EP0714482B2 - Pompe a vide comportant un separateur d'huile - Google Patents

Pompe a vide comportant un separateur d'huile Download PDF

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Publication number
EP0714482B2
EP0714482B2 EP94926181A EP94926181A EP0714482B2 EP 0714482 B2 EP0714482 B2 EP 0714482B2 EP 94926181 A EP94926181 A EP 94926181A EP 94926181 A EP94926181 A EP 94926181A EP 0714482 B2 EP0714482 B2 EP 0714482B2
Authority
EP
European Patent Office
Prior art keywords
oil
line
pump
oil separator
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94926181A
Other languages
German (de)
English (en)
Other versions
EP0714482B1 (fr
EP0714482A1 (fr
Inventor
Lutz Arndt
Winfried Kaiser
Peter Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6495351&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0714482(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0714482A1 publication Critical patent/EP0714482A1/fr
Publication of EP0714482B1 publication Critical patent/EP0714482B1/fr
Application granted granted Critical
Publication of EP0714482B2 publication Critical patent/EP0714482B2/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/122—Arrangements for supercharging the working space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S418/00—Rotary expansible chamber devices
    • Y10S418/01—Non-working fluid separation

Definitions

  • the invention relates to a vacuum pump with the Features of the preamble of claim 1.
  • gas ballast supply With gas ballast supply, the inlet of gases into the Understand the capacity of a vacuum pump, namely one Time when the scoop is closed to the inlet side is.
  • the gas ballast supply can be harmful Condensation of extracted vapors can be avoided.
  • a two-stage vacuum pump is used to supply the gas ballast usually in the forevacuum stage. It is also known to supply gas ballast to the high vacuum stage.
  • Oil-sealed vacuum pumps deliver with the gas volume flow an oil volume flow that consists of one at every revolution Oil supply gets into the pump. The extracted oil gets into the oil supply back. The gases contaminated with oil vapors are fed to the pump outlet.
  • the outlet of such Pumping is therefore usually internal or external located oil separator or gas filter, in which by far the largest part of the oil vapors transported from Gas volume flow is separated.
  • From DE-B-10 98 150 is a gate valve vacuum pump known, the outlet of which is followed by an oil separator.
  • the Oil separator is designed as a cyclone.
  • the previously known vacuum pump on a gas ballast device that comprises a gas channel with a valve. In this gas channel opens a side channel that leads to the oil separator.
  • the Side channel has the effect that part of the oil separator located oil mist as gas ballast in the work area the pump is sucked in. Are using this pump promoted aggressive gases, there is the disadvantage that these get back into the pump delivery chamber. in the other side channel is not used to return the im Oil separation room of separated oil.
  • the state of the art also includes the content of GB-A-863 162. This discloses a gas compressor. On Oil separator from which oil is derived is not available.
  • the present invention has for its object a To create a vacuum pump with the features mentioned at the beginning, where the risk of repatriation from aggressive Gases no longer exist in the pumping chamber and at which the Means for oil return from the oil separator especially are simply designed.
  • the return leads to the return the oil serving line at one point in the vacuum pump, on the during the operation of the vacuum pump There is negative pressure, which is the conveyance of the oil from the oil separator to the pump. The influence on the final pressure behavior is. negligible. The danger of one There is backflow of oil in the connected recipient no more.
  • the oil return into the gas ballast supply serving line also has the advantage that it is particularly simple, inexpensive and can be retrofitted.
  • the anchor sections 21, 22 are provided with slots 25, 26 for Slider 27, 28 equipped. These are each from the associated end face of the rotor milled here, so that achieved exact slot dimensions in a simple manner can be.
  • the bearing section 23 lies between the anchor sections 21, 22. bearing section 23 and bearing bore 11 form the only storage of the Rotor.
  • Anchor section 22 and the associated scoop space 9 are longer than the anchor section 21 with the scooping space 8.
  • Anchor section 22 and Ladle chamber 9 form the high vacuum stage. While the inlet of high vacuum stage 9 is in operation, 22 with the intake manifold 30 in connection.
  • the outlet the high vacuum stage 9, 22 and the inlet of the fore vacuum stage 8, 21 are over the housing bore or the intermediate channel 31 in connection, which is parallel extends to the axes 15, 16 of the scoops 8, 9.
  • the outlet of the forevacuum stage 8, 21 opens in the oil space 17, which includes the oil sump 20. In the oil room 17 the oily gases calm down and leave the pump 1 through the outlet port 33.
  • the inlet and outlet openings are for reasons of clarity of the two pump stages in the figure not shown.
  • the bearing piece 13 Is coaxial with the axis 14 of the bearing bore 11 the bearing piece 13 with a bore 35 for the shaft 36 of the drive motor 4 equipped.
  • the seal the shaft 36 to the bearing piece 13 takes place through the shaft sealing rings 37 in the recesses 38.
  • the clutch of the rotor 3 with the drive shaft 36 is form-fitting via cams and corresponding recesses.
  • float valve 50 Appropriately located in line section 45 a float valve 50. This ensures that line 45 is shut off if there is no deposited and there is oil to be returned. A flood the pump 1 is thereby avoided.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (2)

  1. Pompe à vide (1), comprenant :
    un séparateur d'huile (42) agencé en aval de sa sortie (33),
    un dispositif de ballast à gaz qui comprend une conduite (47) servant à l'amenée de gaz et comportant une vanne de ballast à gaz (48),
    une autre conduite (45, 46) qui relie la conduite (47) à la chambre de collecte d'huile (44) du séparateur d'huile (42) et qui sert à ramener l'huile séparée dans le séparateur d'huile (42) jusque dans la pompe à vide (1), ladite autre conduite (45, 46) débouchant dans la conduite (47) à un emplacement qui se trouve en aval de la Vanne de ballast à gaz (48) par rapport à la direction d'écoulement du ballast à gaz, et
    une vanne (50) dans ladite autre conduite (45, 46),
    caractérisée en ce que ladite vanne (50) est une vanne à flotteur qui bloque la conduite (45, 46) lorsqu'il n'existe aucune huile séparée et à ramener.
  2. Pompe à vide à deux étages (1), comprenant :
    un étage à vide poussé (9, 22),
    un étage à vide préliminaire (8, 21),
    un canal intermédiaire (31) qui relie les deux étages,
    un séparateur d'huile (42) agencé en aval de sa sortie (33), et
    une autre conduite (45, 49) via laquelle l'huile séparée dans le séparateur d'huile (42) est ramenée dans la pompe à vide (1),
    caractérisée en ce que ladite autre conduite (45, 49) qui sert à ramener l'huile débouche dans le canal intermédiaire (31) qui relie la sortie de l'étage à vide poussé (9, 22) à l'entrée de l'étage à vide préliminaire (8, 21) de la pompe (1), et en ce qu'une vanne à flotteur (50) se trouve dans la conduite (45, 49) et qui bloque ladite conduite (45, 49) lorsqu'il n'existe aucune huile séparée et à ramener.
EP94926181A 1993-08-17 1994-08-11 Pompe a vide comportant un separateur d'huile Expired - Lifetime EP0714482B2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4327583A DE4327583A1 (de) 1993-08-17 1993-08-17 Vakuumpumpe mit Ölabscheider
DE4327583 1993-08-17
PCT/EP1994/002675 WO1995005540A1 (fr) 1993-08-17 1994-08-11 Pompe a vide comportant un separateur d'huile

Publications (3)

Publication Number Publication Date
EP0714482A1 EP0714482A1 (fr) 1996-06-05
EP0714482B1 EP0714482B1 (fr) 1997-05-21
EP0714482B2 true EP0714482B2 (fr) 2002-10-09

Family

ID=6495351

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94926181A Expired - Lifetime EP0714482B2 (fr) 1993-08-17 1994-08-11 Pompe a vide comportant un separateur d'huile

Country Status (6)

