DE59602182D1 - Ölgedichtete drehschiebervakuumpumpe mit ölpumpe - Google Patents

Ölgedichtete drehschiebervakuumpumpe mit ölpumpe

Info

Publication number
DE59602182D1
DE59602182D1 DE59602182T DE59602182T DE59602182D1 DE 59602182 D1 DE59602182 D1 DE 59602182D1 DE 59602182 T DE59602182 T DE 59602182T DE 59602182 T DE59602182 T DE 59602182T DE 59602182 D1 DE59602182 D1 DE 59602182D1
Authority
DE
Germany
Prior art keywords
oil
pump
vacuum pump
turnover vacuum
sealed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59602182T
Other languages
English (en)
Inventor
Thomas Abelen
Peter Mueller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Priority to DE59602182T priority Critical patent/DE59602182D1/de
Application granted granted Critical
Publication of DE59602182D1 publication Critical patent/DE59602182D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
DE59602182T 1995-07-19 1996-07-12 Ölgedichtete drehschiebervakuumpumpe mit ölpumpe Expired - Fee Related DE59602182D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE59602182T DE59602182D1 (de) 1995-07-19 1996-07-12 Ölgedichtete drehschiebervakuumpumpe mit ölpumpe

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19526321A DE19526321A1 (de) 1995-07-19 1995-07-19 Ölgedichtete Drehschiebervakuumpumpe mit Ölpumpe
PCT/EP1996/003077 WO1997004235A1 (de) 1995-07-19 1996-07-12 Ölgedichtete drehschiebervakuumpumpe mit ölpumpe
DE59602182T DE59602182D1 (de) 1995-07-19 1996-07-12 Ölgedichtete drehschiebervakuumpumpe mit ölpumpe

Publications (1)

Publication Number Publication Date
DE59602182D1 true DE59602182D1 (de) 1999-07-15

Family

ID=7767216

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19526321A Withdrawn DE19526321A1 (de) 1995-07-19 1995-07-19 Ölgedichtete Drehschiebervakuumpumpe mit Ölpumpe
DE59602182T Expired - Fee Related DE59602182D1 (de) 1995-07-19 1996-07-12 Ölgedichtete drehschiebervakuumpumpe mit ölpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19526321A Withdrawn DE19526321A1 (de) 1995-07-19 1995-07-19 Ölgedichtete Drehschiebervakuumpumpe mit Ölpumpe

Country Status (10)

Country Link
US (1) US6149414A (de)
EP (1) EP0839282B1 (de)
JP (1) JP3946254B2 (de)
KR (1) KR100442466B1 (de)
CN (1) CN1083067C (de)
CA (1) CA2227191C (de)
DE (2) DE19526321A1 (de)
ES (1) ES2133977T3 (de)
TW (1) TW367396B (de)
WO (1) WO1997004235A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030000735A (ko) * 2001-06-26 2003-01-06 김덕겸 개선된 시일구조를 가지는 진공펌프 장치
US6790019B1 (en) * 2003-02-28 2004-09-14 Thomas Industries Inc. Rotary vane pump with multiple sound dampened inlet ports
JP5781334B2 (ja) * 2011-03-04 2015-09-24 アルバック機工株式会社 油回転真空ポンプ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2233017A (en) * 1938-08-10 1941-02-25 Charles F Lambin Compressor
US3166017A (en) * 1962-12-26 1965-01-19 Borg Warner Flex pump
GB1303430A (de) * 1969-06-12 1973-01-17
DE2401171A1 (de) * 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Oelfuehrung in einer drehschieberpumpe
US4276005A (en) * 1979-04-26 1981-06-30 Varian Associates, Inc. Oil flow metering structure for oil sealed mechanical vacuum vane pump
FR2555674B1 (fr) * 1983-11-30 1986-03-28 Cit Alcatel Pompe a joint d'huile a palettes
DD228008A1 (de) * 1984-10-02 1985-10-02 Medizin Labortechnik Veb K Einstellvorrichtung fuer eine oelpumpe zur druckoelschmierung von rotierenden vakuumpumpen
DD256540A1 (de) * 1986-12-30 1988-05-11 Medizin Labortechnik Veb K Druckoelschmierung fuer drehschieber-vakuumpumpen
US4967707A (en) * 1988-07-14 1990-11-06 Rogant H R Rotary engine
DE3922417A1 (de) * 1989-07-07 1991-01-17 Vacuubrand Gmbh & Co Vakuumpumpe mit sicherung gegen belueftung des rezipienten bei stillstand
FR2666382B1 (fr) * 1990-08-28 1992-10-16 Cit Alcatel Dispositif de pompage d'un gaz par une pompe a palettes et a joint d'huile et application aux detecteurs de fuites a helium.
DE4325285A1 (de) * 1993-07-28 1995-02-02 Leybold Ag Ölgedichtete Vakuumpumpe

Also Published As

Publication number Publication date
MX9800405A (es) 1998-09-30
EP0839282B1 (de) 1999-06-09
JPH11509595A (ja) 1999-08-24
ES2133977T3 (es) 1999-09-16
CN1083067C (zh) 2002-04-17
TW367396B (en) 1999-08-21
KR100442466B1 (ko) 2004-09-24
CN1191593A (zh) 1998-08-26
CA2227191A1 (en) 1997-02-06
JP3946254B2 (ja) 2007-07-18
WO1997004235A1 (de) 1997-02-06
KR19990028828A (ko) 1999-04-15
US6149414A (en) 2000-11-21
DE19526321A1 (de) 1997-01-23
CA2227191C (en) 2007-09-11
EP0839282A1 (de) 1998-05-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee