EP0820217A1 - Composition et procédé pour le remplissage de trous de contact - Google Patents
Composition et procédé pour le remplissage de trous de contact Download PDFInfo
- Publication number
- EP0820217A1 EP0820217A1 EP97110015A EP97110015A EP0820217A1 EP 0820217 A1 EP0820217 A1 EP 0820217A1 EP 97110015 A EP97110015 A EP 97110015A EP 97110015 A EP97110015 A EP 97110015A EP 0820217 A1 EP0820217 A1 EP 0820217A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- copper
- composition
- substrate
- silver
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
- H05K1/095—Dispersed materials, e.g. conductive pastes or inks for polymer thick films, i.e. having a permanent organic polymeric binder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
- H05K3/4069—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in organic insulating substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0355—Metal foils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0548—Masks
- H05K2203/0554—Metal used as mask for etching vias, e.g. by laser ablation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/245—Reinforcing conductive patterns made by printing techniques or by other techniques for applying conductive pastes, inks or powders; Reinforcing other conductive patterns by such techniques
- H05K3/246—Reinforcing conductive paste, ink or powder patterns by other methods, e.g. by plating
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/683,351 US5744285A (en) | 1996-07-18 | 1996-07-18 | Composition and process for filling vias |
US683351 | 1996-07-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0820217A1 true EP0820217A1 (fr) | 1998-01-21 |
EP0820217B1 EP0820217B1 (fr) | 2003-01-22 |
Family
ID=24743659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP97110015A Expired - Lifetime EP0820217B1 (fr) | 1996-07-18 | 1997-06-19 | Composition et procédé pour le remplissage de trous de contact |
Country Status (7)
Country | Link |
---|---|
US (1) | US5744285A (fr) |
EP (1) | EP0820217B1 (fr) |
JP (1) | JP3338336B2 (fr) |
KR (1) | KR100266891B1 (fr) |
CN (1) | CN1123280C (fr) |
DE (1) | DE69718567T2 (fr) |
TW (1) | TW373419B (fr) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000062586A1 (fr) * | 1999-04-14 | 2000-10-19 | Allied Photochemical, Inc. | Composition d'argent durcissable par ultraviolets et procede correspondant |
US6500877B1 (en) | 1999-11-05 | 2002-12-31 | Krohn Industries, Inc. | UV curable paint compositions and method of making and applying same |
US6509389B1 (en) | 1999-11-05 | 2003-01-21 | Uv Specialties, Inc. | UV curable compositions for producing mar resistant coatings and method for depositing same |
WO2003019998A1 (fr) * | 2001-08-24 | 2003-03-06 | E. I. Du Pont De Nemours And Company | Pate electro-conductrice thermodurcissable destinee a etre utilisee pour former des bosses electro-conductrices |
US6716893B2 (en) | 2000-01-13 | 2004-04-06 | Uv Specialties, Inc. | UV curable ferromagnetic compositions |
US6767577B1 (en) | 1999-10-06 | 2004-07-27 | Allied Photochemical, Inc. | Uv curable compositions for producing electroluminescent coatings |
US6784223B2 (en) | 2000-01-13 | 2004-08-31 | Allied Photochemical, Inc. | UV curable transparent conductive compositions |
US6805917B1 (en) | 1999-12-06 | 2004-10-19 | Roy C. Krohn | UV curable compositions for producing decorative metallic coatings |
