EP1447567B1 - Vacuum pump arrangement - Google Patents

Vacuum pump arrangement Download PDF

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Publication number
EP1447567B1
EP1447567B1 EP04000831A EP04000831A EP1447567B1 EP 1447567 B1 EP1447567 B1 EP 1447567B1 EP 04000831 A EP04000831 A EP 04000831A EP 04000831 A EP04000831 A EP 04000831A EP 1447567 B1 EP1447567 B1 EP 1447567B1
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EP
European Patent Office
Prior art keywords
vacuum pump
temperature
pump
flange
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04000831A
Other languages
German (de)
French (fr)
Other versions
EP1447567A3 (en
EP1447567A2 (en
Inventor
Robert Watz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1447567A2 publication Critical patent/EP1447567A2/en
Publication of EP1447567A3 publication Critical patent/EP1447567A3/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a Vakuumpumpan extract according to the preamble of the first protection claim.
  • Vacuum pumps in which the invention can be used particularly effectively are rotating pumps, in particular friction pumps. They usually consist of a number of stages, which can be designed differently and each having rotor and corresponding stator components. These pump-active components are penetrated by the gas to be delivered. In order to achieve optimum pumping properties, such as maximum gas flow rate and maximum compression, the rotating parts must rotate at high speed. The drive energy required for this purpose is only partially transformed into kinetic energy. A large part of it is released as heat loss. Further undesirable amounts of heat are released by the storage (mechanical losses due to friction in ball bearings or electrical losses in magnetic bearings) and by compression and friction of the gases.
  • the amount of gases delivered by a vacuum pump depends, among other things, on the temperature in the pump chamber.
  • the amount of gas is smaller at higher temperature per unit volume than at lower temperature. So it makes sense to take measures to reduce the temperature in the pump chamber.
  • the rotor temperature is influenced by the heat dissipation to the pump housing. With a cool pump housing and thus a larger temperature difference between rotor and housing, the heat generated at the rotor is better dissipated. As a result, the amount of gas to be pumped can be increased.
  • a lower rotor temperature also has a positive effect on the service life.
  • vacuum pumps of conventional construction are connected directly to the recipient.
  • cooling devices integrated in the pump housing.
  • Such a rigid solution fixes the increased manufacturing costs also for the applications where cooling at the appropriate location is not required.
  • the state of the art includes the DE 197 24 323 A1 , which proposes to arrange a separate component between the vacuum pump and the recipient.
  • the coolant flows here directly in a channel, which is formed by the component material.
  • the channel can therefore be constructed by different materials, which can lead to electrochemical processes.
  • the EP-A-1 231 383 proposes to arrange a component with poor thermal conduction properties between the recipient and the vacuum pump.
  • the proposed constructions are complex.
  • EP-A-0397 051 and EP-A-0 767 307 essentially relate to cold traps which are arranged in the gas flow between the recipient and the vacuum pump.
  • the invention is based on the object to present a vacuum pump, in which the heat generated during operation can be effectively dissipated.
  • the design should be simple and inexpensive to implement and variable.
  • the arrangement according to the invention is a simple construction. It can, in principle, be applied to any pump both in the high vacuum range and in the pre-vacuum be attached area. If necessary, several components can be assembled together.
  • the temperature at different points of the pump can be set as required and thus the thermal conditions are optimally adapted to the application area and the operating state. In particular, it is possible, for example, to generate a higher temperature on the fore-vacuum side in order to prevent condensation at this point.
  • the pump is provided with the housing 1, which has a suction opening 2 and a gas outlet opening 3.
  • the rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7.
  • Rotor disks 10 are mounted on the rotor shaft. These are provided with a pump-active structure and cause with the stator 12, which are also provided with such a pump-active structure, the pumping effect.
  • an independent component 18 is mounted according to the invention, which has a tempering device 20.
  • the component is provided on the circumference with a groove 21 for receiving a tubular hollow body 22. Through this hollow body flows via an inlet connection 23 and a corresponding, not shown here, outlet nozzle, the temperature-controlled liquid.
  • a plurality of components 18 may be arranged between the pump and the recipient.
  • a temperature control device 35 of a type known per se the temperature of the liquid flowing through the component 18 can be adapted to the requirements.
  • the invention enables better heat dissipation from the pump flange as well as the thermal decoupling from the recipient.
  • the temperature control is independent of the pump cooling circuit. Existing systems can be easily upgraded by adding one or more components.
  • the arrangement according to the invention not only allows to cool, but also a general temperature control in the area used.
  • a groove 16 is mounted on the circumference of the component 18. This is closed with a sleeve 27 and sealing means 28. Thus, in this groove, the temperature-controlled liquid can flow via an inlet connection 31 and an outlet connection, not shown.
  • Fig. 4 Another explanatory example is shown as a detail in Fig. 4 and for better explanation again in Fig. 4a in plan view as a section.
  • the component 18 is provided with bores 32 extending in the tangential direction for receiving the tempered liquid.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A tempering device (20) is provided between a suction side flange (13) of a pump and a recipient connection flange (16).

