EP1236906B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of claim 1.
  • Such turbomolecular pumps usually consist of a number of stages, which may be designed differently and each having rotor and stator components. These pump-active parts are penetrated by the gas to be delivered.
  • the field of application of these pumps increasingly extends to processes involving large quantities of easily condensable gases, such as chemical processes or semiconductor manufacturing.
  • the gases are compressed from the high vacuum range to a pressure range in which laminar flow prevails, or even to atmospheric pressure. This means that in this area of higher pressure relatively large amounts of gas are conveyed. If then these gases are easily condensable, which is more the case at low temperatures, liquid or solid deposits will occur to a considerable extent. As a result, corrosion and etching processes can be caused, which can lead to the destruction of individual components or the entire pump. This is particularly critical in the pump types considered here, since their optimal mode of operation can only be achieved with high speeds and very small distances between stationary and rotating parts.
  • the invention has for its object to provide a construction in which only the threatened by deposits components are heated specifically.
  • a turbomolecular pump with the housing 1, which is provided with a suction port 2 in the high vacuum region 8 and a gas outlet opening 3 in the pre-vacuum region 10.
  • the rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7.
  • the gases entering at the intake opening are supplied by the pump-active components via a pre-vacuum-side gap 18 to the gas outlet opening 3.
  • the interspace 18 is provided with a heater 20 and connected to the pre-vacuum-side stator components 24 via thermal connection with high thermal conductivity.
  • stator components 24 are made of a material with high thermal conductivity and the contacts between them are formed over a large area. Thermally, the gap is separated from the housing 1 and the high-vacuum-side stator components by thermal resistors 28.
  • the gas outlet opening 3 may also be provided with a heater 21 and be thermally separated by thermal resistances 27 from the adjacent housing parts.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung betrifft eine Turbomolekularpumpe nach dem Oberbegriff des Anspruchs 1.The invention relates to a turbomolecular pump according to the preamble of claim 1.

Derartige Turbomolekularpumpen bestehen in der Regel aus einer Anzahl von Stufen, welche unterschiedlich gestaltet sein können und jeweils Rotor- und Statorbauteile aufweisen. Diese pumpaktiven Teile werden von dem zu fördernden Gas durchsetzt. Der Einsatzbereich dieser Pumpen erstreckt sich zunehmend auf Verfahren, bei denen große Mengen von leicht kondensierbaren Gasen anfallen, wie zum Beispiel chemische Prozesse oder die Halbleiterfertigung. Dabei werden die Gase vom Hochvakuumbereich bis zu einem Druckbereich, in welchem laminare Strömung herrscht, oder gar bis Atmosphärendruck komprimiert. Das bedeutet, dass in diesem Bereich höheren Druckes relativ große Gasmengen gefördert werden. Wenn dann diese Gase leicht kondensierbar sind, was bei tiefen Temperaturen umso mehr der Fall ist, kommt es zu Flüssigkeits- oder Feststoffabscheidungen im beträchtlichen Ausmaß. Dadurch können Korrosions- und Ätzvorgänge hervorgerufen werden, welche zur Zerstörung einzelner Bauteile oder der ganzen Pumpe führen können. Dies ist bei den hier betrachteten Pumpentypen besonders kritisch, da ihre optimale Wirkungsweise nur mit hohen Drehzahlen und sehr geringen Abständen zwischen stehenden und rotierenden Teilen erreicht werden kann.Such turbomolecular pumps usually consist of a number of stages, which may be designed differently and each having rotor and stator components. These pump-active parts are penetrated by the gas to be delivered. The field of application of these pumps increasingly extends to processes involving large quantities of easily condensable gases, such as chemical processes or semiconductor manufacturing. The gases are compressed from the high vacuum range to a pressure range in which laminar flow prevails, or even to atmospheric pressure. This means that in this area of higher pressure relatively large amounts of gas are conveyed. If then these gases are easily condensable, which is more the case at low temperatures, liquid or solid deposits will occur to a considerable extent. As a result, corrosion and etching processes can be caused, which can lead to the destruction of individual components or the entire pump. This is particularly critical in the pump types considered here, since their optimal mode of operation can only be achieved with high speeds and very small distances between stationary and rotating parts.

Es gibt Konstruktionen, die zum Ziel haben, die unerwünschten Ablagerungen durch Aufheizen der kritischen Bereiche zu verhindern. Siehe DE-A-19702456 als nächstkommenden Stand der Technik, bzw. EP-A-0646220 . Bei diesen Konstruktionen werden die kritischen Bereiche durch großflächige Wärmezufuhr aufgeheizt. Der Nachteil dabei ist, das dadurch auch Teile der Pumpe aufgeheizt werden, die von den Abscheidungen nicht betroffen sind, wie zum Beispiel Gehäuse, Hochvakuumanschluss, Lagerung und Antrieb. Dies führt neben überhöhtem Energieverbrauch zu weiteren unterschiedlichen nachteiligen Folgen, wie unerwünschte Ausdehnung von Bauteilen mit äußerst engen Toleranzen, schädliche Beeinträchtigung von Antrieb und Lagerteilen und Gefahr der Verletzung bei Berührung.There are constructions that aim to prevent the unwanted deposits by heating the critical areas. Please refer DE-A-19702456 as the closest prior art, or EP-A-0646220 , In these constructions, the critical areas are heated by large-area heat supply. The disadvantage of this is that this also parts of the pump are heated, which are not affected by the deposits, such as housing, high vacuum connection, storage and drive. In addition to excessive energy consumption, this leads to further different disadvantageous consequences, such as undesired expansion of components with extremely tight tolerances, harmful impairment of the drive and bearing parts and the danger of injury when touched.

Der Erfindung liegt die Aufgabe zugrunde, eine Konstruktion vorzustellen, bei der lediglich die von Ablagerungen bedrohten Bauteile gezielt aufgeheizt werden.The invention has for its object to provide a construction in which only the threatened by deposits components are heated specifically.

Die Aufgabe wird durch die kennzeichnenden Merkmale des Anspruchs 1 gelöst. Die Ansprüche 2 und 3 stellen weitere Ausgestaltungsformen der Erfindung dar.The object is solved by the characterizing features of claim 1. Claims 2 and 3 illustrate further embodiments of the invention.

Durch die erfindungsgemäße Anordnung wird erreicht, dass nur die kritischen Bauteile, d. h. diejenigen, die besonders stark von Ablagerungen bedroht sind, aufgeheizt werden. Durch thermische Anbindungen mit hoher Wärmeleitfähigkeit wird die Wärme gezielt an die kritischen Stellen geführt. Andere Bauteile, wie zum Beispiel Gehäuse, Hochvakuumanschluss, Lager und Antrieb, werden durch Wärmeisolation von der Heizung ausgenommen. Diese Maßnahmen führen zu Vorteilen, wie Begrenzung des Energieverbrauchs, Vermeidung unerwünschter Ausdehnung von Bauteilen mit engen Toleranzen, schädliche Beeinträchtigung von Antriebs- und Lagerteilen und Verletzungsgefahr durch Berührung. Durch einen höheren Gasdurchsatz kann die Leistungsfähigkeit der Pumpe gesteigert werden. Die geringe Wärmekapazität der Heizungsteile und der Statorbauteile im Bereich höheren Druckes hat eine kurze Aufheizzeit und einen geringeren Leistungsbedarf zur Folge.By the arrangement according to the invention it is achieved that only the critical components, ie those which are particularly threatened by deposits, are heated. By thermal connections with high thermal conductivity, the heat is directed to the critical points. Other components, such as housing, high vacuum connection, bearings and drive, are excluded from the heater by thermal insulation. These measures lead to advantages, such as limiting energy consumption, avoiding unwanted expansion of components with tight tolerances, damaging the drive and bearing parts and the risk of injury from contact. A higher gas flow rate can increase the efficiency of the pump. The low heat capacity of the heating parts and the stator components in the area of higher pressure results in a short heating time and a lower power requirement.

Anhand der Figur soll die Erfindung am Beispiel einer Turbomolekularpumpe näher läutert werden.With reference to the figure, the invention will be explained in more detail using the example of a turbomolecular pump.

Dargestellt ist eine Turbomolekularpumpe mit dem Gehäuse 1, welches mit einer Ansaugöffnung 2 im Hochvakuumbereich 8 und einer Gasaustrittsöffnung 3 im Vorvakuumbereich 10 versehen ist. Die Rotorwelle 4 ist in Lagern 5 und 6 fixiert und wird durch den Motor 7 angetrieben. Auf der Rotorwelle 4 sind Rotorbauteile 12 befestigt. Diese weisen pumpaktive Strukturen auf und bewirken mit den Statorbauteilen 14, welche ebenfalls mit pumpaktiven Strukturen versehen sein können, den Pumpeffekt. Die bei der Ansaugöffnung eintretenden Gase werden von den pumpaktiven Bauteilen über einen vorvakuumseitigen Zwischenraum 18 der Gasaustrittsöffnung 3 zugeführt. Erfindungsgemäß ist der Zwischenraum 18 mit einer Heizung 20 versehen und über thermische Anbindung mit hoher Wärmeleitfähigkeit mit den vorvakuumseitigen Statorbauteilen 24 verbunden. Diese thermische Anbindung wird dadurch hergestellt, dass die Statorbauteile 24 aus einem Material mit hoher Wärmeleitfähigkeit bestehen und die Kontakte zwischen ihnen großflächig ausgebildet sind. Thermisch wird der Zwischenraum vom Gehäuse 1 und den hochvakuumseitigen Statorbauteilen durch Wärmeleitwiderstände 28 getrennt. Zusätzlich kann die Gasaustrittsöffnung 3 ebenfalls mit einer Heizung 21 versehen und durch Wärmeleitwiderstände 27 von den angrenzenden Gehäuseteilen thermisch getrennt sein.Shown is a turbomolecular pump with the housing 1, which is provided with a suction port 2 in the high vacuum region 8 and a gas outlet opening 3 in the pre-vacuum region 10. The rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7. On the rotor shaft 4 rotor components 12 are attached. These have pump-active structures and cause with the stator components 14, which may also be provided with pump-active structures, the pumping effect. The gases entering at the intake opening are supplied by the pump-active components via a pre-vacuum-side gap 18 to the gas outlet opening 3. According to the invention, the interspace 18 is provided with a heater 20 and connected to the pre-vacuum-side stator components 24 via thermal connection with high thermal conductivity. This thermal connection is produced in that the stator components 24 are made of a material with high thermal conductivity and the contacts between them are formed over a large area. Thermally, the gap is separated from the housing 1 and the high-vacuum-side stator components by thermal resistors 28. In addition, the gas outlet opening 3 may also be provided with a heater 21 and be thermally separated by thermal resistances 27 from the adjacent housing parts.

Claims (3)

  1. A turbomolecular pump with pumping rotor and stator components (12, 14) accommodated in a housing (1), wherein the housing (1) is provided, in the high vacuum region (8), with an intake opening (2) and, in the higher pressure region (10), with a gas outlet opening (3) and the end (16) of the pumping components facing the higher pressure region is connected by means of an intermediate space (18) to the gas outlet opening (3), characterised in that the intermediate space (18) is so provided with heating means (20) and is so connected, on the one hand, by means of a thermal connection with high heat conductivity with the stator components (24) in the higher pressure region and also, on the other hand, is so thermally separated from the housing (1) by thermal resistances (26) that only the components which are strongly threatened with deposits are heated up, in that the high vacuum side stator components are thermally separated from the stator components in the higher pressure region by thermal resistances (28), and in that the gas outlet opening (3) is thermally separated from the adjacent housing components by thermal resistances (27).
  2. A turbomolecular pump according to claim 1, characterised in that the gas outlet opening (3) is provided with heating means (21).
  3. A turbomolecular pump according to claim 1 or 2, characterised in that the thermal connection with high heat conductivity is produced in that the stator components (24) themselves consist of a material with high heat conductivity and that there are large surface areas of contact between them.
EP02001844A 2001-02-16 2002-01-26 Turbomolecular pump Expired - Lifetime EP1236906B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10107341A DE10107341A1 (en) 2001-02-16 2001-02-16 vacuum pump
DE10107341 2001-02-16

Publications (2)

Publication Number Publication Date
EP1236906A1 EP1236906A1 (en) 2002-09-04
EP1236906B1 true EP1236906B1 (en) 2010-07-07

Family

ID=7674321

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02001844A Expired - Lifetime EP1236906B1 (en) 2001-02-16 2002-01-26 Turbomolecular pump

Country Status (4)

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US (1) US6699009B2 (en)
EP (1) EP1236906B1 (en)
JP (1) JP4673538B2 (en)
DE (2) DE10107341A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (en) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbo molecular pump
JP5420323B2 (en) * 2009-06-23 2014-02-19 株式会社大阪真空機器製作所 Molecular pump
DE202013008470U1 (en) * 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh vacuum pump
JP6386737B2 (en) 2014-02-04 2018-09-05 エドワーズ株式会社 Vacuum pump
JP6390478B2 (en) * 2015-03-18 2018-09-19 株式会社島津製作所 Vacuum pump
EP3339652B1 (en) * 2016-12-22 2020-07-01 Pfeiffer Vacuum Gmbh Vacuum pump with inner lining to receive deposits
US10655638B2 (en) * 2018-03-15 2020-05-19 Lam Research Corporation Turbomolecular pump deposition control and particle management

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3508483A1 (en) * 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln HOUSING FOR A TURBOMOLECULAR VACUUM PUMP
FR2634829B1 (en) * 1988-07-27 1990-09-14 Cit Alcatel VACUUM PUMP
KR950007378B1 (en) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 Vacuum pump
JP3616639B2 (en) * 1992-06-19 2005-02-02 ウナクシス ドイチュラント ホールディング ゲゼルシャフト ミット ベシュレンクテル ハフツング Gas friction vacuum pump
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
JP3125207B2 (en) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 Vacuum processing equipment
JP3160504B2 (en) * 1995-09-05 2001-04-25 三菱重工業株式会社 Turbo molecular pump
DE19702456B4 (en) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh vacuum pump
DE19724323A1 (en) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flange connection

Also Published As

Publication number Publication date
JP2002276586A (en) 2002-09-25
US6699009B2 (en) 2004-03-02
US20020114695A1 (en) 2002-08-22
DE50214516D1 (en) 2010-08-19
DE10107341A1 (en) 2002-08-29
EP1236906A1 (en) 2002-09-04
JP4673538B2 (en) 2011-04-20

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