EP1014014A4 - Pulse pipe refrigerating machine and cryopump using the refrigerating machine - Google Patents
Pulse pipe refrigerating machine and cryopump using the refrigerating machineInfo
- Publication number
- EP1014014A4 EP1014014A4 EP99925288A EP99925288A EP1014014A4 EP 1014014 A4 EP1014014 A4 EP 1014014A4 EP 99925288 A EP99925288 A EP 99925288A EP 99925288 A EP99925288 A EP 99925288A EP 1014014 A4 EP1014014 A4 EP 1014014A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- refrigerating machine
- cryopump
- pulse pipe
- pulse
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
- F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1417—Pulse-tube cycles without any valves in gas supply and return lines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
- F25B9/006—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant containing more than one component
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16559698 | 1998-06-12 | ||
JP16559698A JP3623659B2 (en) | 1998-06-12 | 1998-06-12 | Cryopump |
PCT/JP1999/003094 WO1999064797A1 (en) | 1998-06-12 | 1999-06-09 | Pulse pipe refrigerating machine and cryopump using the refrigerating machine |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1014014A1 EP1014014A1 (en) | 2000-06-28 |
EP1014014A4 true EP1014014A4 (en) | 2007-08-15 |
Family
ID=15815362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99925288A Withdrawn EP1014014A4 (en) | 1998-06-12 | 1999-06-09 | Pulse pipe refrigerating machine and cryopump using the refrigerating machine |
Country Status (8)
Country | Link |
---|---|
US (1) | US6293109B1 (en) |
EP (1) | EP1014014A4 (en) |
JP (1) | JP3623659B2 (en) |
KR (1) | KR100561769B1 (en) |
CN (1) | CN1218150C (en) |
MY (1) | MY120815A (en) |
TW (1) | TW477888B (en) |
WO (1) | WO1999064797A1 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003060390A1 (en) * | 2002-01-08 | 2003-07-24 | Shi-Apd Cryogenics, Inc. | Cryopump with two-stage pulse tube refrigerator |
AU2003202921A1 (en) * | 2002-01-08 | 2003-07-24 | Shi-Apd Cryogenics, Inc. | Panels for pulse tube cryopump |
WO2003060391A1 (en) * | 2002-01-08 | 2003-07-24 | Shi-Apd Cryogenics, Inc. | Wired and wireless methods for client and server side authentication |
WO2006085868A2 (en) * | 2005-02-08 | 2006-08-17 | Sumitomo Heavy Industries, Ltd. | Improved cryopump |
CN100572987C (en) * | 2005-04-14 | 2009-12-23 | 中国科学院理化技术研究所 | Thermoacoustic driving pulse tube refrigerator |
JP5632241B2 (en) * | 2010-09-13 | 2014-11-26 | 住友重機械工業株式会社 | Cryo pump and cryogenic refrigerator |
JP5669658B2 (en) * | 2011-04-11 | 2015-02-12 | 住友重機械工業株式会社 | Cryopump system, compressor, and cryopump regeneration method |
US9186601B2 (en) | 2012-04-20 | 2015-11-17 | Sumitomo (Shi) Cryogenics Of America Inc. | Cryopump drain and vent |
CN103383322A (en) * | 2013-07-11 | 2013-11-06 | 安徽万瑞冷电科技有限公司 | Surface analysis system with cryopump |
JP2015098844A (en) * | 2013-11-20 | 2015-05-28 | 住友重機械工業株式会社 | Cryopump system, and operation method of cryopump system |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03286967A (en) * | 1990-03-31 | 1991-12-17 | Ekuteii Kk | Pulse pipe type freezer |
US5269147A (en) * | 1991-06-26 | 1993-12-14 | Aisin Seiki Kabushiki Kaisha | Pulse tube refrigerating system |
US5295791A (en) * | 1993-01-19 | 1994-03-22 | Meise William H | Tapered fluid compressor & refrigeration apparatus |
JPH07180938A (en) * | 1993-12-24 | 1995-07-18 | Toshiba Corp | Pulse tube refrigerator |
JPH0854151A (en) * | 1994-08-10 | 1996-02-27 | Toshiba Corp | Pulse tube refrigerating machine |
EP0767307A1 (en) * | 1995-10-04 | 1997-04-09 | Alcatel Cit | Secondary pumping group |
JPH1054356A (en) * | 1996-08-14 | 1998-02-24 | Ebara Corp | Deposit removing trap |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3892273A (en) * | 1973-07-09 | 1975-07-01 | Perkin Elmer Corp | Heat pipe lobar wicking arrangement |
JPH0781754B2 (en) * | 1990-06-28 | 1995-09-06 | 新技術事業団 | refrigerator |
