EP1161770A1 - Agencement de cellules de memoire ram dynamique, et son procede de realisation - Google Patents

Agencement de cellules de memoire ram dynamique, et son procede de realisation

Info

Publication number
EP1161770A1
EP1161770A1 EP00916811A EP00916811A EP1161770A1 EP 1161770 A1 EP1161770 A1 EP 1161770A1 EP 00916811 A EP00916811 A EP 00916811A EP 00916811 A EP00916811 A EP 00916811A EP 1161770 A1 EP1161770 A1 EP 1161770A1
Authority
EP
European Patent Office
Prior art keywords
trench
substrate
word lines
insulating
dram
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00916811A
Other languages
German (de)
English (en)
Inventor
Josef Willer
Bernhard Sell
Till Schlösser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Publication of EP1161770A1 publication Critical patent/EP1161770A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/05—Making the transistor
    • H10B12/053—Making the transistor the transistor being at least partially in a trench in the substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/34—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the transistor being at least partially in a trench in the substrate

Definitions

  • the invention relates to a DRAM cell arrangement, i. H. a dynamic random access memory cell array with bit lines buried in a substrate and a method of making the same.
  • Em transistor memory cell As a memory cell of a DRAM cell arrangement, a so-called Em transistor memory cell is used almost exclusively, which comprises a transistor and a capacitor. The information of the memory cell is stored in the form of a charge on the capacitor. The capacitor is connected to the transistor, so that when the transistor is driven via a word line, the charge on the capacitor can be read out via a bit line.
  • the general aim is to produce a DRAM cell arrangement that has a high packing density.
  • a DRAM cell arrangement which comprises em transistor memory cells.
  • the space required per memory cell can be 4F ⁇ , where F is the minimum structure size that can be produced using the technology used.
  • F is the minimum structure size that can be produced using the technology used.
  • To produce bit lines trenches running parallel to one another are etched in a silicon substrate. A thin insulating layer is deposited that does not fill the trenches. The trenches are filled with tungsten to produce the bit lines. The insulating layer is removed on each flank of each trench, so that the bit lines are partially exposed laterally. Source / drain areas and channel areas of vertical transistors are generated by epitaxy. The lower source / dram regions of the transistors adjoin the bit lines laterally.
  • Word lines run across the bit lines and m gra- ben, which is between mutually adjacent transistors ⁇ are arranged.
  • the invention is based on the problem to provide a DRAM cell arrangement whose memory cells each having a transistor and a capacitor, whose Bitleitun ⁇ gen in the substrate buried are and with a space requirement for each memory cell of 4F ⁇ and at the same time with as compared to the prior art smaller process costs can be produced. Furthermore, a method for the production thereof is to be specified.
  • a DRAM cell arrangement with memory cells, each of which has a transistor and a capacitor, in which a substrate has trenches which run essentially parallel to one another and in each of which a bit line is arranged.
  • the bit line is arranged in a lower part of the associated trench.
  • the lower part of the trench is provided with an insulation, which is arranged between the bit line and the substrate, except for a strip-shaped recess which runs parallel to the trench and is arranged on a first flank of the trench. Parts of the flanks of the trench arranged above the lower part of the trench and an upper surface of the bit line are provided with further insulation.
  • Word lines run across the bit line.
  • the word lines run above the substrate except for downward protuberances that reach the trenches and are arranged above the bit lines. Insulating structures and the protuberances of the word lines are arranged alternately in the trench above the bit lines.
  • the transistors of the memory cells are designed as vertical transistors. Upper source / drain regions and lower source / drain regions of the transistors are arranged between the trenches. Further insulating structures are arranged in the substrate, which separate upper source / drain regions of transistors adjacent to one another along the trench. The upper source / drain regions of the transi- disturb are connected to the capacitors of the memory cells.
  • the protuberances of the word lines act as gate electrodes of the transistors.
  • the problem is also solved by a method for producing a DRAM cell arrangement with memory cells, each having a transistor and a capacitor, in which an insulating layer is produced on a substrate. Trenches running essentially parallel to one another are produced in the substrate. Lower parts of the trenches are provided with insulation except for strip-shaped cutouts which run parallel to the trenches and are arranged on first flanks of the trench. In the lower parts of the trench depending ⁇ is wells generates a bit line. Parts of the flanks of the trench and the bit lines arranged above the lower parts of the trench are provided with further insulation. Conductive material is applied so that the trenches are filled. A protective layer is created that covers the conductive material.
  • the conductive material and the protective layer are structured in such a way that word lines covered by the protective layer are produced, which run transversely to the bit lines and have downward protrusions that reach the trenches.
