EP0711384B1 - Two-stage slide vane vacuum pump - Google Patents

Two-stage slide vane vacuum pump Download PDF

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Publication number
EP0711384B1
EP0711384B1 EP94925379A EP94925379A EP0711384B1 EP 0711384 B1 EP0711384 B1 EP 0711384B1 EP 94925379 A EP94925379 A EP 94925379A EP 94925379 A EP94925379 A EP 94925379A EP 0711384 B1 EP0711384 B1 EP 0711384B1
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EP
European Patent Office
Prior art keywords
rotor
bearing
pump according
pump
armature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP94925379A
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German (de)
French (fr)
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EP0711384A1 (en
Inventor
Lutz Arndt
Peter Müller
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Balzers und Leybold Deutschland Holding AG
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Leybold AG
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Publication of EP0711384A1 publication Critical patent/EP0711384A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/08—Rotary pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Definitions

  • the invention relates to a rotary vane vacuum pump with a high vacuum stage, with a fore vacuum stage, with a substantially cylindrical rotor which has bearing and armature sections, a bearing section being located between two armature sections and the armature sections being equipped with slide slots, and with an approximately cup-shaped one Housing which encloses the scooping spaces and the bottom part of which is designed as a bearing piece with a passage for a rotor drive.
  • High vacuum pumps require extremely precise manufacture of the individual components that produce the gas. If, for example, in a rotary vane vacuum pump, the gaps between the slides and the associated slide slots in the rotor, the gaps in the area of the anchor systems or - in the case of a two-stage rotary vane vacuum pump - the gaps in the sealing area between the high-vacuum stage and the fore-vacuum stage, flows that are opposite to the desired direction of flow occur (Backflows) that significantly impair the pump properties - pumping speed, compression, final pressure behavior, etc.
  • Backflows Backflows
  • a filler must be used again after milling the slide slots for the purpose of producing an operational rotor at the level of the central bearing section, so that the tight mutual separation of the two stages of the vacuum pump is ensured.
  • the manufacture of a rotor of this type is complex. Milling the slide slots is only possible with limited tolerance because of the need to use a milling disk with a relatively large diameter.
  • the present invention has for its object to provide a two-stage rotary vane vacuum pump of the type mentioned, which can be manufactured more easily and with greater precision.
  • each slide slot can be milled into the rotor cylinder from its associated end face.
  • the production of a slot section that has to be filled in again afterwards is no longer necessary. Milling disks with much smaller radii can be used, which means that much smaller tolerances of the slot dimensions can be achieved. This not only improves the pump properties; the slide assembly is also easier since both slots are accessible from their respective end faces.
  • the pump 1 shown essentially comprises the modules housing 2, rotor 3 and drive motor 4.
  • the housing 2 has essentially the shape of a pot with an outer wall 5, with the cover 6, with an inner part 7 with the scooping spaces 8, 9 and the bearing bore 11, with the end plate 12 and the bearing piece 13, which the scooping spaces 8, Complete at the front.
  • the axis of the bearing bore 11 is designated 14. Eccentric to this are the axes 15 and 16 of the scooping spaces 8, 9.
  • two oil eyes 18, 19 are provided in the cover 6. Oil filler and oil drain ports are not shown.
  • the anchor sections 21, 22 are equipped with slots 25, 26 for slides 27, 28. These are each milled from the associated end face of the rotor, so that exact slot dimensions can be achieved in a simple manner.
  • the bearing section 23 lies between the armature sections 21, 22.
  • the bearing section 23 and the bearing bore 11 form the only bearing of the rotor. This bearing must be of sufficient axial length to prevent the rotor from wobbling.
  • the length of the bearing is expediently chosen so that when the rotor 3 is tilted to the maximum possible, the rotor 3 is still floating due to the bearing play in the bearing bore 11, that is to say that it does not start simultaneously on its two end faces.
  • the armature section 22 and the associated scooping space 9 are longer than the armature section 21 with the scooping space 8.
  • the armature section 22 and scooping space 9 form the high vacuum stage.
  • the inlet of the high vacuum stage 9, 22 is connected to the intake manifold 30.
  • the outlet of the high vacuum stage 9, 22 and the inlet of the fore vacuum stage 8, 21 are connected via the housing bore 31 to their axis 32, which extends parallel to the axes 15, 16 of the scooping spaces 8, 9.
  • the outlet of the forevacuum stage 8, 21 opens into the oil space 17, which comprises the oil sump 20. There, the oil-containing gases calm down and leave the pump 1 through the outlet port 33.
  • the housing 2 of the pump is also expediently constructed from as few parts as possible. At least the wall sections 5, 7 comprising the two scooping spaces 8, 9 and the oil space 17 should be formed in one piece.
  • the bearing piece 13 is equipped with a bore 35 for a rotor drive. This can be the shaft 36 of the drive motor 4 directly.
  • a coupling piece 37 is provided between the free end face of the drive shaft 4 and the rotor 3.
