EP0780881A2 - Lampe à décharge sans électrodes - Google Patents

Lampe à décharge sans électrodes Download PDF

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Publication number
EP0780881A2
EP0780881A2 EP96117127A EP96117127A EP0780881A2 EP 0780881 A2 EP0780881 A2 EP 0780881A2 EP 96117127 A EP96117127 A EP 96117127A EP 96117127 A EP96117127 A EP 96117127A EP 0780881 A2 EP0780881 A2 EP 0780881A2
Authority
EP
European Patent Office
Prior art keywords
discharge lamp
lamp according
radiation
diaphragm body
along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96117127A
Other languages
German (de)
English (en)
Other versions
EP0780881B1 (fr
EP0780881A3 (fr
Inventor
Ernst Dr. Smolka
Klaus-Jürgen Dr. Dietz
Franz Schilling
Anke Schnabl
Beate Herter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
Heraeus Noblelight GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Noblelight GmbH filed Critical Heraeus Noblelight GmbH
Publication of EP0780881A2 publication Critical patent/EP0780881A2/fr
Publication of EP0780881A3 publication Critical patent/EP0780881A3/fr
Application granted granted Critical
Publication of EP0780881B1 publication Critical patent/EP0780881B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Definitions

  • the invention relates to an electrodeless low-pressure discharge lamp, in the lamp bulb of which a plasma is formed by coupling in a high-frequency electromagnetic field and radiation generated by the plasma emerges from the bulb along a predetermined radiation axis, a narrowed part of the lamp bulb being in the region of the plasma as a continuous bore along the Exit axis is provided.
  • an electrodeless low-pressure discharge lamp in the lamp bulb of which a plasma is formed by coupling in a high-frequency electromagnetic field and radiation generated by the plasma emerges from the bulb; a diaphragm body made of high-temperature-resistant material is arranged in the area of the plasma, which contains an opening for constricting the plasma area, the diaphragm body having an optical axis through the opening, along which the radiation emerges.
  • the materials In order to achieve sufficiently high radiation flows and radiation densities in the plasma constriction in the high-frequency field, the materials have to tolerate high wall loads so that they do not decompose, melt, release impurities at temperatures of more than 1500 ° Kelvin, or even as a result of thermal shock during insertion and Shut off the lamps.
  • boron nitride is preferably used as the material for the diaphragm body.
  • an electrodeless high-frequency discharge spectral lamp which contains a hollow lamp bulb made of translucent material, the lamp bulb being divided into two parts, which are connected to one another by means of a capillary feedthrough, and with electromagnetic arrangements for excitation a discharge are provided within the metal vapor located in the piston.
  • the coupling of the electromagnetic energy for the discharge is maintained via a coil arrangement surrounding the lamp bulb, the actual ignition taking place via external electrodes.
  • the considerable ignition problems prove to be problematic, so that additional electrodes have to be provided in the outer region of the lamp bulb, which initiate the ignition; a directed radiation along a preferred beam axis is not provided.
  • the object of the invention is to realize a low-pressure discharge lamp, in particular a low-pressure gas discharge lamp with a continuous spectrum with the highest possible radiance with high radiation stability; Furthermore, a simple mechanical structure should also be achieved with small geometric dimensions, so that it can be used as a light source in spectrophotometers and HPLC detectors, in particular, a spectral range of wavelength ⁇ of 200-350 nm with high radiation stability is to be achieved.
  • the large spectral bandwidth in the continuum of the emitted radiation and the lack of impairment of the lamp atmosphere by introduced electrode material have proven to be advantageous; Furthermore, the simple geometric structure enables a very small size, so that the radiation source can possibly be applied to a printed circuit board.
  • the lamp 1 has a cylindrically symmetrical diaphragm body 2, the interior of which is divided into two sub-spaces 4 and 5 by a diaphragm 3. Both subspaces are connected to one another via an aperture 7 running along the cylinder axis 6.
  • the two subspaces 4 and 5 are each closed off on the end faces 8 and 9 of the diaphragm body 2, the end face 8 being closed by a cover 10 made of the material of the diaphragm body, but the end face 9 having an exit window 11 made of a material which is radiation-permeable to the radiation generated, through which the radiation emerges along axis 6.
  • Both end faces 8 and 9 are each provided with externally applied electrodes 13, 14, via which the excitation takes place by capacitive coupling of the energy into the interior of the lamp 1 in such a way that a plasma is generated in the subspaces 4, 5 and in the area of the aperture 7 is that is constricted in aperture 7 to increase the intensity.
  • the Flat circular electrode 14 is provided along axis 6 with a radiation exit opening 15 arranged adjacent to exit window 11.
  • the radiation exit window 11 consists of quartz glass