Description

Die Erfindung betrifft eine Vakuumpumpanordnung nach dem Oberbegriff des 1. Schutzanspruches.The invention relates to a Vakuumpumpanordnung according to the preamble of the first protection claim.

Vakuumpumpen, bei denen die Erfindung besonders effektiv eingesetzt werden kann, sind rotierende Pumpen, insbesondere Reibungspumpen. Sie bestehen in der Regel aus einer Anzahl von Stufen, welche unterschiedlich gestaltet sein können und jeweils Rotor- und entsprechende Statorbauteile aufweisen. Diese pumpaktiven Bauteile werden von dem zu fördernden Gas durchsetzt. Um optimale Pumpeigenschaften, wie maximalen Gasdurchsatz und maximale Kompression, zu erreichen, müssen die rotierenden Teile mit hoher Geschwindigkeit umlaufen. Die zu diesem Zweck benötigte Antriebsenergie wird nur zum Teil in kinetische Energie verwandelt. Ein großer Teil davon wird als Verlustwärme freigesetzt. Weitere unerwünschte Wärmemengen werden frei durch die Lagerung (mechanische Verluste durch Reibung in Kugellagern oder elektrische Verluste in Magnetlagern) und durch Kompression und Reibung der Gase.Vacuum pumps in which the invention can be used particularly effectively are rotating pumps, in particular friction pumps. They usually consist of a number of stages, which can be designed differently and each having rotor and corresponding stator components. These pump-active components are penetrated by the gas to be delivered. In order to achieve optimum pumping properties, such as maximum gas flow rate and maximum compression, the rotating parts must rotate at high speed. The drive energy required for this purpose is only partially transformed into kinetic energy. A large part of it is released as heat loss. Further undesirable amounts of heat are released by the storage (mechanical losses due to friction in ball bearings or electrical losses in magnetic bearings) and by compression and friction of the gases.

Zur Erzeugung von Ultrahochvakuum in einem am Ansaugflansch angeschlossenen Rezipienten ist es üblich, diesen auszuheizen. Dadurch wird das erwünschte Vakuum in deutlich kürzerer Zeit erreicht als ohne Heizen.In order to produce ultrahigh vacuum in a recipient connected to the intake flange, it is customary to heat it out. As a result, the desired vacuum is achieved in a much shorter time than without heating.

So werden durch den Betrieb der Pumpe und auch durch das Ausheizen des Rezipienten erhebliche Wärmemengen freigesetzt.Thus, by the operation of the pump and also by the heating of the recipient considerable amounts of heat are released.

Die Menge der von einer Vakuumpumpe geförderten Gase ist unter anderem von der Temperatur im Schöpfraum abhängig. Die Gasmenge ist bei höherer Temperatur pro Volumeneinheit kleiner als bei niedrigerer Temperatur. Es ist also sinnvoll, Maßnahmen zu ergreifen, um die Temperatur im Schöpfraum zu reduzieren. Die Rotortemperatur wird durch die Wärmeableitung zum Pumpengehäuse beeinflusst. Bei einem kühlen Pumpengehäuse und somit einem größeren Temperaturunterschied zwischen Rotor und Gehäuse wird die am Rotor entstehende Wärme besser abgeführt. Dadurch kann die zu pumpende Gasmenge erhöht werden. Eine niedrigere Rotortemperatur wirkt sich zusätzlich positiv auf die Lebensdauer aus.The amount of gases delivered by a vacuum pump depends, among other things, on the temperature in the pump chamber. The amount of gas is smaller at higher temperature per unit volume than at lower temperature. So it makes sense to take measures to reduce the temperature in the pump chamber. The rotor temperature is influenced by the heat dissipation to the pump housing. With a cool pump housing and thus a larger temperature difference between rotor and housing, the heat generated at the rotor is better dissipated. As a result, the amount of gas to be pumped can be increased. A lower rotor temperature also has a positive effect on the service life.

Dem Stand der Technik entsprechend, sind Vakuumpumpen üblicher Bauweise direkt mit dem Rezipienten verbunden. Es gibt Konstruktionen mit Kühleinrichtungen, welche im Pumpengehäuse integriert sind. Eine solche starre Lösung fixiert die erhöhten Herstellkosten auch für die Anwendungen, bei denen eine Kühlung an der entsprechenden Stelle nicht erforderlich ist.According to the state of the art, vacuum pumps of conventional construction are connected directly to the recipient. There are constructions with cooling devices integrated in the pump housing. Such a rigid solution fixes the increased manufacturing costs also for the applications where cooling at the appropriate location is not required.

Zum Stand der Technik gehört die DE 197 24 323 A1 , die vorschlägt, ein eigenständiges Bauteil zwischen Vakuumpumpe und Rezipient anzuordnen. Das Kühlmittel fließt hier direkt in einem Kanal, der durch das Bauteilmaterial gebildet wird. Der Kanal kann daher durch unterschiedliche Materialien aufgebaut sein, wodurch es zu elektrochemischen Prozessen kommen kann.The state of the art includes the DE 197 24 323 A1 , which proposes to arrange a separate component between the vacuum pump and the recipient. The coolant flows here directly in a channel, which is formed by the component material. The channel can therefore be constructed by different materials, which can lead to electrochemical processes.

Die EP-A-1 231 383 schlägt vor, zwischen Rezipent und Vakuumpumpe ein Bauteil mit schlechten Wärmeleiteigenschaften anzuordnen. Die vorgeschlagenen Konstruktionen sind aufwändig.The EP-A-1 231 383 proposes to arrange a component with poor thermal conduction properties between the recipient and the vacuum pump. The proposed constructions are complex.

Die Dokumente EP-A-0 819 856 , EP-A-0397 051 und EP-A-0 767 307 betreffen im wesentlichen Kühlfallen, die im Gasstrom zwischen Rezipient und Vakuumpumpe angeordnet werden.The documents EP-A-0 819 856 . EP-A-0397 051 and EP-A-0 767 307 essentially relate to cold traps which are arranged in the gas flow between the recipient and the vacuum pump.

Der Erfindung liegt die Aufgabe zu Grunde, eine Vakuumpumpe vorzustellen, bei der die während des Betriebs entstehende Wärme effektiv abgeführt werden kann. Die Konstruktion soll einfach und kostengünstig zu verwirklichen und variabel einsetzbar sein.The invention is based on the object to present a vacuum pump, in which the heat generated during operation can be effectively dissipated. The design should be simple and inexpensive to implement and variable.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Schutzanspruches gelöst. Die Ansprüche 2 - 7 stellen weitere Ausgestaltungsformen der Erfindung dar.The problem is solved by the characterizing features of the first protection claim. The claims 2-7 represent further embodiments of the invention.

Die erfindungsgemäße Anordnung ist eine einfache Konstruktion. Sie kann im Prinzip an jede Pumpe sowohl im Hochvakuumbereich als auch im Vorvakuum bereich angebracht werden. Im Bedarfsfalle können mehrere Bauteile zusammen montiert werden. Durch Variation der Temperatur der temperierten Flüssigkeit kann die Temperatur an unterschiedlichen Stellen der Pumpe je nach Erfordernis eingestellt und so die thermischen Verhältnisse optimal an den Einsatzbereich und den Betriebszustand angeglichen werden. Insbesondere besteht die Möglichkeit, zum Beispiel auf der Vorvakuumseite eine höhere Temperatur zu erzeugen, um Kondensationen an dieser Stelle zu verhindern.The arrangement according to the invention is a simple construction. It can, in principle, be applied to any pump both in the high vacuum range and in the pre-vacuum be attached area. If necessary, several components can be assembled together. By varying the temperature of the temperature-controlled liquid, the temperature at different points of the pump can be set as required and thus the thermal conditions are optimally adapted to the application area and the operating state. In particular, it is possible, for example, to generate a higher temperature on the fore-vacuum side in order to prevent condensation at this point.

An Hand der Figuren 1 und 2 soll die Erfindung am Beispiel einer Turbomolekularpumpe näher erläutert werden.

Fig. 1
zeigt eine Turbomolekularpumpe mit der erfindungsgemäßen Anordnung
Fig. 2
zeigt einen Ausschnitt aus Fig. 1
Fig. 3
zeigt einen Ausschnitt aus Fig. 1 eines erläuternden Beispiels
Fig. 4
zeigt einen Ausschnitt aus Fig. 1 eines erläuternden Beispiels
Fig. 4a
zeigt einen Schnitt senkrecht zur Achse des Beispiels von Fig. 4
With reference to Figures 1 and 2, the invention will be explained in more detail using the example of a turbomolecular pump.
Fig. 1
shows a turbomolecular pump with the inventive arrangement
Fig. 2
shows a detail of Fig. 1st
Fig. 3
shows a detail of Fig. 1 of an illustrative example
Fig. 4
shows a detail of Fig. 1 of an illustrative example
Fig. 4a
shows a section perpendicular to the axis of the example of FIG. 4

Die Pumpe ist mit dem Gehäuse 1, welches eine Ansaugöffnung 2 und eine Gasaustrittsöffnung 3 aufweist, versehen. Die Rotorwelle 4 ist in Lagern 5 und 6 fixiert und wird durch den Motor 7 angetrieben. Auf der Rotorwelle sind Rotorscheiben 10 befestigt. Diese sind mit einer pumpaktiven Struktur versehen und bewirken mit den Statorscheiben 12, die ebenfalls mit einer solchen pumpaktiven Struktur versehen sind, den Pumpeffekt.The pump is provided with the housing 1, which has a suction opening 2 and a gas outlet opening 3. The rotor shaft 4 is fixed in bearings 5 and 6 and is driven by the motor 7. Rotor disks 10 are mounted on the rotor shaft. These are provided with a pump-active structure and cause with the stator 12, which are also provided with such a pump-active structure, the pumping effect.