  • the coupling of the rotor 3 with the coupling piece 37 and the coupling piece 37 with the drive shaft 36 takes place in a form-fitting manner via projections and corresponding recesses.
  • the rotor 3 is equipped on its end face facing the coupling piece 37 with an elongated recess 38 which extends perpendicular to the slide slot 26 (see also FIG. 2).
  • the coupling piece 37 engages in the recess 38.
  • the projection 39 of the coupling piece 37 is in turn equipped with the recess 41 which engages around the slide 28.
  • a corresponding connection exists between the drive shaft 36 with its elongated recess 42 and the coupling piece 37 with the corresponding projection 43.
  • FIG. 3 shows a further solution in which the drive-side end face of the rotor 3 is equipped with a shoulder 44 with a reduced diameter. This creates a slot in addition to the space occupied by the slide, into which an elongated projection on the coupling piece 37 or on the shaft 36 can engage.
  • the high vacuum stage 9, 22 should have a higher pumping speed than the fore-vacuum stage.
  • the axial length of the high vacuum stage must be greater than the length of the fore vacuum stage, for example at least twice as long.
  • the arrangement of the high-vacuum stage on the drive side has the advantage that only the short forevacuum stage is flying is supported while the relatively long high vacuum stage is supported in the coupling piece 37 or - if this is not present - in the shaft 36.
  • the pump of Figure 1 is finally equipped with an oil pump.
  • This consists of the scooping chamber 45, which is let into the bearing piece 13 from the motor side, with the eccentric 46 rotating therein.
  • the eccentric is connected to a locking slide 47 which is under the pressure of the spiral spring 48.
  • the inlet of the oil pump 45, 46 is connected to the oil sump 20 via a bore 51. All points of the pump 1 that require oil are connected to the outlet of the oil pump 45, 46.
  • a bore 51 ' is shown which opens into the bearing section 11 in the inner part 7 of the pump 1 via a transverse bore 51 "and supplies the bearing located there with lubricating oil.
  • the eccentric 46 of the oil pump is part of the coupling piece 37. It is either fixed or positively connected to the coupling piece 37 - axially displaceably arranged on the projection 42.
  • the solution described provides the option of dispensing with a separate pump-side mounting of the motor shaft 36.
  • the bearing piece 13 and - if present - the coupling piece 37 can take over this function.
  • the end face shown is provided with a central blind bore 49, in which the compression spring 50 is located.
  • the compression spring 50 is supported on the projection 43 of the coupling piece 37 and in the blind bore 49 and generates opposing forces on the shaft 37 (contact forces for the shaft bearing, not shown) 36) and the coupling piece 37.
  • these forces also have an effect on the rotor 3, the fore-vacuum end of which is thus pressed against the end plate 12.
  • This force reduces the gap between the rotor end face and the end plate 12 due to the play, so that a significant improvement in the compression capacity and thus a better final pressure can be achieved.
  • This advantage of tightness in the area of the fore-vacuum stage arises independently of the existing tolerances and can therefore be achieved without any particular increase in the production outlay.
  • the coupling piece 37 also forms the running surface for a sealing ring 55, which is located in an annular recess 56 in the bearing piece 13, on the side of the bearing piece 13 facing the suction chamber 9. If the rotor 3 is directly coupled to the drive shaft 36, then can the bearing piece 13 be equipped with a further - motor-side - recess for a sealing ring. Finally, the bearing piece 13 also has the function of supporting the pump 1 via the foot 57 screwed onto the bearing piece 13.
  • the bearing piece 13 is equipped on its side facing the engine 4 with a circular recess 58 in which a disk 59 is located. This is held in position by the housing 61 of the drive motor 4. It is equipped with a central bore 62 which is penetrated by the shaft 36 of the drive motor 4. The shaft 36 forms the running surface for a second shaft sealing ring 63, which is located in a recess 64 on the motor side of the disk 59.
  • the disc 59 has the task of limiting the scooping space 45 of the oil pump 45, 46.
  • the disk 59 - alone or together with the bearing piece 13 - can also form the only pump-side bearing of the motor shaft 36.
  • the shaft 36 of the drive motor 4 is directly coupled to the rotor 3.
  • the cover plate 59 can be omitted, there are two recesses 56 with seals 55.
  • a cam 40 arranged on the shaft side engages in the recess 38 of the rotor 3.
  • the oil pump 45, 46 is located in the fore-vacuum end plate 12, which is used for accommodation the scoop chamber 45 of the oil pump is equipped with a cover 52.
  • the eccentric 46 of the oil pump is driven by projections or cams 53 on the fore-vacuum side of the rotor 3 (see also FIG. 4).
  • the oil pump 45, 46 is connected to the oil sump 20 via the bore 51. Channels connected to the outlet of the oil pump 45, 46 and leading to locations in the pump 1 to be supplied with oil are not shown.
  • FIG. 6 shows a further exemplary embodiment for the rotor 3.
  • the bearing section 23 and the armature section 21 of the fore-vacuum stage 8, 21 have a smaller diameter than the armature section 22 of the high-vacuum stage 9, 22 in order to keep the frictional forces small in these areas.
  • the diameter of the scooping chamber 8 and the bearing bore 11 must also be reduced.
  • the exemplary embodiments shown consist of a minimum of individual parts. This is achieved in that some components have multiple functions.
  • the pump according to the invention is thereby easier to manufacture and therefore less expensive.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