EP2824672A1 (fr) * | 2013-07-09 | 2015-01-14 | Heraeus Precious Metals GmbH & Co. KG | Pâte électroconductrice comprenant des particules Ag avec une répartition de diamètre multimodal dans la préparation d'électrodes pour cellules solaire MWT |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6255039B1 (en) * | 1997-04-16 | 2001-07-03 | Isola Laminate Systems Corp. | Fabrication of high density multilayer interconnect printed circuit boards |
US6276055B1 (en) * | 1998-09-02 | 2001-08-21 | Hadco Santa Clara, Inc. | Method and apparatus for forming plugs in vias of a circuit board layer |
US6592943B2 (en) | 1998-12-01 | 2003-07-15 | Fujitsu Limited | Stencil and method for depositing solder |
US6054761A (en) * | 1998-12-01 | 2000-04-25 | Fujitsu Limited | Multi-layer circuit substrates and electrical assemblies having conductive composition connectors |
TW409490B (en) * | 1998-12-31 | 2000-10-21 | World Wiser Electronics Inc | The equipment for plug hole process and the method thereof |
US6169125B1 (en) * | 1999-01-11 | 2001-01-02 | Dymax Corporation | Electrically conductive resinous material and radiation curable formulation for producing the same |
US6218446B1 (en) * | 1999-01-11 | 2001-04-17 | Dymax Corporation | Radiation curable formulation for producing electrically conductive resinous material, method of use, and article produced |
US6326555B1 (en) | 1999-02-26 | 2001-12-04 | Fujitsu Limited | Method and structure of z-connected laminated substrate for high density electronic packaging |
JP4345153B2 (ja) * | 1999-09-27 | 2009-10-14 | ソニー株式会社 | 映像表示装置の製造方法 |
TW512467B (en) * | 1999-10-12 | 2002-12-01 | North Kk | Wiring circuit substrate and manufacturing method therefor |
DE10196259T1 (de) | 2000-05-31 | 2003-05-15 | Honeywell Int Inc | Füllverfahren |
US6855385B2 (en) * | 2000-05-31 | 2005-02-15 | Ttm Advanced Circuits, Inc. | PCB support plate for PCB via fill |
KR20030007753A (ko) * | 2000-05-31 | 2003-01-23 | 허니웰 인터내셔날 인코포레이티드 | 채움 방법 |
US6800232B2 (en) * | 2000-05-31 | 2004-10-05 | Ttm Advanced Circuits, Inc. | PCB support plate method for PCB via fill |
US6454154B1 (en) | 2000-05-31 | 2002-09-24 | Honeywell Advanced Circuits, Inc. | Filling device |
US6506332B2 (en) | 2000-05-31 | 2003-01-14 | Honeywell International Inc. | Filling method |
US6589594B1 (en) * | 2000-08-31 | 2003-07-08 | Micron Technology, Inc. | Method for filling a wafer through-via with a conductive material |
US6931723B1 (en) * | 2000-09-19 | 2005-08-23 | International Business Machines Corporation | Organic dielectric electronic interconnect structures and method for making |
US6593534B2 (en) * | 2001-03-19 | 2003-07-15 | International Business Machines Corporation | Printed wiring board structure with z-axis interconnections |
JP3907062B2 (ja) * | 2002-05-21 | 2007-04-18 | 株式会社ダイワ工業 | 層間接続構造及びその形成方法 |
US6600645B1 (en) * | 2002-09-27 | 2003-07-29 | Ut-Battelle, Llc | Dielectric composite materials and method for preparing |
US20050056365A1 (en) * | 2003-09-15 | 2005-03-17 | Albert Chan | Thermal interface adhesive |
EP1622435A1 (fr) * | 2004-07-28 | 2006-02-01 | ATOTECH Deutschland GmbH | Méthode de fabrication d'un dispositif par des techniques d'écriture directe |
KR100632560B1 (ko) * | 2004-08-05 | 2006-10-09 | 삼성전기주식회사 | 병렬적 인쇄회로기판 제조 방법 |
