EP0839282A1 - Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile - Google Patents

Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile

Info

Publication number
EP0839282A1
EP0839282A1 EP96925748A EP96925748A EP0839282A1 EP 0839282 A1 EP0839282 A1 EP 0839282A1 EP 96925748 A EP96925748 A EP 96925748A EP 96925748 A EP96925748 A EP 96925748A EP 0839282 A1 EP0839282 A1 EP 0839282A1
Authority
EP
European Patent Office
Prior art keywords
oil
pump
vacuum pump
rotary vane
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96925748A
Other languages
German (de)
English (en)
Other versions
EP0839282B1 (fr
Inventor
Thomas Abelen
Peter Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0839282A1 publication Critical patent/EP0839282A1/fr
Application granted granted Critical
Publication of EP0839282B1 publication Critical patent/EP0839282B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation
    • F04C29/025Lubrication; Lubricant separation using a lubricant pump
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation

Definitions

  • the invention relates to an oil-sealed rotary vane vacuum pump with an oil pump, the pumping chamber of which is equipped with feeds for oil and gas.
  • oil pump the pumping chamber of which is equipped with feeds for oil and gas.
  • a rotary vane vacuum pump with the features of the preamble of claim 1 is known from DE-A-3922417.
  • the feeds for gas and oil in the delivery chamber of the oil pump according to the prior art are arranged in such a way that the oil pump first only sucks in air and then only oil. This is achieved in that the distance between the intake openings for air on the one hand and oil on the other hand is dimensioned so large that the intake opening for oil is only released when the next slide valve has already separated the circulating delivery volume from the air intake opening. Simultaneous suction of air and oil is not possible.
  • the previously known solution therefore presupposes the use of an oil pump with at least three slides distributed uniformly over the circumference.
  • the present invention has for its object to design an oil-sealed vacuum pump of the type mentioned in such a way that its supply with a gas-oil mixture is particularly simple.
  • FIG. 1 shows a longitudinal section through an embodiment for a rotary vane vacuum pump according to the invention
  • FIG. 2 is a plan view of a bearing piece in which the oil pump is inserted.
  • the pump 1 shown comprises the modules housing 2, rotor 3 and drive motor 4.
  • the housing 2 has essentially the shape of a pot with an outer wall 5, with the cover 6, with an inner part 7 with the scoops 8, 9 and the bearing bore 11, with the end plate 12 and the bearing piece 13, which the scoops Complete ends 8, 9.
  • the axis of the bearing bore 11 is designated 14.
  • two oil eyes 18, 19 are provided in the cover 6. Oil filler and oil drain ports are not shown.
  • the oil sump is designated with 20.
  • the rotor 3 is located within the inner part 7. It is formed in one piece and has two armature sections 21, 22 arranged on the end face and a bearing section 23 located between the armature sections 21, 22.
  • the anchor sections 21, 22 are equipped with slots 24, 25 for two sliders 26, 27.
  • the illustration according to FIG. 1 is chosen such that the respective slide interstices 28, 29 lie in the plane of the drawing.
  • the slider slots 25, 26 are each of the associated milled end face of the rotor, so that exact slot dimensions can be achieved in a simple manner.
  • the bearing section 23 lies between the anchor sections 21, 22.
  • the bearing section 23 and the bearing bore 11 form the only bearing of the rotor.
  • the anchor section 22 and the associated scooping chamber 9 have a larger diameter than the anchor section 21 with the scooping chamber 8.
  • Anchor section 22 and scooping chamber 9 form the high vacuum stage.
  • the inlet of the high vacuum stage 9, 22 is connected to the intake manifold 30.
  • the outlet of the high vacuum stage 9, 22 and the inlet of the fore vacuum stage 8, 21 are connected via the housing bore 31, which extends parallel to the axes of the scoops 8, 9.
  • the outlet of the fore-vacuum stage 8, 21 opens into the oil chamber 17.
  • the housing 2 of the pump is expediently constructed from as few parts as possible. At least the wall sections 5, 7 comprising the two scooping spaces 8, 9 and the oil space 17 should be formed in one piece.
  • the bearing piece 13 is equipped with a bore 35 for a rotor drive. This can be the shaft 35 of the drive motor 4 directly.
  • a coupling piece 37 is provided between the free end face of the drive shaft 36 and the rotor 3. The manner in which the coupling piece 37 is coupled to the drive shaft 36 on the one hand and to the rotor on the other hand is not described in detail. It is explained in more detail in DE-A-43 25 285.
  • the pump shown is equipped with an oil pump. This consists of the scooping space 45, which is let into the bearing piece 13 from the motor side, with the oval eccentric 46 rotating therein.
  • the eccentric 46 of the oil pump is part of the coupling piece 37. It is either fixed or form-fitting - only with axial play - connected to the coupling piece 37.
  • the bearing piece 13 is equipped on its side facing the engine 4 with a circular recess 58 in which a disk 59 is located. This is held in position by the housing 61 of the drive motor 4. It is equipped with a central bore 62 which is penetrated by the shaft 36 of the drive motor 4.
  • the disk 59 has the task of limiting the scooping space 45 of the oil pump 45, 46.
  • Air from the oil chamber 17 and oil from the oil sump 20 are supplied to the oil pump 45, 46 via a first channel 64.
  • the air-oil mixture leaving the oil pump enters channel 66, which opens into bearing bore 11 (mouth 67).
  • the bearing journal 23 is provided with a continuous radial bore 68, from which an axial bore 69 branches off with a nozzle 70 in the direction of the slide gap 28.
  • the position of the mouth 67 of the channel 66 on the one hand and the mouth of the radial bore 68 in the journal 23 on the other hand is chosen so that oil from the channel 66 can only briefly enter the bore 68 when the slide 26 assume their T position.
  • the slide intermediate space 28 has its smallest volume.
  • the oil-air mixture which is briefly injected into the intermediate slide space 28 via the nozzle, flows through the intermediate slide space 28 and passes without pressure into the scooping space 8.
  • the inside of the cover 12 is equipped with a groove 71 which extends from the Slider intermediate space 28 extends into the scooping space 8.
  • the free end face of the anchor section 21 is additionally equipped with a central recess 72.
  • the vacuum pump according to the invention is a single-stage pump, then the relevant portion of the oil-air mixture flows through the bores 66, 68, 69 and the slide gap 28 into the scooping chamber 8 and from there returns to the oil chamber 17. Only a very small part of the oil gets into the bearing gap between the bearing bore 11 and the journal 23 and supplies this bearing with lubricating oil. It flows through the bearing gap and then also reaches the delivery chamber 8. If the vacuum pump - as shown in the exemplary embodiment according to FIG. 1 - has two stages, a third oil-air partial flow enters the bearing gap of the bearing 11, 23 in the direction of the high-vacuum pump stage 9 , 22 a.
  • FIG. 1 shows a plan view of the bearing piece 13.
  • the circular scoop 45 of the oil pump is embedded.
  • An oval-shaped rotor 46 is located in the pump chamber, against which the locking slide 47 rests from below. The direction of rotation is indicated by an arrow.
  • An oil feed 81 opens into the volume increasing its volume (to the right of the locking slide 47). This is designed as a groove in the surface of the bearing piece 13 and extends from the mouth of the oil feed channel 65 (FIG. 1) into the scooping space 45. Via a laterally branching groove 82, it is connected to the rear of the locking slide 47, supplies it with lubricating oil and brings about pressure relief in the locking slide slot.
  • An air supply 83 opens into the delivery space 45 offset by the angle ⁇ . This is also designed as a groove and is connected to the air supply duct 64 (FIG. 1).
  • the aspirated oil-air mixture is conveyed from the respective delivery volume to the outlet 84. This is formed by a groove which is connected to the channel 66 (FIG. 1).
  • the proportion of air in the oil-air mixture depends on the size of the angle ⁇ (azinuthal distance of the air supply from the oil supply). This portion can be influenced by changing the angle ⁇ .
  • the size of the angle ⁇ is between 5 ° and 90 °, preferably 30-40. It is essential that - this also applies to rotors designed differently than shown - oil and air are sucked in during a significant part of the suction rabbit.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne une pompe à vide à palettes (1) rendue étanche à l'huile, qui comprend un rotor (3) et une pompe à huile (45, 46) dont la chambre d'aspiration est munie de conduites d'amenée (64, 65) pour le gaz et l'huile. Afin de simplifier l'alimentation de la pompe à vide en mélange gaz/huile, il est prévu que les conduites d'amenée (64, 65) du gaz et de l'huile soient choisies de manière à ce que dans le volume aspiré en circulation de la pompe à huile (45, 46), il ne soit aspiré d'abord que de l'huile, puis aussi bien de l'huile que de l'air.
EP96925748A 1995-07-19 1996-07-12 Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile Expired - Lifetime EP0839282B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19526321A DE19526321A1 (de) 1995-07-19 1995-07-19 Ölgedichtete Drehschiebervakuumpumpe mit Ölpumpe
DE19526321 1995-07-19
PCT/EP1996/003077 WO1997004235A1 (fr) 1995-07-19 1996-07-12 Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile

Publications (2)

Publication Number Publication Date
EP0839282A1 true EP0839282A1 (fr) 1998-05-06
EP0839282B1 EP0839282B1 (fr) 1999-06-09

Family

ID=7767216

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96925748A Expired - Lifetime EP0839282B1 (fr) 1995-07-19 1996-07-12 Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile

Country Status (10)

Country Link
US (1) US6149414A (fr)
EP (1) EP0839282B1 (fr)
JP (1) JP3946254B2 (fr)
KR (1) KR100442466B1 (fr)
CN (1) CN1083067C (fr)
CA (1) CA2227191C (fr)
DE (2) DE19526321A1 (fr)
ES (1) ES2133977T3 (fr)
TW (1) TW367396B (fr)
WO (1) WO1997004235A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030000735A (ko) * 2001-06-26 2003-01-06 김덕겸 개선된 시일구조를 가지는 진공펌프 장치
US6790019B1 (en) * 2003-02-28 2004-09-14 Thomas Industries Inc. Rotary vane pump with multiple sound dampened inlet ports
JP5781334B2 (ja) * 2011-03-04 2015-09-24 アルバック機工株式会社 油回転真空ポンプ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2233017A (en) * 1938-08-10 1941-02-25 Charles F Lambin Compressor
US3166017A (en) * 1962-12-26 1965-01-19 Borg Warner Flex pump
GB1303430A (fr) * 1969-06-12 1973-01-17
DE2401171A1 (de) * 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Oelfuehrung in einer drehschieberpumpe
US4276005A (en) * 1979-04-26 1981-06-30 Varian Associates, Inc. Oil flow metering structure for oil sealed mechanical vacuum vane pump
FR2555674B1 (fr) * 1983-11-30 1986-03-28 Cit Alcatel Pompe a joint d'huile a palettes
DD228008A1 (de) * 1984-10-02 1985-10-02 Medizin Labortechnik Veb K Einstellvorrichtung fuer eine oelpumpe zur druckoelschmierung von rotierenden vakuumpumpen
DD256540A1 (de) * 1986-12-30 1988-05-11 Medizin Labortechnik Veb K Druckoelschmierung fuer drehschieber-vakuumpumpen
US4967707A (en) * 1988-07-14 1990-11-06 Rogant H R Rotary engine
DE3922417A1 (de) * 1989-07-07 1991-01-17 Vacuubrand Gmbh & Co Vakuumpumpe mit sicherung gegen belueftung des rezipienten bei stillstand
FR2666382B1 (fr) * 1990-08-28 1992-10-16 Cit Alcatel Dispositif de pompage d'un gaz par une pompe a palettes et a joint d'huile et application aux detecteurs de fuites a helium.
DE4325285A1 (de) * 1993-07-28 1995-02-02 Leybold Ag Ölgedichtete Vakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9704235A1 *