The invention pertains to a slide vane vacuum pump (1) with a high vacuum stage (9, 22), with a fore-vacuum stage (8, 21), with a substantially cylindrical rotor (3) which has bearing and anchor segments (11 and 21, 22), a bearing segment (11) being situated between two anchor segments (21, 22) and the anchor segments (21, 22) having vane slots (25, 26), and with a roughly pot-shaped housing (2) which contains the pump chambers (8, 9) and whose base is designed as a bearing piece (13) with a passage (35) for the rotor drive. To provide for a simple manufacture, the invention proposes that the operation rotor (3) is of one piece, that the bearing segment (11) between the anchor segments (21, 22) is the only bearing segment and that both vane slots (25, 26) are open from their respective front ends.

Description

Die Erfindung bezieht sich auf eine Drehschiebervakuumpumpe mit einer Hochvakuumstufe, mit einer Vorvakuumstufe, mit einem im wesentlichen zylindrischen Rotor, der Lager- und Ankerabschnitte aufweist, wobei sich ein Lagerabschnitt zwischen zwei Ankerabschnitten befindet und die Ankerabschnitte mit Schieberschlitzen ausgerüstet sind, und mit einem etwa topfförmigen Gehäuse, das die Schöpfräume umschließt und dessen Bodenteil als Lagerstück mit einem Durchtritt für einen Rotorantrieb ausgebildet ist.The invention relates to a rotary vane vacuum pump with a high vacuum stage, with a fore vacuum stage, with a substantially cylindrical rotor which has bearing and armature sections, a bearing section being located between two armature sections and the armature sections being equipped with slide slots, and with an approximately cup-shaped one Housing which encloses the scooping spaces and the bottom part of which is designed as a bearing piece with a passage for a rotor drive.

