CN101922435B - Double-layer integrally-built-in cryogenic pump - Google Patents
Double-layer integrally-built-in cryogenic pump Download PDFInfo
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- CN101922435B CN101922435B CN2010102563205A CN201010256320A CN101922435B CN 101922435 B CN101922435 B CN 101922435B CN 2010102563205 A CN2010102563205 A CN 2010102563205A CN 201010256320 A CN201010256320 A CN 201010256320A CN 101922435 B CN101922435 B CN 101922435B
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Abstract
The invention discloses a horizontally-cylindrical double-layer integrally-built-in cryogenic pump structure with a simple structure. A skeleton and a support structure of two layers of tube plates in conventional design are saved so as to directly eliminate the consumption of the skeleton and the support structure on a low-temperature medium; and a radiation protection cold shield is arranged between the two layers of tube plates so as to indirectly reduce the consumption of liquid helium tube plates on the low-temperature medium. Liquid nitrogen tube plates and the liquid helium tube plates are integrated by special heat insulation design, and the double-layer integrally-built-in cryogenic pump is directly arranged on three chamber body support rails on the lower part of the inner wall of a test chamber so as to achieve compact structural design and reliable support and maximally ensure the effective space of the test chamber. Due to a special fixation mode, the cryogenic pump can reliably work under large-temperature difference expansion and contraction and does not produce destructive stress at welding joints among a manifold and branch pipes and among the tube plates of the cryogenic pump.
Description
[technical field]
The present invention relates to a kind of double-layer integrally-built-in cryogenic pump design, belong to the cyropump field in low temperature and the vacuum technique.
[background technique]
The large space environment simulator requires in hundreds of, thousands of cubic metres experimental cabin, to reach the high vacuum requirement of degree of vacuum＜10-3Pa; When in experimental cabin, carrying out the astrovehicle test; Astrovehicle discharges lot of test gas usually; For guaranteeing the reliability and the accuracy of simulation test, the pumped vacuum systems that must be equipped with 1,000,000 liters of above pumping speed of per second is come the dynamic vacuum degree in the proof test cabin, and the bigger required exhaust capacity of the discharge quantity of astrovehicle is strong more.External vacuum pumping pump or pump group can not guarantee so big exhaust capacity usually, and the astrovehicle test gas of emitting is generally gas molecules such as nitrogen that hard-pumped removes, methane, and traditional air suction mode is difficult to realize.
Built-in cryogenic pump adopts the condensation absorption principle absorption adiabatic condensation temperature gas molecule higher than cyropump body temperature, and the temperature of the exhaust capacity of cyropump and cyropump tube sheet is relevant with the area of tube sheet.Cyropump tube sheet temperature is low more, and adsorbable gas molecule kind is many more; The tube sheet surface area is big more, and adsorptive power is strong more.Cyropump relies on the cryogenic media cooling; Cryogenic media commonly used is a liquid nitrogen; When extracting adsorption temp such as nitrogen, make cryogenic media with liquid helium usually, because liquid helium output is few, price is high than the high gas molecule of liquid nitrogen; For reducing the heat load of liquid helium consumption and tube sheet, the liquid helium cyropump outside common layout liquid nitrogen tube sheet is gone bail for and is protected.
Built-in cryogenic pump is covered with the whole inwall of space simulator experimental cabin usually, and the liquid helium tube sheet of cyropump and liquid nitrogen tube sheet are double layer construction.The liquid helium tube sheet be low temperature (＜10K), be installed in the inboard, the liquid nitrogen tube sheet be high temperature (＜100K), be installed in the outside press close to body inwall place, cabin, between liquid nitrogen tube sheet and cabin body inwall, have one deck to reduce the cold screen of radiation heat transfer.Mostly the structural type of horizontal cylindrical cyropump is the rib formula; Promptly gather pipe respectively distributing up and down of cylinder; The semicircle arm two ends that distribute as rib respectively with gather the pipe welding up and down; Be welded with fin on the arm, cryogenic media (or gas-liquid two-phase) under gather pipe and flow into, rise from gathering tube drainage along arm to the external world.Mostly the form of tube sheet is arm fin welded structure, and cryogenic media is assigned to each arm and cools off arm and fin from gathering pipe, and a plurality of finned surfaces constitute low temperature refrigeration face adsorption gas molecule.