  • the connection between the window 11 and the panel body 2 is created with the aid of glass solder, with a hermetically sealed closure by heat treatment;
  • the diaphragm has a bore or diaphragm opening 7 with a diameter of 0.1 to 6 mm and has a length of 0.01 to 90 mm.
  • the discharge vessel of lamp 1 is filled with deuterium at a cold filling pressure of 1 to 100 mbar.
  • the outer diameter of the overall system consisting of electrode, discharge vessel and orifice is in the range from 5 to 80 mm.
  • aperture 3 fills the largest possible volume of the interior space consisting of subspaces 4 and 5.
  • Both the rear part of the diaphragm body 2 and the diaphragm 3 can be mirrored within the lamp 1 and serve as a reflector, this being possible, for example, by lining the surfaces with a reflecting ceramic or by means of a metallic coating or metallization of the surface.
  • the diaphragm body in such a way that it has an axially symmetrical reflector geometry, such as e.g. is in the form of a hollow cone or truncated cone or in the form of paraboloids or hyperboloids.
  • boron nitride, thorium oxide, beryllium oxide or polycrystalline diamonds as the material for the diaphragm body, these materials surviving high thermal wall loads and surviving at temperatures of more than 1500 ° Kelvin without impairment or deformation.
  • FIG. 2 shows a lamp 1 with a cylindrically symmetrical diaphragm body 2 ′, which, in contrast to the diaphragm body of FIG. 1, has an opening on its two end faces 8 and 9 along its optical axis 6, along the one through the diaphragm opening 7 leading cylinder axis 6, the two end faces 8 and 9 are each hermetically sealed by a radiation exit window 11 and 12;
  • the electrodes 13, 14, which are provided along the radiator axis 6 with openings 15, 16 for the beam exit, are located on the beam exit windows.
  • the subspaces 4 and 5 can be provided with a reflective inner surface, moreover it is also possible to give the two subspaces 4 and 5 a reflector geometry, for example in the form of a hollow cone or truncated cone or the inner surface of a Assign paraboloid.
  • the circuit arrangement shown in the block diagram is provided for electrical control;
  • the lamp symbolically represented under number 1 has on its end faces 8, 9 in each case an electrode 13, 14, which via an electrical control network 17 and a directional coupler 18 from a generator 19 - i.e. is capacitively excited by means of the electrodes 13, 14.
  • the generator 19 is available for delivering powers in the range from 10 to 100 watts, the upper frequency limit being approximately 2.45 gigahertz and the lower one being 0.01 MHz.
  • the directional coupler 18 is only used to decouple a measurement signal in order to optimize the control network 17.
  • the generator 19 is operated in the frequency range from 0.01 to 2450 megahertz, the directional coupler 18 located between the control network 17 and the generator 19 being connected to a vector voltmeter 20 for carrying out measurements.
  • the operation of the lamp in the frequency range 500 to 2450 megahertz has proven to be advantageous, the reactance of the lamp being the impedance of the supply line with the usual characteristic impedance of e.g. Approximates 50 ⁇ so that only small losses occur.
  • any frequencies can be used to control the lamp, with lower frequencies, e.g. a direct adjustment of the generator output impedance is possible in the range from 100 kHz to 500 MHz, so that small losses also occur here.
  • FIG. 4 shows as curve A the spectral energy distribution over the wavelength ⁇ when using the radiation arrangement according to the invention as a deuterium lamp.
  • the spatial radiation characteristic according to the invention is directed much more strongly than is the case with conventional deuterium lamps with a half-value width of over 36 °.
  • the range of the continuum has a maximum at approximately 220 nm, the emission being line-free in the range from approximately 180 nm to approximately 360 nm.
  • the electrically conductive diaphragm body is electrically insulated from the electrodes 13, 14 to avoid a short circuit, the electrical insulation of a first electrode 13 being effected by an annular insulating body 22, for example made of high-temperature-resistant ceramic material, such as aluminum oxide or aluminum nitride, while the second electrode 14 is insulated from the diaphragm body by the electrically insulating material of the exit window 11.
  • the outlet window and the insulating body are attached and sealed, for example, by gas solders.
  • This lamp can also be operated according to DE-OS 41 20 730 with deuterium with a cold filling pressure of 1 to 100 mbar, preferably at 9 mbar.
  • the opening in the diaphragm body 2 has a length in the range from 0.01 to 90 mm, the diaphragm opening 7 designed as a bore containing a diameter in the range from 0.1 to 6 mm. In practice, in spite of the expectation of eddy current fields in the diaphragm body 2, no excessive heating can be determined.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
EP96117127A 1995-12-20 1996-10-25 Lampe à décharge sans électrodes Expired - Lifetime EP0780881B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19547519A DE19547519C2 (de) 1995-12-20 1995-12-20 Elektrodenlose Entladungslampe
DE19547519 1995-12-20

Publications (3)

Publication Number Publication Date
EP0780881A2 true EP0780881A2 (fr) 1997-06-25
EP0780881A3 EP0780881A3 (fr) 1999-02-10
EP0780881B1 EP0780881B1 (fr) 2002-05-22

Family

ID=7780615

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96117127A Expired - Lifetime EP0780881B1 (fr) 1995-12-20 1996-10-25 Lampe à décharge sans électrodes

Country Status (4)

Country Link
US (1) US5814951A (fr)
EP (1) EP0780881B1 (fr)
JP (1) JP3217001B2 (fr)
DE (2) DE19547519C2 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19909631A1 (de) * 1999-03-05 2000-09-14 Heraeus Noblelight Gmbh Tragbare Miniatur-Spektralsonde
DE20004368U1 (de) 2000-03-10 2000-10-19 Heraeus Noblelight Gmbh Elektrodenlose Entladungslampe
DE20004366U1 (de) 2000-03-10 2000-10-12 Heraeus Noblelight Gmbh Strahlermodul zum Einsatz in ein Lampengehäuse
KR100367132B1 (ko) * 2000-04-27 2003-01-09 준 최 무전극 방전 장치
US7429818B2 (en) * 2000-07-31 2008-09-30 Luxim Corporation Plasma lamp with bulb and lamp chamber
US6737809B2 (en) 2000-07-31 2004-05-18 Luxim Corporation Plasma lamp with dielectric waveguide
US6922021B2 (en) * 2000-07-31 2005-07-26 Luxim Corporation Microwave energized plasma lamp with solid dielectric waveguide
US6737810B2 (en) 2000-10-30 2004-05-18 Matsushita Electric Industrial Co., Ltd. Electrodeless discharge lamp apparatus with adjustable exciting electrodes
WO2005076316A1 (fr) * 2004-02-05 2005-08-18 Matsushita Electric Industrial Co., Ltd. Lampe a decharge sans electrodes
JP6121667B2 (ja) 2012-08-22 2017-04-26 浜松ホトニクス株式会社 放電ランプ及び光源装置
RU2560931C1 (ru) * 2014-07-07 2015-08-20 Федеральное государственное бюджетное учреждение науки Институт сильноточной электроники Сибирского отделения Российской академии наук (ИСЭ СО РАН) Газоразрядный источник излучения

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1003873A (en) 1963-02-14 1965-09-08 Distillers Co Yeast Ltd High frequency discharge spectral lamps
DE4120730A1 (de) 1991-06-24 1993-01-14 Heraeus Instr Gmbh Elektrodenlose niederdruck-entladungslampe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE633760C (de) * 1930-09-26 1936-08-05 Siemens Ag Entladungslampe, bei der die Entladung durch einen verengten Querschnitt hindurchgeht
US2068595A (en) * 1935-07-31 1937-01-19 Hygrade Sylvania Corp Gaseous or vapor arc discharge lamp
US2298239A (en) * 1940-07-22 1942-10-06 Science Lab Inc Light source
DE911870C (de) * 1952-03-14 1954-05-20 Dieter Mannesmann Dr Ing Blitzroehre fuer Roehrenblitzgeraete
US3502929A (en) * 1967-07-14 1970-03-24 Varian Associates High intensity arc lamp
DE2265542C2 (de) * 1971-01-25 1983-01-20 Varian Associates, Inc., 94303 Palo Alto, Calif. Bogen-Entladungslampe
DE3240164A1 (de) * 1982-10-29 1984-05-03 Grün Optik Wetzlar GmbH, 6330 Wetzlar Atomspektrallampe
US4816719A (en) * 1984-12-06 1989-03-28 Gte Products Corporation Low pressure arc discharge tube with reduced ballasting requirement
US4884007A (en) * 1984-12-06 1989-11-28 Gte Products Corporation Low pressure arc discharge tube having increased voltage
CA1255738A (fr) * 1984-12-06 1989-06-13 Radomir Lagushenko Tube a decharge a regime d'arc a gaz a basse pression a tension accrue

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1003873A (en) 1963-02-14 1965-09-08 Distillers Co Yeast Ltd High frequency discharge spectral lamps
DE4120730A1 (de) 1991-06-24 1993-01-14 Heraeus Instr Gmbh Elektrodenlose niederdruck-entladungslampe

Also Published As

Publication number Publication date
EP0780881B1 (fr) 2002-05-22
DE19547519A1 (de) 1997-07-03
JP3217001B2 (ja) 2001-10-09
DE59609231D1 (de) 2002-06-27
DE19547519C2 (de) 2003-08-07
EP0780881A3 (fr) 1999-02-10
JPH09190803A (ja) 1997-07-22
US5814951A (en) 1998-09-29

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