CN104653433A - Adsorption structure assembly of large built-in liquid helium cryogenic pump - Google Patents
Adsorption structure assembly of large built-in liquid helium cryogenic pump Download PDFInfo
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- CN104653433A CN104653433A CN201310585453.0A CN201310585453A CN104653433A CN 104653433 A CN104653433 A CN 104653433A CN 201310585453 A CN201310585453 A CN 201310585453A CN 104653433 A CN104653433 A CN 104653433A
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Abstract
The invention belongs to adsorption structures of liquid helium cryogenic pumps and particularly relates to an adsorption structure assembly of a large built-in liquid helium cryogenic pump. The adsorption structure assembly comprises an extensible groove type cryogenic cold surface, a baffle plate, a shielding plate, a top interface flange and an internal pipe; the extensible cryogenic cold surface and a pipe circuit of the extensible cryogenic cold surface are arranged inside the adsorption structure assembly; the baffle plate and the shielding plate are arranged outside the cryogenic cold surface and the pipe circuit of the cryogenic cold surface; the top of the baffle plate and the top of the shielding plate are provided with the top interface flange. According to the adsorption structure assembly of the large built-in liquid helium cryogenic pump, a double-circuit structure comprises a liquid nitrogen circuit and a liquid helium circuit which are operated independently and matched with each other, the cryogenic area is reasonably distributed, and accordingly the operation cost is reduced; the extensible groove type cryogenic cold surface which is of a double-layer sheet metal structure is matched with coconut based activated carbon materials and accordingly the cryogenic adsorption capacity of the cold surface per unit area is improved; the internal space and an interface of a square vacuum container are effectively utilized due to the square structure of the hanging flange and accordingly the contradiction between the high pumping speed of the cryogenic pump and the device interface is overcome.
Description
Technical field
The invention belongs to a kind of adsorption structure of large-scale built-in liquid helium cryopump, be specifically related to a kind of adsorption structure assembly of large-scale built-in liquid helium cryopump.
Background technique
At present, cryopump is widely used in controlled nuclear fusion, particle accelerator, space environment and modern semiconductor technology field.In the neutral beam system of controlled nuclear fusion device, neutralization processes due to ion source discharge and ion beam needs the Gas puffing compared with large discharge, and the neutral beam particle after neutralisation needs to transmit in high vacuum, therefore need a kind of extract system of high pumping rate in the bunch vacuum system after neutralisation, and acquisition be realized in the shorter time and be less than 10 in the confined space (vacuum vessel)
-4the vacuum environment of Pa.In order to solve this kind of problem, the cryopump of condensation adsorption principle is utilized to be able in this field extensive use in the last few years.
Cryopump passes through the cryogenic condensation plate adsorption coagulation temperature gas molecule higher than cold plate temperature.The larger exhaust capacity of area of cold drawing is stronger, and cold plate temperature is lower, and the gas molecule kind that can extract is more.Early stage cryopump is mostly external, and by the restriction of connection interface size, effective cold drawing area is little, and cooling medium is liquid nitrogen, and cryogenic condensation principle can not be relied on to extract the gases such as the lower hydrogen of adiabatic condensation temperature.Along with the development of cryogenic technique, the cooling medium of cryopump have employed liquid helium in recent years, can extract the gas molecule such as nitrogen and hydrogen; In order to the level making the ultimate vacuum in vacuum vessel reach higher, the cold drawing area of cryopump also needs to continue to increase, connection interface size be constrained in order to outstanding problem, in the vacuum vessel of limited space, for obtaining higher exhaust capacity, built-in cryopump has also just been born.Built-in cryopump is mainly built in vacuum vessel by whole for its adsorption structure part exactly, to reach the object of higher exhaust capacity.The difference that cool source part is measured according to demand, less normal employing small-sized refrigerator, relatively large low-temperature receiver then needs to be equipped with special external source circuit system.The mainly this kind of adsorption structure assembly needing the large-scale liquid helium cryopump of external source circuit system that the present invention relates to, it is the key component of this kind of large-scale liquid helium cryopump.Generally include cryogenic condensation plate (huyashi-chuuka (cold chinese-style noodles)) and radiation baffle (shield plate or deflection plate) and related support structure three part.At present, built-in liquid helium cryopump does not also have standardized commercial product, and it is different from external cryopump, and mostly what market can be purchased is the latter, that is: the small-bore external cryopump product of standard flange interface mode.When system needs large pumping speed, the pump housing is many to vacuum vessel interface requirement opening, and occupied ground space is large.