The cyropump material should have good thermal conductivity, impact toughness, at low temperatures favorable rigidity, plasticity and weldability should be arranged, and the venting rate is low under high vacuum environment.Common cyropump material has fine aluminium, stainless steel and red copper, and the lattice of three kinds of materials all is a face-centered cube, and toughness is better; Stainless anti-yield strength is maximum, aluminium is minimum, copper is placed in the middle; Thermal conductivity copper is best, stainless steel is the poorest, aluminium is placed in the middle; Specific heat capacity aluminium is maximum under the low temperature, copper is best, stainless steel is placed in the middle.Performance through to three kinds of materials compares, and in conjunction with the actual conditions of using in the engineering, Stainless Steel Tube and copper fin are used comparatively extensive in the cyropump selection.
Usually; The quality of cyropump deadweight and cryogenic media leans on support construction supports in experimental cabin; Liquid helium tube sheet and liquid nitrogen tube sheet are installed in the skeleton separately, and skeleton passes through another support construction supports again on the experimental cabin inwall, so the supporting structure of cyropump comprises two-part; One is the support between tube sheet and skeleton, and one is the support of skeleton and cabin body.The temperature difference of cyropump tube sheet is big, and (temperature difference of liquid helium tube sheet＞260k), during the cyropump design, tube sheet should be able to freely stretch in skeleton under the cold and hot big temperature difference, does not produce excessive temperature stress.The quality (thermal capacity) and the swept area of cyropump skeleton and supporting structure itself should be as far as possible little, reduce the consumption of supporting structure to cryogenic media.
The liquid helium tube sheet of at present common liquid helium cyropump and liquid nitrogen (protection) tube sheet are stand alone type; Difference design framework and supporting structure; Make that limited experimental cabin capacity utilization is lower, and skeleton and supporting structure are bigger to the consumption of cryogenic media, even have reached 30% of whole consumptions; Improved experimentation cost greatly, and the effective diameter of experimental cabin is much smaller than the internal diameter of experimental cabin.
[summary of the invention]
The purpose of this invention is to provide a kind of cylindrical shape double-layer integrally-built-in cryogenic pump structure simple in structure, horizontal.Remove the support frame of two-layer tube sheet in the traditional design, directly eliminated skeleton and supporting structure consumption cryogenic media; Between two-layer tube sheet, increase the cold screen of radiation proof, it is about 50% that radiation heat transfer between liquid nitrogen tube sheet and liquid helium tube sheet is reduced, and reduced the consumption of liquid helium tube sheet cryogenic media indirectly.Liquid nitrogen tube sheet and liquid helium tube sheet constitute one through special insulated design, and double-layer integrally-built-in cryogenic pump is directly put on three supporting guides that are placed on experimental cabin inwall bottom, and structural design is compact to be supported reliably, has guaranteed the useful space of experimental cabin to greatest extent.Special means of fixation makes that cyropump down still can reliably working in the expanding with heat and contract with cold of the big temperature difference, can be in the tube sheet weld generation destructive stress of cyropump house steward and arm, arm and fin.
Double-layer integrally-built-in cryogenic pump; Comprise liquid nitrogen cold drawing (3), liquid nitrogen arm (4), last liquid nitrogen house steward (21), following liquid nitrogen house steward (16), liquid helium cold drawing (7), liquid helium arm (6); Last liquid helium house steward (20), following liquid helium house steward (15), the cold screen of radiation proof (2,5), special type mat insulation (8,9,10,12,17,18,19) and special type bolt (14,22); The liquid nitrogen tube sheet is made up of liquid nitrogen cold drawing (3), liquid nitrogen arm (4), last liquid nitrogen house steward (21) and following liquid nitrogen house steward (16); The liquid helium tube sheet is made up of liquid helium cold drawing (7), liquid helium arm (6), last liquid helium house steward (20) and following liquid helium house steward (15); Supporting structure is by becoming the first special type mat insulation (12) that attaches on 30 ° of three supporting guides (11) located and the supporting guide to form with cabin body neutral surface with both sides under the cabin body inwall (1) of large space environment simulator; It is characterized in that: it is traditional distributed finned to adopt whole cold drawing to replace; Between liquid