DE59402769D1 - Zweistufige drehschiebervakuumpumpe - Google Patents

Zweistufige drehschiebervakuumpumpe

Info

Publication number
DE59402769D1
DE59402769D1 DE59402769T DE59402769T DE59402769D1 DE 59402769 D1 DE59402769 D1 DE 59402769D1 DE 59402769 T DE59402769 T DE 59402769T DE 59402769 T DE59402769 T DE 59402769T DE 59402769 D1 DE59402769 D1 DE 59402769D1
Authority
DE
Germany
Prior art keywords
rotary valve
stage rotary
valve pump
pump
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59402769T
Other languages
English (en)
Inventor
Lutz Arndt
Peter Mueller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE59402769D1 publication Critical patent/DE59402769D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/08—Rotary pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
DE59402769T 1993-07-28 1994-07-22 Zweistufige drehschiebervakuumpumpe Expired - Fee Related DE59402769D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4325286A DE4325286A1 (de) 1993-07-28 1993-07-28 Zweistufige Drehschiebervakuumpumpe
PCT/EP1994/002425 WO1995004221A1 (de) 1993-07-28 1994-07-22 Zweistufige drehschiebervakuumpumpe

Publications (1)

Publication Number Publication Date
DE59402769D1 true DE59402769D1 (de) 1997-06-19

Family

ID=6493895

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4325286A Withdrawn DE4325286A1 (de) 1993-07-28 1993-07-28 Zweistufige Drehschiebervakuumpumpe
DE59402769T Expired - Fee Related DE59402769D1 (de) 1993-07-28 1994-07-22 Zweistufige drehschiebervakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4325286A Withdrawn DE4325286A1 (de) 1993-07-28 1993-07-28 Zweistufige Drehschiebervakuumpumpe

Country Status (6)

Country Link
US (1) US5879138A (de)
EP (1) EP0711384B1 (de)
JP (1) JP3614434B2 (de)
KR (1) KR100335037B1 (de)
DE (2) DE4325286A1 (de)
WO (1) WO1995004221A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6929455B2 (en) 2002-10-15 2005-08-16 Tecumseh Products Company Horizontal two stage rotary compressor
US7059839B2 (en) 2002-12-10 2006-06-13 Tecumseh Products Company Horizontal compressor end cap with a terminal, a visually transparent member, and a heater well mounted on the end cap projection
EP1616099B1 (de) * 2003-06-30 2007-08-08 Mahle Motorkomponenten Schweiz AG Rotor aus sintermetall einer drehkolbenpumpe
DE102006058839A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Schmiermittelgedichtete Drehschiebervakuumpumpe
JP5781334B2 (ja) * 2011-03-04 2015-09-24 アルバック機工株式会社 油回転真空ポンプ
DE202016005229U1 (de) 2016-08-26 2016-12-29 Oerlikon Leybold Vacuum Gmbh Mehrstufige Drehschieberpumpe
SG10202110897RA (en) * 2015-10-02 2021-11-29 Leybold Gmbh Multi-stage rotary vane pump
DE202015006922U1 (de) 2015-10-02 2017-01-03 Leybold Gmbh Mehrstufige Drehschieberpumpe
KR102027219B1 (ko) * 2018-12-24 2019-10-01 주식회사 백콤 내부점검과 이물질 제거기능을 갖는 수봉식 진공펌프

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2902210A (en) * 1955-08-15 1959-09-01 Edwards High Vacuum Ltd Multi-stage mechanical vacuum pumps
US2877946A (en) * 1955-11-10 1959-03-17 Central Scientific Co Vacuum pump
US3525578A (en) * 1968-11-29 1970-08-25 Precision Scient Co Vacuum pump
DE2354039A1 (de) * 1973-10-29 1975-05-07 Leybold Heraeus Gmbh & Co Kg Drehschieberpumpe
DE2401171A1 (de) * 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Oelfuehrung in einer drehschieberpumpe
DE3805346A1 (de) * 1987-04-04 1988-10-20 Barmag Barmer Maschf Fluegelzellenpumpe
DD299393A7 (de) * 1989-08-09 1992-04-16 Zwetkow,Zwetko,Bg Oelpumpe fuer rotierende vakuumpumpen
DE4017192A1 (de) * 1990-05-29 1991-12-05 Leybold Ag Verfahren zur herstellung eines pumpenringes fuer eine zweistufige vakuumpumpe sowie mit einem derartigen pumpenring ausgeruestete vakuumpumpe
DE9007544U1 (de) * 1990-05-29 1992-08-13 Leybold Ag, 6450 Hanau, De
DE4017191A1 (de) * 1990-05-29 1991-12-05 Leybold Ag Verfahren zur oelversorgung einer zweistufigen drehschiebervakuumpumpe und fuer die durchfuehrung dieses verfahrens geeignete drehschiebervakuumpumpe
JPH06185482A (ja) * 1992-12-22 1994-07-05 Nippon Soken Inc ベーン型圧縮機

Also Published As

Publication number Publication date
WO1995004221A1 (de) 1995-02-09
US5879138A (en) 1999-03-09
DE4325286A1 (de) 1995-02-02
JP3614434B2 (ja) 2005-01-26
JPH09500703A (ja) 1997-01-21
KR100335037B1 (ko) 2002-11-27
EP0711384B1 (de) 1997-05-14
KR960704158A (ko) 1996-08-31
EP0711384A1 (de) 1996-05-15

Similar Documents

Publication Publication Date Title
DE69431761D1 (de) Multifunktions-rueckschlagventil
DE69400821D1 (de) Abgabeventil
DE69411352D1 (de) Drehkolbenverdichter
ITMI940438A0 (it) Valvola combinata
DE59404227D1 (de) Ventilanordnung
DE59405288D1 (de) Ventilanordnung
DE59400983D1 (de) Ventilblockaggregat
BR9400405A (pt) Válvula rotatória
DE9310673U1 (de) Rückschlagventil
DK0639407T3 (da) Kontraventil
DE59400776D1 (de) Flügelzellenpumpe
DE59402769D1 (de) Zweistufige drehschiebervakuumpumpe
DE59406388D1 (de) Ventilanordnung
DE59405336D1 (de) Ventilanordnung
DE69406752D1 (de) Sorptionspumpe
DE59408022D1 (de) Ventilanordnung
DE59403357D1 (de) Sperrventil
DE9314210U1 (de) Rückschlagventil
DE69410383D1 (de) Ventilanordnung
DE69401970T2 (de) Flügelzellenpumpe
DE59408103D1 (de) Drehschieberventil
KR940020931U (ko) 체크밸브
DE69418467D1 (de) Rückschlagventil
DE9319172U1 (de) Rückschlagventil
DE59401078D1 (de) Ventilanordnung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee