EP0767307A1 - Secondary pumping group - Google Patents

Secondary pumping group Download PDF

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Publication number
EP0767307A1
EP0767307A1 EP96402094A EP96402094A EP0767307A1 EP 0767307 A1 EP0767307 A1 EP 0767307A1 EP 96402094 A EP96402094 A EP 96402094A EP 96402094 A EP96402094 A EP 96402094A EP 0767307 A1 EP0767307 A1 EP 0767307A1
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EP
European Patent Office
Prior art keywords
pump
trap
cryogenic
chamber
unit according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96402094A
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German (de)
French (fr)
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EP0767307B1 (en
Inventor
Guy Gorinas
Rainer Mathes
Alain Ravex
Jean-Marc Poncet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
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Alcatel CIT SA
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Publication of EP0767307A1 publication Critical patent/EP0767307A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Definitions

  • the present invention relates to a secondary pumping unit.
  • the manufacturing processes are carried out under a gaseous atmosphere at very low pressure requiring extensive pumping of the enclosure where the industrial process takes place. This is the case, for example, in the semiconductor industry, vacuum deposition and other industrial processes.
  • cryogenic trap With a mechanical secondary pump. Such a trap is either placed in parallel on the enclosure with the mechanical secondary pump, or placed in series with the pump upstream of its suction.
  • the cryogenic trap is cooled by a cryogenerator working according to the Gifford-Mc Mahon or Stirling principle.
  • the cycle is carried out using a movable piston.
  • a cryogenic generator of the pulsed tube type which has the advantage of having no movable piston and is therefore not the seat of any vibration and is of simple and economical construction.
  • Such a generator consists of a compressor, a rotary valve ensuring alternating pressures, an exchanger-regenerator constituting a mass of thermal inertia, a pulsed tube comprising a hot end and a cold end and d a buffer volume connected to the pulsed tube by a valve and making it possible to adjust the phase of the gas pressure in the tube relative to the speed of movement of the gas in the tube which is the subject of pressure waves.
  • the cold end of the pulsed tube is intimately linked to the thermally conductive surface acting as a cryogenic trap.
  • cryogenerator of this type is described in the article entitled: "Experimental study and modelization of a pulse tube” pages 9 to 12 of volume 32 ICEC Supplement of the journal Cryogenics published in 1992.
  • the object of the invention is to propose a secondary pumping group, associating a cryogenic trap, having, for pumping speed performance equal to the solutions mentioned above, a smaller bulk.
  • the subject of the invention is therefore a secondary pumping group associating a mechanical secondary pump with a cryogenic trap, characterized in that said cryogenic trap forms a ring externally surrounding the mechanical secondary pump at its suction, said trap being enclosed in a casing delimiting the suction opening, in parallel, of the mechanical pump and the cryogenic trap.
  • said trap has a U-shaped section whose open part faces the suction.
  • the cryogenic trap is cooled by a cryogenic generator of the pulsed tube type surrounding the pump under said trap.
  • FIG. 1 is a schematic view showing a secondary pumping group associating a mechanical secondary pump with a cryogenic trap in an arrangement according to the prior art.
  • Figure 2 is a schematic view showing a secondary pumping unit according to the invention.
  • Figure 3 is a view similar to that of Figure 2, but in which has been shown schematically a particular cryogenerator ensuring the cooling of the cryogenic trap.
