CN202250681U - Large-aperture cryogenic pump with liquid nitrogen heat sink - Google Patents
Large-aperture cryogenic pump with liquid nitrogen heat sink Download PDFInfo
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- CN202250681U CN202250681U CN2011204010856U CN201120401085U CN202250681U CN 202250681 U CN202250681 U CN 202250681U CN 2011204010856 U CN2011204010856 U CN 2011204010856U CN 201120401085 U CN201120401085 U CN 201120401085U CN 202250681 U CN202250681 U CN 202250681U
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- liquid nitrogen
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- cryopump
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Abstract
The utility model discloses a large-aperture cryogenic pump with a liquid nitrogen heat sink. The pump comprises a cryogenic pump vacuum pump shell, a GM (Gifford-Mcmahon) refrigerating machine cold head, a low-temperature adsorption disc array, a louver type low-temperature baffle plate, a heat sink radial supporting block, a liquid nitrogen heat sink, a heat sink axial supporting column and a first-stage shielding plate, wherein a liquid nitrogen inlet and outlet elastic joint passes through an arch crown circular sealing cover and is communicated with the liquid nitrogen heat sink in a straight cylinder; the inner bottom end of the straight cylinder and the GM refrigerating machine cold head are coaxially provided with the louver type low-temperature baffle plate to avoid external heat radiation; and active carbon is arranged on adsorption discs of the low-temperature adsorption disc array. Through the large-aperture cryogenic pump with the liquid nitrogen heat sink provided by the utility model, the insufficiency of first-stage refrigeration of a refrigerating machine is solved, the cold quantity requirement of the large-aperture cryogenic pump cannot be met, meanwhile, the refrigerating machine with large second-stage refrigeration is adopted, the adsorption quality of a second-stage adsorption array is increased, so that the impact resistance and suction capacity of the cryogenic pump are improved.
Description
Technical field
The utility model belongs to the vacuum freezing field.Specifically, the utility model relates to a kind of bigbore cryopump, and this cryopump obtains the degree of vacuum of cleaning and superelevation through make the ground vacuum system at the set inside liquid nitrogen heat sink.
Background technique
Along with developing rapidly of China's aerospace industry, the large space environment simulator is more and more, makes that the demand of heavy caliber cryopump is also increasing.But, have only small-sized refrigerator cryopump at present, wherein; CN201288651Y discloses a kind of small-sized refrigerator cryopump, mainly comprises cold head, housing, cold screen, secondary cold drawing, baffle, wherein; Cold screen is arranged on enclosure interior, and it is inner that the secondary cold drawing is arranged on cold screen, and cold head is fixed on the housing center line through its flange and passes housing; Be connected with cold screen through its one-level flange in enclosure interior; In cold screen, be connected with the secondary cold drawing through its secondary flange, baffle and cold screen are formed the optics enclosed construction, and the secondary cold drawing is enclosed in wherein.But, because abroad to the restriction of heavy caliber low temperature delivery side of pump and only through there is very big obstacle technically in each parts increased in size acquisition heavy caliber cryopump of small-sized cryopump, therefore, the work of independent development heavy caliber cryopump is just especially necessary.