nitrogen tube sheet and the liquid helium tube sheet, between liquid nitrogen tube sheet and the said cabin body inwall the cold screen of one deck radiation proof (5,2) is arranged respectively; Comprise cold screen of first radiation proof (2) and the cold screen of second radiation proof (5); Liquid nitrogen arm (4) and liquid helium arm (6) are sitting in the second special type mat insulation (8,9) of band groove and are with in the 3rd special type mat insulation (18,19) of groove; Directly between columnar liquid nitrogen tube sheet and the cylindrical shape liquid helium tube sheet and under teflon arranged the said the 3rd special type mat insulation (18,19), cylindrical shape liquid nitrogen tube sheet and liquid helium tube sheet between and become 30 ° both sides that the said second special type mat insulation (8,9) of teflon is arranged with liquid helium tube sheet neutral surface; The said second special type mat insulation (8,9) and the 3rd special type mat insulation (18,19) are fixed on the liquid nitrogen tube sheet through the first special type bolt (14); Make outer liquid nitrogen tube sheet and the integrant double-layer integrally-built-in cryogenic pump of internal layer liquid helium tube sheet, the liquid nitrogen tube sheet promptly is the skeleton of liquid helium tube sheet, is again that the protection of liquid helium tube sheet is heat sink; The integral body that outer liquid nitrogen tube sheet and internal layer liquid helium tube sheet constitute is directly put and is placed on the 4th special type mat insulation (10,17); Between the first special type mat insulation (12) of the said the 4th special type mat insulation (10,17) and supporting structure the cold screen of first radiation proof (2) is arranged; By sunk screw (13) that the 4th special type mat insulation and this two-layer special type mat insulation of the first special type mat insulation, the cold screen of said first radiation proof (2) and said supporting guide (11) is fixing, the top of double-layer integrally-built-in cryogenic pump is fixed to body top, said cabin with the second special type bolt (22) of U type.
Advantage and good effect that the present invention has are: (1) double-layer integrally-built-in cryogenic pump does not have skeletal structure; The liquid nitrogen tube sheet links to each other with the liquid helium tube sheet through mat insulation; Not only make the skeleton of liquid helium tube sheet but also protect heat sink; Save the consumption of testing cryogenic media in preceding and the process of the test greatly, practiced thrift experimentation cost; (2) increase the cold screen of one deck radiation proof between the liquid helium tube sheet of double-layer integrally-built-in cryogenic pump and liquid nitrogen tube sheet, make the radiation heat transfer between double-deck height warm tube plate reduce by 50%, indirect saving the liquid helium cryogenic media consumption of expensive; (3) compact structure of double-layer integrally-built-in cryogenic pump is removed the useful space that has increased experimental cabin after the skeletal structure; (4) in the experimental cabin of same size, double-layer integrally-built-in cryogenic pump can be arranged bigger cold drawing area, and the exhaust capacity of the big more cyropump of cold drawing area is strong more; (5) house steward of cyropump and arm all adopt square tube to replace traditional pipe, have increased the area of contact of arm and liquid helium, liquid nitrogen cold drawing on the one hand, strengthen transmission of heat; Be convenient to install between liquid helium, liquid nitrogen tube sheet on the other hand and the mat insulation between liquid nitrogen tube sheet and cabin body supporting rail, make things convenient for structural design; The 3rd, contacting by the line contact between liquid nitrogen, liquid helium arm (4,6) and special type mat insulation changes the face contact into, and force structure is more reasonable.
[description of drawings]
Fig. 1 double-layer integrally-built-in cryogenic pump schematic diagram
Mat insulation structure (sectional view) between Fig. 2 liquid nitrogen tube sheet, liquid helium tube sheet, the supporting guide
Fig. 3 double-layer integrally-built-in cryogenic pump schematic perspective view
Among the figure: house steward, 22-U type bolt on house steward, the 21-liquid nitrogen on house steward, 17-mat insulation V, 18-mat insulation VI, 19-mat insulation VII, the 20-liquid helium under house steward, the 16-liquid nitrogen under the special type bolt of 1-cabin body inwall, the cold screen of 2-I, 3-liquid nitrogen cold drawing, 4-liquid nitrogen arm, the cold screen of 5-II, 6-liquid helium arm, 7-liquid helium cold drawing, 8-mat insulation I, 9-mat insulation II, 10-mat insulation III, 11-supporting guide, 12-mat insulation IV, 13-sunk screw, 14-, the 15-liquid helium
[embodiment]
Further specify the present invention below in conjunction with accompanying drawing 1, Fig. 2 and Fig. 3.