  • FIG. 4 shows a group according to the invention connected to a vacuum chamber and comprising a pressure regulation device.
  • a pumping group associating in series a mechanical secondary pump 1 such as a turbomolecular pump for example, and a cryogenic trap 2, a regulating valve 3 being interposed between the pump 1 and the cold trap 2.
  • a mechanical secondary pump 1 such as a turbomolecular pump for example
  • a cryogenic trap 2 a regulating valve 3 being interposed between the pump 1 and the cold trap 2.
  • a casing 4 naturally surrounds the cold trap 2 and includes a flange 5 for connecting the assembly to a chamber to be emptied, not shown, in which an industrial process is carried out, for example the manufacture of semiconductor components.
  • the trap 2 is cooled by a cryogenerator 6 of the movable piston 7 and compressor 8 type.
  • This arrangement introduces conductance between the pumping chamber and the suction of the turbomolecular pump which decreases the effective pumping speed of the turbomolecular pump.
  • Figure 2 shows the arrangement according to the invention.
  • the mechanical secondary pump 1 is associated with a cryogenic trap 2 which surrounds the pump at its aspiration.
  • the trap 2 also has a U-shaped section whose open part faces the suction.
  • the trap is enclosed in a casing 4 comprising a connecting flange 5.
  • the casing 4 delimits the suction opening, in parallel, of the entire pump mechanical 1 and cold trap 2.
  • the volume of the assembly is less for equal performance.
  • this arrangement avoids any risk that pieces of ice fall into the mechanical pump 1.
  • the cryogenic generator for cooling the trap 2 may be identical to that of FIG. 2, however advantageously used, for its simplicity and its absence of a movable piston thus avoiding any vibration, a cryogenic generator of the pulsed tube type as mentioned above.
  • this cryogenic generator of the pulsed tube type has its pulsed tube 9 which surrounds the mechanical pump 4 and is located below the trap 2.
  • the cold end of the pulsed tube 9 is fixed to the trap 2 by a heat-conducting part 10.
  • the pulsed tube 9 is supplied by a compressor 11 through a rotary valve 12 driven by a motor 13, and an exchanger-regenerator 14.
  • the exchanger-regenerator 14 the rotary valve 12 and the drive motor 13 are aligned parallel to the axis ⁇ of the pump.
  • Figure 4 shows a device for regulating the pressure in a pumping chamber 15 connected to the pumping group.
  • a valve 3 (see FIG. 1) situated between the pump 1 and the trap 2.
  • this regulation is ensured by an injection of neutral gas, for example from the argon, inside the mechanical secondary pump 1.
  • a supply line 16 leading to the inlet of the pump is supplied with gas.
  • a pressure gauge 17 which measures the pressure in the chamber 15 is linked to a flow regulator 18.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The assembly, associated with a secondary mechanical pump (1), has a cryogenic trap (2) in the form of a ring surrounding the suction side of the pump. The trap is enclosed in a housing (4) forming the pump's suction port. It has a U-shaped cross-section with its open side towards the pump's suction side. The trap is cooled by a pulsed-tube cryogenerator (9) which surrounds the pump beneath the trap and is fed by a compressor (11) through an impedance (12) and an exchanger-regenerator (14). The impedance is in the form of a rotary valve (12) driven by a motor (13), with the exchanger-regenerator, the valve and the motor aligned parallel with the axis of the pump and beneath the cold end of the pulsed tube. The assembly is connected to a chamber in which an industrial process takes place, and a neutral gas is injected into the pump and its flow is regulated according to the pressure in the chamber.