  • Insulating material is deposited and, together with the insulating layer, selectively etched back to the protective layer and to the substrate until the substrate is exposed, so that insulating structures are produced in the trench which are arranged between the protuberances of the word lines and above the bit lines.
  • the substrate is selectively etched to the insulating structures so that depressions are created between the word lines and between the trenches.
  • Upper source / dram regions of transistors of memory cells are produced in the substrate between the trenches and between the depressions.
  • lower source / drain regions of the transistors are produced in the substrate, each of which ar adjoin one of the recesses. Further insulating structures are created in the depressions. Capacitors of the memory cells are generated that ren with one of the obe ⁇ each source / drain regions are connected. On the first flanks of the trenches, the word lines act as gate electrodes of the transistors and the further insulation acts as a gate dielectric.
  • the upper source / drain regions, the lower source / drain regions, the insulating structures and the further insulating structures are self-aligned to the word lines and to the trenches, so that the DRAM cell arrangement has a high packing density, ie a small one Space requirement per memory cell can have.
  • the trenches are produced with a strip-shaped mask, the strips of which run parallel to one another, and the word lines are structured with the aid of a further strip-shaped mask, the strips of which run parallel to one another and transversely to the trenches, and the strips have a width of F and a spacing of F. from each other, the space requirement of a memory cell can be 4 F " , where F is the minimum structure size that can be produced in the technology used.
  • the lower source / drain region of a transistor is arranged between the trench and an adjacent trench and is spaced apart from the adjacent trench.
  • a channel region of the transistor which is arranged between the lower source / drain region and the upper source / drain region, is electrically connected to most of the substrate.
  • at least one part of the bit line which adjoins the cutout can consist of doped polysilicon.
  • dopant diffuses out of the bit line ms substrate and forms an e-doped region there, which is arranged between the trench and the adjacent trench, adjoins the recess and is spaced apart from the adjacent trench.
  • This tempering step can be, for example, a thermal oxidation to produce a gate dielectric.
  • Parts of the doped region arranged under the upper source / dram regions act as the lower source / dram regions.
  • the doped region can be structured by the depressions, so that the lower source / dram regions of transistors which are adjacent to one another along the trench and which are separate from one another are produced from the doped region.
  • the lower source / dram regions of the transistors adjacent to one another along the trench and the further insulating structures alternately adjoin the bit line in the region of the cutout.
  • the lower source / drain region is produced by structuring a lower doped layer of the substrate.
  • the structuring is done by creating the trenches.
  • the depressions can also be produced in this case in such a way that they extend deeper than the cutouts in the insulation.
  • the upper source / Dra region can be produced by structuring an upper doped layer of the substrate.
  • the structuring takes place through the creation of the depressions and the trenches.
  • the depressions are therefore at least so deep that they cut through the upper doped layer.
  • the upper source / drain region can also be created by implantation. For example, the implantation takes place after the trenches have been created.
  • a separation of the upper source / dram regions of transistors which are adjacent along the bit line of the zueinan ⁇ takes place from one another by the production of the wells.
  • the capacitor can be connected to the upper source / dram region via a conductive structure.
  • the upper source / drain region of the transistor is covered with an insulating layer.
  • the word line runs over the insulating layer.
  • a projection of the upper source / dram region on the insulating layer overlaps a projection of the word line on the insulating layer of the ⁇ art that it is extended beyond two sides of the projection of the word line, so that projections of two parts of the upper source / dram -Limit the area around the projection of the word line and do not overlap the projection of the word line.
  • the upper source / dram area Transversely to the word line, the upper source / dram area therefore has a larger dimension than the word line.
  • Flanks of the word line are provided with insulating spacers.
  • An upper surface of the word line facing away from the upper source / dram region is provided with an insulating protective layer.
  • the conductive structure covers that
  • the capacitor is arranged on the conductive structure.
  • the conductive structure can be generated in a self-aligned manner with respect to the word line and does not increase the space requirement of the memory cell.
  • the spacers are produced, for example, before the depressions are produced by separating and scratching off insulating material.
  • conductive material is deposited to such a thickness that gaps between the word lines are not filled.
  • a mask is created that honors zonal surfaces of parts of the conductive material, which are arranged above the word line, covered.
  • the lei ⁇ tend material and the substrate are selectively etched to mask ge ⁇ . Parts of the conductive material arranged between the word lines are consequently removed.