JPH0626459A (en) * | 1992-07-09 | 1994-02-01 | Hitachi Ltd | Cryogenic cooling device and cooling method thereon |
JPH08128744A (en) * | 1994-10-31 | 1996-05-21 | Aisin Seiki Co Ltd | Double acting pulse pipe refrigerating machine |
JP3835912B2 (en) * | 1997-12-17 | 2006-10-18 | 三菱重工業株式会社 | Pulse tube refrigerator |
-
1998
- 1998-06-12 JP JP16559698A patent/JP3623659B2/en not_active Expired - Lifetime
-
1999
- 1999-06-09 WO PCT/JP1999/003094 patent/WO1999064797A1/en active IP Right Grant
- 1999-06-09 US US09/485,491 patent/US6293109B1/en not_active Expired - Lifetime
- 1999-06-09 KR KR1020007001349A patent/KR100561769B1/en not_active IP Right Cessation
- 1999-06-09 CN CN99800910.5A patent/CN1218150C/en not_active Expired - Fee Related
- 1999-06-09 EP EP99925288A patent/EP1014014A4/en not_active Withdrawn
- 1999-06-11 MY MYPI99002401A patent/MY120815A/en unknown
- 1999-06-11 TW TW088109946A patent/TW477888B/en not_active IP Right Cessation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03286967A (en) * | 1990-03-31 | 1991-12-17 | Ekuteii Kk | Pulse pipe type freezer |
US5269147A (en) * | 1991-06-26 | 1993-12-14 | Aisin Seiki Kabushiki Kaisha | Pulse tube refrigerating system |
US5295791A (en) * | 1993-01-19 | 1994-03-22 | Meise William H | Tapered fluid compressor & refrigeration apparatus |
JPH07180938A (en) * | 1993-12-24 | 1995-07-18 | Toshiba Corp | Pulse tube refrigerator |
JPH0854151A (en) * | 1994-08-10 | 1996-02-27 | Toshiba Corp | Pulse tube refrigerating machine |
EP0767307A1 (en) * | 1995-10-04 | 1997-04-09 | Alcatel Cit | Secondary pumping group |
JPH1054356A (en) * | 1996-08-14 | 1998-02-24 | Ebara Corp | Deposit removing trap |
Non-Patent Citations (3)
Title |
---|
G. WALKER: "Stirling cycle cooling engine with two-phase, two-component working fluid", CRYOGENICS, 1 August 1974 (1974-08-01), pages 459 - 462, XP008080726 * |
GAN Z H ET AL: "Study on pulse tube refrigeration performance with two-component gas mixture", PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON CRYOGENICS AND REFRIGERATION 1998, 21 April 1998 (1998-04-21) - 24 April 1998 (1998-04-24), pages 413 - 416, XP008080734 * |
See also references of WO9964797A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP3623659B2 (en) | 2005-02-23 |
CN1218150C (en) | 2005-09-07 |
US6293109B1 (en) | 2001-09-25 |
KR100561769B1 (en) | 2006-03-16 |
WO1999064797A1 (en) | 1999-12-16 |
MY120815A (en) | 2005-11-30 |
CN1272914A (en) | 2000-11-08 |
KR20010022750A (en) | 2001-03-26 |
JPH11351688A (en) | 1999-12-24 |
TW477888B (en) | 2002-03-01 |
EP1014014A1 (en) | 2000-06-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1134515A4 (en) | Refrigerator | |
TW555004U (en) | Refrigerator | |
TW525770U (en) | Refrigerator | |
HK1037024A1 (en) | Refrigerator | |
GB2299872B (en) | Refrigerator | |
HK1031911A1 (en) | Refrigerating device | |
HK1036101A1 (en) | Refrigerator. | |
EP0907056A4 (en) | Refrigerator | |
EP0719994A4 (en) | Refrigerator | |
HK1071597A1 (en) | Refrigeration cycle device | |
TW422331U (en) | Refrigerator | |
PL337989A1 (en) | Refrigerator | |
EP1124099A4 (en) | Refrigerating cycle | |
PL341154A1 (en) | Refrigerator | |
TW532470U (en) | Refrigerator | |
TW582537U (en) | Refrigerator | |
EP1014014A4 (en) | Pulse pipe refrigerating machine and cryopump using the refrigerating machine | |
GB2344413B (en) | Refrigerator | |
TW493727U (en) | Refrigerator | |
GR3033298T3 (en) | Refrigerator | |
GB9924262D0 (en) | Refrigerator alarm | |
SI0918199T1 (en) | Refrigerator | |
GB9920330D0 (en) | Freezers | |
PL341072A1 (en) | Refrigerator | |
GB9925823D0 (en) | Refrigerator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): BE DE ES FR GB IT NL SE |
|
17P | Request for examination filed |
Effective date: 20000222 |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: AIR WATER INC. |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20070713 |
|
17Q | First examination report despatched |
Effective date: 20080526 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20110119 |