CN2363082Y - Cold trap with refrigeration machine - Google Patents

Abstract

The utility model relates to a cold trap with a refrigeration machine, which is used for oil diffusion pumps. The utility model comprises a cold trap 20 in which a row of baffle plates 21 are arranged; one end of the cold trap is connected with a diffusion pump, and the other end of the cold trap is opened to space to be pumped; the refrigeration machine 10 used as a cold source is arranged in the space; the refrigeration machine is connected with the cold trap through an evaporator 11 of the refrigeration machine. The utility model can cause the cold trap to be deeply cooled and the cooling temperature to be lowered to effectively catch oil gathering molecules and prevent oil from flowing back.

Description

The cold-trap of being furnished with refrigerator

The utility model relates to the cold-trap that a kind of oil diffusion pump is used, and particularly relates to a kind of cold-trap of being furnished with refrigerator.It is mainly used in the high vacuum field, returns oily device as the isolation of diffusion pump, also can be used for separately as food, medicine, chemical field, as anti-oil or other higher boiling dusty gas isolation mounting of returning in clean air source, space.

Advantages such as oil diffusion pump is simple in structure, reliable owing to it, pumping speed is big, with low cost are extensive use of in the vacuum field.But under high vacuum state, its working medium one oily vapours have escape on a small quantity be evacuated between.It is extremely harmful that these oily vapourss require the field to noble and unsullied degree such as electronics industries.At present, the cold-trap that domestic diffusion pump uses adopts water-cooling pattern mostly, and temperature is at 20～35 ℃, and it is very undesirable to keep off oily effect, still has part to have oil vapor to enter working space, influences quality of product.Make low-temperature receiver at the also useful liquid nitrogen of some special occasions, the inconvenience of not only cost height, and operation.

The purpose of this utility model is to overcome the defective of water-cooling pattern, and a kind of cold-trap that can realize deep cooling is provided, and more effectively to capture oil molecule, makes diffusion pump become a kind of fine pumping equipment of cleaning.

For achieving the above object, the utility model provides a kind of cold-trap of being furnished with refrigerator, it comprises cold-trap 20, one row's baffle 21 is housed in it, one end of cold-trap links to each other with diffusion pump, the other end lead to be evacuated between, it is characterized in that, described cold-trap 20 is furnished with a refrigerator 10 as low-temperature receiver, and refrigerator links to each other with cold-trap by its vaporizer 11.

Vaporizer 11, condenser 13, low-pressure meter 15, high pressure gauge 16 and dual-pressure controller 17 that described refrigerator 10 comprises compressor 12 and is attached thereto are equipped with between vaporizer and the condenser and hold fluid cylinder 14, device for drying and filtering 18 and expansion valve 19.

Described vaporizer 11 is arranged in the baffle 21 that is contained in the cold-trap, and it links to each other with refrigerator by high and low pressure two passes 111,112.

The utility model has changed the type of cooling of oil diffusion pump with cold-trap.For cold-trap is equipped with special-purpose refrigerator, can make cold-trap realize degree of depth cooling, chilling temperature is reduced greatly, thereby can more effectively capture oil molecule, prevent to return oil, operation is simple and reliable to make low-temperature receiver than liquid nitrogen again simultaneously, and reduced cost.

Fig. 1 is the utility model structural representation.

Fig. 2 is vaporizer and baffle linkage structure schematic representation.

The utility model is described in further detail below in conjunction with drawings and Examples.

As shown in Figure 1, the utility model comprises cold-trap 20, is contained in baffle 21 in the cold-trap and the refrigerator 10 that links to each other with cold-trap.Cold-trap 20 is contained in diffusion pump and takes out a mouthful place, and row's baffle 21 is housed in the cold-trap, and baffle is man type, and it is fixed on the vaporizer 11 of refrigerator 10, and certain distance is arranged therebetween, guarantees that it has big admittance ability.Baffle is made by the red copper material of good heat conductivity.The man type baffle makes cold-trap that good light shielding property be arranged, and guarantees the oil gas molecule by the cold-trap passage time, has once above collision at least with the baffle surface of this cold-trap, and baffle must keep good the contact with the evaporation pipeline, and is good with assurance thermal conductivity between the two.The low-temperature receiver of cold-trap is provided by refrigerator 10.Refrigerator can be selected single-stage or multistage cascade refrigeration at-30 ℃～-140 ℃ according to usage requirement, be the special-purpose refrigerator of single-stage steam compression type in this example, it comprises vaporizer 11, compressor 12, condenser 13, holds fluid cylinder 14, low-pressure meter 15, high pressure gauge 16, dual-pressure controller 17, device for drying and filtering 18 and expansion valve 19.Vaporizer 11 is located in the cold-trap, and it links to each other with compressor 12 by high and low pressure two passes 111,112.Condenser 13, low-pressure meter 15, high pressure gauge 16 and dual-pressure controller 17 also link to each other with compressor 12.Be equipped with between vaporizer and the condenser and hold fluid cylinder 14, device for drying and filtering 18 and expansion valve 19.Connect with pipeline between between above-mentioned each parts.The refrigerator of the present utility model place different with general vapour compression refrigeration machine is that its vaporizer is located in the cold-trap, connected with refrigerator by the high low pressure two passes.Its working procedure is such: after compressed machine 12 compressions of refrigeration working medium, high temperature and high pressure gas enters condenser 13, heat radiation is condensed into high-pressure liquid working medium, high-pressure liquid working medium enters evaporation heat absorption in the vaporizer 11 in the cold-trap through expansion valve 19 by outer connecting leg road, and makes the baffle surface cool that is connected on the vaporizer to-30 ℃～-140 ℃.When oil molecule or micel contact (collision) with the baffle surface of low temperature, promptly be captured.Reach and isolate the purpose that the oil gas molecule enters working space.Deep cooling function below-100 ℃ is adsorbed water steam effectively, improves pumping speed greatly.Gaseous working medium in vaporizer C after the heat absorption evaporation again through outside the connecting leg road enter refrigerator, finish a refrigeration cycle.

One end of cold-trap of the present utility model connects diffusion pump, the other end lead to be evacuated between, when diffusion pump work, pumped gas passed through cold-trap and is taken away.And the oil gas that backflows between being evacuated in the diffusion pump because its boiling point is higher, when contacting (collision) with cold-trap with the baffle surface, is cooled to liquid state and is attached to baffle surface (being captured).Thereby both allowed pumped gas unimpeded, isolated backflowing of oil gas again effectively.

Before installation, refrigerator 10 is two independent device with cold-trap 20.When work, be connected into a work integral body with the pipeline sign between them.

Claims (3)

1, a kind of high vacuum field that is mainly used in, return the cold-trap of being furnished with refrigerator of oily device as the isolation of diffusion pump, it comprises cold-trap (20), one row's baffle (21) is housed in it, one end of cold-trap links to each other with diffusion pump, the other end lead to be evacuated between, it is characterized in that, described cold-trap (20) is furnished with a refrigerator as low-temperature receiver (10), and refrigerator links to each other with cold-trap by its vaporizer (11).

2, the cold-trap of being furnished with refrigerator according to claim 1, it is characterized in that vaporizer (11), condenser (13), low-pressure meter (15), high pressure gauge (16) and dual-pressure controller (17) that described refrigerator (10) comprises compressor (12) and is attached thereto, be equipped with between vaporizer and the condenser and hold fluid cylinder (14), device for drying and filtering (18) and expansion valve (19).

3, according to claim 1, the 2 described cold-traps of being furnished with refrigerator, it is characterized in that described vaporizer (11) is arranged in the baffle (21) that is contained in the cold-trap, it links to each other with refrigerator by high and low pressure two passes (111), (112).