Description

La présente invention concerne un groupe de pompage secondaire.The present invention relates to a secondary pumping unit.

Dans de nombreux domaines industriels, les procédés de fabrication sont effectués sous atmosphère gazeuse à très basse pression nécessitant un pompage poussé de l'enceinte où a lieu le procédé industriel. C'est le cas par exemple de l'industrie des semiconducteurs, des dépôts sous vide et autres procédés industriels.In many industrial fields, the manufacturing processes are carried out under a gaseous atmosphere at very low pressure requiring extensive pumping of the enclosure where the industrial process takes place. This is the case, for example, in the semiconductor industry, vacuum deposition and other industrial processes.

Il est fréquent que les gaz pompés contiennent des gaz condensables et en particulier de la vapeur d'eau, aussi il est connu d'associer un piège cryogénique à une pompe secondaire mécanique. Un tel piège est, soit disposé en parallèle, sur l'enceinte, avec la pompe secondaire mécanique, soit disposé en série avec la pompe en amont de son aspiration.It is frequent that the pumped gases contain condensable gases and in particular water vapor, also it is known to associate a cryogenic trap with a mechanical secondary pump. Such a trap is either placed in parallel on the enclosure with the mechanical secondary pump, or placed in series with the pump upstream of its suction.

Le piège cryogénique est refroidi par un cryogénérateur travaillant selon le principe de Gifford-Mc Mahon ou de Stirling. Le cycle est réalisé à l'aide d'un piston mobile. On connaît également un cryogénérateur dit du type à tube pulsé qui a l'avantage de ne comporter aucun piston mobile et n'est donc le siège d'aucune vibration et est de construction simple et économique. Un tel générateur se compose d'un compresseur, d'une vanne rotative assurant une alternance de pressions, d'un échangeur-régénérateur constituant une masse d'inertie thermique, d'un tube pulsé comportant une extrémité chaude et une extrémité froide et d'un volume tampon relié au tube pulsé par une vanne et permettant de régler la phase de la pression du gaz dans le tube par rapport à la vitesse de déplacement du gaz dans le tube qui est l'objet d'ondes de pressions. L'extrémité froide du tube pulsé est intimement liée à la surface thermo-conductrice jouant le rôle de piège cryogénique.The cryogenic trap is cooled by a cryogenerator working according to the Gifford-Mc Mahon or Stirling principle. The cycle is carried out using a movable piston. Also known is a cryogenic generator of the pulsed tube type which has the advantage of having no movable piston and is therefore not the seat of any vibration and is of simple and economical construction. Such a generator consists of a compressor, a rotary valve ensuring alternating pressures, an exchanger-regenerator constituting a mass of thermal inertia, a pulsed tube comprising a hot end and a cold end and d a buffer volume connected to the pulsed tube by a valve and making it possible to adjust the phase of the gas pressure in the tube relative to the speed of movement of the gas in the tube which is the subject of pressure waves. The cold end of the pulsed tube is intimately linked to the thermally conductive surface acting as a cryogenic trap.

Un cryogénérateur de ce type est décrit dans l'article intitulé : "Experimental study and modelisation of a pulse tube" pages 9 à 12 du volume 32 ICEC Supplement de la revue Cryogenics publiée en 1992.A cryogenerator of this type is described in the article entitled: "Experimental study and modelization of a pulse tube" pages 9 to 12 of volume 32 ICEC Supplement of the journal Cryogenics published in 1992.

L'invention a pour but de proposer un groupe de pompage secondaire, associant un piège cryogénique, ayant, pour des performances de vitesse de pompage égales aux solutions citées ci-dessus, un encombrement moindre.The object of the invention is to propose a secondary pumping group, associating a cryogenic trap, having, for pumping speed performance equal to the solutions mentioned above, a smaller bulk.

L'invention a ainsi pour objet un groupe de pompage secondaire associant une pompe secondaire mécanique avec un piège cryogénique, caractérisé en ce que ledit piège cryogénique forme un anneau entourant extérieurement la pompe secondaire mécanique à son aspiration, ledit piège étant enfermé dans un carter délimitant l'ouverture d'aspiration, en parallèle, de la pompe mécanique et du piège cryogénique.The subject of the invention is therefore a secondary pumping group associating a mechanical secondary pump with a cryogenic trap, characterized in that said cryogenic trap forms a ring externally surrounding the mechanical secondary pump at its suction, said trap being enclosed in a casing delimiting the suction opening, in parallel, of the mechanical pump and the cryogenic trap.

Selon une réalisation préférée, ledit piège a une section en forme de U dont la partie ouverte est tournée vers l'aspiration.According to a preferred embodiment, said trap has a U-shaped section whose open part faces the suction.

Selon une autre caractéristique, le piège cryogénique est refroidi par un cryogénérateur du type à tube pulsé entourant la pompe sous ledit piège.According to another characteristic, the cryogenic trap is cooled by a cryogenic generator of the pulsed tube type surrounding the pump under said trap.

