EP0839282B1 - Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile - Google Patents

Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile Download PDF

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Publication number
EP0839282B1
EP0839282B1 EP96925748A EP96925748A EP0839282B1 EP 0839282 B1 EP0839282 B1 EP 0839282B1 EP 96925748 A EP96925748 A EP 96925748A EP 96925748 A EP96925748 A EP 96925748A EP 0839282 B1 EP0839282 B1 EP 0839282B1
Authority
EP
European Patent Office
Prior art keywords
oil
pump
slide valve
vacuum pump
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96925748A
Other languages
German (de)
English (en)
Other versions
EP0839282A1 (fr
Inventor
Thomas Abelen
Peter Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0839282A1 publication Critical patent/EP0839282A1/fr
Application granted granted Critical
Publication of EP0839282B1 publication Critical patent/EP0839282B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation

Definitions

  • the invention relates to an oil-sealed rotary vane vacuum pump with an oil pump, the pumping chamber is equipped with supply lines for oil and gas.
  • the oil with gas preferably air a reduction in the operating noise of the vacuum pump reached.
  • a rotary vane vacuum pump with the features of the generic term of claim 1 is from DE-A-3922417 known.
  • the gas and oil feeds into the pumping chamber the oil pump according to the prior art are such arranged that the oil pump first only air and then only sucks oil. This is achieved in that the Distance between the air intake openings on the one hand and oil, on the other hand, is so large that the intake opening is only released for oil when the next slider already the circulating funding volume separated from the air intake.
  • a simultaneous intake of air and oil is not possible.
  • the previously known solution therefore uses an oil pump with at least three evenly over sliders ahead of the circumference. Only because of that ensures that oil is also in the start-up phase of the pump is sucked in.
  • the present invention is based on the object an oil-sealed vacuum pump of the type mentioned to be designed such that their supply with a gas-oil mixture is particularly simple.
  • the pump 1 shown comprises the assemblies housing 2, rotor 3 and drive motor 4.
  • the housing 2 has essentially the shape of a pot with an outer wall 5, with the lid 6, with a Inner part 7 with the scoops 8, 9 and the bearing bore 11, with the end plate 12 and the bearing piece 13, which close the scoops 8, 9 at the end.
  • the Axis of the bearing bore 11 is designated 14.
  • Between outer wall 5 and inner part 7 is located the oil space 17, which partially during the operation of the pump is filled with oil.
  • oil eyes 18, 19 in the cover 6 maximum, minimum Oil level. Oil filler and drain plug are not shown.
  • the oil sump is designated by 20.
  • the rotor 3 is located within the inner part 7 is formed in one piece and has two end faces Anchor sections 21, 22 and one between the Anchor sections 21, 22 located bearing section 23 on.
  • the anchor sections 21, 22 are provided with slots 24, 25 equipped for two sliders 26, 27.
  • the representation according to Figure 1 is chosen so that the respective slide spaces 28, 29 lie in the plane of the drawing.
  • the slide slots 25, 26 are each of the associated Milled end face of the rotor, so that in exact slot dimensions can be achieved in a simple manner can.
  • the bearing section 23 lies between the anchor sections 21, 22. Bearing section 23 and bearing bore 11 form the only bearing of the rotor.
  • Anchor section 22 and the associated scooping space 9 have a larger diameter than the anchor section 21 with the scooping space 8.
  • Anchor section 22 and scooping space 9 form the high vacuum stage.
  • the inlet of the high vacuum stage 9, 22 with the intake manifold 30 in connection stands the inlet of the high vacuum stage 9, 22 with the intake manifold 30 in connection.
  • the outlet of the high vacuum stage 9, 22 and the inlet of the fore-vacuum stage 8, 21 via the housing bore 31 in connection extends parallel to the axes of the scoops 8, 9.
  • the outlet of the forevacuum stage 8, 21 opens into the oil space 17. There the oily gases calm down and leave the pump 1 through the outlet port 33.
  • the inlet and outlet openings are clear of the two pump stages not shown in Fig. 1.
  • the housing 2 of the pump is expedient from as few as possible Parts built up. At least that the two scoops 8, 9 and wall sections comprising the oil chamber 17 5, 7 should be formed in one piece.
  • the bearing piece is coaxial with the axis 14 of the bearing bore 11 13 with a bore 35 for a rotor drive equipped. This can be the shaft 35 of the Drive motor 4 be.
  • the embodiment is between the free end face the drive shaft 36 and the rotor 3 a coupling piece 37 provided. The way of coupling the coupling piece 37 with the drive shaft 36 on the one hand and with the rotor on the other hand is not described in detail. It is explained in more detail in DE-A-43 25 285.
  • the pump shown is equipped with an oil pump. This consists of the in the bearing piece 13 of the Scooping space 45 embedded in the engine side with the therein rotating oval eccentric 46.
  • the eccentric is a Locking slide 47 on, under the pressure of the coil spring 48 stands.
  • the eccentric 46 of the oil pump is a component of the coupling piece 37. It is either fixed or positive - only with axial play - with the coupling piece 37 connected.
  • the oil pump 45, 46 is 64 via a first channel from the oil space 17 and a second channel 65 oil from the Oil sump 20 supplied.
  • the air-oil mixture leaving the oil pump enters channel 66 which enters the bearing bore 11 (mouth 67) opens.
  • mouth 67 is the bearing pin 23 with a continuous radial bore 68 provided, of which an axial bore 69 with a nozzle 70 branches in the direction of the slide gap 28.
  • the location of the mouth 67 of the channel 66 on the one hand and the mouth of the radial bore 68 in the journal 23 on the other hand is chosen so that oil from channel 66 only can then briefly enter the bore 68 when the slider 26 take their T position.
  • the vacuum pump according to the invention is a one-stage Pump, then the relevant portion of the oil-air mixture flows over the bores 66, 68, 69 and the slide gap 28 into the scooping chamber 8 and arrives from there back into the oil space 17. Just a very small one Part of the oil gets into the bearing gap between the bearing bore 11 and journal 23 and supplies this storage with lubricating oil. It flows through the bearing gap and then also reaches the scooping chamber 8. Is the vacuum pump - As in the embodiment of Figure 1 shown - trained in two stages, a third occurs Oil-air partial flow in the bearing gap of the bearing 11, 23 in the direction of high vacuum pump stage 9, 22. Would Oil-air mixture get into the high vacuum stage, then would the air contained in the oil the final pressure behavior of the vacuum pump.
  • the bearing pin 23 has a circumferential groove 74 equipped, at the height of which a bore 75 opens communicates with the intermediate vacuum (bore 31).
  • Figure 2 shows a plan view of the bearing piece 13.
  • the circular scoop 45 of the Oil pump let in there is a in the scoop oval-shaped rotor 46, the locking slide 47 of lies below.
  • the direction of rotation is indicated by an arrow featured.
  • an oil supply 81 In the volume that increases its volume (right of the gate valve 47) opens first an oil supply 81.
  • Via a laterally branching groove 82 it stands with the back of the locking slide 47 in Connection, supplies it with lubricating oil and causes a pressure relief in the gate valve slot.
  • An air supply 83 opens out offset by the angle ⁇ the scooping space 45. This is also designed as a groove and stands with the air supply duct 64 ( Figure 1) in Connection.
  • the oil-air mixture drawn in depends on the respective delivery volume promoted to outlet 84. This is formed from a groove that communicates with channel 66 ( Figure 1) stands.
  • the size of the angle ⁇ (azinuthal distance of the Air supply from the oil supply) depends on the proportion of Air in the oil-air mixture. By changing the angle ⁇ can be influenced on this part.
  • the size of the angle ⁇ is between 5 ° and 90 °, preferably 30-40. It is essential that - this also applies for rotors designed differently than shown - while a significant part of the intake bunny both oil and air is also sucked in.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

