DE59405538D1 - Ölgedichtete vakuumpumpe - Google Patents

Ölgedichtete vakuumpumpe

Info

Publication number
DE59405538D1
DE59405538D1 DE59405538T DE59405538T DE59405538D1 DE 59405538 D1 DE59405538 D1 DE 59405538D1 DE 59405538 T DE59405538 T DE 59405538T DE 59405538 T DE59405538 T DE 59405538T DE 59405538 D1 DE59405538 D1 DE 59405538D1
Authority
DE
Germany
Prior art keywords
oil
vacuum pump
sealed vacuum
sealed
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59405538T
Other languages
English (en)
Inventor
Thomas Abelen
Lutz Arndt
Peter Mueller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE59405538T priority Critical patent/DE59405538D1/de
Application granted granted Critical
Publication of DE59405538D1 publication Critical patent/DE59405538D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00—Joints and connections
    • Y10T403/70—Interfitted members
    • Y10T403/7016—Diametric end slot is joint component

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE59405538T 1993-07-28 1994-05-26 Ölgedichtete vakuumpumpe Expired - Fee Related DE59405538D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE59405538T DE59405538D1 (de) 1993-07-28 1994-05-26 Ölgedichtete vakuumpumpe

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4325285A DE4325285A1 (de) 1993-07-28 1993-07-28 Ölgedichtete Vakuumpumpe
DE59405538T DE59405538D1 (de) 1993-07-28 1994-05-26 Ölgedichtete vakuumpumpe
PCT/EP1994/001680 WO1995004222A1 (de) 1993-07-28 1994-05-26 Ölgedichtete vakuumpumpe

Publications (1)

Publication Number Publication Date
DE59405538D1 true DE59405538D1 (de) 1998-04-30

Family

ID=6493894

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4325285A Withdrawn DE4325285A1 (de) 1993-07-28 1993-07-28 Ölgedichtete Vakuumpumpe
DE59405538T Expired - Fee Related DE59405538D1 (de) 1993-07-28 1994-05-26 Ölgedichtete vakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4325285A Withdrawn DE4325285A1 (de) 1993-07-28 1993-07-28 Ölgedichtete Vakuumpumpe

Country Status (6)

Country Link
US (1) US5749716A (de)
EP (1) EP0711386B1 (de)
JP (1) JPH09500942A (de)
KR (1) KR960704160A (de)
DE (2) DE4325285A1 (de)
WO (1) WO1995004222A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19526303A1 (de) * 1995-07-19 1997-01-23 Leybold Ag Ölgedichtete Drehschiebervakuumpumpe mit einer Ölversorgung
DE19526321A1 (de) * 1995-07-19 1997-01-23 Leybold Ag Ölgedichtete Drehschiebervakuumpumpe mit Ölpumpe
DE10024669B4 (de) * 2000-05-18 2005-10-13 Hella Kgaa Hueck & Co. Pumpe
EP2746532B1 (de) 2012-12-19 2018-02-14 Pierburg Pump Technology GmbH Rotoranordnung für eine Vakuumpumpe sowie Vakuumpumpe mit einer derartigen Rotoranordnung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1190134B (de) * 1957-02-07 1965-04-01 Edwards High Vacuum Ltd Drehkolben-Vakuumpumpe mit oelueberlagertem Auspuffventil
US3289601A (en) * 1965-02-12 1966-12-06 Fawick Corp Fluid displacement device usable as a hydraulic motor or pump
DE2354039A1 (de) * 1973-10-29 1975-05-07 Leybold Heraeus Gmbh & Co Kg Drehschieberpumpe
DE2401171A1 (de) * 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Oelfuehrung in einer drehschieberpumpe
US4120621A (en) * 1976-07-19 1978-10-17 Puritan Bennett Corporation Oil sealed single stage vacuum pump
US4276005A (en) * 1979-04-26 1981-06-30 Varian Associates, Inc. Oil flow metering structure for oil sealed mechanical vacuum vane pump
IT1207829B (it) * 1987-02-04 1989-06-01 Galileo Spa Off Perfezionamento nel circuito di lubrificazione delle pompe rotative per vuoto.
DE3805346A1 (de) * 1987-04-04 1988-10-20 Barmag Barmer Maschf Fluegelzellenpumpe
JPH0784869B2 (ja) * 1988-09-20 1995-09-13 三菱電機株式会社 スクロール流体機械
JPH0385387A (ja) * 1989-08-28 1991-04-10 Mitsubishi Electric Corp スクロール圧縮機
DE4017191A1 (de) * 1990-05-29 1991-12-05 Leybold Ag Verfahren zur oelversorgung einer zweistufigen drehschiebervakuumpumpe und fuer die durchfuehrung dieses verfahrens geeignete drehschiebervakuumpumpe
JPH05172073A (ja) * 1991-12-24 1993-07-09 Toshiba Corp 流体圧縮機
KR950007519B1 (ko) * 1992-09-09 1995-07-11 김영수 로터리 형식의 진공펌프장치

Also Published As

Publication number Publication date
DE4325285A1 (de) 1995-02-02
EP0711386A1 (de) 1996-05-15
US5749716A (en) 1998-05-12
WO1995004222A1 (de) 1995-02-09
JPH09500942A (ja) 1997-01-28
EP0711386B1 (de) 1998-03-25
KR960704160A (ko) 1996-08-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee