EP1447567A2 - Vacuum pump arrangement - Google Patents

Vacuum pump arrangement Download PDF

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Publication number
EP1447567A2
EP1447567A2 EP04000831A EP04000831A EP1447567A2 EP 1447567 A2 EP1447567 A2 EP 1447567A2 EP 04000831 A EP04000831 A EP 04000831A EP 04000831 A EP04000831 A EP 04000831A EP 1447567 A2 EP1447567 A2 EP 1447567A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
temperature control
control device
pump
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04000831A
Other languages
German (de)
French (fr)
Other versions
EP1447567A3 (en
EP1447567B1 (en
Inventor
Robert Watz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1447567A2 publication Critical patent/EP1447567A2/en
Publication of EP1447567A3 publication Critical patent/EP1447567A3/en
Application granted granted Critical
Publication of EP1447567B1 publication Critical patent/EP1447567B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump arrangement according to the preamble of 1. Protection claim.
  • Vacuum pumps in which the invention can be used particularly effectively can be rotating pumps, especially friction pumps. They exist usually from a number of levels, which are designed differently can and each have rotor and corresponding stator components. This Pump-active components are penetrated by the gas to be pumped. To optimal Pump properties, such as maximum gas throughput and maximum compression, To reach the rotating parts at high speed circulate. The drive energy required for this purpose is only partially in transformed kinetic energy. Much of it is called heat loss released. Further undesirable amounts of heat are released through storage (mechanical losses due to friction in ball bearings or electrical Losses in magnetic bearings) and by compression and friction of the gases.
  • the amount of gases pumped by a vacuum pump is among others depends on the temperature in the scoop chamber.
  • the amount of gas is higher Temperature per unit volume is lower than at lower temperature. It is So it makes sense to take measures to increase the temperature in the scooping chamber to reduce.
  • the rotor temperature becomes due to the heat dissipation to the pump housing affected. With a cool pump housing and thus a larger one The temperature difference between the rotor and the housing is the one that arises on the rotor Heat dissipated better. This allows the amount of gas to be pumped increase.
  • a lower rotor temperature also has a positive effect the lifespan.
  • vacuum pumps are of conventional design directly connected to the recipient.
  • cooling devices which are integrated in the pump housing.
  • Such a rigid solution fixes the increased manufacturing costs even for the applications where one Cooling at the appropriate point is not necessary.
  • the invention is based on the object of presenting a vacuum pump which effectively dissipates the heat generated during operation can.
  • the construction should be simple and inexpensive to implement and variable be applicable.
  • the arrangement according to the invention is a simple construction. You can in Principle of every pump both in the high vacuum range and in the fore vacuum area to be attached. If necessary, several components can be put together to be assembled. By varying the temperature of the tempered liquid the temperature at different points of the pump depending on the requirement adjusted and so the thermal conditions optimal to the application and the operating status can be adjusted. In particular, there is Possibility, for example, of a higher temperature on the fore-vacuum side generate to prevent condensation at this point.
  • the pump is with the housing 1, which has a suction opening 2 and Has gas outlet opening 3, provided.
  • the rotor shaft 4 is in bearings 5 and 6 fixed and driven by the motor 7.
  • Component 18 attached, which has a temperature control device 20.
  • a first embodiment (Fig. 2) is the component on the circumference with a groove 21 for Providing a tubular hollow body 22 provided. Through this hollow body flows through an inlet connection 23 and a corresponding one, not here shown outlet the tempered liquid.
  • a groove 16 is attached. This is with a sleeve 27 and Sealing devices 28 closed.
  • the tempered in this groove Liquid via an inlet connection 31 and one not shown Flow outlet pipe.
  • FIG. 4 Another embodiment is as a detail in Fig. 4 and for better explanation shown again in Fig. 4a in plan view as a section.
  • Component 18 with bores 32 extending in the tangential direction for receiving the tempered liquid.
  • ком ⁇ онент 18 can be between Pump and recipient can be arranged. Via a temperature control device 35 The temperature of those flowing through the component 18 can be known per se Liquid can be adapted to the requirements.
  • the invention enables better heat dissipation from the pump flange as well thermal decoupling from the recipient.
  • the temperature control is independent of the pump cooling circuit. Existing systems can easily can be converted by adding one or more components.
  • the invention Arrangement not only allows cooling, but also beyond general temperature control in the area used.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressor (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A tempering device (20) is provided between a suction side flange (13) of a pump and a recipient connection flange (16).

