CN103603788B - Secondary cold plate in vacuum low-temperature pump - Google Patents
Secondary cold plate in vacuum low-temperature pump Download PDFInfo
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- CN103603788B CN103603788B CN201310495458.4A CN201310495458A CN103603788B CN 103603788 B CN103603788 B CN 103603788B CN 201310495458 A CN201310495458 A CN 201310495458A CN 103603788 B CN103603788 B CN 103603788B
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- cylinder
- cold plate
- secondary cold
- longitudinal
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Abstract
The invention discloses a secondary cold plate in a vacuum low-temperature pump. The secondary cold plate in the vacuum low-temperature pump comprises a barrel body and an end socket, wherein the end socket is fixed on the barrel body; multiple annular grooves and longitudinal grooves are respectively formed in the outer wall of the barrel body; annular copper pipes are welded in the annular grooves of the barrel body; longitudinal copper pipes are welded in the longitudinal grooves of the barrel body; the annular copper pipes and the longitudinal copper pipes are communicated and welded together. As the grooves serving as reinforcing ribs are formed in the barrel body, and the copper pipes are welded in the grooves for reinforcement, strength of the secondary cold plate is enhanced and the service life of the pump body is increased. In addition, the welded copper pipes can be communicated with a helium compressor set, so that the secondary cold plate can speed up the cooling speed and accordingly condense gases efficiently.
Description
Technical field:
The present invention relates to the technical field of vacuum low-temperature pump, more specifically to the structure in a kind of vacuum low-temperature pump
The secondary cold plate improved.
Background technology:
Cryopump, also known as condenser pump, is the vacuum pump utilizing low-temperature surface condensed gas.It can obtain speed of bleeding
The clean vacuum that rate is maximum, limiting pressure is minimum, is widely used in research and the life of semiconductor and IC
Produce, and molecular beam research, vacuum coating equipment, vacuum surface analytical tool, ion implantation apparatus and space
The aspects such as analog.It is then the parts of its key as the cold drawing used by its condensed gas.Existing low
Temperature pump secondary cold plate structure as it is shown in figure 1, it is made up of cylinder 10 and end socket 20, existing cold drawing one
As made by the red copper of anaerobic, it is when small volume, the intensity of cylinder 10 still can, but make bigger
During cold drawing, then the intensity of its cylinder 10 is often inadequate, easily causes cryopump loss of function.
Summary of the invention:
The purpose of the present invention is aiming at the deficiency of prior art, and provides in the vacuum low-temperature pump that a kind of structure is improved
Secondary cold plate, it increases groove on cylinder and becomes its reinforcement, and arrange copper pipe on groove increases simultaneously
Intensity, thus ensure that the intensity of cold drawing.Cylinder wall thickness at annular groove and longitudinal fluting place is equal to cylinder
Wall thickness at other faces of cylinder of body.
For achieving the above object, the secondary cold plate in the vacuum low-temperature pump of the present invention includes cylinder and end socket, and end socket is solid
It is scheduled on cylinder, the outer wall of cylinder forms some annular grooves and longitudinal fluting, the annular of cylinder respectively
It is welded with ring-type copper pipe in groove, in the longitudinal fluting of cylinder, is welded with longitudinal copper pipe, described ring-type copper pipe
It is connected with longitudinal copper pipe and welds together；The least significant end of the described longitudinal fluting on cylinder is positioned at cylinder
On the annular groove of bottom.
Preferred as technique scheme, described ring-type copper pipe and longitudinal copper pipe are welded by phosphor-copper sealed with brazing
Together.
The beneficial effects of the present invention is: on cylinder, shaping groove is as its reinforcement, simultaneously again on groove for it
Welding copper pipe is reinforced, thus enhances the intensity of secondary cold plate, adds the service life of the pump housing.It addition,
Its copper pipe welded can connect helium compressor group, so that secondary cold plate can accelerate rate of cooling, from
And effective noncondensing gas.
Accompanying drawing illustrates:
The present invention is described further below in conjunction with the accompanying drawings:
Fig. 1 is the structural representation of existing secondary cold plate；
Fig. 2 is the structural representation of the present invention；
Fig. 3 be the present invention partly cut open structural representation.
Symbol description in figure:
10-cylinder；11-annular groove；12-longitudinal fluting；20-end socket；The ring-type copper pipe of 31-；32-indulges
To copper pipe.
Detailed description of the invention:
The following stated is only the preferred embodiment embodying the principle of the invention, the most therefore limits the protection model of the present invention
Enclose.
As shown in Fig. 2 to Fig. 3: the secondary cold plate in the vacuum low-temperature pump of the present invention includes cylinder 10 and end socket 20,
End socket 20 is fixed on cylinder 10, the outer wall of cylinder 10 forms some annular grooves 11 respectively and indulges
Cylinder 10 wall thickness at groove 12, annular groove 11 and longitudinal fluting 12 place equal to cylinder 10 other
Wall thickness at the face of cylinder.The least significant end of longitudinal fluting 12 is positioned on the annular groove 11 of cylinder 10 bottom.
It is welded with ring-type copper pipe 31 in the annular groove 11 of cylinder 10, is welded with in the longitudinal fluting 12 of cylinder 10
Longitudinal copper pipe 32, described ring-type copper pipe 31 is connected with longitudinal copper pipe 32 and is welded by phosphor-copper sealed with brazing
It is connected together.
