CN103899511B - Compel stream built-in type liquid helium cryo pump - Google Patents
Compel stream built-in type liquid helium cryo pump Download PDFInfo
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- CN103899511B CN103899511B CN201410083823.5A CN201410083823A CN103899511B CN 103899511 B CN103899511 B CN 103899511B CN 201410083823 A CN201410083823 A CN 201410083823A CN 103899511 B CN103899511 B CN 103899511B
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- cryosurface
- fixed plate
- radiation proof
- baffle plate
- proof baffle
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Abstract
The invention discloses a kind of compeling and flow built-in type liquid helium cryo pump, include the many groups of element of construction based on same principle and termination fixed plate system.Element of construction is suspended in midair line, nitrogen pipe and helium tube formed by radiation proof baffle plate, cryosurface, cryosurface.The working medium flowed in nitrogen pipe and helium tube provides in urgent stream mode.Many groups element of construction forms cylindrical shape, and be arranged in working zone, two ends are sealed by termination fixed plate system.Termination fixed plate system comprises termination clamping rings, some groups of termination fixed plate cover plates and termination fixed plate filter plate.In actual using process, this built-in type liquid helium cryo pump uses under being highly suitable for extremely complicated elecromagnetic environment, and working stability is reliable and have superior gas load adaptive capacity.
Description
Technical field
The present invention relates to cryogenic pump field, mainly a kind of compeling flows built-in type liquid helium cryo pump.
Background technique
Cryopump is the product that cryogenic technique and vacuum technique combine, the equipment utilizing cryogenic pumping mechanism to obtain and maintain high vacuum and ultrahigh vacuum, be widely used in spatial simulation, large-scale accelerator, fusion research, ion etching, electron tube, the scientific and technological production field such as ion implantation, has pumping speed large, without returning oil pollution, poisonous gas can be pumped, stable performance, simple operation and other advantages.Cryogenic pumping be exactly make at low temperatures to be evacuated between gas by low-temperature surface condensation, trapping or absorption, thus the pressure between making to be evacuated greatly reduces to obtain and maintains certain vacuum state.
What liquid helium cryo pump mainly utilized is cryogenic condensation the pumping mechanism, using the low temperature face of liquid helium cooling as the face of bleeding.General liquid helium cryo pump is using the bottom surface of liquid helium Dewar as the face of bleeding, be irradiated to the infrared radiation of associated components liquid helium temperature from room temperature parts with shielding using the baffle plate of Dewar container for liquefied nitrogen and cooled with liquid nitrogen as heat shield structure, pump by the Flange joint of its bleeding point to vacuum system.Because the pumping speed of pump is relevant to the area in low temperature face, and have the restriction of the conductance of flanged connecting structure own, the cryopump of this form can not reach very large pumping speed.Adopt the cryopump of natural circulation cooling cryogenic condensation face and radiation proof baffle plate, strict requirement is equipped with to the installation position of pump, be difficult to meet the requirement large pumping speed cryopump being arranged on particular space occasion required in such as fusion research.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of compels stream built-in type liquid helium cryo pump, and its structure is simple, and working stability is reliable, has very large pumping speed, cylindrical shell can be made difformity and size to adapt to different applications, easy for installation.
For solving the problems of the technologies described above, the technical solution adopted in the present invention is:
A kind of compeling flows built-in type liquid helium cryo pump, it is characterized in that: comprise the element of construction that multiple structure is identical, each element of construction is respectively by radiation proof baffle plate, cryosurface, cryosurface suspention line, helium tube and nitrogen pipe are formed, described radiation proof baffle plate is made up of arcuate segment and the J-shaped section be connected to also in J-shaped structure on arcuate segment arc madial wall, the arcuate segment arc outer side wall of radiation proof baffle plate is provided with nitrogen pipe, helium tube is arranged on cryosurface, by suspending the cryosurface with helium tube in the J-shaped hook of cryosurface suspention alignment J-shaped section in midair in the J-shaped section of radiation proof baffle plate, by J-shaped hook semi-surrounding cryosurface and the helium tube of radiation proof baffle plate J-shaped section, multiple element of construction is assembled into columnar structured by the arcuate segment of respective radiation proof baffle plate, the termination fixed plate ring of annular is fixed with respectively at columnar structured two ends tube port position, the internal ring wall place of each termination fixed plate ring is annularly provided with multiple terminations fixed plate cover plate respectively, the internal ring wall place of the termination fixed plate ring between the fixed plate cover plate of adjacent termination is respectively arranged with termination fixed plate filter plate, and termination fixed plate cover plate, the termination fixed plate filter plate at fixed plate ring internal ring wall place, each termination are spliced into annular.