Description

Die Erfindung betrifft eine Vakuumpumpanordnung nach dem Oberbegriff des 1. Schutzanspruches.The invention relates to a vacuum pump arrangement according to the preamble of 1. Protection claim.

Vakuumpumpen, bei denen die Erfindung besonders effektiv eingesetzt werden kann, sind rotierende Pumpen, insbesondere Reibungspumpen. Sie bestehen in der Regel aus einer Anzahl von Stufen, welche unterschiedlich gestaltet sein können und jeweils Rotor- und entsprechende Statorbauteile aufweisen. Diese pumpaktiven Bauteile werden von dem zu fördernden Gas durchsetzt. Um optimale Pumpeigenschaften, wie maximalen Gasdurchsatz und maximale Kompression, zu erreichen, müssen die rotierenden Teile mit hoher Geschwindigkeit umlaufen. Die zu diesem Zweck benötigte Antriebsenergie wird nur zum Teil in kinetische Energie verwandelt. Ein großer Teil davon wird als Verlustwärme freigesetzt. Weitere unerwünschte Wärmemengen werden frei durch die Lagerung (mechanische Verluste durch Reibung in Kugellagern oder elektrische Verluste in Magnetlagern) und durch Kompression und Reibung der Gase.Vacuum pumps in which the invention can be used particularly effectively can be rotating pumps, especially friction pumps. They exist usually from a number of levels, which are designed differently can and each have rotor and corresponding stator components. This Pump-active components are penetrated by the gas to be pumped. To optimal Pump properties, such as maximum gas throughput and maximum compression, To reach the rotating parts at high speed circulate. The drive energy required for this purpose is only partially in transformed kinetic energy. Much of it is called heat loss released. Further undesirable amounts of heat are released through storage (mechanical losses due to friction in ball bearings or electrical Losses in magnetic bearings) and by compression and friction of the gases.

Zur Erzeugung von Ultrahochvakuum in einem am Ansaugflansch angeschlossenen Rezipienten ist es üblich, diesen auszuheizen. Dadurch wird das erwünschte Vakuum in deutlich kürzerer Zeit erreicht als ohne Heizen.To generate ultra high vacuum in a connected to the intake flange Recipients are usually used to heat them up. This will make the desired Vacuum reached in a significantly shorter time than without heating.

So werden durch den Betrieb der Pumpe und auch durch das Ausheizen des Rezipienten erhebliche Wärmemengen freigesetzt. So by the operation of the pump and also by heating the Recipients released considerable amounts of heat.

Die Menge der von einer Vakuumpumpe geförderten Gase ist unter anderem von der Temperatur im Schöpfraum abhängig. Die Gasmenge ist bei höherer Temperatur pro Volumeneinheit kleiner als bei niedrigerer Temperatur. Es ist also sinnvoll, Maßnahmen zu ergreifen, um die Temperatur im Schöpfraum zu reduzieren. Die Rotortemperatur wird durch die Wärmeableitung zum Pumpengehäuse beeinflusst. Bei einem kühlen Pumpengehäuse und somit einem größeren Temperaturunterschied zwischen Rotor und Gehäuse wird die am Rotor entstehende Wärme besser abgeführt. Dadurch kann die zu pumpende Gasmenge erhöht werden. Eine niedrigere Rotortemperatur wirkt sich zusätzlich positiv auf die Lebensdauer aus.The amount of gases pumped by a vacuum pump is among others depends on the temperature in the scoop chamber. The amount of gas is higher Temperature per unit volume is lower than at lower temperature. It is So it makes sense to take measures to increase the temperature in the scooping chamber to reduce. The rotor temperature becomes due to the heat dissipation to the pump housing affected. With a cool pump housing and thus a larger one The temperature difference between the rotor and the housing is the one that arises on the rotor Heat dissipated better. This allows the amount of gas to be pumped increase. A lower rotor temperature also has a positive effect the lifespan.

