EP0937579B1 - Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head - Google Patents

Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head Download PDF

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Publication number
EP0937579B1
EP0937579B1 EP99200740A EP99200740A EP0937579B1 EP 0937579 B1 EP0937579 B1 EP 0937579B1 EP 99200740 A EP99200740 A EP 99200740A EP 99200740 A EP99200740 A EP 99200740A EP 0937579 B1 EP0937579 B1 EP 0937579B1
Authority
EP
European Patent Office
Prior art keywords
ink
orifice
discharging
plate
recording head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99200740A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0937579A2 (en
EP0937579A3 (en
Inventor
Kazuaki Masuda
Nobuyuki Kuwabara
Takashi Watanabe
Akira Goto
Hiroshi Kono
Toshio Kashino
Akio Saito
Koyo Midorikawa
Toru Okumura
Masami Ikeda
Takashi Kanzaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63275800A external-priority patent/JP2771557B2/ja
Priority claimed from JP27579788A external-priority patent/JPH02121842A/ja
Priority claimed from JP27579488A external-priority patent/JPH02121843A/ja
Priority claimed from JP740989A external-priority patent/JPH02187345A/ja
Priority claimed from JP1007470A external-priority patent/JP2831368B2/ja
Priority claimed from JP741089A external-priority patent/JP2633943B2/ja
Priority claimed from JP1007403A external-priority patent/JP2763563B2/ja
Priority claimed from JP918489A external-priority patent/JPH02188257A/ja
Priority claimed from JP918189A external-priority patent/JPH02188255A/ja
Priority claimed from JP1018079A external-priority patent/JP2764418B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0937579A2 publication Critical patent/EP0937579A2/en
Publication of EP0937579A3 publication Critical patent/EP0937579A3/en
Publication of EP0937579B1 publication Critical patent/EP0937579B1/en
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14024—Assembling head parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter

Definitions

  • the present invention relates to a method of producing a print head for an ink jet printer.
  • Figs. 1A and 1B are respectively a schematic exploded perspective view and a schematic perspective after bonding showing an example of the liquid jet recording head of this type of the prior art.
  • the first and the second substrates are mutually adhered and fixed with an adhesive 13 to assemble a recording head as shown in Fig. 1B.
  • the head obtained by the method as described above has the problem that the straight forward progress of the ink droplets is impaired. This is, above all, due to the fact that the orifices, which are formed of materials of different qualities, cause difference in wettability with the ink at the peripherals of orifices.
  • the orifice plate is also adhered by use of an adhesive, but since the pitch of the flow channel 11 and the height of the flow channel wall 10 are fine to the extent of about some 10 ⁇ m, unless the coated amount (thickness) of the adhesive layer 13 is controlled to about some ⁇ m, the adhesive may come out to the flow channel side because of the pressure applied during bonding, whereby there may be caused such fear that the low channel diameter or the discharging orifice diameter may be varied, even to leading to clogging. Also, when the adhesive force is not sufficient, there is the fear that peeling of the orifice plate may occur.
  • the resin film has generally a thickness of about 20 to 50 ⁇ m, not only handling is cumbersome, but also it may be considered that wrinkles may be formed or bubbles may be introduced during . plastering to effect no good plastering.
  • Fig. 10 is a perspective view showing the details of the mask 209 and the orifice plate 240.
  • On the mask 209 are provided transparent portions 291 corresponding to the sites where orifices on the orifice plate 240 are to be worked so that laser beam 212 may be transmitted therethrough.
  • this pattern can be worked into the film for orifice plate.
  • UV-ray is irradiated on the bonded dry film surface to effect curing of the film, and the recording head (ceiling plate-heater board orifice plate) is fixed at a predetermined position comprising the constitution shown in Fig. 11, followed by registration of the recording head, the excimer laser and the mask.
  • This registration is corresponded by making the stand 207 for fixing the recording head movable system in this example.
  • the shape of the ink liquid channel and the orifice plate 40b are the same as in the example as described above, and as the material for the orifice plate 40a, films of Myler, Tedlar (registered brand), etc. are used.
  • the film 40a is previously bonded to the plate 40b, and then bonded to the opening surface of the liquid channel. Thereafter, the orifice is worked with an excimer laser beam.