Described one compels stream built-in type liquid helium cryo pump, it is characterized in that: the end-to-end series connection successively of the nitrogen pipe in multiple element of construction on radiation proof baffle plate arcuate segment, form nitrogen pipe cascaded structure, in nitrogen pipe cascaded structure, first nitrogen pipe is communicated with suction port, and an end nitrogen pipe is communicated with air outlet.
Described one compels stream built-in type liquid helium cryo pump, it is characterized in that: multiple element of construction can the side's of being assembled into tubular construction by the arcuate segment of respective radiation proof baffle plate.
Described one compels stream built-in type liquid helium cryo pump, it is characterized in that: described radiation proof baffle plate integral material is aluminum alloy, blackening process is done on surface, radiation proof baffle plate is J-shaped hook semi-surrounding cryosurface and the helium tube of J-shaped section, also cool with the direct radiation heat all absorbed from high-temperature wall surface the gas being about to arrive cryosurface, reduce the impact on cryosurface temperature.
Described one compels stream built-in type liquid helium cryo pump, it is characterized in that: described cryosurface is copper material, cryosurface provides cold to be cooled to liquid helium region by the urgent flow liquid helium of helium tube inside, cryosurface is suspended in the J-shaped hook of radiation proof baffle plate J-shaped section by cryosurface suspention line, and cryosurface and radiation proof baffle plate are without directly contacting.
Working stability of the present invention is reliable, has very large pumping speed, cylindrical shell can be made difformity and size to adapt to different applications.And structure is simple, easy for installation.
Advantage of the present invention is:
The present invention adopts the blocking of ZF-BLE to design, and in operation, working surface temperature stabilization is controlled; The cryosurface of each element of construction provides cold cool to reach and maintain the effect of low temperature by the urgent flow liquid helium of helium tube inside, and the vacuum system being applicable to being arranged in arbitrary shape is inner, low and can play its condensation pumping performance to greatest extent to requirements of installation space; The radiation proof baffle plate of each element of construction provides cold to reach cooling effect by the urgent flow liquid nitrogen of nitrogen pipe inside, and its cross section is " J " font, semi-surrounding cryosurface; Radiation proof baffle plate two ends arrange termination fixed plate system, can mask the radiation heat of major part from high temperature wall thus, and make the gas particle energy of arrival cryosurface enough low, reduce the impact on cryosurface temperature; By organizing, element of construction is assembled to be welded whole cryo pump more, can make difformity and size according to practical application, applied widely.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the schematic diagram of element of construction cross section in the present invention.
Fig. 3 is nitrogen pipe connection diagram in the present invention.
Fig. 4 is helium tube connection diagram in the present invention.
Embodiment
See Fig. 1, 2, 3, a kind of compeling flows built-in type liquid helium cryo pump, comprise the identical element of construction of multiple structure 1, each element of construction 1 is respectively by radiation proof baffle plate 11, cryosurface 12, cryosurface suspention line 13, helium tube 14 and nitrogen pipe 15 are formed, radiation proof baffle plate 11 is made up of arcuate segment 111 and the J-shaped section 112 be connected to also in J-shaped structure on arcuate segment arc 111 madial wall, the arcuate segment 111 arc outer side wall of radiation proof baffle plate 11 is provided with nitrogen pipe 15, helium tube 14 is arranged on cryosurface 12, the J-shaped section 112 of radiation proof baffle plate 11 suspends the cryosurface 12 with helium tube 14 in midair by cryosurface suspention line 13 in the J-shaped hook of J-shaped section 112, by J-shaped hook semi-surrounding cryosurface 12 and the helium tube 14 of radiation proof baffle plate 11J shape section 112, multiple element of construction 1 is assembled into columnar structured by the arcuate segment 111 of respective radiation proof baffle plate 11, the termination fixed plate ring 2 of annular is fixed with respectively at columnar structured two ends tube port position, the internal ring wall place of each termination fixed plate ring 2 is annularly provided with multiple terminations fixed plate cover plate 3 respectively, the internal ring wall place of the termination fixed plate ring 2 between adjacent termination fixed plate cover plate 3 is respectively arranged with termination fixed plate filter plate 4, and termination fixed plate cover plate 3, the termination fixed plate filter plate 4 at fixed plate ring 2 internal ring wall place, each termination are spliced into annular.
The end-to-end series connection successively of nitrogen pipe 15 in multiple element of construction 1 on radiation proof baffle plate 11 arcuate segment 111, form nitrogen pipe cascaded structure, in nitrogen pipe cascaded structure, first helium tube is communicated with suction port, and an end nitrogen pipe is communicated with air outlet.