Country Link
US (1) US5697771A (fr)
EP (1) EP0714482B2 (fr)
JP (1) JPH09503566A (fr)
KR (1) KR960704159A (fr)
DE (2) DE4327583A1 (fr)
WO (1) WO1995005540A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19709206A1 (de) * 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vakuumpumpe
DE19962445A1 (de) * 1999-12-22 2001-06-28 Leybold Vakuum Gmbh Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE20103261U1 (de) * 2001-02-23 2001-06-07 Werner Rietschle GmbH + Co. KG, 79650 Schopfheim Ölabscheider für ölüberflutete Pumpen
DE102008013784B4 (de) * 2007-03-15 2017-03-23 Denso Corporation Kompressor
DE102007043350B3 (de) * 2007-09-12 2009-05-28 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Verfahren zur Steuerung einer Gasballastzufuhr zu einer Vakuumpumpe
US8906330B2 (en) 2009-05-04 2014-12-09 Basf Corporation Lean HC conversion of TWC for lean burn gasoline engines
JP2012122450A (ja) * 2010-12-10 2012-06-28 Kobe Steel Ltd スクリュ圧縮機
JP5947023B2 (ja) * 2011-11-14 2016-07-06 東京エレクトロン株式会社 温度制御装置、プラズマ処理装置、処理装置及び温度制御方法
KR101540313B1 (ko) * 2014-04-07 2015-07-30 한전케이피에스 주식회사 중수로 핵연료 교환설비의 분리기 포텐쇼미터 절연유 충유 장치 및 이를 이용한 충유 방법
WO2015197138A1 (fr) * 2014-06-27 2015-12-30 Ateliers Busch Sa Méthode de pompage dans un système de pompes à vide et système de pompes à vide
EP3376033B1 (fr) * 2017-03-14 2020-11-25 Leybold GmbH Pompe à vide

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE951884C (de) * 1953-12-23 1956-11-08 Leybold S Nachfolger E Vakuumpumpe
GB863162A (en) * 1956-09-21 1961-03-15 Scaife Company Rotary gas compressor pump
DE1302133B (fr) * 1958-05-07 1970-01-22
DE1098150B (de) * 1958-05-30 1961-01-26 Heraeus Gmbh W C Vakuumpumpe mit Gasballasteinrichtung
DE1123076B (de) * 1959-04-18 1962-02-01 Leybolds Nachfolger E Rotierende mechanische Vakuumpumpe
DE1403069B1 (de) * 1959-06-19 1970-01-29 Leybold Heraeus Gmbh & Co Kg Fluessigkeitsgedichtete rotierende mechanische Vakuumpumpe
US4204815A (en) * 1977-12-06 1980-05-27 Gast Manufacturing Corporation Cartridge rotary vane pump
US4268230A (en) * 1979-04-26 1981-05-19 Varian Associates, Inc. Gas ballast for oil sealed mechanical vacuum vane pump
GB2081383B (en) * 1980-07-31 1983-12-21 Hydrovane Compressor The Co Lt Rotary compressors
JPS6030494A (ja) * 1983-07-29 1985-02-16 Hitachi Ltd 全密閉形圧縮機
US4875149A (en) * 1988-12-16 1989-10-17 Sundstrand Corporation Phase separation control
EP0401399B1 (fr) * 1989-06-06 1994-03-02 Leybold Aktiengesellschaft Pompe à vide élevé à deux ou plusieurs étages
DE4017191A1 (de) * 1990-05-29 1991-12-05 Leybold Ag Verfahren zur oelversorgung einer zweistufigen drehschiebervakuumpumpe und fuer die durchfuehrung dieses verfahrens geeignete drehschiebervakuumpumpe

Also Published As

Publication number Publication date
US5697771A (en) 1997-12-16
KR960704159A (ko) 1996-08-31
JPH09503566A (ja) 1997-04-08
DE4327583A1 (de) 1995-02-23
EP0714482B1 (fr) 1997-05-21
DE59402844D1 (de) 1997-06-26
EP0714482A1 (fr) 1996-06-05
WO1995005540A1 (fr) 1995-02-23

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