EP0711384B1 - Pompe a vide a palette a deux etages - Google Patents

Pompe a vide a palette a deux etages Download PDF

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Publication number
EP0711384B1
EP0711384B1 EP94925379A EP94925379A EP0711384B1 EP 0711384 B1 EP0711384 B1 EP 0711384B1 EP 94925379 A EP94925379 A EP 94925379A EP 94925379 A EP94925379 A EP 94925379A EP 0711384 B1 EP0711384 B1 EP 0711384B1
Authority
EP
European Patent Office
Prior art keywords
rotor
bearing
pump according
pump
armature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94925379A
Other languages
German (de)
English (en)
Other versions
EP0711384A1 (fr
Inventor
Lutz Arndt
Peter Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0711384A1 publication Critical patent/EP0711384A1/fr
Application granted granted Critical
Publication of EP0711384B1 publication Critical patent/EP0711384B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/08—Rotary pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Definitions

  • the invention relates to a rotary vane vacuum pump with a high vacuum stage, with a fore vacuum stage, with a substantially cylindrical rotor which has bearing and armature sections, a bearing section being located between two armature sections and the armature sections being equipped with slide slots, and with an approximately cup-shaped one Housing which encloses the scooping spaces and the bottom part of which is designed as a bearing piece with a passage for a rotor drive.
  • High vacuum pumps require extremely precise manufacture of the individual components that produce the gas. If, for example, in a rotary vane vacuum pump, the gaps between the slides and the associated slide slots in the rotor, the gaps in the area of the anchor systems or - in the case of a two-stage rotary vane vacuum pump - the gaps in the sealing area between the high-vacuum stage and the fore-vacuum stage, flows that are opposite to the desired direction of flow occur (Backflows) that significantly impair the pump properties - pumping speed, compression, final pressure behavior, etc.
  • Backflows Backflows
  • a filler must be used again after milling the slide slots for the purpose of producing an operational rotor at the level of the central bearing section, so that the tight mutual separation of the two stages of the vacuum pump is ensured.
  • the manufacture of a rotor of this type is complex. Milling the slide slots is only possible with limited tolerance because of the need to use a milling disk with a relatively large diameter.
  • the present invention has for its object to provide a two-stage rotary vane vacuum pump of the type mentioned, which can be manufactured more easily and with greater precision.
  • each slide slot can be milled into the rotor cylinder from its associated end face.
  • the production of a slot section that has to be filled in again afterwards is no longer necessary. Milling disks with much smaller radii can be used, which means that much smaller tolerances of the slot dimensions can be achieved. This not only improves the pump properties; the slide assembly is also easier since both slots are accessible from their respective end faces.
  • the pump 1 shown essentially comprises the modules housing 2, rotor 3 and drive motor 4.
  • the housing 2 has essentially the shape of a pot with an outer wall 5, with the cover 6, with an inner part 7 with the scooping spaces 8, 9 and the bearing bore 11, with the end plate 12 and the bearing piece 13, which the scooping spaces 8, Complete at the front.
  • the axis of the bearing bore 11 is designated 14. Eccentric to this are the axes 15 and 16 of the scooping spaces 8, 9.
  • two oil eyes 18, 19 are provided in the cover 6. Oil filler and oil drain ports are not shown.
  • the anchor sections 21, 22 are equipped with slots 25, 26 for slides 27, 28. These are each milled from the associated end face of the rotor, so that exact slot dimensions can be achieved in a simple manner.
  • the bearing section 23 lies between the armature sections 21, 22.
  • the bearing section 23 and the bearing bore 11 form the only bearing of the rotor. This bearing must be of sufficient axial length to prevent the rotor from wobbling.
  • the length of the bearing is expediently chosen so that when the rotor 3 is tilted to the maximum possible, the rotor 3 is still floating due to the bearing play in the bearing bore 11, that is to say that it does not start simultaneously on its two end faces.
  • the armature section 22 and the associated scooping space 9 are longer than the armature section 21 with the scooping space 8.
  • the armature section 22 and scooping space 9 form the high vacuum stage.
  • the inlet of the high vacuum stage 9, 22 is connected to the intake manifold 30.
  • the outlet of the high vacuum stage 9, 22 and the inlet of the fore vacuum stage 8, 21 are connected via the housing bore 31 to their axis 32, which extends parallel to the axes 15, 16 of the scooping spaces 8, 9.
  • the outlet of the forevacuum stage 8, 21 opens into the oil space 17, which comprises the oil sump 20. There, the oil-containing gases calm down and leave the pump 1 through the outlet port 33.
  • the housing 2 of the pump is also expediently constructed from as few parts as possible. At least the wall sections 5, 7 comprising the two scooping spaces 8, 9 and the oil space 17 should be formed in one piece.
  • the bearing piece 13 is equipped with a bore 35 for a rotor drive. This can be the shaft 36 of the drive motor 4 directly.
  • a coupling piece 37 is provided between the free end face of the drive shaft 4 and the rotor 3.
  • the coupling of the rotor 3 with the coupling piece 37 and the coupling piece 37 with the drive shaft 36 takes place in a form-fitting manner via projections and corresponding recesses.