On va maintenant donner la description d'un exemple de mise en oeuvre de l'invention en se reportant au dessin annexé dans lequel :We will now give the description of an exemplary implementation of the invention with reference to the appended drawing in which:

La figure 1 est une vue schématique montrant un groupe de pompage secondaire associant une pompe secondaire mécanique avec un piège cryogénique dans une disposition selon l'art antérieur.FIG. 1 is a schematic view showing a secondary pumping group associating a mechanical secondary pump with a cryogenic trap in an arrangement according to the prior art.

La figure 2 est une vue schématique montrant un groupe de pompage secondaire selon l'invention.Figure 2 is a schematic view showing a secondary pumping unit according to the invention.

La figure 3 est une vue similaire à celle de la figure 2, mais dans laquelle a été représenté schématiquement un cryogénérateur particulier assurant le refroidissement du piège cryogénique.Figure 3 is a view similar to that of Figure 2, but in which has been shown schematically a particular cryogenerator ensuring the cooling of the cryogenic trap.

La figure 4 montre un groupe selon l'invention relié à une chambre à vide et comportant un dispositif de régulation de pression.FIG. 4 shows a group according to the invention connected to a vacuum chamber and comprising a pressure regulation device.

En se référant à la figure 1, on voit un groupe de pompage associant en série une pompe secondaire mécanique 1 telle qu'une pompe turbomoléculaire par exemple, et un piège cryogénique 2, une vanne de régulation 3 étant interposée entre la pompe 1 et le piège froid 2.Referring to FIG. 1, we see a pumping group associating in series a mechanical secondary pump 1 such as a turbomolecular pump for example, and a cryogenic trap 2, a regulating valve 3 being interposed between the pump 1 and the cold trap 2.

Un carter 4 entoure bien entendu le piège froid 2 et comporte une bride 5 pour la liaison de l'ensemble à une chambre à vider, non représentée, dans laquelle un procédé industriel est effectué, par exemple la fabrication de composants semiconducteurs. Le piège 2 est refroidi par un cryogénérateur 6 du type à piston mobile 7 et compresseur 8.A casing 4 naturally surrounds the cold trap 2 and includes a flange 5 for connecting the assembly to a chamber to be emptied, not shown, in which an industrial process is carried out, for example the manufacture of semiconductor components. The trap 2 is cooled by a cryogenerator 6 of the movable piston 7 and compressor 8 type.

Cette disposition introduit une conductance entre la chambre de pompage et l'aspiration de la pompe turbomoléculaire qui diminue la vitesse de pompage effective de la pompe turbomoléculaire.This arrangement introduces conductance between the pumping chamber and the suction of the turbomolecular pump which decreases the effective pumping speed of the turbomolecular pump.

La figure 2 montre la disposition suivant l'invention. Ici, la pompe secondaire mécanique 1 est associée à un piège cryogénique 2 qui entoure la pompe à son aspiration. D'une manière avantageuse, le piège 2 a en outre une section en forme de U dont la partie ouverte est tournée vers l'aspiration. Le piège est enfermé dans un carter 4 comportant une bride de liaison 5. Le carter 4 délimite l'ouverture d'aspiration, en parallèle, de l'ensemble de la pompe mécanique 1 et du piège froid 2. Ainsi, on n'ajoute plus de conductance entre la chambre de pompage et la pompe turbomoléculaire 1. Le volume de l'ensemble est moindre pour des performances égales. Par ailleurs, cette disposition évite tout risque que des morceaux de glace ne tombent dans la pompe mécanique 1.Figure 2 shows the arrangement according to the invention. Here, the mechanical secondary pump 1 is associated with a cryogenic trap 2 which surrounds the pump at its aspiration. Advantageously, the trap 2 also has a U-shaped section whose open part faces the suction. The trap is enclosed in a casing 4 comprising a connecting flange 5. The casing 4 delimits the suction opening, in parallel, of the entire pump mechanical 1 and cold trap 2. Thus, no more conductance is added between the pumping chamber and the turbomolecular pump 1. The volume of the assembly is less for equal performance. Furthermore, this arrangement avoids any risk that pieces of ice fall into the mechanical pump 1.

Le cryogénérateur de refroidissement du piège 2 peut être identique à celui de la figure 2, cependant on utilise avantageusement, pour sa simplicité et son absence de piston mobile évitant ainsi toute vibration, un cryogénérateur du type à tube pulsé comme évoqué plus haut.The cryogenic generator for cooling the trap 2 may be identical to that of FIG. 2, however advantageously used, for its simplicity and its absence of a movable piston thus avoiding any vibration, a cryogenic generator of the pulsed tube type as mentioned above.

Par ailleurs, selon une autre caractéristique de l'invention, et conformément à la figure 3, ce cryogénérateur du type à tube pulsé a son tube pulsé 9 qui entoure la pompe mécanique 4 et est situé au dessous du piège 2. L'extrémité froide du tube pulsé 9 est fixée au piège 2 par une pièce thermo-conductrice 10.Furthermore, according to another characteristic of the invention, and in accordance with FIG. 3, this cryogenic generator of the pulsed tube type has its pulsed tube 9 which surrounds the mechanical pump 4 and is located below the trap 2. The cold end of the pulsed tube 9 is fixed to the trap 2 by a heat-conducting part 10.

Cette disposition diminue l'encombrement. Par ailleurs, le tube pulsé 9 est alimenté par un compresseur 11 à travers une vanne rotative 12 entraînée par un moteur 13, et un échangeur-régénérateur 14. Pour diminuer encore l'encombrement, l'échangeur-régénérateur 14, la vanne rotative 12 et le moteur d'entraînement 13 sont alignés parallèlement à l'axe Δ de la pompe.This arrangement reduces the bulk. Furthermore, the pulsed tube 9 is supplied by a compressor 11 through a rotary valve 12 driven by a motor 13, and an exchanger-regenerator 14. To further reduce the size, the exchanger-regenerator 14, the rotary valve 12 and the drive motor 13 are aligned parallel to the axis Δ of the pump.

Enfin, la figure 4 montre un dispositif pour réguler la pression dans une chambre de pompage 15 reliée au groupe de pompage. Une telle régulation est effectuée, dans l'art antérieur par une vanne 3 (voir figure 1) située entre la pompe 1 et le piège 2. Selon l'invention, cette régulation est assurée par une injection de gaz neutre, par exemple de l'argon, à l'intérieur de la pompe secondaire mécanique 1. Pour ce faire, une conduite d'amenée 16 aboutissant à l'entrée de la pompe est alimentée en gaz. Un manomètre 17 qui mesure la pression dans la chambre 15 est lié à un régulateur de débit 18.Finally, Figure 4 shows a device for regulating the pressure in a pumping chamber 15 connected to the pumping group. Such regulation is carried out, in the prior art by a valve 3 (see FIG. 1) situated between the pump 1 and the trap 2. According to the invention, this regulation is ensured by an injection of neutral gas, for example from the argon, inside the mechanical secondary pump 1. To do this, a supply line 16 leading to the inlet of the pump is supplied with gas. A pressure gauge 17 which measures the pressure in the chamber 15 is linked to a flow regulator 18.

Claims (6)