  • the conductive structures are created from the conductive material and the depressions are created in the substrate.
  • the mask can be generated in a self-adjusted manner so that the space requirement of the memory cell is not increased.
  • One way to create the mask is to non-conformally deposit insulating material so that the insulating material is thickest over the horizontal surfaces of the portions of conductive material located above the word line.
  • the mask is produced from the insulating material by etching back the insulating material until parts of the conductive material arranged between the word lines are exposed.
  • the mask covers not only the horizontal surfaces of the parts of the conductive material which are arranged above the word line, but also transverse surfaces of the conductive material.
  • a further possibility of producing the mask consists in first depositing and etching back the auxiliary material after the conductive material containing the doped polysilicon has been deposited, until lateral faces of the conductive material are partially exposed. A thermal oxidation is then carried out so that the mask is produced on exposed parts of the conductive material. The auxiliary material is then removed.
  • tungsten is particularly suitable if the substrate consists of silicon, since silicon and tungsten approximate- have the same thermal expansion coefficient, so that mechanical tension and resulting defects in temperature changes are avoided.
  • the polysilicon of the bit line In order to prevent the metal of the bit line and the silicon of the substrate or, if provided, the polysilicon of the bit line from forming a metal silicide, which has a lower electrical conductivity, due to diffusion, it is advantageous to separate between the metal and to provide the silicon or the polysilicon with a diffusion barrier.
  • a lower part of the bit line consists of metal.
  • a diffusion bar containing nitrogen is arranged above it.
  • the polysilicon, which adjoins the cutout, is arranged on the diffusion bar.
  • Parts of the further insulation are thickened at the edges of the word lines.
  • the word lines can consist of two parts.
  • a lower part of the word lines, which comprises the protuberances, is preferably made of doped polysilicon.
  • the second parts of the word lines arranged above the first parts can e.g. B. consist of a metal silicide, such as tungsten silicide.
  • the word lines can also be made of doped polysilicon, from one arranged above, e.g. nitrogenous, diffusion bamers and from metal arranged above, e.g. Tungsten.
  • the insulating layer, the isolation, the further isolation, the isolating structures, the further isolating structures and the mask consist for example of S1O2 or from silicon nitride.
  • other insulating materials lie ⁇ gen in the context of the invention.
  • the protective layer is preferably made of silicon nitride, to allow tive to selec ⁇ etching.
  • the substrate can consist of another material that is suitable for transistors.
  • the substrate may include GaAs.
  • FIG. 1 shows a cross section through a substrate after a first insulating layer, a layer of silicon nitride, a second insulating layer, trench and isolation have been produced.
  • FIG. 2 shows the cross section from FIG. 1 after bit lines and first doped regions have been produced.
  • FIG. 3a shows the cross section from FIG. 2 after a further insulation, second doped regions, word lines, a protective layer and spacers have been produced.
  • FIG. 3b shows a cross section through the substrate parallel to the cross section from FIG. 3a after the process steps from FIG. 3a.
  • FIG. 3c shows a cross section perpendicular to the cross section from FIG. 3a through the substrate after the process steps from FIG. 3a.
  • 3d shows a parallel to the cross section of Figure 3c cross-section through the substrate after the process ⁇ steps of Figure 3a.
  • Figure 3e shows a top view of the substrate m of he ⁇ ste insulating layer, the bit lines, the iso ⁇ lation, the further insulation, the word lines and the spacers are illustrated.
  • FIG. 4a shows the cross section from FIG. 3a after insulating structures, a mask, depressions, conductive structures, further insulating structures, upper source / dram regions, channel regions and lower source / dram regions have been produced.
  • FIG. 4b shows the cross section from FIG. 3b after the process steps from FIG. 4a.
  • FIG. 4c shows the cross section from FIG. 3c after the process steps from FIG. 4a.
  • Figure 4d shows the cross section of Figure 3d after the process ⁇ steps of Figure 4a.
  • FIG. 5 shows the cross section from FIG. 4d after storage nodes, conductive spacers and a capacitor plate have been produced.
  • a substrate 1 made of monolithic silicon is provided.
  • S1O2 is deposited in a thickness of approximately 20 nm on a surface of the substrate 1, so that a first insulating one
  • Layer II is generated.
  • silicon nitride N silicon nitride with a thickness of approx. 50nm deposited.
  • S ⁇ 0 m a thickness of approximately 200 nm makesschie ⁇ (see Figure 1).
  • the second insulating layer 12 With the aid of a strip-shaped first photoresist mask whose strips are approximately lOOnm wide and have a spacing of approximately lOOnm from each other, the second insulating layer 12, the layer of silicon nitride N and the first isolate ⁇ de layer II are patterned, so that the substrate 1 is partially exposed. The first photoresist mask is then removed. With z. B. HBr, the substrate 1 is etched approximately 500 nm deep, so that trenches G are produced (see FIG. 1). The structured second insulating layer 12 acts as a mask.
  • Thermal oxidation is carried out in order to produce an insulation 13 which is approximately 10 nm thick.
  • the insulation 13 covers the flanks and the bottom of the trench G (see FIG. 1).
  • msitu doped polysilicon is deposited with a thickness of approx. 50 nm. It is polished mechanically and mechanically until the second insulating layer 12 is removed. Then the polysilicon is etched back to a depth of approx. 400 nm.
  • HF is suitable as an etchant, for example.
  • the layer of silicon nitride N protects parts of the first insulating layer II.
  • msitu-doped polysilicon is deposited in a thickness of approx. 50 nm and ground back by chemical mechanical polishing until the layer made of silicon nitride N is exposed.
  • n-doping ions 1 Dl strip-shaped first doped regions in the substrate are generated, which are located between the trench and the G SURFACE ⁇ surface of the substrate 1 are adjacent (see Figure 2).
  • the first doped areas Dl are approx. 20nm thick.
  • the doped polysilicon in the trench G forms bit lines B, which are arranged in the lower parts of the trench G.
  • the insulation 13 in the lower parts of the trenches G each has a strip-shaped recess on the first flank, in which the bit line B adjoins the substrate 1 (see FIG. 2).
  • Thermal oxidation is carried out to remove etching residues, and the S1O2 produced in this way is subsequently removed by wet etching. The layer of silicon nitride N is removed.
  • the further insulation 14 is approximately 5 nm thick and covers parts of the flanks of the trenches G and upper surfaces of the bit lines B arranged above the lower parts of the trench G (see FIGS. 3a to 3e).
  • the thermal oxidation acts as a tempering step through which the dopant diffuses from the bit line B m into the substrate 1 and forms second doped regions D2 there (see FIGS. 3a, 3b).
  • Each of the second doped regions D2 adjoins that trench G in which the bit line from which the dopant with which the second doped region D2 was produced is diffused.
  • the second doped region D2 is arranged between this trench and an adjacent trench, adjoins the recess of the trench G and is spaced apart from the adjacent trench.
  • msitu doped polysilicon with a thickness of approx. 50 nm is deposited, so that the trenches G are filled become.
  • Tungsten silicide is deposited in a thickness of approx. 80 nm.
  • S silicon nitride is deposited to a thickness of approximately 50 nm (they ⁇ he figures 3a to 3d).
  • the third photoresist mask is removed.
  • thermal oxidation is carried out so that the further insulation 14 is thickened in sections up to below the word lines W.
  • the further insulation 14 is therefore thickened in the region of edges of the word lines W. This thermal oxidation corresponds to the so-called reoxidation step in planar transistors.
  • silicon nitride is deposited to a thickness of approximately 10 nm and is etched back (see FIGS. 3a to 3e).
  • the spacers Sp cover flanks of the word lines W and parts of the insulation 13 and the further insulation 14.
  • S1O2 is deposited with a thickness of approx. 50 nm and chemically and mechanically polished until the protective layer S is exposed.
  • the S1O2 is then etched back until the substrate 1 is exposed. This creates insulating structures 15 in the trench, so that the trenches of the word lines W and the insulating structures 15 are arranged alternately in each trench G above the associated bit line B (see FIGS. 4a to 4d).
  • msitu doped polysilicon is deposited with a thickness of approximately 10 nm. The thickness is so small that gaps between the word lines W are not filled.
  • the fourth photoresist mask is removed.
  • S1O2 m is deposited at a high rate using a CVD method, so that the S1O2 grows on the horizontal surfaces of the parts of the polysilicon which are arranged above the word lines W about twice as thick, namely about 20 nm , compared to lower positions.
  • the S1O2 is then etched to a depth of approximately 10 nm, so that parts of the polysilicon arranged between the word lines W are exposed.
  • the mask M is thereby generated from the S1O2 (see FIGS. 4a to 4d).
  • the polysilicon and the substrate 1 are selectively etched to the mask M and the insulating structures 15, so that depressions V are produced between the word lines W and specifically between the trenches G (see FIGS. 4b and 4d).
  • the depressions V are approximately 450 nm deep, so that they extend deeper than the cutouts in the insulation 13.
  • the word lines act as gate electrodes of the transistors and the further insulation acts as a gate dielectric.
  • S1O2 is deposited to a thickness of approx. 100 nm and planarized by chemical-mechanical polishing. This creates additional insulating structures 16 in the depressions V (see FIGS. 4b and 4d).
  • the conductive structures L are exposed by means of a photolithographic process (see FIG. 5). Then msitu doped polysilicon is deposited with a thickness of approx. 500 nm. Tungsten silicide is deposited in a thickness of approx. 100 nm.
  • storage nodes K of capacitors are produced from the tungsten silicide and the polysilicon, which are connected to the conductive structures L (see FIG. 5).
  • a surface of the storage nodes K is enlarged by conductive spacers Sp, which are produced by depositing tungsten silicide in a thickness of approximately 20 nm and then scratching it back.
  • silicon nitride is deposited to a thickness of approximately 6 nm and oxidized to a depth of approximately 1 nm.
  • titanium nitride is deposited in a thickness of approximately 100 nm (see FIG. 5).
  • a DRAM cell arrangement is produced, with memory cells, each of which comprises one of the transistors and one of the capacitors connected to them.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)