Zwischen dem Flansch 13 auf der Ansaugseite 2 der Pumpe und dem Anschlussflansch 16 des Rezipienten 14 ist erfindungsgemäß ein eigenständiges Bauteil 18 angebracht, welches eine Temperiereinrichtung 20 aufweist. In einer ersten Ausführungsform (Fig. 2) ist das Bauteil am Umfang mit einer Nut 21 zur Aufnahme eines rohrförmigen Hohlkörpers 22 versehen. Durch diesen Hohlkörper fließt über einen Eingangsstutzen 23 und einen entsprechenden, hier nicht dargestellten Ausgangsstutzen die temperierte Flüssigkeit.Between the flange 13 on the suction side 2 of the pump and the connecting flange 16 of the recipient 14, an independent component 18 is mounted according to the invention, which has a tempering device 20. In a In the first embodiment (FIG. 2), the component is provided on the circumference with a groove 21 for receiving a tubular hollow body 22. Through this hollow body flows via an inlet connection 23 and a corresponding, not shown here, outlet nozzle, the temperature-controlled liquid.

Als weitere Ausgestaltung der Erfindung können mehrere Bauteile 18 zwischen Pumpe und Rezipient angeordnet sein. Über eine Temperaturregeleinrichtung 35 an sich bekannter Art kann die Temperatur der durch das Bauteil 18 strömenden Flüssigkeit den Erfordernissen angepasst werden.As a further embodiment of the invention, a plurality of components 18 may be arranged between the pump and the recipient. By way of a temperature control device 35 of a type known per se, the temperature of the liquid flowing through the component 18 can be adapted to the requirements.

Die Erfindung ermöglicht eine bessere Wärmeableitung vom Pumpenflansch sowie die thermische Entkopplung vom Rezipienten. Die Temperaturregelung ist vom Pumpenkühlkreislauf unabhängig. Bestehende Systeme können leicht durch Zufügen von einem oder mehreren Bauteilen umgerüstet werden. Die erfindungsgemäße Anordnung erlaubt nicht nur zu kühlen, sondern darüber hinaus eine allgemeine Temperaturregelung im eingesetzten Bereich.The invention enables better heat dissipation from the pump flange as well as the thermal decoupling from the recipient. The temperature control is independent of the pump cooling circuit. Existing systems can be easily upgraded by adding one or more components. The arrangement according to the invention not only allows to cool, but also a general temperature control in the area used.

Bei einem erläuternden, nicht zur Erfindung gehörenden Beispiel, welches als Ausschnitt in Fig. 3 gezeigt ist, ist am Umfang des Bauteils 18 eine Nut 16 angebracht. Diese wird mit einer Hülse 27 und Abdichtungseinrichtungen 28 verschlossen. Somit kann in dieser Nut die temperierte Flüssigkeit über einen Eingangsstutzen 31 und einen nicht dargestellten Ausgangsstutzen fließen.In an illustrative, not belonging to the invention example, which is shown as a detail in Fig. 3, a groove 16 is mounted on the circumference of the component 18. This is closed with a sleeve 27 and sealing means 28. Thus, in this groove, the temperature-controlled liquid can flow via an inlet connection 31 and an outlet connection, not shown.

Ein weiteres erläuterndes Beispiel ist als Ausschnitt in Fig. 4 und zur besseren Erläuterung noch einmal in Fig. 4a in Draufsicht als Schnitt dargestellt. Hier ist das Bauteil 18 mit in tangentialer Richtung verlaufenden Bohrungen 32 zur Aufnahme der temperierten Flüssigkeit versehen.Another explanatory example is shown as a detail in Fig. 4 and for better explanation again in Fig. 4a in plan view as a section. Here, the component 18 is provided with bores 32 extending in the tangential direction for receiving the tempered liquid.

Claims (4)

  1. Vacuum pump arrangement with a flange (13), which is located on the intake side (2), for connecting a container (14) with a connecting flange (16), and an independent component (18) which is located between the flange (13) of the vacuum pump and the connecting flange (16) of the container (14) and which comprises a temperature moderating device, characterised in that the temperature moderating device (20) is formed by a groove (21) which is located at the periphery of the component (18) and which accommodates a tubular hollow body (22).
  2. Vacuum pump according to Claim 1, characterised in that a temperature-moderated fluid flows through the temperature moderating device (20).
  3. Vacuum pump according to Claim 1 or 2, characterised in that the temperature moderating device (20) is connected to a temperature control device (35).
  4. Vacuum pump according to any one of the preceding Claims, characterised in that a plurality of independent components (18) with a temperature moderating device (20) are located between the flange (13) of the vacuum pump and the connecting flange of the container (14).
EP04000831A 2003-02-07 2004-01-16 Vacuum pump arrangement Expired - Lifetime EP1447567B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10305038 2003-02-07
DE10305038A DE10305038A1 (en) 2003-02-07 2003-02-07 Vacuum pumping arrangement