Double-layer integrally-built-in cryogenic pump; Mainly comprise liquid nitrogen cold drawing (3), liquid nitrogen arm (4), last liquid nitrogen house steward (21), following liquid nitrogen house steward (16), liquid helium cold drawing (7), liquid helium arm (6); Last liquid helium house steward (20), following liquid helium house steward (15), the cold screen of radiation proof (2,5), special type mat insulation (8,9,10,12,17,18,19) and special type bolt (13,14,22) etc.; The liquid nitrogen tube sheet is made up of liquid nitrogen cold drawing (3), liquid nitrogen arm (4), last liquid nitrogen house steward (21) and following liquid nitrogen house steward (16); The liquid helium tube sheet by liquid helium cold drawing (7), liquid helium arm (6), go up liquid helium house steward (20) and following liquid helium house steward (15) forms, supporting structure by under the cabin body inwall (1), both sides become the mat insulation (12) that attaches on 30 ° of three supporting guides (11) located and the supporting guide to form with cabin body neutral surface.It is traditional distributed finned to adopt whole cold drawing to replace; Between liquid nitrogen tube sheet and the liquid helium tube sheet, between liquid nitrogen tube sheet and the cabin body inwall the cold screen of one deck radiation proof (5,2) is arranged respectively; Liquid nitrogen arm (4) and liquid helium arm (6) are sitting in respectively in the special type mat insulation (8,9,18,19) of band groove; Directly over the cylindrical shape liquid helium tube sheet, under, become 30 ° both sides that teflon mat insulation (8,9,18,19) is arranged with liquid helium tube sheet neutral surface; Be fixed on the liquid nitrogen tube sheet through special type bolt (14); Make outer liquid nitrogen tube sheet and the integrant double-layer integrally-built-in cryogenic pump of internal layer liquid helium tube sheet, even the skeleton of liquid nitrogen tube sheet liquid helium tube sheet is again that the protection of liquid helium tube sheet is heat sink.Double-layer integrally-built-in cryogenic pump is directly put and is placed on the mat insulation (10,17); Between the mat insulation (12) of mat insulation (10,17) and supporting structure the cold screen of radiation proof (2) is arranged; By sunk screw (13) that this two-layer mat insulation, the cold screen of radiation proof (2) and supporting guide (11) is fixing, the top of double-layer integrally-built-in cryogenic pump is fixed to body top, cabin with U bolt (22).
The cryogenic media that flows in the liquid helium tube sheet is a liquid helium, and the cryogenic media that flows in the liquid nitrogen tube sheet is a liquid nitrogen.Different cryogenic medias is assigned in each arm (4,6) by following house steward (15,16), and cooling cold drawing (3,7) separately is aggregated into house steward (20,21) by each arm again and discharges.The cold screen of one deck (5) is arranged between two tube sheets, can reduce between liquid helium tube sheet (6,7) and the liquid nitrogen tube sheet (3,4) 50% radiation heat transfer, can reduce expensive liquid helium cryogenic media consumption indirectly.
The material of liquid nitrogen tube sheet and liquid helium tube sheet adopts common Stainless Steel Tube, copper fin form, because the intensity of steel is good, the heat conductivity of copper high.Liquid nitrogen, liquid helium house steward (15,16,20,21), arm (4,6) all are the stainless steel square tube, and liquid nitrogen, liquid helium cold drawing (3,7) replace distributed fin with whole copper plate, have simplified production and processing technology.The liquid nitrogen cold drawing is contacted with three mat insulations of supporting structure, and this moment, area of contact was bigger, so liquid nitrogen cold drawing (3) should be welded on the outside of liquid nitrogen arm (4).Arm is that square tube can increase the area of contact with cold drawing; Strengthen transmission of heat; Be convenient to install between liquid helium, the liquid nitrogen tube sheet on the other hand, the mat insulation between liquid nitrogen tube sheet and the supporting structure; Make things convenient for structural design, can also increase the area of contact between liquid nitrogen, liquid helium arm (4,6) and the special type mat insulation, be beneficial to structure stress.
The rigidity of liquid nitrogen tube sheet and liquid helium tube sheet itself can support its deadweight and the weight of the interior cryogenic media of pipe; Thereby tube sheet can not stay in experimental cabin; Cyropump is pressed under the body inwall of cabin under action of gravity, both sides become with neutral surface on 30 ° of supporting structures of locating; The liquid nitrogen tube sheet and and supporting structure between two-layer mat insulation is arranged, thereby be adiabatic between cyropump and the experimental cabin inwall, and cold screen (2) between the two makes radiation heat transfer reduce by 50% again.
When liquid nitrogen tube sheet and liquid helium tube sheet feed liquid nitrogen, liquid helium respectively, up and down house steward's (15,16,20,21) shrinkage meeting cause whole double-layer integrally-built-in cryogenic pump integral body along horizontal experimental cabin axially and radial contraction.Can cause the slide relative of cyropump and supporting structure in axial contraction; Because surface of contact is the outer surface of liquid nitrogen cold drawing and the upper surface of teflon mat insulation (10,17); The friction factor of stainless steel and teflon very low (0.1); Force of sliding friction is less, therefore can not produce big stress in arm (4,6) and house steward's (15,16,20,21) weld joint.During radial contraction; Because U bolt only limits the rotation of double-deck cyropump in experimental cabin; Do not gather moving down of pipe (20,21) and do not limit; Because the effect of gravity, cyropump still is pressed on the supporting structure, also can not produce big stress in arm (4,6) and house steward's (15,16,20,21) weld joint.Because the temperature of liquid helium and liquid nitrogen is different; The outer liquid nitrogen tube sheet of cyropump is different with the contour projector of internal layer liquid helium tube sheet; Liquid nitrogen tube sheet and liquid helium tube sheet can produce slide relative; For the thermal stress that the temperature difference is caused obtains discharging, the mat insulation between two-layer tube sheet (8,9) is not continuous, and long hole forms is also adopted in special type bolt (14) joint.
Claims (5)
1. double-layer integrally-built-in cryogenic pump; Comprise liquid nitrogen cold drawing (3), liquid nitrogen arm (4), last liquid nitrogen house steward (21), following liquid nitrogen house steward (16), liquid helium cold drawing (7), liquid helium arm (6); Last liquid helium house steward (20), following liquid helium house steward (15), the cold screen of radiation proof (2,5), special type mat insulation (8,9,10,12,17,18,19) and special type bolt (14,22); The liquid nitrogen tube sheet is made up of liquid nitrogen cold drawing (3), liquid nitrogen arm (4), last liquid nitrogen house steward (21) and following liquid nitrogen house steward (16); The liquid helium tube sheet is made up of liquid helium cold drawing (7), liquid helium arm (6), last liquid helium house steward (20) and following liquid helium house steward (15); Supporting structure is by becoming the first special type mat insulation (12) that attaches on 30 ° of three supporting guides (11) located and the supporting guide to form with cabin body neutral surface with both sides under the cabin body inwall (1) of large space environment simulator; It is characterized in that: it is traditional distributed finned to adopt whole cold drawing to replace; Between liquid nitrogen tube sheet and the liquid helium tube sheet, between liquid nitrogen tube sheet and the said cabin body inwall the cold screen of one deck radiation proof (5,2) is arranged respectively; Comprise cold screen of first radiation proof (2) and the cold screen of second radiation proof (5); Liquid nitrogen arm (4) and liquid helium arm (6) are sitting in the second special type mat insulation (8,9) of band groove and are with in the 3rd special type mat insulation (18,19) of groove; Directly between columnar liquid nitrogen tube sheet and the cylindrical shape liquid helium tube sheet and under teflon arranged the said the 3rd special type mat insulation (18,19), cylindrical shape liquid nitrogen tube sheet and liquid helium tube sheet between and become 30 ° both sides that the said second special type mat insulation (8,9) of teflon is arranged with liquid helium tube sheet neutral surface; The said second special type mat insulation (8,9) and the 3rd special type mat insulation (18,19) are fixed on the liquid nitrogen tube sheet through the first special type bolt (14); Make outer liquid nitrogen tube sheet and the integrant double-layer integrally-built-in cryogenic pump of internal layer liquid helium tube sheet, the liquid nitrogen tube sheet is the skeleton of liquid helium tube sheet, is again that the protection of liquid helium tube sheet is heat sink; The integral body that outer liquid nitrogen tube sheet and internal layer liquid helium tube sheet constitute is directly put and is placed on the 4th special type mat insulation (10,17); Between the first special type mat insulation (12) of the said the 4th special type mat insulation (10,17) and supporting structure the cold screen of first radiation proof (2) is arranged; By sunk screw (13) that the 4th special type mat insulation and this two-layer special type mat insulation of the first special type mat insulation, the cold screen of said first radiation proof (2) and said supporting guide (11) is fixing, the top of double-layer integrally-built-in cryogenic pump is fixed to body top, said cabin with the second special type bolt (22) of U type.
