CN201288651Y - Low temperature pump for micro refrigerator - Google Patents
Low temperature pump for micro refrigerator Download PDFInfo
- Publication number
- CN201288651Y CN201288651Y CNU2008201780157U CN200820178015U CN201288651Y CN 201288651 Y CN201288651 Y CN 201288651Y CN U2008201780157 U CNU2008201780157 U CN U2008201780157U CN 200820178015 U CN200820178015 U CN 200820178015U CN 201288651 Y CN201288651 Y CN 201288651Y
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- cold
- screen
- flange
- cryopump
- head
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- Expired - Fee Related
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Abstract
The utility model discloses a small-sized refrigerator cryopump, mainly comprising a cold head, a casing, a cold screen, a secondary cold plate and a baffle, wherein the cold screen is arranged in the casing, the secondary cold plate is disposed in the cold screen, the cold head is fixed on the midline of the casing via the flange thereof and passes through the casing, connected with the cold screen by the primary flange in the casing, and connected with the secondary cold plate by the secondary flange thereof in the cold screen, the baffle and the cold screen form an optical closed structure, thus enclosing the secondary cold plate. Compared with the prior art, the utility model has low cost, and runs well in BZ3/BZ4 part component test equipment.
Description
Technical field
The utility model belongs to refrigerating field, specifically, relates to a kind of small-sized refrigerator cryopump, particularly according to the self-shileding cryopump of the Φ 400mm bore of the designed one-tenth of size of the 1050CS cold head of Austin company.
Background technique
The small-sized self-shileding cryopump that uses in the parts testing installation is all from U.S.'s import.Because space industry belongs to the relatively stricter unit of U.S.'s examination, the import process is difficulty relatively, and the cycle is longer, and funds are also somewhat expensive.And also there are many difficult points in the development of small-sized refrigerator cryopump at present.Based on this, the utility model people has carried out the development of the small-sized self-shileding cryopump of low temperature.
Summary of the invention
The technical problems to be solved in the utility model is: grasped the development of small-sized refrigerator cryopump comprehensively, and provide a kind of small-sized refrigerator cryopump, the cryopump bore of manufacturing is Φ 400mm, can directly be applied in the BZ3/BZ4 parts testing installation and in two equipment running state good.
Small-sized refrigerator cryopump of the present utility model, mainly comprise cold head, housing, cold screen, secondary cold drawing, baffle, wherein, cold screen is arranged on enclosure interior, and it is inner that the secondary cold drawing is arranged on cold screen, and cold head is fixed on the housing center line by its flange and passes housing, be connected with cold screen by its one-level flange in enclosure interior, be connected with the secondary cold drawing by its secondary flange in cold screen, baffle and cold screen are formed the optics enclosed construction, and the secondary cold drawing is enclosed in wherein.
In the above-mentioned cryopump, described secondary cold drawing is inverted cup shape, comprises the cylindrical body and a plurality of frustums that are connected successively of hollow.Preferably on the frustum adjacent, be equipped with big frustum with described cylindrical body.
The utility model beneficial effect compared with prior art is:
(1) reality has been grasped the development technology of small-sized refrigerator cryopump, has broken away from the narrow limitation of product import;
(2) compare with the import like product, reduced cost.
Description of drawings
Fig. 1 is the structural representation of the utility model small-sized refrigerator cryopump.
Wherein, 1 is cold head; 2 is pump case; 3 is cold screen; 4 is the secondary cold drawing; 5 is baffle.
Embodiment
(1) as shown in Figure 1, the utility model small-sized refrigerator cryopump mainly comprises cold head 1, pump case 2, cold screen 3, secondary cold drawing (for example 20K cold drawing) 4 and baffle 5.Cold head 1 is contained on the pump case 2, the motor section branch is provided with (not shown) outside pump case, one-level, secondary cold head flange (not shown) are in being arranged on pump case, and the material of pump case 2 is a stainless steel, with the flange internal diameter of cold head 1 be 100mm, external diameter is 152mm, the height of pump case 2 is 418mm, and pump case 2 large cylinder internal diameters are 400mm, and external diameter is 410mm, pump case 2 pumping hole flange internal diameters are 400mm, and external diameter is 510mm.