Groupe de pompage secondaire associant une pompe secondaire mécanique (1) avec un piège cryogénique (2), caractérisé en ce que ledit piège cryogénique (2) forme un anneau entourant extérieurement la pompe secondaire mécanique à son aspiration, ledit piège (2) étant enfermé dans un carter (4) délimitant l'ouverture d'aspiration, en parallèle, de la pompe mécanique (1) et du piège cryogénique (2).Secondary pumping group associating a mechanical secondary pump (1) with a cryogenic trap (2), characterized in that said cryogenic trap (2) forms a ring externally surrounding the mechanical secondary pump at its suction, said trap (2) being enclosed in a casing (4) delimiting the suction opening, in parallel, of the mechanical pump (1) and the cryogenic trap (2). Groupe de pompage secondaire selon la revendication 1, caractérisé en ce que la section dudit piège (2) entourant la pompe mécanique (1) a la forme d'un U dont la partie ouverte est tournée vers l'aspiration.Secondary pumping unit according to claim 1, characterized in that the section of said trap (2) surrounding the mechanical pump (1) has the shape of a U, the open part of which faces the suction. Groupe de pompage selon l'une des revendications 1 ou 2, caractérisé en ce que ledit piège cryogénique (2) est refroidi par un cryogénérateur du type à tube pulsé (9) entourant la pompe (1) sous ledit piège (2).Pumping unit according to one of claims 1 or 2, characterized in that said cryogenic trap (2) is cooled by a cryogenic generator of the pulsed tube type (9) surrounding the pump (1) under said trap (2). Groupe de pompage selon la revendication 3, caractérisé en ce que le tube pulsé (9) est alimenté par un compresseur (11) à travers une impédance (12) et un échangeur-régénérateur (14).Pumping unit according to claim 3, characterized in that the pulsed tube (9) is supplied by a compressor (11) through an impedance (12) and an exchanger-regenerator (14). Groupe de pompage selon la revendication 4, caractérisé en ce que ladite impédance est une vanne rotative (12) entraînée par un moteur (13), ledit échangeur-régénérateur (14), la vanne rotative (12) et son moteur d'entraînement (13) étant alignés parallèlement à l'axe (Δ) de la pompe, sous l'extrémité froide du tube pulsé (9).Pumping unit according to claim 4, characterized in that said impedance is a rotary valve (12) driven by a motor (13), said exchanger-regenerator (14), the rotary valve (12) and its drive motor ( 13) being aligned parallel to the axis (Δ) of the pump, under the cold end of the pulsed tube (9). Groupe de pompage selon l'une des revendications 1 à 5, relié à une chambre (15) où se déroule un procédé industriel, caractérisé en ce que, pour assurer une régulation de la pression dans la chambre, une injection de gaz neutre est envoyée à l'intérieur de la pompe, le débit de cette injection étant réglé par un appareil de régulation de débit (18) en fonction de la pression mesurée (17) dans la chambre (15).Pumping unit according to one of claims 1 to 5, connected to a chamber (15) where an industrial process takes place, characterized in that, to regulate the pressure in the chamber, an injection of neutral gas is sent inside the pump, the flow rate of this injection being adjusted by a flow control device (18) as a function of the pressure measured (17) in the chamber (15).
EP96402094A 1995-10-04 1996-10-01 Secondary pumping group Expired - Lifetime EP0767307B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9511660A FR2739574B1 (en) 1995-10-04 1995-10-04 SECONDARY PUMPING GROUP
FR9511660 1995-10-04

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EP0767307A1 true EP0767307A1 (en) 1997-04-09
EP0767307B1 EP0767307B1 (en) 2002-12-18

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JP (1) JP2763524B2 (en)
DE (1) DE69625436T2 (en)
FR (1) FR2739574B1 (en)

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JP6124776B2 (en) * 2013-12-02 2017-05-10 住友重機械工業株式会社 Cold trap
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* Cited by examiner, † Cited by third party
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EP1014014A1 (en) * 1998-06-12 2000-06-28 Daido Hoxan Inc. Pulse pipe refrigerating machine and cryopump using the refrigerating machine
EP1014014A4 (en) * 1998-06-12 2007-08-15 Air Water Inc Pulse pipe refrigerating machine and cryopump using the refrigerating machine
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EP1447567A3 (en) * 2003-02-07 2005-06-15 Pfeiffer Vacuum GmbH Vacuum pump arrangement

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FR2739574B1 (en) 1997-11-14
EP0767307B1 (en) 2002-12-18
DE69625436T2 (en) 2003-10-09
JPH09126126A (en) 1997-05-13
FR2739574A1 (en) 1997-04-11
DE69625436D1 (en) 2003-01-30
JP2763524B2 (en) 1998-06-11
US5720174A (en) 1998-02-24

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