  • the rotor 3 is equipped on its end face facing the coupling piece 37 with an elongated recess 38 which extends perpendicular to the slide slot 26 (see also FIG. 2).
  • the coupling piece 37 engages in the recess 38.
  • the projection 39 of the coupling piece 37 is in turn equipped with the recess 41 which engages around the slide 28.
  • a corresponding connection exists between the drive shaft 36 with its elongated recess 42 and the coupling piece 37 with the corresponding projection 43.
  • FIG. 3 shows a further solution in which the drive-side end face of the rotor 3 is equipped with a shoulder 44 with a reduced diameter. This creates a slot in addition to the space occupied by the slide, into which an elongated projection on the coupling piece 37 or on the shaft 36 can engage.
  • the high vacuum stage 9, 22 should have a higher pumping speed than the fore-vacuum stage.
  • the axial length of the high vacuum stage must be greater than the length of the fore vacuum stage, for example at least twice as long.
  • the arrangement of the high-vacuum stage on the drive side has the advantage that only the short forevacuum stage is flying is supported while the relatively long high vacuum stage is supported in the coupling piece 37 or - if this is not present - in the shaft 36.
  • the pump of Figure 1 is finally equipped with an oil pump.
  • This consists of the scooping chamber 45, which is let into the bearing piece 13 from the motor side, with the eccentric 46 rotating therein.
  • the eccentric is connected to a locking slide 47 which is under the pressure of the spiral spring 48.
  • the inlet of the oil pump 45, 46 is connected to the oil sump 20 via a bore 51. All points of the pump 1 that require oil are connected to the outlet of the oil pump 45, 46.
  • a bore 51 ' is shown which opens into the bearing section 11 in the inner part 7 of the pump 1 via a transverse bore 51 "and supplies the bearing located there with lubricating oil.
  • the eccentric 46 of the oil pump is part of the coupling piece 37. It is either fixed or positively connected to the coupling piece 37 - axially displaceably arranged on the projection 42.
  • the solution described provides the option of dispensing with a separate pump-side mounting of the motor shaft 36.
  • the bearing piece 13 and - if present - the coupling piece 37 can take over this function.
  • the end face shown is provided with a central blind bore 49, in which the compression spring 50 is located.
  • the compression spring 50 is supported on the projection 43 of the coupling piece 37 and in the blind bore 49 and generates opposing forces on the shaft 37 (contact forces for the shaft bearing, not shown) 36) and the coupling piece 37.
  • these forces also have an effect on the rotor 3, the fore-vacuum end of which is thus pressed against the end plate 12.
  • This force reduces the gap between the rotor end face and the end plate 12 due to the play, so that a significant improvement in the compression capacity and thus a better final pressure can be achieved.
  • This advantage of tightness in the area of the fore-vacuum stage arises independently of the existing tolerances and can therefore be achieved without any particular increase in the production outlay.
  • the coupling piece 37 also forms the running surface for a sealing ring 55, which is located in an annular recess 56 in the bearing piece 13, on the side of the bearing piece 13 facing the suction chamber 9. If the rotor 3 is directly coupled to the drive shaft 36, then can the bearing piece 13 be equipped with a further - motor-side - recess for a sealing ring. Finally, the bearing piece 13 also has the function of supporting the pump 1 via the foot 57 screwed onto the bearing piece 13.
  • the bearing piece 13 is equipped on its side facing the engine 4 with a circular recess 58 in which a disk 59 is located. This is held in position by the housing 61 of the drive motor 4. It is equipped with a central bore 62 which is penetrated by the shaft 36 of the drive motor 4. The shaft 36 forms the running surface for a second shaft sealing ring 63, which is located in a recess 64 on the motor side of the disk 59.
  • the disc 59 has the task of limiting the scooping space 45 of the oil pump 45, 46.
  • the disk 59 - alone or together with the bearing piece 13 - can also form the only pump-side bearing of the motor shaft 36.
  • the shaft 36 of the drive motor 4 is directly coupled to the rotor 3.
  • the cover plate 59 can be omitted, there are two recesses 56 with seals 55.
  • a cam 40 arranged on the shaft side engages in the recess 38 of the rotor 3.
  • the oil pump 45, 46 is located in the fore-vacuum end plate 12, which is used for accommodation the scoop chamber 45 of the oil pump is equipped with a cover 52.
  • the eccentric 46 of the oil pump is driven by projections or cams 53 on the fore-vacuum side of the rotor 3 (see also FIG. 4).
  • the oil pump 45, 46 is connected to the oil sump 20 via the bore 51. Channels connected to the outlet of the oil pump 45, 46 and leading to locations in the pump 1 to be supplied with oil are not shown.
  • FIG. 6 shows a further exemplary embodiment for the rotor 3.
  • the bearing section 23 and the armature section 21 of the fore-vacuum stage 8, 21 have a smaller diameter than the armature section 22 of the high-vacuum stage 9, 22 in order to keep the frictional forces small in these areas.
  • the diameter of the scooping chamber 8 and the bearing bore 11 must also be reduced.
  • the exemplary embodiments shown consist of a minimum of individual parts. This is achieved in that some components have multiple functions.
  • the pump according to the invention is thereby easier to manufacture and therefore less expensive.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