The model utility content
In order to address the above problem; The utility model provides a kind of heavy caliber cryopump that has liquid nitrogen heat sink; Comprise cryopump vacuum pump case, GM refrigerator cold head, cryogenic absorption disk array, louvre type low temperature baffle plate, heat sink radial support piece, liquid nitrogen heat sink, heat sink axially support post and one-level shield plate; Wherein, cryopump vacuum pump case comprises straight barrel and the vault circle capping at its top of welding and the suction flange that welds its bottom, is symmetrically arranged with hanger on the straight barrel outer side wall; Vault circle capping end face one side is provided with the fore pump interface; The end face opposite side is provided with relief valve connection, and capping is respectively arranged with liquid nitrogen elasticity of export and import joint near the both sides of straight barrel sidewall and it seals through end socket, and GM refrigerator cold head is coaxial with said vacuum pump case; The one-level shield plate is fixed on the first-class heat exchanger of GM refrigerator cold head; The cryogenic absorption array of discs is fixed on the secondary heat exchanger of GM refrigerator cold head, is provided with around one-level shield plate and the cryogenic absorption array of discs to reduce the liquid nitrogen heat sink that GM refrigerator cold head cold scatters and disappears, and liquid nitrogen heat sink carries out radial support through heat sink radial support piece; Carry out axially support through heat sink axially support post; Liquid nitrogen elasticity of export and import joint passes vault circle capping and is connected with the inner liquid nitrogen heat sink of straight barrel, and straight barrel inner bottom and GM refrigerator cold head are coaxially arranged with louvre type low temperature baffle plate to avoid External Heat Flux, and the suction tray of cryogenic absorption array of discs is provided with active carbon.
Wherein, heavy caliber be meant cryopump diameter greater than 500mm.
Wherein, Secondary cryogenic absorption disk array is made up of last lower fixed frame and some adsorption boards; Each sheet adsorption board all is the approximate disk of the Octagon of 45 ° of flangings; Be connected with lower fixed frame with upper holder through screw, last lower fixed frame is connected with screw with the secondary heat exchanger of cold head, and the joint is lined with the indium sheet.
Louvre type low temperature baffle plate is provided with a plurality of blades, and each blade pass is crossed socket and is positioned on two cross connecting plates, and a vertical connecting plate is located by vertical socket with two cross connecting plates, with ring framework socket location, fixes with the argon arc welding electric welding more again.
Further, circular frame closely contacts with liquid nitrogen heat sink, and three connecting plates connect with screw with the connecting plate on the liquid nitrogen heat sink, and the joint is lined with the indium sheet.
Further, liquid nitrogen heat sink comprises vertical liquid nitrogen heat sink and horizontal liquid nitrogen heat sink.
Wherein, Vertical liquid nitrogen heat sink comprise two one sides open rectangular groove liquid collecting pipe and with two of its welding semicircle chambeies of hollow of processing by the thick corrosion resistant plate of 1mm; Two liquid collecting pipes are communicated with welding with the liquid nitrogen pipes of liquid nitrogen import, liquid nitrogen outlet respectively; The outside of last liquid collecting pipe is welded with 4 connecting sheets that 6 connecting sheets that are connected with louvre type low temperature baffle plate and confession are provided with heat sink radially fixed block respectively; Outer spot welding one circle of following liquid collecting pipe is provided with four holes to be used for heat sink axial restraint as the thick corrosion resistant plate of the 1mm of radiation proof shirt rim on the shirt rim.
Wherein, horizontal liquid nitrogen heat sink has the semicircle chamber of two hollows, and the liquid nitrogen import of rectangular slotted eye is opened with two both sides in the semicircle chamber of this hollow, the liquid nitrogen pipe of liquid nitrogen outlet is communicated with welding, and is welded with umbrella shape shirt rim and 10 connecting sheets.
Wherein, liquid nitrogen heat sink is through 4 heat sink radial support piece lateral fixation and pass through 4 heat sink axially support axiss of a cylinder to fixing, and the import liquid nitrogen pipe is connected joint welded seal with pump case with two elasticity with the outlet liquid nitrogen pipe.
The one-level shield plate is connected through screw on the first-class heat exchanger of above-mentioned cold head, and the joint is lined with the indium sheet.
The heavy caliber cryopump that has liquid nitrogen heat sink of the utility model has following advantage:
1) band liquid nitrogen heat sink, it is not enough to have solved refrigerator one-level refrigerating capacity, can not satisfy the cold requirement of heavy caliber cryopump;
2) adopt the bigger refrigerator of two-stage system cold, can improve the quality of secondary absorption battle array, thereby improve the shock-resistant ability and the pumping capacity of cryopump.