  • the recording head obtained according to this Example has water repellency at the discharging orifice surface and the orifice plate, and therefore no unnecessary ink pooling or dew formation occurs at the discharging orifice surface, whereby stable discharging without influences from these is rendered possible.
  • Fig. 24 is an enlarged sectional view of the orifice plate member 40 shown in Fig. 23, and in Fig. 24, 12B is a PES film forming the orifice plate, 13B a tacky layer as the adhesive, and 17B a Mylar.
  • 12B is a PES film forming the orifice plate, 13B a tacky layer as the adhesive, and 17B a Mylar.
  • orifices of 3 ⁇ m are formed at a pitch of 70 ⁇ m.
  • the orifice plate 12B obtained by peel-off of the Mylar 17B is bonded to the opened face of the ink channel to complete the main ink jet recording head.
  • Fig. 26 is an enlarged views of the portion where the laser beam 212 is incident on the film, and in Fig. 26, 18B is a dry film forming the orifice plate, 19B a protective film comprising a polyether and 20B a Mylar.
  • the Mylar is peeled off to form the state shown in Fig. 28, and UV-ray is irradiated on the orifice plate 18B of the bonded dry film from the discharging direction side to effect photocuring, thereby completing the main ink jet recording head. Also according to this example, a shape with the taper of the orifice being widened in the direction opposite to the ink discharging direction is obtained.
  • a liquid repellent (ink repellent) coating layer 303 and an adhesive layer 304 are provided on one surface of a plate member 302 capable of forming a discharging orifice plate.
  • a liquid repellent (ink repellent) coating layer 303 and an adhesive layer 304 are provided on one surface of a plate member 302 capable of forming a discharging orifice plate.
  • the plate member 302 one comprising a resin, a metal, etc. can be utilized.
  • the resin plate member may be also improved in strength and other characteristics by addition of various additives or fillers into the resin.
  • a plate member made of a metal for example, a plate member comprising stainless steel, nickel, gold, silver, platinum, etc. can be utilized.
  • the adhesive layer 304 may be formed of a material suitably selected which can give good bonded sate between the discharging orifice plate and the main recording head portion and, for example, an epoxy type adhesive subjected to B staging by the heating treatment under the conditions of 100 °C - 120 °C for 30 to 60 minutes, etc. can be utilized, and provided to a layer thickness of about 1 to 5 ⁇ m.
  • a thru-hole 301 is opened at a predetermined portion of the plate member 302 having the liquid repellent coating layer 303 and the adhesive layer 304 provided thereon as described above.
  • the press working method For formation of the thru-hole 301, the press working method, the electron beam working method, the laser beam working method, the liquid jet working method, etc. can be utilized.
  • the plate member 302 By combining the plate member 302 with the above-mentioned constitution with these methods, perforation working of high precision perforation working can be done at high speed and simply.
  • an epoxy type adhesive comprising a mixture of various components shown below was coated according to the spin coating method under various conditions shown below, further subjected to the heating treatment under the conditions of 100 °C to 120 °C, and 30 to 60 minutes, followed by drying and solification to effect B staging, to give a number of plate materials attached with adhesive layers.
  • the layer thickness of the adhesive layer after B staging was found to be 1 to 5 ⁇ m.
  • Adhesive layer composition :
  • a solution prepared by adding a fluorine silicon coating agent KP - 801 (trade name, manufactured by Shinetsu Kagaku Kogyo) to 0.07 % by weight into Difreon S-3 (trade name, manufactured by Daikin Kogyo) was spin coated under the various conditions shown below, and then subjected to the heating treatment of 80 °C to 120 °C form a liquid repellent coating layer of 1 ⁇ m or less.
  • a discharging orifice plate was obtained in the same manner as in Example a except for using a stainless steel plate with a thickness of 50 ⁇ m as the plate material, and forming perforation of thru-holes by the continuous perforation working with electron beam.
  • the discharging orifice plate obtained was found to have good quality similarly as in Example a.
  • each discharging orifice plate of the main recording head portion used in Example a (with the constitution shown in Fig. 3 and Fig. 4) is pressed under a load of about 2 kg/cm 2 against the two-liquid mixed epoxy resin adhesive layer on the silicone rubber obtained by the above operation, and then the silicon rubber was peeled off to have the adhesive layer onto the main recording head.
  • the discharging orifice plate previously obtained was tentatively adhered with registration onto the transfer adhesive layer thus obtained, and then subjected to the heating treatment at 60 °C to 100 °C for 30 minutes to 60 minutes to cure the adhesive.