L'invention concerne une pompe à vide à palette (1) qui comprend un étage de vide très poussé (9, 22), un étage de prévide (8, 21), un rotor (3) sensiblement cylindrique qui comporte des sections de support et d'ancrage (11 et 21, 22), une section de support (11) se trouvant entre deux sections d'ancrage (21, 22) et ces dernières comportant des fentes pour palette (25, 26), ainsi qu'un carter (2) se présentant sous forme de pot qui renferme les chambres d'aspiration (8, 9) et dont le fond sert de pièce-support (13) et comporte un passage (35) pour l'entraînement du rotor. Afin d'avoir une fabrication simple, il est prévu que le rotor opérationnel (3) soit monobloc, que les deux sections d'ancrage (21, 22) du rotor (3) se trouvent à l'avant, que la section de support (11) située entre les sections d'ancrage (21, 22) soit la seule section de support et que les deux fentes pour palette (25, 26) soient ouvertes depuis leurs faces avant respectives.

Claims (21)

  1. Pompe à vide à palette (1) comprenant un étage à vide poussé (9, 22), un étage à vide préliminaire (8, 21), un rotor (3) sensiblement cylindrique qui présente des secteurs de montage et d'armature (11 ou 21, 22), dans laquelle un secteur de montage (11) se trouve entre deux secteurs d'armature (21, 22) et les secteurs d'armature (21, 22) sont équipés de fentes à tiroir (25, 26), et comprenant un boîtier (2) approximativement en forme de pot dans lequel se trouvent les chambres d'aspiration (8, 9) et dont la partie de fond est réalisée sous forme d'un élément de montage (13) présentant un passage (35) pour l'entraînement de rotor, caractérisée en ce que le rotor fonctionnel (3) est réalisé en une seule pièce, en ce que les deux secteurs d'armature (21, 22) du rotor (3) sont agencés du côté frontal, en ce que le secteur de montage (11) situé entre les secteurs d'annature (21, 22) est le seul secteur de montage, et en ce que les deux fentes à tiroir (25, 26) sont ouvertes depuis leur côté frontal respectif.
  2. Pompe selon la revendication 1, caractérisée en ce que l'étage à vide poussé (9, 22) se trouve au voisinage de l'élément de montage (13), et en ce que le côté frontal du secteur d'armature (22) de l'étage à vide poussée (9, 22) est équipé d'organes pour une liaison en coopération de formes du rotor (3) avec l'arbre d'entraînement (36) d'un moteur (4).
  3. Pompe selon la revendication 2, caractérisée en ce que le côté frontal du secteur d'armature (22) de l'étage à vide poussé (9, 22) est pourvu d'un évidement (38) pour l'engagement d'une saillie (39, 40).
  4. Pompe selon la revendication 3, caractérisée en ce que l'évidement (38) est réalisé sous forme oblongue, s'étend approximativement perpendiculairement à la fente à tiroir (26) et croise celle-ci, et en ce que la saillie (39, 40) dont la taille correspond à l'évidement (38) présente à son tour un évidement (41) qui entoure le tiroir (28).
  5. Pompe selon l'une quelconque des revendications 1 à 4, caractérisée en ce que le segment de paroi (7) du boîtier (2), qui entoure les deux chambres d'aspiration (8, 9), est réalisé en une seule pièce.
  6. Pompe selon l'une quelconque des revendications 1 à 5, caractérisée en ce qu'un pied (57) fonçant support pour la pompe (1) est relié au disque d'extrémité (13).
  7. Pompe selon l'une quelconque des revendications 1 à 6, caractérisée en ce qu'elle est équipée d'une pompe à huile (45, 46), et en ce qu'un canal (51', 51") relié à la sortie de la pompe à huile débouche dans la région du seul élément de montage du rotor (11).
  8. Pompe selon la revendication 7, caractérisée en ce qu'elle est équipée d'un élément d'accouplement (37) qui est situé dans le passage (35) de l'élément de montage (13) et qui relie en coopération de formes le rotor (3) à l'arbre (36) du moteur d'entraînement (4), et qui est une surface d'application pour au moins un joint d'étanchéité ondulé (55) et qui forme support pour le rotor (46) de la pompe à huile (45, 46).
  9. Pompe selon la revendication 8, caractérisée en ce que la pompe à huile (45, 46) se trouve du côté opposé à l'entraînement (4, 36) dans le disque d'extrémité (12).
  10. Pompe selon la revendication 9, caractérisée en ce que l'arbre (36) du moteur d'entraînement (4) est en liaison par coopération de formes avec l'un des côtés frontaux du rotor (3), et le rotor (46) de la pompe à huile avec l'autre côté frontal du rotor (3).
  11. Pompe selon l'une ou l'autre des revendications 9 et 10, caractérisée en ce que le passage (35, 62) dans l'élément de montage (13) et/ou dans un couvercle (59) forme le seul élément de montage côté pompe de l'arbre de moteur (36).
  12. Pompe selon l'une ou l'autre des revendications 2 et 3 et selon l'une quelconque des autres revendications, caractérisée en ce qu'il est prévu entre le rotor (3) et l'arbre (36) un ressort (50) qui exerce des forces dirigées axialement sur le rotor (3) et sur l'arbre (36).
  13. Pompe selon la revendication 12, caractérisée en ce que le ressort (50) se trouve entre l'élément d'accouplement (37) et l'arbre (36).
  14. Pompe selon les revendications 3 et 13, caractérisée en ce que le ressort (50) s'appuie sur la saillie (43) de l'élément d'accouplement (37) et dans un perçage borgne (49) côté frontal dans l'arbre (36).
  15. Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce que le secteur de montage (23) est pourvu d'une gorge périphérique (70).
  16. Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce que le rotor (3) est pourvu de perçages (71, 72) qui débouchent d'une part dans le côté frontal du secteur d'armature (21) de l'étage à vide préliminaire (8, 21), et d'autre part radialement dans le secteur de montage (23).
  17. Pompe selon la revendication 7 et selon l'une ou l'autre des revendications 15 et 16, caractérisée en ce que la gorge (70) et/ou l'embouchure du perçage (72) dans le secteur de montage (23) se trouvent à la hauteur de l'embouchure du perçage (51") côté boîtier dans l'élément de montage d'armature (11, 23).
  18. Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce que le secteur de montage (23) ainsi que les secteurs d'armature (21, 22) présentent le même diamètre.
  19. Pompe selon la revendication 18, caractérisée en ce que l'élément de montage (13) et le segment de boîtier qui entoure la chambre d'aspiration (9) côté élément de montage sont réalisés en une seule pièce.
  20. Pompe selon l'une ou l'autre des revendications 18 et 19, caractérisée en ce que le secteur d'armature (22) de l'étage à vide poussé (9, 22) présente une longueur au mois deux fois plus importante que le secteur d'armature (21) de l'étage à vide préliminaire (8, 21).
  21. Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce que la longueur du secteur de montage (11) est choisie de telle sorte que lors d'une position inclinée maximale du rotor (3), grâce au jeu de montage dans le perçage de montage (11), le rotor (3) est toujours en flottement, c'est-à-dire qu'il n'est pas en contact simultanément sur ses deux côtés frontaux.
EP94925379A 1993-07-28 1994-07-22 Pompe a vide a palette a deux etages Expired - Lifetime EP0711384B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4325286 1993-07-28
DE4325286A DE4325286A1 (de) 1993-07-28 1993-07-28 Zweistufige Drehschiebervakuumpumpe
PCT/EP1994/002425 WO1995004221A1 (fr) 1993-07-28 1994-07-22 Pompe a vide a palette a deux etages