2. double-layer integrally-built-in cryogenic pump as claimed in claim 1; It is characterized in that: house steward (15,16,20,21) and arm (4,6) all adopt square tube to replace traditional pipe; Increase the area of contact of arm and liquid helium, liquid nitrogen cold drawing on the one hand, strengthened transmission of heat; Be convenient to install between liquid helium, liquid nitrogen tube sheet on the other hand and the special type mat insulation between liquid nitrogen tube sheet and cabin body supporting guide; Contacting by traditional line contact between the third aspect, liquid nitrogen, liquid helium arm (4,6) and special type mat insulation changes the face contact into.
3. double-layer integrally-built-in cryogenic pump as claimed in claim 1; It is characterized in that: the 4th special type mat insulation (10,17) that adopts teflon between liquid nitrogen tube sheet and the supporting structure; Cyropump is during along the axial shrinkage of horizontal said cabin body; Force of sliding friction is less, can not produce big stress in arm (4,6) and house steward's (15,16,20,21) weld joint.
4. double-layer integrally-built-in cryogenic pump as claimed in claim 1; It is characterized in that: double-layer integrally-built-in cryogenic pump is during along the radial contraction of horizontal said cabin body; The second special type bolt of U type only limits the rotation of cyropump in the body of cabin, and does not limit moving down of house steward (20,21), because the effect of gravity; Cyropump still is pressed on the supporting structure, can not produce big stress in arm (4,6) and house steward's (15,16,20,21) weld joint.
5. double-layer integrally-built-in cryogenic pump as claimed in claim 1; It is characterized in that: the second special type mat insulation (8,9) between liquid nitrogen tube sheet and the liquid helium tube sheet is not continuous; Long hole forms is also adopted in the joint of the first special type bolt (14); Guarantee liquid nitrogen tube sheet and liquid helium tube sheet not simultaneously, produce slide relative, can not produce thermal stress in contour projector.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010102563205A CN101922435B (en) | 2009-12-09 | 2010-08-18 | Double-layer integrally-built-in cryogenic pump |
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| CN200910242307 | 2009-12-09 | ||
| CN200910242307.1 | 2009-12-09 | ||
| CN2010102563205A CN101922435B (en) | 2009-12-09 | 2010-08-18 | Double-layer integrally-built-in cryogenic pump |
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| CN101922435A CN101922435A (en) | 2010-12-22 |
| CN101922435B true CN101922435B (en) | 2012-05-23 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175456B (en) * | 2011-01-28 | 2012-11-07 | 北京航空航天大学 | Straight cylindrical liquid-nitrogen liquid-helium double-medium compatible heat sink device and refrigeration method thereof |
| CN103899511B (en) * | 2014-03-07 | 2016-04-06 | 中国科学院等离子体物理研究所 | Compel stream built-in type liquid helium cryo pump |
| CN105664678A (en) * | 2016-02-23 | 2016-06-15 | 王新建 | Horizontal compressed air drying adsorption tower |
| CN109751218B (en) * | 2017-11-03 | 2023-10-20 | 核工业西南物理研究院 | Built-in high-vacuum low-temperature condensing air pump |
| CN110793797A (en) * | 2019-11-11 | 2020-02-14 | 中国科学院合肥物质科学研究院 | Double-cold-screen negative-pressure low-temperature heat exchanger testing device |
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| US4337669A (en) * | 1979-10-19 | 1982-07-06 | Kernforschungsanlage Julich Gmbh | Cryogenic pump and air sampler |
| US4341079A (en) * | 1980-04-01 | 1982-07-27 | Cvi Incorporated | Cryopump apparatus |
| CN201014185Y (en) * | 2007-02-12 | 2008-01-30 | 查特深冷工程系统(常州)有限公司 | Mobile deep cooling liquid instantaneous delivery filling device |
| CN101576075A (en) * | 2009-06-08 | 2009-11-11 | 北京航空航天大学 | Device and method for measuring built-in low-temperature pumping speed |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2512129B2 (en) * | 1989-01-20 | 1996-07-03 | 株式会社日立製作所 | Cryopump |
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2010
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4337669A (en) * | 1979-10-19 | 1982-07-06 | Kernforschungsanlage Julich Gmbh | Cryogenic pump and air sampler |
| US4341079A (en) * | 1980-04-01 | 1982-07-27 | Cvi Incorporated | Cryopump apparatus |
| CN201014185Y (en) * | 2007-02-12 | 2008-01-30 | 查特深冷工程系统(常州)有限公司 | Mobile deep cooling liquid instantaneous delivery filling device |
| CN101576075A (en) * | 2009-06-08 | 2009-11-11 | 北京航空航天大学 | Device and method for measuring built-in low-temperature pumping speed |
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