Description of drawings
Fig. 1 is the structural representation of the heavy caliber cryopump that has liquid nitrogen heat sink of the utility model.
Wherein, 1 is the cryopump pump case; 2, GM refrigerator cold head; 3, cryogenic absorption disk array; 4, louvre type low temperature baffle plate; 5, heat sink radial support piece; 6, liquid nitrogen heat sink; 7, heat sink axially support post; With 8, the one-level shield plate.
Fig. 2 is the structural representation of the heavy caliber cryopump housing of the utility model.
Wherein, 11 is straight barrel; 12 are the capping of vault circle; 13 is suction flange; 14 is hanger; 15 is the fore pump interface; 16 is relief valve connection; 17 are liquid nitrogen elasticity of export and import joint; 18 is end socket.
Fig. 3 is the secondary cryogenic absorption disk array structural representation of the heavy caliber cryopump housing of the utility model.
Wherein, 21 is the approximate disk of Octagon of flanging; 22 is upper holder; 23 is lower fixed frame
Fig. 4 is the louvre type low temperature baffle arrangement schematic representation of the heavy caliber cryopump of the utility model.
Wherein 31-38 is a blade: 39 are cross connecting plate; 40 is vertical connecting plate; 41 is circular frame;
Fig. 5 is the vertical liquid nitrogen heat sink structure schematic representation of the heavy caliber cryopump of the utility model.
Wherein, 51,52 is liquid collecting pipe; 53 is the semicircle chamber of hollow; 54 is the liquid nitrogen import; 55 are the liquid nitrogen outlet; 56 is connecting sheet; 57 shirt rims;
Fig. 6 is the horizontal liquid nitrogen heat sink structural representation of the heavy caliber cryopump housing of the utility model.
Wherein, 61 is the semicircle chamber of hollow; 63 is the liquid nitrogen import; 64 are the liquid nitrogen outlet; 67 is the umbrella shape shirt rim; 68 for installing connecting sheet.
Embodiment
Followingly with reference to accompanying drawing the utility model is elaborated, but the accompanying drawing purpose of example not only is not intended to the protection domain of the utility model is carried out any restriction, its scope is limited appending claims.
Fig. 1 is the structural representation of the heavy caliber cryopump that has liquid nitrogen heat sink of the utility model.This heavy caliber cryopump that has liquid nitrogen heat sink comprises cryopump vacuum pump case 1, GM refrigerator cold head 2, cryogenic absorption disk array 3, louvre type low temperature baffle plate 4, heat sink radial support piece 5, liquid nitrogen heat sink 6, heat sink axially support post 7 and one-level shield plate 8; Wherein, Cryopump vacuum pump case 1 comprises straight barrel 11 and the vault circle capping 12 at its top of welding and the suction flange 13 that welds its bottom; Be symmetrically arranged with hanger 14 on straight barrel 11 outer side walls; Vault circle capping 12 end faces one side is provided with fore pump interface 15; The end face opposite side is provided with relief valve connection 16, and capping 12 is respectively arranged with liquid nitrogen elasticity of export and import joint 17 near the both sides of straight barrel 11 sidewalls and it seals through end socket 18, and GM refrigerator cold head 2 is coaxial with said vacuum pump case 1; One-level shield plate 8 is fixed on the first-class heat exchanger of GM refrigerator cold head 2; Cryogenic absorption array of discs 3 is fixed on the secondary heat exchanger of GM refrigerator cold head 2, and one-level shield plate 8 is provided with on every side with cryogenic absorption array of discs 3 and reduces the liquid nitrogen heat sink 6 that GM refrigerator cold head 2 colds scatter and disappear, and liquid nitrogen heat sink 6 carries out radial support through heat sink radial support piece 5; Carry out axially support through heat sink axially support post 7; Liquid nitrogen elasticity of export and import joint passes vault circle capping 22 and is connected with straight barrel 21 inner liquid nitrogen heat sinks 6, and straight barrel 21 inner bottom and GM refrigerator cold head 2 are coaxially arranged with louvre type low temperature baffle plate 4 to avoid External Heat Flux, and the suction tray of cryogenic absorption array of discs 3 is provided with active carbon.
Fig. 2 is the structural representation of the heavy caliber cryopump housing of the utility model.Wherein, each parts of cryopump housing 1 adopt the argon arc welding welding to process, and material all adopts 304 stainless steels, welding leak rate＜5 * 10
-11Pam
3/ s, internal surface machine glazed finish, outer surface sprays paint.
Fig. 3 has provided the secondary cryogenic absorption disk array structural representation of the heavy caliber cryopump housing of the utility model.Wherein, Cryogenic absorption disk array 3 is processed by oxygen free copper; Wherein each sheet adsorption board all is the approximate disk 21 of Octagon of 45 ° of flangings; Be connected with lower fixed frame 23 with upper holder 22 through screw, last lower fixed frame is connected with screw with the secondary heat exchanger of GM refrigerator cold head 2, and the indium sheet all will be filled up in the joint.
Fig. 4 is the louvre type low temperature baffle arrangement schematic representation of the heavy caliber cryopump of the utility model.Wherein, Louvre type low temperature baffle plate 4 is processed by oxygen free copper, the silver-plated polishing towards the outside, inwards blackout; Each blade (31,32,33,34,35,36,37,38) is positioned on two cross connecting plates 39 by socket; A vertical connecting plate 40 is located by vertical socket with two cross connecting plates 39, with ring framework 41 sockets location, fixes with the argon arc welding electric welding at last again; Circular frame 41 closely contacts with liquid nitrogen heat sink 6, and three connecting plates connect with screw with the connecting plate of liquid nitrogen heat sink 6, and the joint is lined with the indium sheet.
Fig. 5 and Fig. 6 show the vertical liquid nitrogen heat sink of heavy caliber cryopump and the structural representation of horizontal liquid nitrogen heat sink respectively.Wherein, liquid nitrogen heat sink 6 is processed with argon arc welding welding by stainless steel, goes out on advancing under in pump being in order to guarantee liquid nitrogen, and heat sink separated, horizontal two kinds (seeing Fig. 5 and Fig. 6 respectively) cooperate the vertical and horizontally-mounted needs of cryopump respectively.The vertical heat sink liquid collecting pipe Φ 40 (51,52) that is opened rectangular groove by two one sides processes with two hollow semicircle chamber 53 welding of being processed by the thick corrosion resistant plate of 1mm; Two liquid collecting pipes (51,52) are communicated with welding with Φ 40 liquid nitrogen pipe of liquid nitrogen import 54, liquid nitrogen outlet 55 respectively; 4 connecting sheets 56 that the outside of last liquid collecting pipe is welded with 6 connecting sheets 56 that are connected with louvre type low temperature baffle plate respectively and heat sink radially fixed block is installed; The outer spot welding one of following liquid collecting pipe is enclosed the thick corrosion resistant plate of 1mm as radiation-resistant shirt rim 57, and the hole of big 4 Φ 11 is used for heat sink axial restraint on the shirt rim.Horizontal heat sink (Fig. 6) also is that the liquid nitrogen pipe that has the semicircle chamber 61 of two hollows and two both sides to open the liquid nitrogen import 63 of rectangular slotted eye, liquid nitrogen outlet 64 is communicated with welding, welds a umbrella shape shirt rim 67 and 10 installation connecting sheets 68 equally.Two kinds heat sink all is outer surface machine glazed finish, and internal surface figure is pitch-dark, and through 4 heat sink radial support piece lateral fixation, 4 heat sink axially support axiss of a cylinder are to fixing, and the liquid pipe that liquid nitrogen is imported and exported is connected with two elasticity with pump case and saves 17 welded seals.