(2) internal diameter of cold screen 3 is 380mm, and thickness is 1.5mm, and cold screen 3 is arranged on the one-level cold head flange (not shown) of cold head 1, adds the indium sheet between the flange, and cold screen 3 highly is 230mm, internal surface japanning, outer surface chromium plating polishing.
(3) secondary cold drawing 4 adopts the soldering of oxygen-free high conductivity type copper plate to be shaped, be arranged on the secondary cold head flange (not shown) of cold head 1, install the indium sheet between the flange additional, the base dimension of secondary cold drawing 4 is Φ 176 * 163.5mm, the cup height of secondary cold drawing 4 is 123mm, whole the silver-plated polishing of outer surface, adsorption board internal surface low temperature glue bond cocoanut active charcoal, it is that 1mm-2mm, length are the cylindrical shape of 2mm-3mm that active carbon adopts diameter.
(4) baffle 5 is installed in the opening end of cold screen 3, and the screw joint adopts the indium sheet to connect.Baffle outer surface chromium plating polishing, the internal surface japanning.
The design procedure of cryopump of the present utility model comprises:
(1) secondary cold drawing 4 the determining of area of bleeding;
(2), design the general structure of secondary cold drawing 4 according to the refrigeration work consumption of bleed area and cold head 1;
(3) design the size of pump case 2, cold screen 3 and secondary cold drawing 4 according to the length of cold head;
(4) determine the processing technology of structure, cold screen 3 and the baffle 5 of baffle 5 according to the size of pumping speed.
Determine the condensation area and the adsorption area of secondary cold drawing 4 in the described step (1) according to the size of pumping speed.
According to the refrigeration work consumption of bleed area, cooling time and cold head 1, determine the quality and the general structure of secondary cold drawing 4 in the described step (2).
Design the size of pump case 2, cold screen 3, secondary cold drawing 4 in the described step (3) according to the length of cold head 1, guarantee that pump case 2, cold screen 3 and secondary cold drawing 4 do not contact mutually; The silver-plated polishing of the cryosurface of secondary cold drawing 4, adsorption plane make the gas that enters in the pump not run on the adsorption plane before running into cryosurface below cryosurface as far as possible.
Cold screen 3 and baffle 5 outer surfaces or chromium plating polishing makes the surface penetrate rate less than 0.1 in the described step (4), and the internal surface blacking makes skin emissivity not in little by 0.9.
Although above embodiment of the present utility model is described in detail and illustrates, but what should indicate is, we can carry out various changes and modification to above-mentioned mode of execution, but these do not break away from the scope that spirit of the present utility model and appended claim are put down in writing.
Claims (3)
1, a kind of small-sized refrigerator cryopump mainly comprises cold head, housing, cold screen, secondary cold drawing, baffle, it is characterized in that, described cold screen is arranged on enclosure interior, and it is inner that the secondary cold drawing is arranged on cold screen; Described cold head is fixed on the housing center line by its flange and passes housing, is connected with described cold screen at the one-level flange of enclosure interior by cold head, and the secondary flange by described cold head in described cold screen is connected with the secondary cold drawing; Described baffle and cold screen are formed the optics enclosed construction, and the secondary cold drawing is enclosed in wherein.
2, cryopump as claimed in claim 1 is characterized in that, described secondary cold drawing is inverted cup shape, comprises the cylindrical body and a plurality of frustums that are connected successively of hollow.