  • Example a the fluorine silicone coating agent solution used in Example a was spin coated uniformly on a silicone rubber with a thickness of 0.5 mm under the conditions shown below.
  • the silicone rubber was peeled off to have the fluorine silicone coating agent layer transferred onto the discharging orifice plate surface of the main recording head, followed further by curing by heating at 80 °C - 120 °C, to complete a recording head.
  • a recording head was prepared in the same manner as in Comparative example a except for using a stainless steel plate with a thickness of 50 ⁇ m as the plate material, and the same one as used in Example b as the main recording head.
  • the ink jet liquid has grooves which become ink channels 505 and ink liquid chamber 506 on an appropriate substrate 501 such as glass, metal, plastic, etc., and further has a energy generating member 504 for generating energy to be utilized for discharging ink such as heat energy, etc. on the lower side of another substrate 502 along the groove formed along the substrate 501, followed by bonding of the substrate 501 and the substrate 502 to prepare a main head 507.
  • the discharging orifice plate 503 which is a plate body of a multilayer structure applied with high precision hole opening by press working is adhered to the surface of the main head 507 where openings communicated to the ink channels 505 are formed.
  • this case is formed of a plate body 520A comprising the three layers having an ink repellent layer 531, a base film 532 and an adhesive layer 533 successively laminated, and after the plate body 520A is subjected to hole opening by press working, it is adhered as the discharging orifice plate 503 with the adhesive layer 533 onto the main head 507.
  • this case is formed of a plate body 530 comprising four layers having an ink repellent layer 531, a base film 532, an adhesive layer 533 and a release film 534 successively formed, and after the plate body 530 is subjected to hole opening by press working, it is adhered as the discharging orifice plate 503 by peeling the release film 534 with the adhesive layer 533 onto the main head 507.
  • nonstretched film such as polyether ether ketone (PEEK), polyether sulfone (PES), polysulfone (PSF), polyethylene terephthalate (PET), polyimide, etc.
  • PEEK polyether ether ketone
  • PES polyether sulfone
  • PSF polysulfone
  • PET polyethylene terephthalate
  • PEEK polyether ether ketone
  • PEEK polyether ether ketone
  • the nonstretched film of 25 ⁇ polyether ether ketone (PEEK) is sufficiently satisfactory in precision with a heat shrinkage of 0.1 % or less after held at 150 °C for 4 hours.
  • the preparation steps of the plate body 530 comprise the 7 steps of the film washing step 601, the ink repellent treatment agent coating step 602, the drying step 603, the surface modification step 604, the adhesive coating step 605, the drying step 606 and the release film molding step 607.
  • the points of the present embodiment are the ink repellent treatment and the adhesive coating, and therefore other steps are omitted.
  • ink repellent treatment agent coating step 602 it has been practiced in the prior art to effect the water repellent treatment after hole working, whereby there may be occurred clogging of hole with the ink repellent treatment agent. This problem can be improved by applying this step to the base film 532.
  • fluorine type or silicon type agents such as Fluorocoat of Asahi Glass, LF-40 of Soken Kagaku, DEFENSA-7702 (trade name) of Dainippon Ink Kagaku, etc. may be employed.
  • DEFENSA-7702 is coated by a roll coater.
  • the base film 532 as described above is excellent in chemical resistance and therefore adhesion strength between the adhesive and the base film 532 cannot but become weak.
  • surface modification of the base film 532 is effected in the surface modification step 604.
  • the plasma treatment, the uv/O 3 treatment, etc. are effective.
  • the uv/O 3 treatment method was employed. Evaluation of surface modification was performed in terms of contact angle. By irradiation of a light of 2537 ⁇ at 20 mw/cm 2 for 5 minutes, the initial contact angle 36° could be improved to 31 with polyether ether ketone (PEEK).
  • PEEK polyether ether ketone
  • epoxy type uv curable adhesives acrylic uv curable adhesive, etc. may be included.
  • a stock solution of a dry film is coated by roll coating and vacuum dried.
  • the release film plastering step 607 is not required if the above characteristic 1 of the adhesive layer 533 being initially smooth is complete, but practically more or less stickiness may sometimes remain, and therefore in view of easiness during the press working in the later step, a release film 534 may be laminated.
  • a release film 534 may be laminated.
  • the release paper polyethylene (PE), polyvinyl fluoride (PVF), etc. are suitable.
  • the plate body 530 obtained according to the steps as described above, the item of clogging of holes with adhesive, ink repellent treatment agent which is the problem of the prior art has been solved.
  • it can be accomplished by deleting the release film plastering step 607 in Fig. 36.
  • hole opening for forming ink discharging orifices is performed by applying press working on the plate body 530 obtained according to the steps as described above.
  • the plate body 530 is mounted on the delivery table 604 and the die 655 of a press hole opening device as shown in Fig. 37, fixed with the film press 653, and holes are opened by driving the punch 651 by the punch driving source 652.
  • the discharging orifice diameter is made 3.2 ⁇ and the pitch 70.5 ⁇ .
  • punching sag, burr are generated, but in this example, the influence is made null by making the punching sag an adhesive, and further generation of the burr could be inhibited by controlling the clearance of the die 652 of the punch 651 to about 1 ⁇ .
  • a highly precise ink jet head can be obtained by forming ink discharging orifices by press working of a plate body with a multilayer structure.
  • the metal layer 709 as described below is demanded to have high uniformity, smoothness, etc.
  • Formation of the resin layer pattern 708a can be performed by laminating a photosensitive resin layer 708 on the surface of the substrate 707 as shown in Fig. 38B, then exposing the photosensitive resin layer 708 through a desired pattern to light, or spot irradiating the photosensitive resin layer 708 in a desired pattern, and developing the photosensitive resin layer 708 after exposure, thereby leaving the pattern of the resin layer 708a to remain on the substrate surface.
  • the method utilizing photolithography as described above is not limitative, but other various methods can be used.
  • a metal layer 709 which is the constituent material of the discharging orifice plate is formed by electroforming, and then water repellent treatment is applied on the metal layer 709 surface as shown in Fig. 38E to form the layer 710 of water repellent treatment agent.
  • a material having necessary rigidity and satisfactory characteristics to ink may be suitably selected and used for the discharging orifice plate.
  • nickel, etc. can be utilized.
  • the conditions for obtaining good water repellent treatment effect may be set.
  • the metal layer 709 is peeled off from the surface of the substrate 707 to provide a metal plate (Fig. 38F).
  • the resin 708a is treated with an appropriate liquid for dissolution and removal thereof to remove the resin 708a from the metal plate 709, thereby forming a void portion (thru-hole) for forming the discharging orifice from which the resin 708a, is withdrawn to obtain a discharging orifice plate (Fig. 38H).
  • the method for applying the water repellent treatment agent onto the metal layer 709 surface and forming the adhesive layer 711 other than the coating method as described above, there can be utilized the method in which the metal layer is peeled off previously from the substrate to be taken out as the plate before performing the water repellent treatment, one surface of said plate is sprayed with the water repellent treatment agent, while the other surface with an adhesive (711) either with a time difference or simultaneously; the method in which a water repellent treatment agent layer formed on an appropriate base material such as Mylar film, etc. is superposed on one surface of said plate, pressed with rollers, etc., and further a water repellent treatment agent formed on an appropriate base material such as Mylar film, etc.
  • the discharging orifice plate thus obtained has one surface subjected to the water repellent treatment and the other surface having an adhesive layer which can be utilized for bonding to a bonding member having liquid channels, etc. formed thereon which becomes the ink passage for formation of ink jet recording head.
  • the water repellent treatment will not extend to the portion which becomes the orifice inner surface. Besides, due to the presence of the resin 708, formation of the adhesive layer 711 can be done more easily.
  • a dry film (Laminate HG, manufactured by Dinachem) was laminated and pattern exposure and developing processing were applied on said laminate film (thickness 25 ⁇ m) to form spot-like resin layers arranged corresponding to the arrangements of the discharging orifices.
  • nickel plating was effected on the spot-like resin layer formed surfaces on the electroconductive substrate to form a nickel plated layer (thickness 20 ⁇ m) .
  • a solution of a fluorosilicon type KP-801 (trade name) manufactured by Shinetsu Kagaku as the water repellent agent dissolved at a ratio of 0.01 % by weight dissolved in Difreon S3 (trade name, manufactured by Daikin Kogyo) was prepared, coated on the nickel plated layer surface on the electroconductive substrate by the spin coating method, followed by drying of the coated layer (thickness 1 ⁇ m or less) by the heating treatment under the conditions of 150 °C, 2 hours, to effect the water repellent treatment.