Dem Stand der Technik entsprechend, sind Vakuumpumpen üblicher Bauweise direkt mit dem Rezipienten verbunden. Es gibt Konstruktionen mit Kühleinrichtungen, welche im Pumpengehäuse integriert sind. Eine solche starre Lösung fixiert die erhöhten Herstellkosten auch für die Anwendungen, bei denen eine Kühlung an der entsprechenden Stelle nicht erforderlich ist.According to the state of the art, vacuum pumps are of conventional design directly connected to the recipient. There are constructions with cooling devices, which are integrated in the pump housing. Such a rigid solution fixes the increased manufacturing costs even for the applications where one Cooling at the appropriate point is not necessary.

Der Erfindung liegt die Aufgabe zu Grunde, eine Vakuumpumpe vorzustellen, bei der die während des Betriebs entstehende Wärme effektiv abgeführt werden kann. Die Konstruktion soll einfach und kostengünstig zu verwirklichen und variabel einsetzbar sein.The invention is based on the object of presenting a vacuum pump which effectively dissipates the heat generated during operation can. The construction should be simple and inexpensive to implement and variable be applicable.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Schutzanspruches gelöst. Die Ansprüche 2 - 7 stellen weitere Ausgestaltungsformen der Erfindung dar.The task is characterized by the characteristic features of the 1st protection claim solved. Claims 2-7 represent further embodiments of the invention represents.

Die erfindungsgemäße Anordnung ist eine einfache Konstruktion. Sie kann im Prinzip an jede Pumpe sowohl im Hochvakuumbereich als auch im Vorvakuum bereich angebracht werden. Im Bedarfsfalle können mehrere Bauteile zusammen montiert werden. Durch Variation der Temperatur der temperierten Flüssigkeit kann die Temperatur an unterschiedlichen Stellen der Pumpe je nach Erfordernis eingestellt und so die thermischen Verhältnisse optimal an den Einsatzbereich und den Betriebszustand angeglichen werden. Insbesondere besteht die Möglichkeit, zum Beispiel auf der Vorvakuumseite eine höhere Temperatur zu erzeugen, um Kondensationen an dieser Stelle zu verhindern.The arrangement according to the invention is a simple construction. You can in Principle of every pump both in the high vacuum range and in the fore vacuum area to be attached. If necessary, several components can be put together to be assembled. By varying the temperature of the tempered liquid the temperature at different points of the pump depending on the requirement adjusted and so the thermal conditions optimal to the application and the operating status can be adjusted. In particular, there is Possibility, for example, of a higher temperature on the fore-vacuum side generate to prevent condensation at this point.

An Hand der Figuren 1 bis 4a soll die Erfindung am Beispiel einer Turbomolekularpumpe näher erläutert werden.

Fig. 1
zeigt eine Turbomolekularpumpe mit der erfindungsgemäßen Anordnung
Fig. 2
zeigt einen Ausschnitt aus Fig. 1
Fig. 3
zeigt einen Ausschnitt aus Fig. 1 einer weiteren Ausführungsform
Fig. 4
zeigt einen Ausschnitt aus Fig. 1 einer weiteren Ausführungsform
Fig. 4a
zeigt einen Schnitt senkrecht zur Achse der Ausführungsform von Fig. 4
1 to 4a, the invention will be explained in more detail using the example of a turbomolecular pump.
Fig. 1
shows a turbomolecular pump with the arrangement according to the invention
Fig. 2
shows a section of Fig. 1st
Fig. 3
shows a section of Fig. 1 of a further embodiment
Fig. 4
shows a section of Fig. 1 of a further embodiment
Fig. 4a
shows a section perpendicular to the axis of the embodiment of FIG. 4