3, cryopump as claimed in claim 1 or 2 is characterized in that, a big frustum adds on the frustum adjacent with described cylindrical body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201780157U CN201288651Y (en) | 2008-11-17 | 2008-11-17 | Low temperature pump for micro refrigerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201780157U CN201288651Y (en) | 2008-11-17 | 2008-11-17 | Low temperature pump for micro refrigerator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201288651Y true CN201288651Y (en) | 2009-08-12 |
Family
ID=40980333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201780157U Expired - Fee Related CN201288651Y (en) | 2008-11-17 | 2008-11-17 | Low temperature pump for micro refrigerator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201288651Y (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103603788A (en) * | 2013-10-18 | 2014-02-26 | 昆山珍实复合材料有限公司 | Secondary cold plate in vacuum low-temperature pump |
| CN103994049A (en) * | 2013-02-18 | 2014-08-20 | 住友重机械工业株式会社 | Cryopump and cryopump mounting structure |
| CN106014917A (en) * | 2015-03-31 | 2016-10-12 | 住友重机械工业株式会社 | Cryopump |
| CN107304760A (en) * | 2016-04-19 | 2017-10-31 | 爱发科低温泵株式会社 | Cryogenic pump, vacuum treatment installation |
| CN107725320A (en) * | 2017-11-24 | 2018-02-23 | 兰州真空设备有限责任公司 | A kind of full refrigeration mode cryogenic pump of heavy caliber |
| CN108105066A (en) * | 2017-12-26 | 2018-06-01 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump of variable pumping speed |
| CN108386656A (en) * | 2018-03-13 | 2018-08-10 | 北京卫星环境工程研究所 | Leakage temperature barrier and method for ultralow temperature cold plate |
| CN108612639A (en) * | 2018-05-17 | 2018-10-02 | 东莞市联洲知识产权运营管理有限公司 | A kind of baffle holder on condenser pump |
| CN108661880A (en) * | 2018-05-10 | 2018-10-16 | 东莞市联洲知识产权运营管理有限公司 | The baffle holder of structure optimization on a kind of condenser pump |
| CN111120255A (en) * | 2019-12-27 | 2020-05-08 | 浙江博开机电科技有限公司 | Built-in low-temperature pump |
| CN116221066A (en) * | 2023-01-09 | 2023-06-06 | 安徽万瑞冷电科技有限公司 | Cryopump, control system, and control method |
-
2008
- 2008-11-17 CN CNU2008201780157U patent/CN201288651Y/en not_active Expired - Fee Related
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103994049A (en) * | 2013-02-18 | 2014-08-20 | 住友重机械工业株式会社 | Cryopump and cryopump mounting structure |
| CN103994049B (en) * | 2013-02-18 | 2016-08-17 | 住友重机械工业株式会社 | Cryopump and cryopump mounting structure |
| CN103603788B (en) * | 2013-10-18 | 2017-01-11 | 南通乐士机械有限公司 | Secondary cold plate in vacuum low-temperature pump |
| CN103603788A (en) * | 2013-10-18 | 2014-02-26 | 昆山珍实复合材料有限公司 | Secondary cold plate in vacuum low-temperature pump |
| CN106014917B (en) * | 2015-03-31 | 2018-07-17 | 住友重机械工业株式会社 | Cryogenic pump |
| CN106014917A (en) * | 2015-03-31 | 2016-10-12 | 住友重机械工业株式会社 | Cryopump |
| CN107304760A (en) * | 2016-04-19 | 2017-10-31 | 爱发科低温泵株式会社 | Cryogenic pump, vacuum treatment installation |
| CN107304760B (en) * | 2016-04-19 | 2020-06-16 | 爱发科低温泵株式会社 | Cryopump and vacuum processing apparatus |
| CN107725320A (en) * | 2017-11-24 | 2018-02-23 | 兰州真空设备有限责任公司 | A kind of full refrigeration mode cryogenic pump of heavy caliber |
| CN108105066A (en) * | 2017-12-26 | 2018-06-01 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump of variable pumping speed |
| CN108386656A (en) * | 2018-03-13 | 2018-08-10 | 北京卫星环境工程研究所 | Leakage temperature barrier and method for ultralow temperature cold plate |
| CN108661880A (en) * | 2018-05-10 | 2018-10-16 | 东莞市联洲知识产权运营管理有限公司 | The baffle holder of structure optimization on a kind of condenser pump |
| CN108612639A (en) * | 2018-05-17 | 2018-10-02 | 东莞市联洲知识产权运营管理有限公司 | A kind of baffle holder on condenser pump |
| CN111120255A (en) * | 2019-12-27 | 2020-05-08 | 浙江博开机电科技有限公司 | Built-in low-temperature pump |
| CN111120255B (en) * | 2019-12-27 | 2021-12-10 | 浙江博开机电科技有限公司 | Built-in low-temperature pump |
| CN116221066A (en) * | 2023-01-09 | 2023-06-06 | 安徽万瑞冷电科技有限公司 | Cryopump, control system, and control method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090812 Termination date: 20151117 |
|
| EXPY | Termination of patent right or utility model |