CN203856673U - Adsorbing structure component for large-size built-in liquid helium low-temperature pump - Google Patents
Adsorbing structure component for large-size built-in liquid helium low-temperature pump Download PDFInfo
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- CN203856673U CN203856673U CN201320736100.1U CN201320736100U CN203856673U CN 203856673 U CN203856673 U CN 203856673U CN 201320736100 U CN201320736100 U CN 201320736100U CN 203856673 U CN203856673 U CN 203856673U
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- Prior art keywords
- low
- temperature
- liquid helium
- loop
- cold surface
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- 239000007788 liquid Substances 0.000 title claims abstract description 30
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 24
- 239000001307 helium Substances 0.000 title claims abstract description 23
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 235000012149 noodles Nutrition 0.000 claims description 24
- 238000001179 sorption measurement Methods 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 16
- 238000005086 pumping Methods 0.000 abstract description 10
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 4
- 239000002184 metal Substances 0.000 abstract description 4
- 239000000725 suspension Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 12
- 230000005494 condensation Effects 0.000 description 9
- 238000009833 condensation Methods 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 7
- 238000010622 cold drawing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000006386 neutralization reaction Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 244000060011 Cocos nucifera Species 0.000 description 1
- 235000013162 Cocos nucifera Nutrition 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001007 puffing effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The utility model belongs to an adsorbing structure for a liquid helium low-temperature pump and specifically relates to an adsorbing structure component for a large-size built-in liquid helium low-temperature pump. The adsorbing structure component comprises an expansion slot type low-temperature cold surface, a baffle plate, a shield plate, a top interface flange and an inner pipeline, wherein the expansion slot type low-temperature cold surface and a pipeline loop thereof are arranged in the component; the baffle plate and the shield plate are arranged on the outer side of the low-temperature cold surface and the pipeline loop thereof; the top interface flange is arranged at the top of the baffle plate and the shield plate. The adsorbing structure component has the advantages that a double-loop structure respectively corresponds to a liquid nitrogen loop and a liquid helium loop which can independently run and also can match with each other; the low-temperature area is reasonably distributed, so that the running cost is lowered; the expansion slot type low-temperature cold surface with a double-layer metal plate structure is used together with a coconut-base activated carbon material, so that the low-temperature absorbing capability of unit area cold surface is increased; the inner space and interface of a square vacuum container are effectively utilized by a suspension type flange square structure, so that the contradiction between the high pumping speed of the low-temperature pump and the device interface is overcome.
Description
Technical field
The invention belongs to a kind of adsorption structure of large-scale built-in liquid helium cryopump, be specifically related to a kind of adsorption structure assembly of large-scale built-in liquid helium cryopump.
Background technique
At present, cryopump is widely used in controlled nuclear fusion, particle accelerator, space environment and modern semiconductor technology field.In the neutral beam system of controlled nuclear fusion device, because the neutralization processes of ion source discharge and ion beam needs the Gas puffing of larger flow, and neutral beam particle after neutralisation need to transmit in high vacuum, therefore in the bunch vacuum system after neutralisation, need a kind of extract system of high pumping rate, within the confined space (vacuum vessel) and shorter time, realize obtaining and be less than 10
-4the vacuum environment of Pa.In order to solve this class problem, utilized in the last few years the cryopump of condensation adsorption principle to be able in this field extensive use.
Cryopump is by the cryogenic condensation plate absorption adiabatic condensation temperature gas molecule higher than cold drawing temperature.The larger exhaust capacity of area of cold drawing is stronger, and cold drawing temperature is lower, and the gas molecule kind that can extract is just more.Early stage cryopump is mostly external, is subject to the restriction of connection interface size, and effectively cold drawing area is little, and cooling medium is liquid nitrogen, can not rely on cryogenic condensation principle to extract the gases such as hydrogen that adiabatic condensation temperature is lower.Along with the development of cryogenic technique, the cooling medium of cryopump had adopted liquid helium in recent years, can extract the gas molecule such as nitrogen and hydrogen; In order to make the ultimate vacuum in vacuum vessel reach higher level, the cold drawing area of cryopump also needs to continue to increase, and being constrained to for outstanding problem of connection interface size, in the vacuum vessel of limited space, for obtaining higher exhaust capacity, built-in cryopump has also just been born.Built-in cryopump is mainly built in vacuum vessel whole its adsorption structure part exactly, to reach the object of higher exhaust capacity.The difference that low-temperature receiver part is measured according to demand, less normal employing small-sized refrigerator, relatively large low-temperature receiver needs to be equipped with special external source circuit system.What the present invention relates to is mainly the adsorption structure assembly that this class needs the large-scale liquid helium cryopump of external source circuit system, and it is the key component of the large-scale liquid helium cryopump of this class.Generally include cryogenic condensation plate (huyashi-chuuka (cold chinese-style noodles)) and radiation baffle (shield plate or deflection plate) and related support structure three parts.At present, built-in liquid helium cryopump does not also have standardized commercial product, and it is different from external cryopump, and mostly that on market, can purchase is the latter, that is: the small-bore external cryopump product of standard flange interface mode.In the time that system needs large pumping speed, the pump housing is many to vacuum vessel interface requirement opening, and occupied ground space is large.
As shown in Figure 1, traditional adsorber structure usually reaches because the reason of self exhaust capacity and structure need to increase with interface size or the quantity of vacuum vessel the object that improves pumping speed.In tradition adsorber structure, low temperature huyashi-chuuka (cold chinese-style noodles) is mainly cryogenic piping and the welding of cryogenic condensation plate.As shown in Figure 2, cryogenic piping and cryogenic condensation version surface of contact are little, and low temperature cold source utilization ratio is low, and loss is large.How to improve the cryogenic absorption ability of unit area huyashi-chuuka (cold chinese-style noodles), reduce simultaneously the interface requirements of vacuum vessel is become to the problem that the adsorption structure assembly of development this class large-scale built-in liquid helium cryopump must solve.
Summary of the invention
The object of this invention is to provide a kind of adsorption structure assembly for large-scale built-in liquid helium cryopump, the cryogenic absorption ability that it can be able to effectively improve unit area huyashi-chuuka (cold chinese-style noodles) reduces the interface requirements to vacuum vessel simultaneously.
The present invention realizes like this, a kind of adsorption structure assembly of large-scale built-in liquid helium cryopump, it comprises extendible low temperature huyashi-chuuka (cold chinese-style noodles), deflection plate, shield plate, top flange and internal pipeline, wherein, extendible low temperature huyashi-chuuka (cold chinese-style noodles) and pipeline loop thereof are located at component internal, low temperature huyashi-chuuka (cold chinese-style noodles) and pipeline loop are provided with deflection plate and shield plate outward, and deflection plate and shield plate top are provided with top flange.
Described deflection plate is made up of the polylith aluminum deflection plate of 120 degree angles.
The described low temperature cold expanded face comprises that slot type or distribution point type make.
Advantage of the present invention is, double loop structure is corresponding liquid nitrogen and liquid helium loop respectively, and not only independent operating but also cooperatively interact, by reasonable layout low temperature warm area, has reduced operating cost; The expansion slot type low temperature cold face (or distribution point type low temperature cold face) of double-deck sheet metal structural, coordinates the use of coconut palm matrix activated carbon material, has improved the cryogenic absorption ability of unit area huyashi-chuuka (cold chinese-style noodles); Suspension type flange square structure has effectively utilized inner space and the interface of square vacuum vessel, has solved the contradiction between the large pumping speed of cryopump and device interface.Rationally utilize inner side space and the top flange of square vacuum vessel, on confined space position, by liquid nitrogen loop deflection plate and the shield plate optimized, and the expansion slot type low temperature cold face (or distribution point type low temperature cold face) of the double-deck sheet metal structural in brand-new liquid helium loop, increase the cryogenic absorption ability of unit area huyashi-chuuka (cold chinese-style noodles), reach within the scope of the useful space functional effect of larger cryogenic absorption ability.According to the needs of pumping speed, modular design can be placed multiple simultaneously.
Brief description of the drawings
Fig. 1 is traditional cryopump adsorption structure schematic diagram;
Fig. 2 is low temperature huyashi-chuuka (cold chinese-style noodles) structural representation in traditional adsorber structure;
Fig. 3 is the adsorption structure assembly schematic diagram of a kind of large-scale built-in liquid helium cryopump provided by the present invention;
Fig. 4 is deflection plate schematic diagram;
Fig. 5 is shield plate schematic diagram;
Fig. 6 is the structural representation of cryogenic pumping array;
Fig. 7 is slot type low temperature huyashi-chuuka (cold chinese-style noodles) structural representation;
Fig. 8 is distribution point type low temperature cold face structural representation.
In figure, 1 low temperature huyashi-chuuka (cold chinese-style noodles), 2 deflection plates, 3 shield plates, 4 top flanges, 11 shield plates, 12 low temperature huyashi-chuuka (cold chinese-style noodles).
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in detail:
As shown in Fig. 3-6, a kind of adsorption structure assembly of large-scale built-in liquid helium cryopump comprises can expand slot type or distribution point type low temperature cold face 1, deflection plate 2, shield plate 3, top flange 4 and internal pipeline.Low temperature huyashi-chuuka (cold chinese-style noodles) 1 and the pipeline loop thereof of expansion are arranged on component internal, and low temperature huyashi-chuuka (cold chinese-style noodles) 1 and pipeline loop thereof are surrounded by deflection plate 2 and shield plate 3 outward, and deflection plate 2 and shield plate 3 tops are provided with top flange 4.
Form liquid helium loop by the low temperature the expanded huyashi-chuuka (cold chinese-style noodles) 1 of 2 millimeters thick 304 stainless double-deck sheet metal structurals and inner tubular structure and be positioned at component internal; The liquid nitrogen loop encompasses being made up of the stainless distribution point type of polylith aluminum deflection plate 2 and 2 millimeters thick 304 shield plate 3 of 120 degree angles outside; Deflection plate 2 is in the face of the load of vacuum vessel internal gas, inner liquid helium with liquid nitrogen pipes loop by the adsorption structure being connected with external source of square shaped top flange 4.
As shown in Figure 7,8; The processing technology of extendible slot type low temperature huyashi-chuuka (cold chinese-style noodles) and two kinds of forms of distribution point type low temperature cold face is different, but effect is approximate.Aluminum deflection plate and the stainless distribution point type of 2 millimeters thick 304 shield plate of the 120 degree angles in liquid nitrogen loop have been born most thermal load, be arranged in the periphery of modular construction, its effect can be summarized as: (a) can have good thermal protection effect to the liquid helium low temperature huyashi-chuuka (cold chinese-style noodles) of 4.5K; (b) to water vapour in vacuum chamber and CO
2gas Deng boiling point higher than 77K, can be frozen in them on baffle plate, stops these gases to approach cryopanel, can be used as the cold utmost point of one-level; (c) to the gas that can not condense at 77K temperature, as Ar, O
2, N
2, Ne, H
2can play precooling effect with gases such as He, be conducive to the heat load that increases pumping speed, reduces low temperature face.
The structural representation of cryogenic pumping array as shown in Figure 6; The supporting structure of optimizing has reduced the impact on vacuum vessel main body; For square vacuum vessel, suspension type flange square structure has effectively utilized inner side space and the interface of square vacuum vessel, has solved the problem between device interface.
Feature of the present invention is:
1. low temperature huyashi-chuuka (cold chinese-style noodles) has improved the utilization ratio of low temperature cold source;
2. deflection plate and shield plate have been born most thermal load, avoid thermal radiation to shine directly on cryogenic condensation plate, are conducive to improve the capture rate to gas molecule, reduce as far as possible stopping of the motion of deflection plate to pumped gas molecule simultaneously;
3. the supporting structure of optimizing has reduced the impact on vacuum vessel main body.
The present invention is a kind of brand-new low-temperature adsorber structure for the vacuum vessel of square structure in essence.It has retained the advantage of built-in large pumping speed cryopump, and by adopting the low temperature huyashi-chuuka (cold chinese-style noodles) of new structure greatly to improve the cryogenic absorption ability of unit area huyashi-chuuka (cold chinese-style noodles), modular structure, has reduced the impact on vacuum vessel on interface simultaneously.Adsorption structure assembly of the present invention has simple in structure, convenient for installation and maintenance, feature that can stable operation under complicated electromagnetism and neutron radiation environment.
Claims (2)
1. the adsorption structure assembly of a large-scale built-in liquid helium cryopump, it is characterized in that: it comprises extendible low temperature huyashi-chuuka (cold chinese-style noodles) (1), deflection plate (2), shield plate (3), top flange (4) and internal pipeline, wherein, extendible low temperature huyashi-chuuka (cold chinese-style noodles) (1) and pipeline loop thereof are located at component internal, low temperature huyashi-chuuka (cold chinese-style noodles) (1) and pipeline loop are provided with deflection plate (2) and shield plate (3) outward, and deflection plate (2) and shield plate (3) top are provided with top flange (4).
2. the adsorption structure assembly of a kind of large-scale built-in liquid helium cryopump as claimed in claim 1, is characterized in that: described deflection plate (2) is made up of the polylith aluminum deflection plate (2) of 120 degree angles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320736100.1U CN203856673U (en) | 2013-11-19 | 2013-11-19 | Adsorbing structure component for large-size built-in liquid helium low-temperature pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320736100.1U CN203856673U (en) | 2013-11-19 | 2013-11-19 | Adsorbing structure component for large-size built-in liquid helium low-temperature pump |
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| Publication Number | Publication Date |
|---|---|
| CN203856673U true CN203856673U (en) | 2014-10-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320736100.1U Expired - Lifetime CN203856673U (en) | 2013-11-19 | 2013-11-19 | Adsorbing structure component for large-size built-in liquid helium low-temperature pump |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104653433A (en) * | 2013-11-19 | 2015-05-27 | 核工业西南物理研究院 | Adsorption structure assembly of large built-in liquid helium cryogenic pump |
-
2013
- 2013-11-19 CN CN201320736100.1U patent/CN203856673U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104653433A (en) * | 2013-11-19 | 2015-05-27 | 核工业西南物理研究院 | Adsorption structure assembly of large built-in liquid helium cryogenic pump |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20141001 |
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| CX01 | Expiry of patent term |