CN103383322A - Surface analysis system with cryopump - Google Patents
Surface analysis system with cryopump Download PDFInfo
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- CN103383322A CN103383322A CN2013102913151A CN201310291315A CN103383322A CN 103383322 A CN103383322 A CN 103383322A CN 2013102913151 A CN2013102913151 A CN 2013102913151A CN 201310291315 A CN201310291315 A CN 201310291315A CN 103383322 A CN103383322 A CN 103383322A
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- vacuum cavity
- cryopump
- pump housing
- surface analysis
- analysis system
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Abstract
The invention discloses a surface analysis system with a cryopump. The surface analysis system comprises a vacuum cavity. The central straight pipe of a sample holder at the vacuum cavity top stretches into the vacuum cavity, and the bottom end of the straight pipe is provided with a square copper block. The pump body of the cryopump is installed at the bottom of the vacuum cavity. The secondary cold head of a refrigerating machine contacts the lateral part of an adsorption array in the pump body to cool the adsorption array. The multiple copper wires connected at the copper block bottom are respectively connected to the adsorption array in the pump body. The lowest temperature of the sample involved in the invention can reach 25K, thus completely meeting the demands of surface analysis experiments, no liquid nitrogen or liquid helium is needed, and the temperature is lower than that obtained by general liquid nitrogen or liquid helium cooling, and then more experimental information can be obtained.
Description
Technical field
The present invention relates to surface analysis system field, be specially a kind of surface analysis system with cryopump.
Background technology
The a lot of analytical and testing instruments that use in research and production need to carry out in ultra-high vacuum system, and in order to obtain abundanter information, also need the sample of institute's analytical test is lowered the temperature, as in Surface Science research, generally need to be down to 80 K to sample, even the following temperature of 50 K could satisfy the condition of molecular adsorption.
The acquisition of sample low temperature is undertaken cooling by liquid nitrogen or liquid helium.As shown in Figure 2, be a cover surface analysis system.The lower end of cavity is equipped with an ionic pump and molecular pump, is used for bleeding obtaining and keep ultrahigh vacuum.What installed the upper end is a specimen holder, and the center of specimen holder is a straight tube, is used for holding liquid nitrogen or liquid helium.The copper billet of one box-shaped is installed, copper billet bottom installation sample in the bottom of straight tube.In the analytical test process, need constantly to inject liquid nitrogen or liquid helium copper billet is cooling, and then sample is cooling.By the calculating in 6 hours of average experimental period every day, approximately need to consume 5 L liquid nitrogen or liquid heliums in one day.In the situation that nitrogen and helium scarcity of resources, there is the larger problem of scarce resource consumption in this type of cooling.
In addition, because the installation direction of specimen holder has uncertainty, sometimes need to install the specimen holder of horizontal direction, this moment, will there be some problems in the cooling of sample, can only find time to produce the circulation that pressure reduction is realized liquid nitrogen/helium by mechanical pump, reach cooling-down effect.This mode is very large to the loss of liquid nitrogen/helium.
Summary of the invention
The purpose of this invention is to provide a kind of surface analysis system with cryopump, to solve prior art surface analysis system to the cooling problem that can consume liquid nitrogen or liquid helium of sample.
In order to achieve the above object, the technical solution adopted in the present invention is:
a kind of surface analysis system with cryopump, include vacuum cavity, specimen holder is installed on vacuum cavity, described specimen holder center vertically is equipped with straight tube, the straight tube bottom is stretched in vacuum cavity from the vacuum cavity top, and the straight tube bottom is equipped with square copper billet, the bottom of copper billet is made as the installed surface that sample is installed, it is characterized in that: also comprise the cryopump that is consisted of by the pump housing and refrigeration machine, the pump housing of described cryopump is arranged on bottom vacuum cavity, refrigeration machine is arranged on pump housing sidepiece, be provided with absorbing array in the pump housing, the secondary cold head of described refrigeration machine contacts with cooling absorbing array with absorbing array sidepiece in the pump housing, described copper billet bottom is connected with the copper conductor that many copper wires form, the copper conductor other end is connected to respectively on absorbing array in the pump housing.
Described a kind of surface analysis system with cryopump is characterized in that: be provided with the dielectric resin material layer between described copper billet and straight tube bottom.
When utilizing refrigeration machine to lower the temperature for cryopump, the present invention also to the sample cooling, also can obtain the low temperature of sample when obtaining, keeping vacuum; The minimum temperature of sample of the present invention can be low to moderate 25 K, is satisfied with surface analysis experiment needs fully, need not expend liquid nitrogen or liquid helium, and lower than the temperature of general liquid nitrogen or liquid helium cooling acquisition, and then obtains more experiment information.
Description of drawings
Fig. 1 is structural representation of the present invention.
Fig. 2 is prior art surface analysis system architecture schematic diagram.
Embodiment
As shown in Figure 1.a kind of surface analysis system with cryopump, include vacuum cavity 1, vacuum cavity 1 top is equipped with specimen holder 2, specimen holder 2 centers vertically are equipped with straight tube 3, straight tube 3 bottoms are stretched in vacuum cavity 1 from vacuum cavity 1 top, and straight tube 3 bottoms are equipped with square copper billet 4, the bottom of copper billet 4 is made as the installed surface that sample 9 is installed, also comprise the cryopump that is consisted of by the pump housing 5 and refrigeration machine 6, the pump housing 5 of cryopump is arranged on vacuum cavity 1 bottom, refrigeration machine 6 is arranged on the pump housing 5 sidepieces, be provided with absorbing array 7 in the pump housing 5, the secondary cold head of refrigeration machine 6 contacts with cooling absorbing array 7 with absorbing array 7 sidepieces in the pump housing 5, copper billet 4 bottoms are connected with the copper conductor 8 that many copper wires form, copper conductor 8 other ends are connected to respectively on absorbing array 7 in the pump housing 5.Be provided with the dielectric resin material layer between copper billet 4 and straight tube 3 bottoms.
The present invention installs a cryopump in the bottom of vacuum cavity, and cryopump is comprised of the pump housing and a G-M refrigeration machine, the absorbing array in the cooling pump housing of secondary cold head of refrigeration machine, and its temperature is lower than 20 K.An easy specimen holder of cover is installed at the vacuum cavity top, and specimen holder central straight pipe bottom is equipped with copper billet, and the bottom of copper billet is fixed wtih sample.Be lined with adiabatic resin material between copper billet and specimen holder, can reduce the thermal losses of copper billet.Be connected with a copper conductor that is comprised of many copper wires in the bottom of copper billet, the other end of copper conductor is connected to the absorbing array place of cryopump.The cold of absorbing array can transfer to copper billet on specimen holder and then cooling sample by copper conductor like this.The temperature of sample is minimum can be reached about 25 K.And the copper conductor that connects also can satisfy sample and rotate freely and move.
Claims (2)
1. surface analysis system with cryopump, include vacuum cavity, specimen holder is installed on vacuum cavity, described specimen holder center vertically is equipped with straight tube, the straight tube bottom is stretched in vacuum cavity from the vacuum cavity top, and the straight tube bottom is equipped with square copper billet, the bottom of copper billet is made as the installed surface that sample is installed, it is characterized in that: also comprise the cryopump that is consisted of by the pump housing and refrigeration machine, the pump housing of described cryopump is arranged on bottom vacuum cavity, refrigeration machine is arranged on pump housing sidepiece, be provided with absorbing array in the pump housing, the secondary cold head of described refrigeration machine contacts with cooling absorbing array with absorbing array sidepiece in the pump housing, described copper billet bottom is connected with the copper conductor that many copper wires form, the copper conductor other end is connected to respectively on absorbing array in the pump housing.
2. a kind of surface analysis system with cryopump according to claim 1 is characterized in that: be provided with the dielectric resin material layer between described copper billet and straight tube bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013102913151A CN103383322A (en) | 2013-07-11 | 2013-07-11 | Surface analysis system with cryopump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013102913151A CN103383322A (en) | 2013-07-11 | 2013-07-11 | Surface analysis system with cryopump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103383322A true CN103383322A (en) | 2013-11-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN2013102913151A Pending CN103383322A (en) | 2013-07-11 | 2013-07-11 | Surface analysis system with cryopump |
Country Status (1)
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| CN (1) | CN103383322A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105987845A (en) * | 2015-02-15 | 2016-10-05 | 中国科学院大连化学物理研究所 | One-to-two temperature control sample holder |
| CN110988005A (en) * | 2019-12-17 | 2020-04-10 | 中国科学技术大学 | Strong permanent magnet device for magnetizing material under vacuum system |
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| JPS62139987A (en) * | 1985-12-16 | 1987-06-23 | Nec Corp | Vacuum device |
| US4707998A (en) * | 1986-12-03 | 1987-11-24 | The Board Of Regents, The University Of Texas | Apparatus and method for ultrarapid cooling of biological samples |
| US5237825A (en) * | 1991-11-08 | 1993-08-24 | Gte Laboratories Incorporated | Method and apparatus for cryogenically cooling samples |
| JPH0868380A (en) * | 1994-08-30 | 1996-03-12 | Sanyo Electric Co Ltd | Regeneration method for cryopump |
| US5653113A (en) * | 1995-04-07 | 1997-08-05 | Rigaku Corporation | Cooling system |
| CN1272914A (en) * | 1998-06-12 | 2000-11-08 | 大同北产株式会社 | Pulse pipe refrigerating machine and cryopump using refrigerating machine |
| CN201152655Y (en) * | 2007-12-05 | 2008-11-19 | 安徽万瑞冷电科技有限公司 | Absorbing array structure for refrigeration typed low-temperature pump |
| CN102288634A (en) * | 2010-06-17 | 2011-12-21 | 中国科学院理化技术研究所 | Thermal property measuring device |
| CN202250681U (en) * | 2011-10-20 | 2012-05-30 | 徐敏 | Large-aperture cryogenic pump with liquid nitrogen heat sink |
| CN102769991A (en) * | 2012-07-26 | 2012-11-07 | 中国原子能科学研究院 | Inserted low temperature condensing plate device |
| CN102998424A (en) * | 2012-11-29 | 2013-03-27 | 安徽万瑞冷电科技有限公司 | High temperature and low temperature testing device |
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2013
- 2013-07-11 CN CN2013102913151A patent/CN103383322A/en active Pending
Patent Citations (11)
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|---|---|---|---|---|
| JPS62139987A (en) * | 1985-12-16 | 1987-06-23 | Nec Corp | Vacuum device |
| US4707998A (en) * | 1986-12-03 | 1987-11-24 | The Board Of Regents, The University Of Texas | Apparatus and method for ultrarapid cooling of biological samples |
| US5237825A (en) * | 1991-11-08 | 1993-08-24 | Gte Laboratories Incorporated | Method and apparatus for cryogenically cooling samples |
| JPH0868380A (en) * | 1994-08-30 | 1996-03-12 | Sanyo Electric Co Ltd | Regeneration method for cryopump |
| US5653113A (en) * | 1995-04-07 | 1997-08-05 | Rigaku Corporation | Cooling system |
| CN1272914A (en) * | 1998-06-12 | 2000-11-08 | 大同北产株式会社 | Pulse pipe refrigerating machine and cryopump using refrigerating machine |
| CN201152655Y (en) * | 2007-12-05 | 2008-11-19 | 安徽万瑞冷电科技有限公司 | Absorbing array structure for refrigeration typed low-temperature pump |
| CN102288634A (en) * | 2010-06-17 | 2011-12-21 | 中国科学院理化技术研究所 | Thermal property measuring device |
| CN202250681U (en) * | 2011-10-20 | 2012-05-30 | 徐敏 | Large-aperture cryogenic pump with liquid nitrogen heat sink |
| CN102769991A (en) * | 2012-07-26 | 2012-11-07 | 中国原子能科学研究院 | Inserted low temperature condensing plate device |
| CN102998424A (en) * | 2012-11-29 | 2013-03-27 | 安徽万瑞冷电科技有限公司 | High temperature and low temperature testing device |
Non-Patent Citations (3)
| Title |
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| 毛祖遂 等: "一台表面分析仪的超高真空系统设计与调试", 《真空科学与技术》, vol. 5, no. 8, 30 June 1985 (1985-06-30), pages 32 - 37 * |
| 王如竹 等: "《低温系统》", 31 December 2000, article "低温泵", pages: 293-295 - 8.9.1 * |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105987845A (en) * | 2015-02-15 | 2016-10-05 | 中国科学院大连化学物理研究所 | One-to-two temperature control sample holder |
| CN105987845B (en) * | 2015-02-15 | 2018-06-19 | 中国科学院大连化学物理研究所 | One drag two temperature controls specimen holder |
| CN110988005A (en) * | 2019-12-17 | 2020-04-10 | 中国科学技术大学 | Strong permanent magnet device for magnetizing material under vacuum system |
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Application publication date: 20131106 |