Publications (3)

Publication Number Publication Date
EP1447567A2 EP1447567A2 (en) 2004-08-18
EP1447567A3 EP1447567A3 (en) 2005-06-15
EP1447567B1 true EP1447567B1 (en) 2007-09-19

Family

ID=32668001

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04000831A Expired - Lifetime EP1447567B1 (en) 2003-02-07 2004-01-16 Vacuum pump arrangement

Country Status (5)

Country Link
US (1) US7500821B2 (en)
EP (1) EP1447567B1 (en)
JP (1) JP2004239258A (en)
AT (1) ATE373781T1 (en)
DE (2) DE10305038A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008011489U1 (en) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump
DE102013203421A1 (en) * 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh vacuum pump
DE202013008468U1 (en) * 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh vacuum pump housing
JP5772994B2 (en) * 2014-01-10 2015-09-02 株式会社島津製作所 Turbo molecular pump

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US1136957A (en) * 1914-01-06 1915-04-27 Carl F Hettinger Rotary compressor.
US1288728A (en) * 1915-09-18 1918-12-24 Spencer Turbine Co Rotary blower.
US1601531A (en) * 1925-05-11 1926-09-28 Jeannin Electric Company Electric-motor casing
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US3142155A (en) * 1961-11-29 1964-07-28 Gen Electric Gas turbine engine cooling arrangement
US4073338A (en) * 1973-06-26 1978-02-14 Toyota Chuo Kenkyusho Heat exchangers
USRE36610E (en) 1989-05-09 2000-03-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
JP2538796B2 (en) * 1989-05-09 1996-10-02 株式会社東芝 Vacuum exhaust device and vacuum exhaust method
DE4020015C1 (en) 1990-06-20 1991-09-26 Mannesmann Ag, 4000 Duesseldorf, De
US5154573A (en) * 1991-09-12 1992-10-13 Ingersoll-Rand Company Cooling system for centrifugal pump components
DE4237972C2 (en) * 1992-11-11 1997-06-12 Leybold Ag Vacuum pump with rotor
DE4220015A1 (en) * 1992-06-19 1993-12-23 Leybold Ag Gas friction vacuum pump with high vacuum section and pre-vacuum section - has cooling system for high vacuum section and pump is equipped with heater at its pre-vacuum section
FR2739574B1 (en) 1995-10-04 1997-11-14 Cit Alcatel SECONDARY PUMPING GROUP
IT1287016B1 (en) * 1996-07-18 1998-07-24 Varian Spa VACUUM PUMP.
DE19724323A1 (en) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flange connection
JPH11315794A (en) * 1998-05-01 1999-11-16 Kashiyama Kogyo Kk Screw dry vacuum pump with cooling mechanism
KR20010072708A (en) * 1998-08-18 2001-07-31 칼 하인쯔 호르닝어 Turbine housing
JP4657463B2 (en) * 2001-02-01 2011-03-23 エドワーズ株式会社 Vacuum pump

Also Published As

Publication number Publication date
EP1447567A3 (en) 2005-06-15
ATE373781T1 (en) 2007-10-15
US20040156713A1 (en) 2004-08-12
EP1447567A2 (en) 2004-08-18
JP2004239258A (en) 2004-08-26
DE502004004989D1 (en) 2007-10-31
US7500821B2 (en) 2009-03-10
DE10305038A1 (en) 2004-08-19

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