Publications (2)

Publication Number Publication Date
EP0711384A1 EP0711384A1 (fr) 1996-05-15
EP0711384B1 true EP0711384B1 (fr) 1997-05-14

Family

ID=6493895

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94925379A Expired - Lifetime EP0711384B1 (fr) 1993-07-28 1994-07-22 Pompe a vide a palette a deux etages

Country Status (6)

Country Link
US (1) US5879138A (fr)
EP (1) EP0711384B1 (fr)
JP (1) JP3614434B2 (fr)
KR (1) KR100335037B1 (fr)
DE (2) DE4325286A1 (fr)
WO (1) WO1995004221A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017055129A1 (fr) * 2015-10-02 2017-04-06 Leybold Gmbh Pompe à palettes multicellulaire

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6929455B2 (en) 2002-10-15 2005-08-16 Tecumseh Products Company Horizontal two stage rotary compressor
US7059839B2 (en) 2002-12-10 2006-06-13 Tecumseh Products Company Horizontal compressor end cap with a terminal, a visually transparent member, and a heater well mounted on the end cap projection
EP1616099B1 (fr) * 2003-06-30 2007-08-08 Mahle Motorkomponenten Schweiz AG Rotor en metal fritte d'une pompe a piston rotatif
DE102006058839A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Schmiermittelgedichtete Drehschiebervakuumpumpe
JP5781334B2 (ja) * 2011-03-04 2015-09-24 アルバック機工株式会社 油回転真空ポンプ
DE202016005229U1 (de) 2016-08-26 2016-12-29 Oerlikon Leybold Vacuum Gmbh Mehrstufige Drehschieberpumpe
DE202015006922U1 (de) 2015-10-02 2017-01-03 Leybold Gmbh Mehrstufige Drehschieberpumpe
KR102027219B1 (ko) * 2018-12-24 2019-10-01 주식회사 백콤 내부점검과 이물질 제거기능을 갖는 수봉식 진공펌프

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Publication number Priority date Publication date Assignee Title
US2902210A (en) * 1955-08-15 1959-09-01 Edwards High Vacuum Ltd Multi-stage mechanical vacuum pumps
US2877946A (en) * 1955-11-10 1959-03-17 Central Scientific Co Vacuum pump
US3525578A (en) * 1968-11-29 1970-08-25 Precision Scient Co Vacuum pump
DE2354039A1 (de) * 1973-10-29 1975-05-07 Leybold Heraeus Gmbh & Co Kg Drehschieberpumpe
DE2401171A1 (de) * 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Oelfuehrung in einer drehschieberpumpe
DE3805346A1 (de) * 1987-04-04 1988-10-20 Barmag Barmer Maschf Fluegelzellenpumpe
DD299393A7 (de) * 1989-08-09 1992-04-16 Zwetkow,Zwetko,Bg Oelpumpe fuer rotierende vakuumpumpen
DE4017192A1 (de) * 1990-05-29 1991-12-05 Leybold Ag Verfahren zur herstellung eines pumpenringes fuer eine zweistufige vakuumpumpe sowie mit einem derartigen pumpenring ausgeruestete vakuumpumpe
DE4017191A1 (de) * 1990-05-29 1991-12-05 Leybold Ag Verfahren zur oelversorgung einer zweistufigen drehschiebervakuumpumpe und fuer die durchfuehrung dieses verfahrens geeignete drehschiebervakuumpumpe
DE4017194A1 (de) * 1990-05-29 1991-12-05 Leybold Ag Drehschiebervakuumpumpe
JPH06185482A (ja) * 1992-12-22 1994-07-05 Nippon Soken Inc ベーン型圧縮機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017055129A1 (fr) * 2015-10-02 2017-04-06 Leybold Gmbh Pompe à palettes multicellulaire

Also Published As

Publication number Publication date
US5879138A (en) 1999-03-09
DE4325286A1 (de) 1995-02-02
JPH09500703A (ja) 1997-01-21
DE59402769D1 (de) 1997-06-19
KR100335037B1 (ko) 2002-11-27
EP0711384A1 (fr) 1996-05-15
WO1995004221A1 (fr) 1995-02-09
KR960704158A (ko) 1996-08-31
JP3614434B2 (ja) 2005-01-26

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