Die Pumpe ist mit dem Gehäuse 1, welches eine Ansaugöffnung 2 und eine Gasaustrittsöffnung 3 aufweist, versehen. Die Rotorwelle 4 ist in Lagern 5 und 6 fixiert und wird durch den Motor 7 angetrieben. Auf der Rotorwelle sind Rotorscheiben 10 befestigt. Diese sind mit einer pumpaktiven Struktur versehen und bewirken mit den Statorscheiben 12, die ebenfalls mit einer solchen pumpaktiven Struktur versehen sind, den Pumpeffekt.The pump is with the housing 1, which has a suction opening 2 and Has gas outlet opening 3, provided. The rotor shaft 4 is in bearings 5 and 6 fixed and driven by the motor 7. There are rotor disks on the rotor shaft 10 attached. These are provided with a pump-active structure and effect with the stator disks 12, which are also pump-active with such Structure are provided, the pump effect.

Zwischen dem Flansch 13 auf der Ansaugseite 2 der Pumpe und dem Anschlussflansch 16 des Rezipienten 14 ist erfindungsgemäß ein eigenständiges Bauteil 18 angebracht, welches eine Temperiereinrichtung 20 aufweist. In einer ersten Ausführungsform (Fig. 2) ist das Bauteil am Umfang mit einer Nut 21 zur Aufnahme eines rohrförmigen Hohlkörpers 22 versehen. Durch diesen Hohlkörper fließt über einen Eingangsstutzen 23 und einen entsprechenden, hier nicht dargestellten Ausgangsstutzen die temperierte Flüssigkeit.Between the flange 13 on the suction side 2 of the pump and the connection flange 16 of the recipient 14 is an independent one according to the invention Component 18 attached, which has a temperature control device 20. In a first embodiment (Fig. 2) is the component on the circumference with a groove 21 for Providing a tubular hollow body 22 provided. Through this hollow body flows through an inlet connection 23 and a corresponding one, not here shown outlet the tempered liquid.

Bei der Ausführungsform, welche als Ausschnitt in Fig. 3 gezeigt ist, ist am Umfang des Bauteils 18 eine Nut 16 angebracht. Diese wird mit einer Hülse 27 und Abdichtungseinrichtungen 28 verschlossen. Somit kann in dieser Nut die temperierte Flüssigkeit über einen Eingangsstutzen 31 und einen nicht dargestellten Ausgangsstutzen fließen.In the embodiment, which is shown as a detail in Fig. 3, is on the circumference of the component 18 a groove 16 is attached. This is with a sleeve 27 and Sealing devices 28 closed. Thus, the tempered in this groove Liquid via an inlet connection 31 and one not shown Flow outlet pipe.

Eine weitere Ausführungsform ist als Ausschnitt in Fig. 4 und zur besseren Erläuterung noch einmal in Fig. 4a in Draufsicht als Schnitt dargestellt. Hier ist das Bauteil 18 mit in tangentialer Richtung verlaufenden Bohrungen 32 zur Aufnahme der temperierten Flüssigkeit versehen.Another embodiment is as a detail in Fig. 4 and for better explanation shown again in Fig. 4a in plan view as a section. Here it is Component 18 with bores 32 extending in the tangential direction for receiving the tempered liquid.

Als weitere Ausgestaltung der Erfindung können mehrere Bauteile 18 zwischen Pumpe und Rezipient angeordnet sein. Über eine Temperaturregeleinrichtung 35 an sich bekannter Art kann die Temperatur der durch das Bauteil 18 strömenden Flüssigkeit den Erfordernissen angepasst werden.As a further embodiment of the invention, several components 18 can be between Pump and recipient can be arranged. Via a temperature control device 35 The temperature of those flowing through the component 18 can be known per se Liquid can be adapted to the requirements.

Die Erfindung ermöglicht eine bessere Wärmeableitung vom Pumpenflansch sowie die thermische Entkopplung vom Rezipienten. Die Temperaturregelung ist vom Pumpenkühlkreislauf unabhängig. Bestehende Systeme können leicht durch Zufügen von einem oder mehreren Bauteilen umgerüstet werden. Die erfindungsgemäße Anordnung erlaubt nicht nur zu kühlen, sondern darüber hinaus eine allgemeine Temperaturregelung im eingesetzten Bereich.The invention enables better heat dissipation from the pump flange as well thermal decoupling from the recipient. The temperature control is independent of the pump cooling circuit. Existing systems can easily can be converted by adding one or more components. The invention Arrangement not only allows cooling, but also beyond general temperature control in the area used.

Claims (7)

Vakuumpumpanordnung mit einem auf der Ansaugseite (2) angebrachten Flansch (13) zum Anschluss eines Rezipienten (14) mit Anschlussflansch (16), dadurch gekennzeichnet, dass zwischen dem Flansch (13) der Vakuumpumpe und dem Anschlussflansch (16) des Rezipienten (14) ein eigenständiges Bauteil (18) angebracht ist, welche eine Temperiereinrichtung (20) aufweist.Vacuum pump arrangement with a flange (13) attached to the suction side (2) for connecting a recipient (14) with a connecting flange (16), characterized in that between the flange (13) of the vacuum pump and the connecting flange (16) of the recipient (14) an independent component (18) is attached, which has a temperature control device (20). Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Temperiereinrichtung (20) durch eine am Umfang des Bauteils (18) angebrachte Nut (21) gebildet wird, welche einen rohrförmigen Hohlkörper (22) aufnimmt.Vacuum pump according to Claim 1, characterized in that the temperature control device (20) is formed by a groove (21) which is provided on the circumference of the component (18) and which receives a tubular hollow body (22). Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Temperiereinrichtung (20) durch eine am Umfang des Bauteils (18) angebrachte Nut (26) gebildet wird, welche mit einer Hülse (27) und Abdichtungseinrichtungen (28) verschlossen ist.Vacuum pump according to claim 1, characterized in that the temperature control device (20) is formed by a groove (26) made on the circumference of the component (18), which is closed with a sleeve (27) and sealing devices (28). Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Temperiereinrichtung (20) durch am Bauteil (18) angebrachte, in tangentialer Richtung verlaufende Bohrungen (30) gebildet wird.Vacuum pump according to Claim 1, characterized in that the temperature control device (20) is formed by bores (30) made on the component (18) and extending in the tangential direction. Vakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass die Temperiereinrichtung (18) von einer temperierten Flüssigkeit durchflossen wird.Vacuum pump according to one of the preceding claims, characterized in that a tempered liquid flows through the temperature control device (18). Vakuumpumpe nach Anspruch 5, dadurch gekennzeichnet, dass die Temperiereinrichtung (20) mit einer Temperaturregeleinrichtung (35) verbunden ist. Vacuum pump according to claim 5, characterized in that the temperature control device (20) is connected to a temperature control device (35). Vakuumpumpe nach einer der vorangehenden Ansprüche, dadurch gekennzeichnet, dass zwischen dem Flansch (13) der Vakuumpumpe und dem Anschlussflansch des Rezipienten (14) mehrere eigenständige Bauteile (18) mit Temperiereinrichtung (20) angebracht sind.Vacuum pump according to one of the preceding claims, characterized in that between the flange (13) of the vacuum pump and the connecting flange of the recipient (14) several independent components (18) with temperature control device (20) are attached.
EP04000831A 2003-02-07 2004-01-16 Vacuum pump arrangement Expired - Lifetime EP1447567B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10305038 2003-02-07
DE10305038A DE10305038A1 (en) 2003-02-07 2003-02-07 Vacuum pumping arrangement

Publications (3)

Publication Number Publication Date
EP1447567A2 true EP1447567A2 (en) 2004-08-18
EP1447567A3 EP1447567A3 (en) 2005-06-15
EP1447567B1 EP1447567B1 (en) 2007-09-19

Family

ID=32668001

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04000831A Expired - Lifetime EP1447567B1 (en) 2003-02-07 2004-01-16 Vacuum pump arrangement

Country Status (5)

Country Link
US (1) US7500821B2 (en)
EP (1) EP1447567B1 (en)
JP (1) JP2004239258A (en)
AT (1) ATE373781T1 (en)
DE (2) DE10305038A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008011489U1 (en) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump
DE102013203421A1 (en) * 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh vacuum pump
DE202013008468U1 (en) * 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh vacuum pump housing
JP5772994B2 (en) * 2014-01-10 2015-09-02 株式会社島津製作所 Turbo molecular pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0397051A1 (en) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
EP0767307A1 (en) * 1995-10-04 1997-04-09 Alcatel Cit Secondary pumping group
EP0819856A1 (en) * 1996-07-18 1998-01-21 VARIAN S.p.A. Vacuum pump
DE19724323A1 (en) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flange connection
EP1231383A1 (en) * 2001-02-01 2002-08-14 Seiko Instruments Inc. Vacuum pump

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US1136957A (en) * 1914-01-06 1915-04-27 Carl F Hettinger Rotary compressor.
US1288728A (en) * 1915-09-18 1918-12-24 Spencer Turbine Co Rotary blower.
US1601531A (en) * 1925-05-11 1926-09-28 Jeannin Electric Company Electric-motor casing
CA584954A (en) * 1954-07-01 1959-10-13 Westinghouse Electric Corporation Motor pump unit
US3142155A (en) * 1961-11-29 1964-07-28 Gen Electric Gas turbine engine cooling arrangement
US4073338A (en) * 1973-06-26 1978-02-14 Toyota Chuo Kenkyusho Heat exchangers
USRE36610E (en) 1989-05-09 2000-03-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
DE4020015C1 (en) 1990-06-20 1991-09-26 Mannesmann Ag, 4000 Duesseldorf, De
US5154573A (en) * 1991-09-12 1992-10-13 Ingersoll-Rand Company Cooling system for centrifugal pump components
DE4220015A1 (en) * 1992-06-19 1993-12-23 Leybold Ag Gas friction vacuum pump with high vacuum section and pre-vacuum section - has cooling system for high vacuum section and pump is equipped with heater at its pre-vacuum section
DE4237972C2 (en) * 1992-11-11 1997-06-12 Leybold Ag Vacuum pump with rotor
JPH11315794A (en) * 1998-05-01 1999-11-16 Kashiyama Kogyo Kk Screw dry vacuum pump with cooling mechanism
EP1105623B1 (en) * 1998-08-18 2003-05-28 Siemens Aktiengesellschaft Turbine housing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0397051A1 (en) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
EP0767307A1 (en) * 1995-10-04 1997-04-09 Alcatel Cit Secondary pumping group
EP0819856A1 (en) * 1996-07-18 1998-01-21 VARIAN S.p.A. Vacuum pump
DE19724323A1 (en) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flange connection
EP1231383A1 (en) * 2001-02-01 2002-08-14 Seiko Instruments Inc. Vacuum pump

Also Published As

Publication number Publication date
DE502004004989D1 (en) 2007-10-31
ATE373781T1 (en) 2007-10-15
DE10305038A1 (en) 2004-08-19
US20040156713A1 (en) 2004-08-12
US7500821B2 (en) 2009-03-10
EP1447567A3 (en) 2005-06-15
EP1447567B1 (en) 2007-09-19
JP2004239258A (en) 2004-08-26

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