US7452568B2 (en) * | 2005-02-04 | 2008-11-18 | International Business Machines Corporation | Centrifugal method for filing high aspect ratio blind micro vias with powdered materials for circuit formation |
JP5021216B2 (ja) * | 2006-02-22 | 2012-09-05 | イビデン株式会社 | プリント配線板およびその製造方法 |
US20070212865A1 (en) * | 2006-03-08 | 2007-09-13 | Craig Amrine | Method for planarizing vias formed in a substrate |
US20080057233A1 (en) * | 2006-08-29 | 2008-03-06 | Harrison Daniel J | Conductive thermal transfer ribbon |
JP5350384B2 (ja) | 2007-09-13 | 2013-11-27 | ヘンケル・アクチェンゲゼルシャフト・ウント・コムパニー・コマンディットゲゼルシャフト・アウフ・アクチェン | 導電性組成物 |
US8205971B2 (en) * | 2010-01-19 | 2012-06-26 | Xerox Corporation | Electrically grounded inkjet ejector and method for making an electrically grounded inkjet ejector |
US9365947B2 (en) | 2013-10-04 | 2016-06-14 | Invensas Corporation | Method for preparing low cost substrates |
JP6406598B2 (ja) * | 2014-07-24 | 2018-10-17 | 学校法人福岡大学 | プリント配線板及びその製造方法 |
US9820386B2 (en) * | 2016-03-18 | 2017-11-14 | Intel Corporation | Plasma etching of solder resist openings |
CN112714552B (zh) * | 2020-11-30 | 2022-07-29 | 惠州市特创电子科技股份有限公司 | 线路板及其棕化方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4383363A (en) * | 1977-09-01 | 1983-05-17 | Sharp Kabushiki Kaisha | Method of making a through-hole connector |
JPS6431874A (en) * | 1987-07-29 | 1989-02-02 | Sumitomo Bakelite Co | Electroconductive resin paste for semiconductor |
JPH0198674A (ja) * | 1987-10-09 | 1989-04-17 | Daido Steel Co Ltd | 導電性組成物 |
JPH01143292A (ja) * | 1987-11-27 | 1989-06-05 | Matsushita Electric Ind Co Ltd | プリント配線板の製造方法 |
US5156772A (en) * | 1988-05-11 | 1992-10-20 | Ariel Electronics, Inc. | Circuit writer materials |
EP0651602A1 (fr) * | 1993-10-29 | 1995-05-03 | Matsushita Electric Industrial Co., Ltd. | Composition d'une pâte conductrice pour le remplissage de trous de contact, plaque de circuit imprimé en utilisant cette pâte conductrice, et procédé de sa production |
JPH08138437A (ja) * | 1994-11-04 | 1996-05-31 | Hitachi Chem Co Ltd | 導電性材料及びそれを用いた導電性ペースト |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3971610A (en) * | 1974-05-10 | 1976-07-27 | Technical Wire Products, Inc. | Conductive elastomeric contacts and connectors |
US3989644A (en) * | 1974-09-27 | 1976-11-02 | General Electric Company | Radiation curable inks |
FR2593346B1 (fr) * | 1986-01-17 | 1990-05-25 | Nec Corp | Substrat de cablage utilisant une ceramique comme isolant |
JPH04196290A (ja) * | 1990-11-27 | 1992-07-16 | Matsushita Electric Works Ltd | 多層積層板の製造方法 |
JP3057924B2 (ja) * | 1992-09-22 | 2000-07-04 | 松下電器産業株式会社 | 両面プリント基板およびその製造方法 |
US5386627A (en) * | 1992-09-29 | 1995-02-07 | International Business Machines Corporation | Method of fabricating a multi-layer integrated circuit chip interposer |
-
1996
- 1996-07-18 US US08/683,351 patent/US5744285A/en not_active Expired - Lifetime
-
1997
- 1997-04-29 TW TW086105675A patent/TW373419B/zh not_active IP Right Cessation
- 1997-06-19 DE DE69718567T patent/DE69718567T2/de not_active Expired - Fee Related
- 1997-06-19 EP EP97110015A patent/EP0820217B1/fr not_active Expired - Lifetime
- 1997-07-16 KR KR1019970033023A patent/KR100266891B1/ko not_active IP Right Cessation
- 1997-07-18 JP JP19448997A patent/JP3338336B2/ja not_active Expired - Fee Related
- 1997-07-18 CN CN97114736A patent/CN1123280C/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4383363A (en) * | 1977-09-01 | 1983-05-17 | Sharp Kabushiki Kaisha | Method of making a through-hole connector |
JPS6431874A (en) * | 1987-07-29 | 1989-02-02 | Sumitomo Bakelite Co | Electroconductive resin paste for semiconductor |
JPH0198674A (ja) * | 1987-10-09 | 1989-04-17 | Daido Steel Co Ltd | 導電性組成物 |
JPH01143292A (ja) * | 1987-11-27 | 1989-06-05 | Matsushita Electric Ind Co Ltd | プリント配線板の製造方法 |
US5156772A (en) * | 1988-05-11 | 1992-10-20 | Ariel Electronics, Inc. | Circuit writer materials |
EP0651602A1 (fr) * | 1993-10-29 | 1995-05-03 | Matsushita Electric Industrial Co., Ltd. | Composition d'une pâte conductrice pour le remplissage de trous de contact, plaque de circuit imprimé en utilisant cette pâte conductrice, et procédé de sa production |
JPH08138437A (ja) * | 1994-11-04 | 1996-05-31 | Hitachi Chem Co Ltd | 導電性材料及びそれを用いた導電性ペースト |
Non-Patent Citations (4)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 13, no. 221 (C - 598) 23 May 1989 (1989-05-23) * |
PATENT ABSTRACTS OF JAPAN vol. 13, no. 313 (C - 618) 17 July 1989 (1989-07-17) * |
PATENT ABSTRACTS OF JAPAN vol. 13, no. 396 (E - 815) 4 April 1989 (1989-04-04) * |
PATENT ABSTRACTS OF JAPAN vol. 96, no. 9 30 September 1996 (1996-09-30) * |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000062586A1 (fr) * | 1999-04-14 | 2000-10-19 | Allied Photochemical, Inc. | Composition d'argent durcissable par ultraviolets et procede correspondant |
US6290881B1 (en) | 1999-04-14 | 2001-09-18 | Allied Photochemical, Inc. | Ultraviolet curable silver composition and related method |
US6767577B1 (en) | 1999-10-06 | 2004-07-27 | Allied Photochemical, Inc. | Uv curable compositions for producing electroluminescent coatings |
US6500877B1 (en) | 1999-11-05 | 2002-12-31 | Krohn Industries, Inc. | UV curable paint compositions and method of making and applying same |
US6509389B1 (en) | 1999-11-05 | 2003-01-21 | Uv Specialties, Inc. | UV curable compositions for producing mar resistant coatings and method for depositing same |
US6805917B1 (en) | 1999-12-06 | 2004-10-19 | Roy C. Krohn | UV curable compositions for producing decorative metallic coatings |
US6716893B2 (en) | 2000-01-13 | 2004-04-06 | Uv Specialties, Inc. | UV curable ferromagnetic compositions |
US6784223B2 (en) | 2000-01-13 | 2004-08-31 | Allied Photochemical, Inc. | UV curable transparent conductive compositions |
WO2003019998A1 (fr) * | 2001-08-24 | 2003-03-06 | E. I. Du Pont De Nemours And Company | Pate electro-conductrice thermodurcissable destinee a etre utilisee pour former des bosses electro-conductrices |
US6800223B2 (en) | 2001-08-24 | 2004-10-05 | E. I. Du Pont De Nemours And Company | Thermosetting electroconductive paste for electroconductive bump use |
EP2824672A1 (fr) * | 2013-07-09 | 2015-01-14 | Heraeus Precious Metals GmbH & Co. KG | Pâte électroconductrice comprenant des particules Ag avec une répartition de diamètre multimodal dans la préparation d'électrodes pour cellules solaire MWT |
WO2015003807A1 (fr) * | 2013-07-09 | 2015-01-15 | Heraeus Precious Metals Gmbh & Co. Kg | Pâte électroconductrice contenant des particules d'ag présentant une distribution de diamètres plurimodale, pour la préparation d'électrodes dans des cellules solaires mwt |
Also Published As
Publication number | Publication date |
---|---|
DE69718567T2 (de) | 2003-11-27 |
US5744285A (en) | 1998-04-28 |
JP3338336B2 (ja) | 2002-10-28 |
KR100266891B1 (ko) | 2000-09-15 |
DE69718567D1 (de) | 2003-02-27 |
CN1171602A (zh) | 1998-01-28 |
KR980013551A (ko) | 1998-04-30 |
CN1123280C (zh) | 2003-10-01 |
EP0820217B1 (fr) | 2003-01-22 |
JPH10107431A (ja) | 1998-04-24 |
TW373419B (en) | 1999-11-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0820217B1 (fr) | Composition et procédé pour le remplissage de trous de contact | |
EP0955795B1 (fr) | Pâte conductrice pour le remplissage de trous de contact, plaques à circuit imprimé à double face et multicouche en l'utilisant, et son procédé de production | |
EP0653904B1 (fr) | Compositions pour le remplissage de trous d'interconnexion pour l'attachement direct de dispositifs et procédés de leur application | |
US6127025A (en) | Circuit board with wiring sealing filled holes | |
KR930000776B1 (ko) | 도전성 조성물 및 그의 제조방법 | |
KR100463434B1 (ko) | 매립된 레지스터를 갖는 인쇄회로기판 및 이의 제조방법 | |
US6692664B2 (en) | Printed wiring board conductive via hole filler having metal oxide reducing capability | |
KR20010089702A (ko) | 다층프린트배선판 및 다층프린트배선판의 제조 방법 | |
JPS6140316A (ja) | 直接はんだ付け可能な導電性組成物 | |
JPH10256687A (ja) | ビアホール充填用導体ペースト組成物とそれを用いたプリント配線基板 | |
US7438969B2 (en) | Filling material, multilayer wiring board, and process of producing multilayer wiring board | |
KR100776725B1 (ko) | 열경화성 에폭시수지조성물과 그 성형체 및다층프린트배선판 | |
JP2002305367A (ja) | 高性能電子基板の開口を埋める方法及び部材 | |
JPH0759691B2 (ja) | アデイテイブ印刷配線板用接着剤 | |
JPH11181250A (ja) | スルーホール充填用ペースト及びそれを用いたプリント配線板 | |
JPH05175649A (ja) | 回路基板の製造方法 | |
JPH0575225A (ja) | 金属ベース印刷配線基板及びその製造方法 | |
JP3111010B2 (ja) | 導電性ペースト | |
JP2000082332A (ja) | ビア充填用導電ペ―スト組成物 | |
JPH05175650A (ja) | 回路基板の製造方法 | |
US6776852B2 (en) | Process of removing holefill residue from a metallic surface of an electronic substrate | |
JPH0426560B2 (fr) | ||
JPH0418642B2 (fr) | ||
JPH07307110A (ja) | 導電ペースト | |
JPH07262822A (ja) | 導電ペースト |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): DE FR GB |
|
AX | Request for extension of the european patent |
Free format text: AL;LT;LV;RO;SI |
|
17P | Request for examination filed |
Effective date: 19980219 |
|
AKX | Designation fees paid |
Free format text: DE FR GB |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB |
|
17Q | First examination report despatched |
Effective date: 19991112 |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): DE FR GB |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D |
|
REF | Corresponds to: |
Ref document number: 69718567 Country of ref document: DE Date of ref document: 20030227 Kind code of ref document: P |
|
ET | Fr: translation filed | ||
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed |
Effective date: 20031023 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20090617 Year of fee payment: 13 Ref country code: DE Payment date: 20090615 Year of fee payment: 13 |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20100619 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20110228 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20110101 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100630 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100619 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20090611 Year of fee payment: 13 |