L'invention concerne une pompe à vide à palettes (1) rendue étanche à l'huile, qui comprend un rotor (3) et une pompe à huile (45, 46) dont la chambre d'aspiration est munie de conduites d'amenée (64, 65) pour le gaz et l'huile. Afin de simplifier l'alimentation de la pompe à vide en mélange gaz/huile, il est prévu que les conduites d'amenée (64, 65) du gaz et de l'huile soient choisies de manière à ce que dans le volume aspiré en circulation de la pompe à huile (45, 46), il ne soit aspiré d'abord que de l'huile, puis aussi bien de l'huile que de l'air.

Claims (8)

  1. Pompe à vide rotative à palettes (1), étanchée vis-à-vis de l'huile, comprenant un rotor (3), et comprenant une pompe à huile (45, 46), dont la chambre d'aspiration est pourvue d'admissions (64, 65) pour le gaz et pour l'huile, caractérisée en ce que l'agencement des admissions (64, 65) pour le gaz et l'huile est ainsi choisi que dans le volume de pompage en circulation dans la pompe à huile (45, 46) on aspire tout d'abord uniquement de l'huile, et ensuite à la fois de l'huile et de l'air.
  2. Pompe à vide rotative à palettes selon la revendication 1, caractérisée en ce que la pompe à huile (45, 46) comprend un rotor (46) et une palette de fermeture (47) appliquée contre le rotor.
  3. Pompe à vide rotative à palettes selon la revendication 2, caractérisée en ce que le rotor (46) a la forme d'une ellipse.
  4. Pompe à vide rotative à palettes selon l'une des revendications 1, 2, et 3, caractérisée en ce que la pompe à huile (45, 46) est intégrée dans la pompe rotative à palettes, et en ce qu'elle est accouplée à l'arbre d'entraínement (36) pour le rotor (3).
  5. Pompe à vide rotative à palettes selon la revendication 4, caractérisée en ce que la chambre d'aspiration (45) de la pompe à huile (45, 46) est ménagée du côté entraínement dans une pièce de palier (13), et en ce qu'un disque (59) posé sur la pièce de palier (13) forme l'une des parois de la chambre d'aspiration.
  6. Pompe à vide rotative à palettes selon la revendication 5, caractérisée en ce que la pièce de palier (13) et/ou le disque (59) sont pourvus de gorges (81 à 84), lesquelles débouchent dans la chambre d'aspiration (45) de la pompe à huile (45, 46).
  7. Pompe à vide rotative à palettes selon la revendication 2 et la revendication 6, caractérisée en ce qu'une gorge (81) convoyant de l'huile communique avec la fente à palettes via une dérivation (82).
  8. Pompe à vide rotative à palettes selon l'une des revendications précédentes, caractérisée en ce que la sortie (84) de la pompe à huile (45, 46) communique avec l'espace intermédiaire (28) entre les palettes via des canaux (66, 68, 69) dans le boítier et dans une pièce de palier (23).
EP96925748A 1995-07-19 1996-07-12 Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile Expired - Lifetime EP0839282B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19526321A DE19526321A1 (de) 1995-07-19 1995-07-19 Ölgedichtete Drehschiebervakuumpumpe mit Ölpumpe
DE19526321 1995-07-19
PCT/EP1996/003077 WO1997004235A1 (fr) 1995-07-19 1996-07-12 Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile

Publications (2)

Publication Number Publication Date
EP0839282A1 EP0839282A1 (fr) 1998-05-06
EP0839282B1 true EP0839282B1 (fr) 1999-06-09

Family

ID=7767216

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96925748A Expired - Lifetime EP0839282B1 (fr) 1995-07-19 1996-07-12 Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile

Country Status (10)

Country Link
US (1) US6149414A (fr)
EP (1) EP0839282B1 (fr)
JP (1) JP3946254B2 (fr)
KR (1) KR100442466B1 (fr)
CN (1) CN1083067C (fr)
CA (1) CA2227191C (fr)
DE (2) DE19526321A1 (fr)
ES (1) ES2133977T3 (fr)
TW (1) TW367396B (fr)
WO (1) WO1997004235A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030000735A (ko) * 2001-06-26 2003-01-06 김덕겸 개선된 시일구조를 가지는 진공펌프 장치
US6790019B1 (en) * 2003-02-28 2004-09-14 Thomas Industries Inc. Rotary vane pump with multiple sound dampened inlet ports
JP5781334B2 (ja) * 2011-03-04 2015-09-24 アルバック機工株式会社 油回転真空ポンプ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2233017A (en) * 1938-08-10 1941-02-25 Charles F Lambin Compressor
US3166017A (en) * 1962-12-26 1965-01-19 Borg Warner Flex pump
GB1303430A (fr) * 1969-06-12 1973-01-17
DE2401171A1 (de) * 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Oelfuehrung in einer drehschieberpumpe
US4276005A (en) * 1979-04-26 1981-06-30 Varian Associates, Inc. Oil flow metering structure for oil sealed mechanical vacuum vane pump
FR2555674B1 (fr) * 1983-11-30 1986-03-28 Cit Alcatel Pompe a joint d'huile a palettes
DD228008A1 (de) * 1984-10-02 1985-10-02 Medizin Labortechnik Veb K Einstellvorrichtung fuer eine oelpumpe zur druckoelschmierung von rotierenden vakuumpumpen
DD256540A1 (de) * 1986-12-30 1988-05-11 Medizin Labortechnik Veb K Druckoelschmierung fuer drehschieber-vakuumpumpen
US4967707A (en) * 1988-07-14 1990-11-06 Rogant H R Rotary engine
DE3922417A1 (de) * 1989-07-07 1991-01-17 Vacuubrand Gmbh & Co Vakuumpumpe mit sicherung gegen belueftung des rezipienten bei stillstand
FR2666382B1 (fr) * 1990-08-28 1992-10-16 Cit Alcatel Dispositif de pompage d'un gaz par une pompe a palettes et a joint d'huile et application aux detecteurs de fuites a helium.
DE4325285A1 (de) * 1993-07-28 1995-02-02 Leybold Ag Ölgedichtete Vakuumpumpe

Also Published As

Publication number Publication date
CA2227191C (fr) 2007-09-11
JPH11509595A (ja) 1999-08-24
CN1191593A (zh) 1998-08-26
KR19990028828A (ko) 1999-04-15
CA2227191A1 (fr) 1997-02-06
JP3946254B2 (ja) 2007-07-18
CN1083067C (zh) 2002-04-17
EP0839282A1 (fr) 1998-05-06
MX9800405A (es) 1998-09-30
TW367396B (en) 1999-08-21
DE19526321A1 (de) 1997-01-23
WO1997004235A1 (fr) 1997-02-06
ES2133977T3 (es) 1999-09-16
DE59602182D1 (de) 1999-07-15
US6149414A (en) 2000-11-21
KR100442466B1 (ko) 2004-09-24

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