As shown in Figure 1, traditional adsorber structure is usually because the reason of self exhaust capacity and structure needs the interface size of increase and vacuum vessel or quantity to reach the object improving pumping speed.Tradition adsorber structure in low temperature huyashi-chuuka (cold chinese-style noodles) mainly cryogenic piping weld with cryogenic condensation plate.As shown in Figure 2, cryogenic piping and cryogenic condensation version surface of contact little, low temperature cold source utilization ratio is low, and loss is large.How to improve the cryogenic absorption ability of unit area huyashi-chuuka (cold chinese-style noodles), reduce simultaneously and the problem that the adsorption structure assembly of developing this kind of large-scale built-in liquid helium cryopump must solve is become to the interface requirements of vacuum vessel.
Summary of the invention
The object of this invention is to provide a kind of adsorption structure assembly for large-scale built-in liquid helium cryopump, it effectively can improve the cryogenic absorption ability of unit area huyashi-chuuka (cold chinese-style noodles), reduces the interface requirements to vacuum vessel simultaneously.
The present invention realizes like this, a kind of adsorption structure assembly of large-scale built-in liquid helium cryopump, it comprises extendible low temperature huyashi-chuuka (cold chinese-style noodles), deflection plate, shield plate, top flange and internal pipeline, wherein, extendible low temperature huyashi-chuuka (cold chinese-style noodles) and pipeline loop thereof are located at component internal, be provided with deflection plate and shield plate outside low temperature huyashi-chuuka (cold chinese-style noodles) and pipeline loop, deflection plate and shield plate top are provided with top flange.
Described deflection plate is made up of the polylith aluminum deflection plate of 120 degree of angles.
Described easily extensible low temperature cold face comprises slot type or distribution point type is made.
Advantage of the present invention is, double loop structure is corresponding liquid nitrogen and liquid helium loop respectively, not only independent operating but also cooperatively interact, and by reasonable layout low temperature warm area, reduces operating cost; The expansion slot type low temperature cold face (or distribution point type low temperature cold face) of double-deck sheet metal structural, coordinates the use of coconut palm matrix activated carbon material, improves the cryogenic absorption ability of unit area huyashi-chuuka (cold chinese-style noodles); Suspension type flange square structure effectively make use of inner space and the interface of square vacuum vessel, solves the contradiction between the large pumping speed of cryopump and device interface.The inner side space of the square vacuum vessel of Appropriate application and top flange, on confined space position, by liquid nitrogen loop deflection plate and the shield plate of optimization, and the expansion slot type low temperature cold face of the double-deck sheet metal structural in brand-new liquid helium loop (or distribution point type low temperature cold face), increase the cryogenic absorption ability of unit area huyashi-chuuka (cold chinese-style noodles), reach within the scope of the useful space, the functional effect of larger cryogenic absorption ability.According to the needs of pumping speed, modular design can be placed multiple simultaneously.
Accompanying drawing explanation
Fig. 1 is Conventional cryogenic pump adsorption structure schematic diagram;
Fig. 2 is low temperature huyashi-chuuka (cold chinese-style noodles) structural representation in traditional adsorber structure;
Fig. 3 is the adsorption structure assembly schematic diagram of a kind of large-scale built-in liquid helium cryopump provided by the present invention;
Fig. 4 is deflection plate schematic diagram;
Fig. 5 is shield plate schematic diagram;
Fig. 6 is the structural representation of cryogenic pumping array;
Fig. 7 is slot type low temperature huyashi-chuuka (cold chinese-style noodles) structural representation;
Fig. 8 is distribution point type low temperature cold face structural representation.