The operation principle of the present invention is as follows: the cylinder 10 of secondary cold plate rolls and first passes through punch forming mode molding before
Annular groove 11 and longitudinal fluting 12, then carry out rolling welding, and weld upper cover 20.The most again recessed
Welding copper pipe in groove, the annular groove 11 of molding and longitudinal fluting 12 can add cylinder as reinforcement
The bending resistance deformation intensity of 10, welds copper pipe in its groove simultaneously, and copper pipe can add again the anti-of cylinder 10
Copper pipe also can be connected helium compressor group by bending deformation intensity, accelerates the rate of cooling of secondary cold plate.
Claims (2)
1. the secondary cold plate in vacuum low-temperature pump, it includes cylinder (10) and end socket (20), end socket
(20) be fixed on cylinder (10), it is characterised in that: cylinder (10) if outer wall on form respectively
Dry annular groove (11) and longitudinal fluting (12), be welded with in the annular groove (11) of cylinder (10)
Ring-type copper pipe (31), is welded with longitudinal copper pipe (32), institute in the longitudinal fluting (12) of cylinder (10)
The ring-type copper pipe (31) stated is connected with longitudinal copper pipe (32) and welds together；Described annular groove
(11) cylinder (10) wall thickness and at longitudinal fluting (12) place is equal to cylinder (10) other faces of cylinder
The wall thickness at place；The least significant end of the described longitudinal fluting (12) on cylinder (10) is positioned at cylinder (10)
On the annular groove (11) of lower end.
Secondary cold plate in a kind of vacuum low-temperature pump the most according to claim 1, it is characterised in that: described
Ring-type copper pipe (31) and longitudinal copper pipe (32) welded together by phosphor-copper sealed with brazing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310495458.4A CN103603788B (en) | 2013-10-18 | 2013-10-18 | Secondary cold plate in vacuum low-temperature pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310495458.4A CN103603788B (en) | 2013-10-18 | 2013-10-18 | Secondary cold plate in vacuum low-temperature pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103603788A CN103603788A (en) | 2014-02-26 |
| CN103603788B true CN103603788B (en) | 2017-01-11 |
Family
ID=50122036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310495458.4A Active CN103603788B (en) | 2013-10-18 | 2013-10-18 | Secondary cold plate in vacuum low-temperature pump |
Country Status (1)
| Country | Link |
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| CN (1) | CN103603788B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103899511B (en) * | 2014-03-07 | 2016-04-06 | 中国科学院等离子体物理研究所 | Compel stream built-in type liquid helium cryo pump |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201288651Y (en) * | 2008-11-17 | 2009-08-12 | 北京卫星环境工程研究所 | Low temperature pump for micro refrigerator |
| CN101629757A (en) * | 2009-08-10 | 2010-01-20 | 黄明佳 | Liner wall heat exchange type water tank |
| CN202250681U (en) * | 2011-10-20 | 2012-05-30 | 徐敏 | Large-aperture cryogenic pump with liquid nitrogen heat sink |
| CN203022997U (en) * | 2012-12-04 | 2013-06-26 | 安徽万瑞冷电科技有限公司 | Coiled tube type liquid nitrogen heat sink structure for large-caliber cryogenic pump |
| CN203548126U (en) * | 2013-10-18 | 2014-04-16 | 昆山珍实复合材料有限公司 | Second-level cold plate in vacuum low-temperature pump |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59117998A (en) * | 1982-12-24 | 1984-07-07 | Toshiba Corp | Bearing lubricating device |
-
2013
- 2013-10-18 CN CN201310495458.4A patent/CN103603788B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201288651Y (en) * | 2008-11-17 | 2009-08-12 | 北京卫星环境工程研究所 | Low temperature pump for micro refrigerator |
| CN101629757A (en) * | 2009-08-10 | 2010-01-20 | 黄明佳 | Liner wall heat exchange type water tank |
| CN202250681U (en) * | 2011-10-20 | 2012-05-30 | 徐敏 | Large-aperture cryogenic pump with liquid nitrogen heat sink |
| CN203022997U (en) * | 2012-12-04 | 2013-06-26 | 安徽万瑞冷电科技有限公司 | Coiled tube type liquid nitrogen heat sink structure for large-caliber cryogenic pump |
| CN203548126U (en) * | 2013-10-18 | 2014-04-16 | 昆山珍实复合材料有限公司 | Second-level cold plate in vacuum low-temperature pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103603788A (en) | 2014-02-26 |
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| C41 | Transfer of patent application or patent right or utility model | ||
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Effective date of registration: 20160826 Address after: 226200 Nantong City, Qidong Province Economic Development Zone, Hai Hong Industrial Zone Lingfeng Road, No. 685 Applicant after: Nantong Leshi Machinery Co. Ltd. Address before: Pengxi Kunjia supporting industrial zone Kunshan Road, Suzhou City, Jiangsu province 215000 Applicant before: KUNSHAN TRUETIME COMPOSITE MATERIAL CO., LTD. |
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Effective date of registration: 20190806 Address after: 226200 Beixin Fine Chemical Park, Qidong City, Nantong City, Jiangsu Province Patentee after: Qidong Dongyue Chemical Co., Ltd. Address before: 226200 Nantong City, Qidong Province Economic Development Zone, Hai Hong Industrial Zone Lingfeng Road, No. 685 Patentee before: Nantong Leshi Machinery Co. Ltd. |
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| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 226200 fine chemical industry park, Qidong, Jiangsu, Nantong Patentee after: Jiangsu lvao New Material Co., Ltd Address before: 226200 fine chemical industry park, Qidong, Jiangsu, Nantong Patentee before: QIDONG DONGYUE CHEMICAL Co.,Ltd. |