Wherein, One-level shield plate 8 is processed by oxygen free copper, towards secondary cryogenic absorption disk array 3 one sides blackout, facing to the silver-plated polishing of a side of heat sink shirt rim; Be connected through screw on the first-class heat exchanger of GM refrigerator cold head 2, the joint is lined with the indium sheet to reduce thermal contact resistance.
Each physical dimension is by the bore decision of pump in the utility model, and embodiment: pump directly is 1320mm.Pump case height 1075mm, the height of liquid nitrogen heat sink (3) is 700mm, internal diameter is 1160mm, liquid nitrogen pipe diameter 40mm, each baffle plate of louvre type low temperature baffle plate and venetian blind is 106mm highly at a distance of 74.5mm, and 16 in blade is arranged, blade tilt is 45 degree.Every adsorption board inscribed circle diameter of secondary cryogenic absorption disk array 790mm, interval 70mm, totally 8 adsorb sheets, one-level shield plate diameter 790mm.
Although preceding text have given to describe in detail and explanation to the embodiment of the utility model; But what should indicate is; Those skilled in the art can carry out various equivalences to above-mentioned mode of execution according to the spirit of the utility model and change and modification; The function that it produced all should be within the utility model protection domain when not exceeding spiritual that specification and accompanying drawing contain.
Claims (10)
1. heavy caliber cryopump that has liquid nitrogen heat sink; Comprise cryopump vacuum pump case, GM refrigerator cold head, cryogenic absorption disk array, louvre type low temperature baffle plate, heat sink radial support piece, liquid nitrogen heat sink, heat sink axially support post and one-level shield plate; It is characterized in that; Cryopump vacuum pump case comprises straight barrel and the vault circle capping at its top of welding and the suction flange that welds its bottom; Be symmetrically arranged with hanger on the straight barrel outer side wall, vault circle capping end face one side is provided with the fore pump interface, and the end face opposite side is provided with relief valve connection; Capping is respectively arranged with liquid nitrogen elasticity of export and import joint near the both sides of straight barrel sidewall and it seals through end socket; GM refrigerator cold head is coaxial with said vacuum pump case, and the one-level shield plate is fixed on the first-class heat exchanger of GM refrigerator cold head, and the cryogenic absorption array of discs is fixed on the secondary heat exchanger of GM refrigerator cold head; Be provided with around one-level shield plate and the cryogenic absorption array of discs and reduce the liquid nitrogen heat sink that GM refrigerator cold head cold scatters and disappears; Liquid nitrogen heat sink carries out radial support through heat sink radial support piece, carries out axially support through heat sink axially support post, and liquid nitrogen elasticity of export and import joint passes vault circle capping and is connected with the inner liquid nitrogen heat sink of straight barrel; Straight barrel inner bottom and GM refrigerator cold head are coaxially arranged with louvre type low temperature baffle plate to avoid External Heat Flux, and the suction tray of cryogenic absorption array of discs is provided with active carbon.
2. heavy caliber cryopump as claimed in claim 1 is characterized in that heavy caliber is meant " diameter is greater than 500mm ".
3. according to claim 1 or claim 2 heavy caliber cryopump; It is characterized in that; Said cryogenic absorption disk array is made up of last lower fixed frame and some adsorption boards, and each sheet adsorption board all is the approximate disk of the Octagon of 45 ° of flangings, is connected with lower fixed frame with upper holder through screw; Last lower fixed frame is connected with screw with the secondary heat exchanger of cold head, and the joint is lined with the indium sheet.
4. according to claim 1 or claim 2 heavy caliber cryopump; It is characterized in that; Said louvre type low temperature baffle plate is provided with a plurality of blades, and each blade pass is crossed socket and is positioned on two cross connecting plates, and a vertical connecting plate is located by vertical socket with two cross connecting plates; With ring framework socket location, fix with the argon arc welding electric welding more again.