  • the electroconductive substrate and the nickel plated layer were peeled off to give a nickel plate.
  • an adhesive Takelite xP-405/xH-8901b, manufactured by Takeda Seiyaku
  • an adhesive layer thickness 2 ⁇ m
  • a Mylar film was laminated on said adhesive layer, followed by treatment with an aqueous 3 - 4 % sodium hydroxide solution and removal of the dry film from the nickel plate, to give a discharging orifice plate.
  • the Mylar film on the discharging orifice plate obtained was peeled off to have the adhesive layer exposed, and bonded to the main recording head portion having an energy generating member generating energy used for ink discharging, a discharging signal applying means onto the energy generating member, ink channels, etc. formed on a substrate as shown in Fig. 5 to prepare an ink jet recording head.
  • the slippage angle from the predetermined discharging direction is 1° at the maximum, and also no nondischarging occurred because there was no progress of the water repellent into the inner portion of the discharging orifice.
  • discharging was performed for a long time, there was no unnecessary pooling of ink on the surface, whereby stable discharging could be persisted.
  • Example c After a discharging orifice plate was obtained in the same manner as in Example c except for using the product obtained by sputtering an aluminum coating layer on a Si substrate surface as the substrate for formation of the discharging orifice plate, an ink jet recording head was prepared.
  • the heater 108 can be formed by use of the same material as the heat generating resistance layer of the discharging heater 105 (e.g. HfB 2 ), it may be also formed by use of other materials constituting the heater board, such as aluminum, tantalum, titanium, etc.
  • Fig. 39 shows a constitutional example of the ceiling plate material for constituting the ceiling plate 400 according to another background example.
  • the ceiling plate material 400' is made to have a desired number of ink channel grooves 411, 412, ... (two in the Figure for brevity) and an orifice plate portion 404 provided integrally.
  • the ceiling plate material 400' is simultaneously molded integrally together with the orifice plate portion 404 by use of a resin excellent ink resistance such as polysulfone, polyethersulfone, polyphenyleneoxide, polypropylene, etc.
  • the orifice plate portion 404 may be also formed of the same resin material as the main body portion of the ceiling plate material 400' or another kind of resin material, which may be prepared separated from the main portion of the ceiling plate material 400' and inserted into the mold for insert molding.
  • the resin can be molded with a mold having a reverse pattern thereto formed by such method as cutting, etc., whereby the flow channel grooves 411, 412 can be formed on the ceiling plate 400.
  • the orifice plate 404 having thus integrally molded has a thickness of about 50 to 100 ⁇ m in molding. Although the orifice can be also formed under this state, but practically the flow channel length of that portion should be desirably 20 ⁇ m or less. This is because, if the flow channel length from the discharge heater 101A is large, discharging performance is influenced thereby. Accordingly, in this example, particularly the portion over the range where orifices to be formed are arranged corresponding to the grooves 411, 412 of the orifice plate portion 404 is worked to be made thin before formation of the orifices. In this example, excimer laser was used for working.
  • Fig. 40 is a schematic illustration of a device for performing working by use of such excimer laser.
  • 450 is an excimer laser oscillator (in this exmaple, it is made a Kr-F excimer laser oscillator)
  • 451 is a lens of, for example, f value of 500 mm for converging laser beam 452.
  • 453 is a mask comprising a plate of Al, etc. with a thickness of, for exmaple, 1 mm having a hole pattern corresponding to the worked portion.
  • the ceiling plate material 400' is arranged adequately so that the surface to be worked may be irradiated by laser beam through the lens 451 and the mask 453.
  • the laser beam emitted from the Kr-F excimer laser oscillator 450 is irradiated on the orifice plate 404 through the mask 453 having a hold of, for example, rectangular shape formed thereon.
  • the orifice plate 404 becomes thin by working only of the portion where irradiated with excimer laser.
  • Fig. 41A exhibits such state, where 465 is the grooved portion made thin by said working. At this time by controlling adequately the strength of laser and the working time, the thickness of that portion could be made about 10 to 20 ⁇ m.
  • the orifice plate 404 is subjected to the liquid repellant treatment, because the surface having liquid repellancy has the effect to wetting of unnecessary ink, etc.
  • the liquid repellant DEFENSA from Dainippon Ink diluted with Difreon S-3 from Daikin to 1 % is coated.
  • UV-ray irradiation is effected.
  • orifices corresponding to flow channels are formed by working with excimer laser. This can be done by replacing the mask having formed the holes corresponding to the orifices with the above mask in Fig. 40. After replacement, registration is effected, lowered by irradiation of laser to form orifices 406. Thus, the ceiling plate 400 as shown in Fig. 41B can be received. In Fig. 41B, for brevity, 4 orifices (or flow channels) are provided.
  • grooves 411, 412 for flow channel formation and the common liquid chamber portion may be also worked with excimer laser, or these may be also worked after formation of the discharging outlet (orifice) portions. Also, when the length of the flow channel length in front of the discharging heater poses no problem, the orifice plate portion 404 is not necessarily made thin depending on the constitution.
  • the heater board 100 is abutted against the orifice plate 404 as shown by the chain line to be bonded thereto, thereby giving a main recording head.
  • the position can be determined of the flow channel direction by abutting the heater board 100 against the end surface on the opposite side to the end surface on the discharging side of the orifice plate portion 404 during bonding of the heater board 100 and the ceiling plate 400 integrally made with the orifice plate portion 404, the whole registration step and assembling step can be made easier. In addition, there is also no fear of peel-off of the orifice plate as in the prior art.
  • Fig. 42 shows another background example of the present invention in which orifice working is performed by excimer laser beam on the orifice plate formed integrally with the ceiling plate, and the same elements as those shown in Fig. 40 are attached with the same symbols.
  • 450 is a laser oscillating device for oscillating KrF excimer laser beam, 452 a pulse laser beam with a wavelength of 248 mm and a pulse width of about 15 nsec oscillated from the laser oscillating device 451, 453 a synthetic quartz lens for converging the laser beam 452, 454 a projection mask having aluminum capable of shielding the laser beam 452 vapor deposited thereon, on which a plurality of holes of 133 ⁇ m in diameter are arranged at a pitch of 212 ⁇ m to constituted an orifice pattern.
  • Fig. 43A shows a constitutional example of the ceiling plate 457 according to this example.
  • the ceiling plate 457 is made to have a desired number of ink channel grooves 464 and ink discharging orifices 466 formed on the orifice plate 460 corresponding thereto (two in the Figure for brevity) and an orifice plate portion 10 provided integrally.
  • the ceiling plate material 457 is simultaneously molded integrally together with the orifice plate 460 by use of a resin excellent in ink resistance such as polysulfone, polyethersulfone, polyphenyleneoxide, polypropylene, etc.
  • a resin can be molded with a mold having a fine groove of reverse pattern thereto by such method as cutting, etc., and with the use of the mold, liquid channel groove 464 can be formed on the ceiling plate 457.
  • orifice within the mold, molding is effected under the state having no orifice 466 and excimer laser beam is irradiated by a laser device on the positions where orifices are to be formed from the ink channel side on the orifice plate 10 as explained in Fig. 42, followed by removal and evaporation of the resin, to form orifices 466.
  • Fig. 43B The details of orifice formation are shown in Fig. 43B.
  • the excimer laser beam 452 is irradiated on the orifice plate 460 through the mask 454 as described above from the ink channel side 464.
  • the cross-sectional area of the orifice having a tapered shape becomes reduced toward the discharging direction.
  • Fig. 44 is a perspective view of the main recording head constituted by bonding of the heater board 458 and the ceiling plate 457 as described above.
  • the heater board 458 having the discharging heater 101A, etc. is bonded to the orifice plate 460 to obtain the main recording head.
  • the position can be determined of the flow channel direction by abutting the heater board 458 against the end surface on the opposite side to the end surface on the discharging side of the orifice plate 460 during bonding of the heater board 458 and the ceiling plate 460 integrally made with the orifice plate 460, the whole registration step and assembling step can be made easier. In addition, there is also no fear of peel-off of the orifice plate as in the prior art.
  • Figs. 45A and 45B show another background example of the present invention, and are respectively a perspective view and a sectional view of a ceiling plate having an orifice plate integral formed therewith.
  • This example has made the irradiation angle, namely ⁇ 2 as described above 45° corresponding to the shapes of the ceiling plate and the orifice plate.
  • ⁇ 2 the irradiation angle
  • the discharging speed is increased to two-fold or more, and consequently the shooting position precision of droplet can be improved to give good recording result.
  • the volume of discharged liquid is understood to become larger, and this gives better result to the recording density.
  • the orifice plate and the ceiling are integrally combined, but application of the present invention is not limited thereto, but the desired effect can be of course obtained by bonding separately to the ceiling plate, and then applying the orifice working as described above thereon.
  • Fig. 47 is a perspective view showing one example of ceiling plate 400 shown in Fig. 7, representing the groove 403 for common liquid chamber and the groove 402 (dotted line) for ink channel, and the ceiling plate 400 is a resin molding.
  • the resin material polyether sulfone, polyether ether ketone excellent in ink resistance can be used. Molding of the ceiling plate 400 is performed by use of a commercially available injection molding machine and a mold forming a pair with the shape shown in Fig. 47.
  • the excimer laser used in this example is KrF excimer laser and also Arf excimer laser can be used.
  • the mask material a quartz substrate is used and the opaque portion 714 of the mask 453 is formed by Cr vapor deposition.
  • the width 703 of the ink channel groove is made 32 ⁇ m corresponding to the constitution having 16 discharging outlets per 1 mm, and width 704 of the non-groove portion is made 31.5 ⁇ m.
  • the dry film surface of the film and the ceiling plate-heater board are pushed against each other under a pressure of 2 to 10 kg/cm 2 for 1 to 10 seconds to be bonded together.
  • the composite is cooled gradually to room temperature (about 25 °C), followed by separation of the film from the ceiling-heater board.
  • the dry film which becomes the orifice plate is separated from the other protective film of Mylar film to be bonded to the ceiling-heater board.
  • UV-ray is irradiated on the bonded dry film surface to effect curing of the film, and the recording head (ceiling plate-heater board-orifice plate) is fixed at a predetermined position comprising the constitution shown in Fig.
  • the principal part of the recording head prepared as described above is constituted as shown in Fig. 56.
  • the angle ⁇ of the discharging orifice 805 formed on the orifice plate 802 differs for each liquid channel 804, whereby the droplet will fly with curving of the discharging direction 807 for each discharging orifice 805 in substantially the same angle as the discharging orifice angle.
  • the recorded dot pitch d formed on the surface to be recorded 806 can be made smaller than the liquid channel pitch d' of the recording head.
  • the above-mentioned incident angle may be different from the angle formed between the plane which is vertical to the above-mentioned discharging orifice surface and formed between the direction in which above discharging orifices are juxtaposed and the direction in which the ink is discharged from the above discharging orifices, and the above discharging orifice surface.
  • Fig. 60 shows a background example which bonds or fixes the heater board 100 and the ceiling plate 400.
  • the orifice plate portion 404 of the ceiling plate 400 is shown by the chain line, and showing of the wiring pattern on the heater board 100 is omitted.
  • the registration of the heater board 100 and the ceiling plate 400 is performed by abutting the end surface of the heater board 100 against the orifice plate portion 404, and in bonding of these, the adhesive 405 was coated along the 3 sides of the peripheral portion of the ceiling plate 400. By doing so, flowing of the adhesive into the ink flow channel could be inhibited. Further, it is also possible to permit an adhesive to exist over a suitable range in necessary and sufficient amount at the bonding surface between the heater board 100 and the orifice plate 404.
  • the coating step of the adhesive can be simplified. Also when slippage occurred during registration in the prior art, there was a fear of sticking of adhesive to the flow channel portion at the discharging heater 105, etc. of the heater board 100, or occurrence of defective product by clogging of the flow channel or discharging outlet with adhesive, but no such phenomenon occurs in this example, and registration can be done for many times. Further, presence of more or less deformation, warping or variance in product in the ceiling plate by use of a resin material is permissible and therefore the manufacturing steps can become simple.
  • the structure is made to obtain sufficient adhesion by applying pressure with a plate spring 500 in flat shape from the upper surface of the ceiling plate 400 under the state where the main recording head comprising the heater board 100 and the ceiling plate 400 is bonded to the support 300.
  • the plate spring 500 is further pressurized by another member of the upper part (e.g. feeding tank 600 in Fig. 7).
  • This ink discharged by the recording head reaches a recording medium 18 with the recording surface regulated by a platen 9 to form an image on the recording medium 18.