In figure, 1 low temperature huyashi-chuuka (cold chinese-style noodles), 2 deflection plates, 3 shield plates, 4 top flanges, 11 shield plates, 12 low temperature huyashi-chuuka (cold chinese-style noodles).
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in detail:
As seen in figures 3-6, a kind of adsorption structure assembly of large-scale built-in liquid helium cryopump comprises easily extensible slot type or distribution point type low temperature cold face 1, deflection plate 2, shield plate 3, top flange 4 and internal pipeline.Low temperature huyashi-chuuka (cold chinese-style noodles) 1 and the pipeline loop thereof of expansion are arranged on component internal, and be surrounded by deflection plate 2 and shield plate 3 outside low temperature huyashi-chuuka (cold chinese-style noodles) 1 and pipeline loop thereof, deflection plate 2 and shield plate 3 top are provided with top flange 4.
Form liquid helium loop by the easily extensible low temperature huyashi-chuuka (cold chinese-style noodles) 1 of the stainless double-deck sheet metal structural of 2 millimeters thick 304 and inner tubular structure and be positioned at component internal; Outside the liquid nitrogen loop be made up of polylith aluminum the deflection plate 2 and 2 millimeters thick 304 stainless distribution point type shield plate 3 of 120 degree of angles is enclosed in; Vacuum vessel internal gas load faced by deflection plate 2, inner liquid helium and the adsorption structure that with external source be connected of liquid nitrogen pipes loop by square shaped top flange 4.
As shown in Figure 7,8; The processing technology of extendible slot type low temperature huyashi-chuuka (cold chinese-style noodles) and distribution point type low temperature cold face two kinds of forms is different, but effect is similar to.Aluminum deflection plate and the 2 millimeters thick 304 stainless distribution point type shield plate of 120 degree of angles in liquid nitrogen loop assume responsibility for most thermal load, be arranged in the periphery of modular construction, its effect can be summarized as: (a) can have good thermal protection effect to the liquid helium low temperature huyashi-chuuka (cold chinese-style noodles) of 4.5K; B () is to water vapour in vacuum chamber and CO
2deng the gas of boiling point higher than 77K, can they be frozen on baffle plate, stop these gases close to cryopanel, namely can be used as the cold pole of one-level; (c) to the gas that can not condense at 77K temperature, as Ar, O
2, N
2, Ne, H
2precooling effect can be played, the heat load be conducive to increasing pumping speed, reducing low temperature face with the gas such as He.
The structural representation of cryogenic pumping array as shown in Figure 6; The supporting structure optimized decreases the impact on vacuum vessel main body; For square vacuum vessel, suspension type flange square structure effectively make use of inner side space and the interface of square vacuum vessel, solves the problem between device interface.
Feature of the present invention is:
1. low temperature huyashi-chuuka (cold chinese-style noodles) improves the utilization ratio of low temperature cold source;
2. deflection plate and shield plate assume responsibility for most thermal load, avoid thermal radiation to shine directly on cryogenic condensation plate, are conducive to improving the capture rate to gas molecule, reduce deflection plate as far as possible to the stop of the motion of pumped gas molecule simultaneously;
3. the supporting structure optimized decreases the impact on vacuum vessel main body.
The present invention is a kind of brand-new low-temperature adsorber structure of the vacuum vessel for square structure in essence.It preserves the advantage of built-in large pumping speed cryopump, the cryogenic absorption ability simultaneously by adopting the low temperature huyashi-chuuka (cold chinese-style noodles) of new structure to substantially increase unit area huyashi-chuuka (cold chinese-style noodles), modular structure, interface decreases the impact on vacuum vessel.It is simple that adsorption structure assembly of the present invention has structure, convenient for installation and maintenance, can the feature of stable operation under complicated electromagnetism and neutron radiation environment.
Claims (3)
1. the adsorption structure assembly of one kind large-scale built-in liquid helium cryopump, it is characterized in that: it comprises extendible low temperature huyashi-chuuka (cold chinese-style noodles) (1), deflection plate (2), shield plate (3), top flange (4) and internal pipeline, wherein, extendible low temperature huyashi-chuuka (cold chinese-style noodles) (1) and pipeline loop thereof are located at component internal, be provided with deflection plate (2) and shield plate (3) outside low temperature huyashi-chuuka (cold chinese-style noodles) (1) and pipeline loop, deflection plate (2) and shield plate (3) top are provided with top flange (4).
2. the adsorption structure assembly of a kind of large-scale built-in liquid helium cryopump as claimed in claim 1, is characterized in that: described deflection plate (2) is made up of the polylith aluminum deflection plate (2) of 120 degree of angles.
3. the adsorption structure assembly of a kind of large-scale built-in liquid helium cryopump as claimed in claim 1, is characterized in that: described easily extensible low temperature huyashi-chuuka (cold chinese-style noodles) (1) comprises slot type or distribution point type is made.
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| CN201310585453.0A CN104653433A (en) | 2013-11-19 | 2013-11-19 | Adsorption structure assembly of large built-in liquid helium cryogenic pump |
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| CN201310585453.0A CN104653433A (en) | 2013-11-19 | 2013-11-19 | Adsorption structure assembly of large built-in liquid helium cryogenic pump |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106930924A (en) * | 2015-12-30 | 2017-07-07 | 核工业西南物理研究院 | A kind of straight-plate-type built-in cryopump structure with three-level adsorption structure |
| CN108050043A (en) * | 2018-01-04 | 2018-05-18 | 湘潭大学 | A kind of vacuum extractor, pumped vacuum systems and its vacuum pumping method |
| CN108249002A (en) * | 2016-12-29 | 2018-07-06 | 核工业西南物理研究院 | A kind of vacuum tank sandwich |
| CN111081388A (en) * | 2018-10-19 | 2020-04-28 | 核工业西南物理研究院 | Efficient steam generation system suitable for pulse power reactor |
| CN115295176A (en) * | 2022-08-09 | 2022-11-04 | 中国科学院合肥物质科学研究院 | Tokamak divertor particle removing equipment |
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| JPH0712051A (en) * | 1993-06-25 | 1995-01-17 | Nec Kansai Ltd | Cartridge type cryopump |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106930924A (en) * | 2015-12-30 | 2017-07-07 | 核工业西南物理研究院 | A kind of straight-plate-type built-in cryopump structure with three-level adsorption structure |
| CN106930924B (en) * | 2015-12-30 | 2019-01-08 | 核工业西南物理研究院 | A kind of straight-plate-type built-in cryopump structure with three-level adsorption structure |
| CN108249002A (en) * | 2016-12-29 | 2018-07-06 | 核工业西南物理研究院 | A kind of vacuum tank sandwich |
| CN108249002B (en) * | 2016-12-29 | 2024-04-09 | 核工业西南物理研究院 | Vacuum container sandwich structure |
| CN108050043A (en) * | 2018-01-04 | 2018-05-18 | 湘潭大学 | A kind of vacuum extractor, pumped vacuum systems and its vacuum pumping method |
| CN111081388A (en) * | 2018-10-19 | 2020-04-28 | 核工业西南物理研究院 | Efficient steam generation system suitable for pulse power reactor |
| CN115295176A (en) * | 2022-08-09 | 2022-11-04 | 中国科学院合肥物质科学研究院 | Tokamak divertor particle removing equipment |
| CN115295176B (en) * | 2022-08-09 | 2023-06-02 | 中国科学院合肥物质科学研究院 | Tokamak divertor particle removal equipment |
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Application publication date: 20150527 |