5. heavy caliber cryopump as claimed in claim 4 is characterized in that the ring framework closely contacts with liquid nitrogen heat sink, and three connecting plates connect with screw with the connecting plate on the liquid nitrogen heat sink, and the joint is lined with the indium sheet.
6. according to claim 1 or claim 2 heavy caliber cryopump is characterized in that said liquid nitrogen heat sink comprises vertical liquid nitrogen heat sink and horizontal liquid nitrogen heat sink.
7. heavy caliber cryopump as claimed in claim 6; It is characterized in that; Said vertical liquid nitrogen heat sink comprise two one sides open rectangular groove liquid collecting pipe and with two of its welding semicircle chambeies of hollow of processing by the thick corrosion resistant plate of 1mm; Two liquid collecting pipes are communicated with welding with the liquid nitrogen pipes of liquid nitrogen import, liquid nitrogen outlet respectively; The outside of last liquid collecting pipe is welded with 4 connecting sheets that 6 connecting sheets that are connected with louvre type low temperature baffle plate and confession are provided with heat sink radially fixed block respectively, and outer spot welding one circle of following liquid collecting pipe is provided with four holes to be used for heat sink axial restraint as the thick corrosion resistant plate of the 1mm of radiation proof shirt rim on the shirt rim.
8. heavy caliber cryopump as claimed in claim 6; It is characterized in that; Said horizontal liquid nitrogen heat sink has the semicircle chamber of two hollows; The liquid nitrogen import of rectangular slotted eye is opened with two both sides in the semicircle chamber of this hollow, the liquid nitrogen pipe of liquid nitrogen outlet is communicated with welding, and is welded with umbrella shape shirt rim and 10 connecting sheets.
9. according to claim 1 or claim 2 heavy caliber cryopump; It is characterized in that; Said liquid nitrogen heat sink is through 4 heat sink radial support piece lateral fixation and pass through 4 heat sink axially support axiss of a cylinder to fixing, and the import liquid nitrogen pipe is connected joint welded seal with pump case with two elasticity with the outlet liquid nitrogen pipe.
10. according to claim 1 or claim 2 heavy caliber cryopump is characterized in that said one-level shield plate is connected through screw on the first-class heat exchanger of above-mentioned cold head, and the joint is lined with the indium sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204010856U CN202250681U (en) | 2011-10-20 | 2011-10-20 | Large-aperture cryogenic pump with liquid nitrogen heat sink |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204010856U CN202250681U (en) | 2011-10-20 | 2011-10-20 | Large-aperture cryogenic pump with liquid nitrogen heat sink |
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| CN202250681U true CN202250681U (en) | 2012-05-30 |
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| CN2011204010856U Expired - Fee Related CN202250681U (en) | 2011-10-20 | 2011-10-20 | Large-aperture cryogenic pump with liquid nitrogen heat sink |
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Cited By (12)
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| CN103383322A (en) * | 2013-07-11 | 2013-11-06 | 安徽万瑞冷电科技有限公司 | Surface analysis system with cryopump |
| CN103603788A (en) * | 2013-10-18 | 2014-02-26 | 昆山珍实复合材料有限公司 | Secondary cold plate in vacuum low-temperature pump |
| CN103994049A (en) * | 2013-02-18 | 2014-08-20 | 住友重机械工业株式会社 | Cryopump and cryopump mounting structure |
| CN104653433A (en) * | 2013-11-19 | 2015-05-27 | 核工业西南物理研究院 | Adsorption structure assembly of large built-in liquid helium cryogenic pump |
| CN105041609A (en) * | 2015-07-16 | 2015-11-11 | 兰州空间技术物理研究所 | Heavy-calibre cryopump for pumping away xenon |
| CN107725320A (en) * | 2017-11-24 | 2018-02-23 | 兰州真空设备有限责任公司 | A kind of full refrigeration mode cryogenic pump of heavy caliber |
| CN108105066A (en) * | 2017-12-26 | 2018-06-01 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump of variable pumping speed |
| CN108547753A (en) * | 2018-03-22 | 2018-09-18 | 兰州真空设备有限责任公司 | A kind of heavy caliber liquid nitrogen-GM type cryogenic pumps |
| CN108915991A (en) * | 2018-06-19 | 2018-11-30 | 安徽万瑞冷电科技有限公司 | A kind of fast cooling type cryogenic pump with heat bridge |
| CN110291291A (en) * | 2017-02-07 | 2019-09-27 | 住友重机械工业株式会社 | Cryogenic pump |
| CN110758781A (en) * | 2019-11-12 | 2020-02-07 | 上海卫星装备研究所 | Thermal vacuum equipment with condensable volatile pollutant absorption function and use method |
| CN117167234A (en) * | 2023-10-30 | 2023-12-05 | 苏州八匹马超导科技有限公司 | Cryopump adsorption array and cryopump |
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2011
- 2011-10-20 CN CN2011204010856U patent/CN202250681U/en not_active Expired - Fee Related
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103994049A (en) * | 2013-02-18 | 2014-08-20 | 住友重机械工业株式会社 | Cryopump and cryopump mounting structure |
| CN103994049B (en) * | 2013-02-18 | 2016-08-17 | 住友重机械工业株式会社 | Cryopump and cryopump mounting structure |
| CN103383322A (en) * | 2013-07-11 | 2013-11-06 | 安徽万瑞冷电科技有限公司 | Surface analysis system with cryopump |
| CN103603788A (en) * | 2013-10-18 | 2014-02-26 | 昆山珍实复合材料有限公司 | Secondary cold plate in vacuum low-temperature pump |
| CN103603788B (en) * | 2013-10-18 | 2017-01-11 | 南通乐士机械有限公司 | Secondary cold plate in vacuum low-temperature pump |
| CN104653433A (en) * | 2013-11-19 | 2015-05-27 | 核工业西南物理研究院 | Adsorption structure assembly of large built-in liquid helium cryogenic pump |
| CN105041609A (en) * | 2015-07-16 | 2015-11-11 | 兰州空间技术物理研究所 | Heavy-calibre cryopump for pumping away xenon |
| CN110291291A (en) * | 2017-02-07 | 2019-09-27 | 住友重机械工业株式会社 | Cryogenic pump |
| CN110291291B (en) * | 2017-02-07 | 2021-07-20 | 住友重机械工业株式会社 | Low-temperature pump |
| CN107725320A (en) * | 2017-11-24 | 2018-02-23 | 兰州真空设备有限责任公司 | A kind of full refrigeration mode cryogenic pump of heavy caliber |
| CN108105066A (en) * | 2017-12-26 | 2018-06-01 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump of variable pumping speed |
| CN108547753A (en) * | 2018-03-22 | 2018-09-18 | 兰州真空设备有限责任公司 | A kind of heavy caliber liquid nitrogen-GM type cryogenic pumps |
| CN108915991A (en) * | 2018-06-19 | 2018-11-30 | 安徽万瑞冷电科技有限公司 | A kind of fast cooling type cryogenic pump with heat bridge |
| CN108915991B (en) * | 2018-06-19 | 2019-08-23 | 安徽万瑞冷电科技有限公司 | A kind of fast cooling type cryogenic pump with heat bridge |
| CN110758781A (en) * | 2019-11-12 | 2020-02-07 | 上海卫星装备研究所 | Thermal vacuum equipment with condensable volatile pollutant absorption function and use method |
| CN117167234A (en) * | 2023-10-30 | 2023-12-05 | 苏州八匹马超导科技有限公司 | Cryopump adsorption array and cryopump |
| CN117167234B (en) * | 2023-10-30 | 2024-02-06 | 苏州八匹马超导科技有限公司 | Cryopump adsorption array and cryopump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120530 Termination date: 20161020 |