Multiple element of construction 1 can the side's of being assembled into tubular construction by the arcuate segment 111 of respective radiation proof baffle plate 11.
Radiation proof baffle plate 11 integral material is aluminum alloy, blackening process is done on surface, radiation proof baffle plate 11 is J-shaped hook semi-surrounding cryosurface 12 and the helium tube 14 of J-shaped section 112, also cool with the direct radiation heat all absorbed from high-temperature wall surface the gas being about to arrive cryosurface, reduce the impact on cryosurface temperature.
Cryosurface 12 is copper material, cryosurface 12 provides cold to be cooled to liquid helium region by the urgent flow liquid helium of helium tube 14 inside, cryosurface 12 is suspended in the J-shaped hook of radiation proof baffle plate 11J shape section 112 by cryosurface suspention line 13, and cryosurface 12 and radiation proof baffle plate 11 are without directly contacting.
As shown in Figure 1, mutual assembled welding between multiple element of construction 1, forms cylindrical shape, also can make other shape according to installing space condition, as square, to adapt to different use occasion.The parameter such as quantity, axial length, circumferential radian of element of construction 1 is all decided according to the actual requirements.
As shown in Figure 2, element of construction 1 includes nitrogen pipe 15, radiation proof baffle plate 11, cryosurface suspention line 13, cryosurface 12, helium tube 14.Radiation proof baffle plate 11 welds mutually with nitrogen pipe 15, and provides cold to be cooled to liquid nitrogen temperature by the urgent flow liquid nitrogen of the latter inside.Radiation proof baffle plate 11 material is aluminum alloy, and blackening process is done on surface, is " J " character form structure, semi-surrounding cryosurface 4, all to absorb the thermal radiation from room temperature wall, and make the gas particle energy of arrival cryosurface 12 enough low, reduce the impact on cryosurface 12 temperature.Cryosurface 12 is copper material, welds mutually with helium tube 14, and provides cold to be cooled to liquid helium region by the urgent flow liquid helium of the latter inside, is the groundwork face that condensation extracts the gases such as hydrogen deuterium.Cryosurface 12 is fixed on radiation proof baffle plate 11 by cryosurface suspention line 13, and with radiation proof baffle plate 11 without directly contacting, to reduce the impact of heat transfer on cryosurface 12 temperature.
As shown in Figure 1, termination fixed plate ring 2, termination fixed plate cover plate 3, termination fixed plate filter plate 4 with the use of, the two ends of element of construction 1 can be covered, reduce radiation heat on the impact of cryosurface temperature.
As shown in Figure 3, be connected in series between nitrogen pipe 15, and by importing and exporting the urgent flow liquid nitrogen of unified supply, discharging the nitrogen of vaporization.
As shown in Figure 4, weld between cryosurface 12 and helium tube 14.Mutually connect between helium tube 14, and by importing and exporting the urgent flow liquid helium of unified supply, reclaiming the helium of vaporization.
In actual using process, this compels using under stream built-in type liquid helium cryo pump is highly suitable for extremely complicated elecromagnetic environment, and working stability is reliable and have superior gas load adaptive capacity.
Claims (5)
1. compel stream built-in type liquid helium cryo pump for one kind, it is characterized in that: comprise the element of construction that multiple structure is identical, each element of construction is respectively by radiation proof baffle plate, cryosurface, cryosurface suspention line, helium tube and nitrogen pipe are formed, described radiation proof baffle plate is made up of arcuate segment and the J-shaped section be connected to also in J-shaped structure on arcuate segment arc madial wall, the arcuate segment arc outer side wall of radiation proof baffle plate is provided with nitrogen pipe, helium tube is arranged on cryosurface, by suspending the cryosurface with helium tube in the J-shaped hook of cryosurface suspention alignment J-shaped section in midair in the J-shaped section of radiation proof baffle plate, by J-shaped hook semi-surrounding cryosurface and the helium tube of radiation proof baffle plate J-shaped section, multiple element of construction is assembled into columnar structured by the arcuate segment of respective radiation proof baffle plate, the termination fixed plate ring of annular is fixed with respectively at columnar structured two ends tube port position, the internal ring wall place of each termination fixed plate ring is annularly provided with multiple terminations fixed plate cover plate respectively, the internal ring wall place of the termination fixed plate ring between the fixed plate cover plate of adjacent termination is respectively arranged with termination fixed plate filter plate, and termination fixed plate cover plate, the termination fixed plate filter plate at fixed plate ring internal ring wall place, each termination are spliced into annular.