Abstract

Selon l'invention, des lignes de bits sont disposées dans les parties inférieures de tranchées d'un substrat (1). Des lignes de mots (W) s'étendent jusqu'à des protubérances dirigées vers le bas qui vont jusque dans les tranchées et sont disposées sur les lignes de bits, sur le substrat (1). Les transistors sont des transistors verticaux dont les régions de source/drain (S/Do) sont disposées sous les lignes de mots (W) et entre des tranchées voisines. Les condensateurs sont reliés aux régions supérieures de source/drain (S/Do). Des structures conductrices (L) qui entourent les lignes de mots (W) de dessus et sur les côtés, mais qui sont isolées desdites lignes de mots (W), et qui sont adjacentes aux régions supérieures de source/drain (S/Do) peuvent relier ces dernières (S/Do) aux condensateurs.
EP00916811A 1999-03-12 2000-03-10 Agencement de cellules de memoire ram dynamique, et son procede de realisation Withdrawn EP1161770A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19911148 1999-03-12
DE19911148A DE19911148C1 (de) 1999-03-12 1999-03-12 DRAM-Zellenanordnung und Verfahren zu deren Herstellung
PCT/DE2000/000756 WO2000055904A1 (fr) 1999-03-12 2000-03-10 Agencement de cellules de memoire ram dynamique, et son procede de realisation

Publications (1)

Publication Number Publication Date
EP1161770A1 true EP1161770A1 (fr) 2001-12-12

Family

ID=7900802

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00916811A Withdrawn EP1161770A1 (fr) 1999-03-12 2000-03-10 Agencement de cellules de memoire ram dynamique, et son procede de realisation

Country Status (8)

Country Link
US (1) US6504200B2 (fr)
EP (1) EP1161770A1 (fr)
JP (1) JP3786836B2 (fr)
KR (1) KR100403442B1 (fr)
CN (1) CN1150612C (fr)
DE (1) DE19911148C1 (fr)
TW (1) TW461086B (fr)
WO (1) WO2000055904A1 (fr)

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JP3786836B2 (ja) 2006-06-14
CN1343371A (zh) 2002-04-03
TW461086B (en) 2001-10-21
WO2000055904A1 (fr) 2000-09-21
KR20010104379A (ko) 2001-11-24
US20020079527A1 (en) 2002-06-27
DE19911148C1 (de) 2000-05-18
JP2002539642A (ja) 2002-11-19
US6504200B2 (en) 2003-01-07
CN1150612C (zh) 2004-05-19
KR100403442B1 (ko) 2003-10-30

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