Also Published As

Publication number Publication date
TW367396B (en) 1999-08-21
CA2227191C (fr) 2007-09-11
KR19990028828A (ko) 1999-04-15
CA2227191A1 (fr) 1997-02-06
CN1083067C (zh) 2002-04-17
JP3946254B2 (ja) 2007-07-18
JPH11509595A (ja) 1999-08-24
KR100442466B1 (ko) 2004-09-24
DE19526321A1 (de) 1997-01-23
CN1191593A (zh) 1998-08-26
US6149414A (en) 2000-11-21
DE59602182D1 (de) 1999-07-15
WO1997004235A1 (fr) 1997-02-06
MX9800405A (es) 1998-09-30
ES2133977T3 (es) 1999-09-16
EP0839282B1 (fr) 1999-06-09

Similar Documents

Publication Publication Date Title
DE3529929C2 (fr)
DE10118356A1 (de) Scrollkompressor
DE1503507C3 (de) Flügelzellenverdichter
EP0839283B1 (fr) Pompe a vide a palettes rendue etanche a l'huile, avec alimentation en huile
DE102014222321B3 (de) Flügelzellenpumpe mit verbessertem Startverhalten
EP0264778B1 (fr) Pompe à palettes
EP3015708B1 (fr) Pompes a cellules battantes presentant un comportement de demarrage ameliore
EP0711384B1 (fr) Pompe a vide a palette a deux etages
WO1997004235A1 (fr) Pompe a vide a palettes rendue etanche a l'huile, avec pompe a huile
DE4008522C2 (fr)
DE3325261C2 (fr)
DE3513923C2 (fr)
DD256540A1 (de) Druckoelschmierung fuer drehschieber-vakuumpumpen
DE19838927C2 (de) Brennkraftmaschine mit einer Ölpumpe und einem Ölvorratsbehälter
DE10037468A1 (de) Steuerscheibe insbesondere für eine Flügelzellpumpe
DE4325285A1 (de) Ölgedichtete Vakuumpumpe
DE102016122903A1 (de) Gaspumpe mit Ölrückführung
DE102006036439A1 (de) Förderaggregat
DE3929745A1 (de) Fluegelzellenkompressor
DE4035464A1 (de) Fluegelzellenverdichter
DE102021125709A1 (de) Rotationspumpe mit einer Verstelleinrichtung
WO1995004220A1 (fr) Carter de pompe a vide a palette a deux etages
DE19622518A1 (de) Hydraulische Doppelzahnradpumpe
DE19500542A1 (de) Drehkolbenpumpe
WO2010075834A2 (fr) Pompe à ailettes

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19971120

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): CH DE ES FR GB IT LI

RIN1 Information on inventor provided before grant (corrected)

Inventor name: MUELLER, PETER

Inventor name: ABELEN, THOMAS

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

17Q First examination report despatched

Effective date: 19981119

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE ES FR GB IT LI

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 59602182

Country of ref document: DE

Date of ref document: 19990715

ITF It: translation for a ep patent filed
REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: ISLER & PEDRAZZINI AG

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19990802

REG Reference to a national code

Ref country code: ES

Ref legal event code: FG2A

Ref document number: 2133977

Country of ref document: ES

Kind code of ref document: T3

ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

REG Reference to a national code

Ref country code: CH

Ref legal event code: PCAR

Free format text: ISLER & PEDRAZZINI AG;POSTFACH 1772;8027 ZUERICH (CH)

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20090716

Year of fee payment: 14

Ref country code: ES

Payment date: 20090722

Year of fee payment: 14

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20090720

Year of fee payment: 14

Ref country code: DE

Payment date: 20090722

Year of fee payment: 14

Ref country code: CH

Payment date: 20090715

Year of fee payment: 14

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20090724

Year of fee payment: 14

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20100712

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20110331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100731

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100731

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110201

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 59602182

Country of ref document: DE

Effective date: 20110201

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100712

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100802

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100712

REG Reference to a national code

Ref country code: ES

Ref legal event code: FD2A

Effective date: 20110818

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100713