2. one according to claim 1 compels stream built-in type liquid helium cryo pump, it is characterized in that: the end-to-end series connection successively of the nitrogen pipe in multiple element of construction on radiation proof baffle plate arcuate segment, form nitrogen pipe cascaded structure, in nitrogen pipe cascaded structure, first nitrogen pipe is communicated with suction port, and an end nitrogen pipe is communicated with air outlet.
3. one according to claim 1 compels stream built-in type liquid helium cryo pump, it is characterized in that: multiple element of construction is by the arcuate segment side of the being assembled into tubular construction of respective radiation proof baffle plate.
4. one according to claim 1 compels stream built-in type liquid helium cryo pump, it is characterized in that: described radiation proof baffle plate integral material is aluminum alloy, blackening process is done on surface, radiation proof baffle plate is J-shaped hook semi-surrounding cryosurface and the helium tube of J-shaped section, also cool with the direct radiation heat all absorbed from high-temperature wall surface the gas being about to arrive cryosurface, reduce the impact on cryosurface temperature.
5. one according to claim 1 compels stream built-in type liquid helium cryo pump, it is characterized in that: described cryosurface is copper material, cryosurface provides cold to be cooled to liquid helium region by the urgent flow liquid helium of helium tube inside, cryosurface is suspended in the J-shaped hook of radiation proof baffle plate J-shaped section by cryosurface suspention line, and cryosurface and radiation proof baffle plate are without directly contacting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410083823.5A CN103899511B (en) | 2014-03-07 | 2014-03-07 | Compel stream built-in type liquid helium cryo pump |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410083823.5A CN103899511B (en) | 2014-03-07 | 2014-03-07 | Compel stream built-in type liquid helium cryo pump |
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| CN103899511A CN103899511A (en) | 2014-07-02 |
| CN103899511B true CN103899511B (en) | 2016-04-06 |
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| CN201410083823.5A Expired - Fee Related CN103899511B (en) | 2014-03-07 | 2014-03-07 | Compel stream built-in type liquid helium cryo pump |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109751218B (en) * | 2017-11-03 | 2023-10-20 | 核工业西南物理研究院 | Built-in high-vacuum low-temperature condensing air pump |
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| US4873833A (en) * | 1988-11-23 | 1989-10-17 | American Telephone Telegraph Company, At&T Bell Laboratories | Apparatus comprising a high-vacuum chamber |
| CN1174593A (en) * | 1994-12-02 | 1998-02-25 | 萨伊斯纯汽油有限公司 | Getter pump module and system |
| CN2363082Y (en) * | 1998-06-26 | 2000-02-09 | 深圳威士达真空系统工程有限公司 | Cold trap with refrigeration machine |
| CN101922435A (en) * | 2009-12-09 | 2010-12-22 | 北京航空航天大学 | Double-layer integrally-built-in cryogenic pump |
| CN201730791U (en) * | 2010-02-04 | 2011-02-02 | 中国科学院等离子体物理研究所 | Storage-tank-type liquid helium cryosorption pump |
| CN103603788A (en) * | 2013-10-18 | 2014-02-26 | 昆山珍实复合材料有限公司 | Secondary cold plate in vacuum low-temperature pump |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7313922B2 (en) * | 2004-09-24 | 2008-01-01 | Brooks Automation, Inc. | High conductance cryopump for type III gas pumping |
-
2014
- 2014-03-07 CN CN201410083823.5A patent/CN103899511B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4873833A (en) * | 1988-11-23 | 1989-10-17 | American Telephone Telegraph Company, At&T Bell Laboratories | Apparatus comprising a high-vacuum chamber |
| CN1174593A (en) * | 1994-12-02 | 1998-02-25 | 萨伊斯纯汽油有限公司 | Getter pump module and system |
| CN2363082Y (en) * | 1998-06-26 | 2000-02-09 | 深圳威士达真空系统工程有限公司 | Cold trap with refrigeration machine |
| CN101922435A (en) * | 2009-12-09 | 2010-12-22 | 北京航空航天大学 | Double-layer integrally-built-in cryogenic pump |
| CN201730791U (en) * | 2010-02-04 | 2011-02-02 | 中国科学院等离子体物理研究所 | Storage-tank-type liquid helium cryosorption pump |
| CN103603788A (en) * | 2013-10-18 | 2014-02-26 | 昆山珍实复合材料有限公司 | Secondary cold plate in vacuum low-temperature pump |
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| CN103899511A (en) | 2014-07-02 |
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