  • the main recording head the ink supplying source, etc. are made integral and disposable, but the both may be separate bodies, and each is not necessarily required to be made disposable. This is because, even the main recording head may be the fixed type without the condition of simple exchange, simple and inexpensive constitution as described above will also constitute to the reduction in cost of the main printer.
  • the present invention is effective for a recording head of the freely exchangeable chip type which enables electrical connection to the main device or supply of ink from the main device by being mounted on the main device, or for the case by use of a recording head of the cartridge type provided integrally on the recording head itself.
  • the orifice on the orifice plate with high density, in high accuracy and under accurate positioning relative to the ink path or the like.
  • the mask member properly, more small or fine plural orifices can be manufactured together, so the ink jet recording head can be manufactured simply and in low cost. Additionally, realization of high accuracy can improve character of the image to be recorded.
  • the water repellent treatment of the outer surface of the discharge opening plate is carried out securely and effectively by simple method which adds the applying process of the water repellent treatment agent during the manufacturing process of the discharge opening plate, which enables to realize the discharge opening plate of high quality which has been made water repellent treatment in low cost.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP99200740A 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head Expired - Lifetime EP0937579B1 (en)

Applications Claiming Priority (22)

Application Number Priority Date Filing Date Title
JP27580088 1988-10-31
JP27579788A JPH02121842A (ja) 1988-10-31 1988-10-31 インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法
JP27579488A JPH02121843A (ja) 1988-10-31 1988-10-31 液体噴射記録ヘッドおよび該ヘッドの製造方法
JP63275800A JP2771557B2 (ja) 1988-10-31 1988-10-31 インクジェット記録ヘッドの製造方法
JP27579488 1988-10-31
JP27579788 1988-10-31
JP1007403A JP2763563B2 (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッドの製造方法
JP741089 1989-01-13
JP741089A JP2633943B2 (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッドおよび該ヘッドの製造方法
JP1007470A JP2831368B2 (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッド用吐出口形成部材の製造方法
JP747089 1989-01-13
JP740389 1989-01-13
JP740989 1989-01-13
JP740989A JPH02187345A (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッドおよび該ヘッドの製造方法
JP918189 1989-01-18
JP918489 1989-01-18
JP918489A JPH02188257A (ja) 1989-01-18 1989-01-18 インクジェットヘッドの製造方法
JP918189A JPH02188255A (ja) 1989-01-18 1989-01-18 吐出口板の製造方法
JP1807989 1989-01-28
JP1018079A JP2764418B2 (ja) 1989-01-28 1989-01-28 インクジェット記録ヘッドの製造方法および該方法によって製造されたインクジェット記録ヘッド
EP19890311199 EP0367541B1 (en) 1988-10-31 1989-10-30 Method of manufacturing an ink jet head
EP94200483A EP0602021A2 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP94200483A Division EP0602021A2 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head

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EP0937579A2 EP0937579A2 (en) 1999-08-25
EP0937579A3 EP0937579A3 (en) 1999-11-03
EP0937579B1 true EP0937579B1 (en) 2003-10-08

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EP99200740A Expired - Lifetime EP0937579B1 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head
EP94200483A Withdrawn EP0602021A2 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head
EP19890311199 Expired - Lifetime EP0367541B1 (en) 1988-10-31 1989-10-30 Method of manufacturing an ink jet head

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EP19890311199 Expired - Lifetime EP0367541B1 (en) 1988-10-31 1989-10-30 Method of manufacturing an ink jet head

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EP (3) EP0937579B1 (enrdf_load_stackoverflow)
DE (2) DE68918663T2 (enrdf_load_stackoverflow)
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DE68918663T2 (de) 1995-03-16
EP0367541B1 (en) 1994-10-05
DE68929489D1 (de) 2003-11-13
ES2207908T3 (es) 2004-06-01
DE68918663D1 (de) 1994-11-10
EP0937579A2 (en) 1999-08-25
EP0602021A3 (enrdf_load_stackoverflow) 1994-08-31
ES2060789T3 (es) 1994-12-01
EP0367541A2 (en) 1990-05-09
DE68929489T2 (de) 2004-08-19
EP0367541A3 (en) 1990-11-14
EP0937579A3 (en) 1999-11-03
EP0602021A2 (en) 1994-06-15

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