Hochvakuumpumpen erfordern eine äußerst präzise Fertigung der einzelnen, die Gasförderung bewirkenden Bauteile. Sind beispielsweise bei einer Drehschiebervakuumpumpe die Spalte zwischen den Schiebern und den zugehörigen Schieberschlitzen im Rotor, die Spalte im Bereich der Ankeranlagen oder - bei einer zweistufigen Drehschiebervakuumpumpe - die Spalte im Abdichtungsbereich zwischen der Hochvakuumstufe und der Vorvakuumstufe zu groß, dann treten der gewünschten Förderrichtung entgegengerichtete Strömungen (Rückströmungen) auf, die die Pumpeigenschaften - Saugvermögen, Kompression, Enddruckverhalten usw. - maßgeblich beeinträchtigen.High vacuum pumps require extremely precise manufacture of the individual components that produce the gas. If, for example, in a rotary vane vacuum pump, the gaps between the slides and the associated slide slots in the rotor, the gaps in the area of the anchor systems or - in the case of a two-stage rotary vane vacuum pump - the gaps in the sealing area between the high-vacuum stage and the fore-vacuum stage, flows that are opposite to the desired direction of flow occur (Backflows) that significantly impair the pump properties - pumping speed, compression, final pressure behavior, etc.

Aus der DE-A-2354039 (Figur 3) ist eine zweistufige Drehschiebervakuumpumpe der eingangs erwähnten Art bekannt. Neben dem zwischen den Ankerabschnitten befindlichen Lagerabschnitt weist der Rotor auf einer seiner beiden Stirnseiten - auf der Seite der Vorvakuumstufe - noch einen weiteren Lagerabschnitt auf. Beide Schieberschlitze müssen deshalb von der anderen Stirnseite her - der Hochvakuumseite - in den Rotor gefräst werden. Nachteilig daran ist, daß dazu eine Frässcheibe mit einem relativ großen Radius - größer als die Summe aus den Längen beider Schieber und der Länge des mittleren Lagerabschnittes - verwendet werden muß. Außerdem muß nach dem Fräsen der Schieberschlitze zum Zwecke der Herstellung eines betriebsfähigen Rotors in Höhe des mittleren Lagerabschnittes wieder ein Füllstück eingesetzt werden, damit die dichte gegenseitige Trennung der beiden Stufen der Vakuumpumpe sichergestellt ist. Die Herstellung eines Rotors dieser Art ist aufwendig. Das Einfräsen der Schieberschlitze ist wegen der Notwendigkeit, eine Frässcheibe mit relativ großem Durchmesser verwenden zu müssen, nur mit begrenzter Toleranz möglich.From DE-A-2354039 (Figure 3) a two-stage rotary vane vacuum pump of the type mentioned is known. In addition to the bearing section located between the armature sections, the rotor has yet another bearing section on one of its two end faces - on the side of the fore-vacuum stage. Both slider slots must therefore be milled into the rotor from the other end - the high vacuum side. The disadvantage of this is that a milling disk with a relatively large radius - larger than the sum of the lengths of both slides and the length of the central bearing section - must be used. In addition, a filler must be used again after milling the slide slots for the purpose of producing an operational rotor at the level of the central bearing section, so that the tight mutual separation of the two stages of the vacuum pump is ensured. The manufacture of a rotor of this type is complex. Milling the slide slots is only possible with limited tolerance because of the need to use a milling disk with a relatively large diameter.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine zweistufige Drehschiebervakuumpumpe der eingangs erwähnten Art zu schaffen, die einfacher und mit größerer Präzision hergestellt werden kann.The present invention has for its object to provide a two-stage rotary vane vacuum pump of the type mentioned, which can be manufactured more easily and with greater precision.

Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst. Dadurch, daß es nicht mehr nötig ist, einen zweiten Lagerabschnitt auf einer der beiden Stirnseiten des Rotors vorzusehen, kann jeder Schieberschlitz von seiner zugehörigen Stirnseite her in den Rotorzylinder gefräst werden. Die Herstellung eines Schlitzabschnittes, der nachträglich wieder verfüllt werden muß, ist nicht mehr erforderlich. Frässcheiben mit wesentlich kleineren Radien können eingesetzt und damit wesentlich kleinere Toleranzen der Schlitzabmessungen erzielt werden. Dadurch werden nicht nur die Pumpeigenschaften verbessert; auch die Schiebermontage ist einfacher, da beide Schlitze von ihrer jeweiligen Stirnseite her zugänglich sind.According to the invention, this object is achieved by the characterizing features of the claims. Because it is no longer necessary to provide a second bearing section on one of the two end faces of the rotor, each slide slot can be milled into the rotor cylinder from its associated end face. The production of a slot section that has to be filled in again afterwards is no longer necessary. Milling disks with much smaller radii can be used, which means that much smaller tolerances of the slot dimensions can be achieved. This not only improves the pump properties; the slide assembly is also easier since both slots are accessible from their respective end faces.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 5 erläutert werden. Es zeigen:

  • Figur 1 einen Längsschnitt durch ein Ausführungsbeispiel für eine Drehschiebervakuumpumpe nach der Erfindung,
  • Figur 2 einen Rotor nach der Erfindung,
  • Figur 3 die hochvakuumseitige Stirnseite des Rotors mit Vorsprüngen,
  • Figur 4 die vorvakuumseitige Stirnseite des Rotors mit Vorsprüngen,
  • Figur 5 einen Längsschnitt durch ein weiteres Ausführungsbeispiel für eine Pumpe nach der Erfindung und
  • Figur 6 ein weiteres Ausführungsbeispiel für einen Rotor nach der Erfindung.
Further advantages and details of the invention will be explained with reference to FIGS. 1 to 5. Show it:
  • FIG. 1 shows a longitudinal section through an exemplary embodiment for a rotary vane vacuum pump according to the invention,
  • FIG. 2 shows a rotor according to the invention,
  • FIG. 3 the high-vacuum end face of the rotor with projections,
  • FIG. 4 shows the end of the rotor on the fore-vacuum side with projections,
  • Figure 5 shows a longitudinal section through a further embodiment for a pump according to the invention and
  • Figure 6 shows another embodiment of a rotor according to the invention.

Die dargestellte Pumpe 1 umfaßt im wesentlichen die Baugruppen Gehäuse 2, Rotor 3 und Antriebsmotor 4.The pump 1 shown essentially comprises the modules housing 2, rotor 3 and drive motor 4.

Das Gehäuse 2 hat im wesentlichen die Form eines Topfes mit einer äußeren Wandung 5, mit dem Deckel 6, mit einem Innenteil 7 mit den Schöpfräumen 8,9 sowie der Lagerbohrung 11, mit der Endscheibe 12 und dem Lagerstück 13, welche die Schöpfräume 8, 9 stirnseitig abschließen. Die Achse der Lagerbohrung 11 ist mit 14 bezeichnet. Exzentrisch dazu liegen die Achsen 15 und 16 der Schöpfräume 8, 9. Zwischen äußerer Wandung 5 und Innenteil 7 befindet sich der Ölraum 17, der während des Betriebs der Pumpe teilweise mit Öl gefüllt ist. Zur Kontrolle des Ölstandes sind im Deckel 6 zwei Ölaugen 18, 19 (maximaler, minimaler Ölstand) vorgesehen. Öleinfüll- und Ölablaßstutzen sind nicht dargestellt.The housing 2 has essentially the shape of a pot with an outer wall 5, with the cover 6, with an inner part 7 with the scooping spaces 8, 9 and the bearing bore 11, with the end plate 12 and the bearing piece 13, which the scooping spaces 8, Complete at the front. The axis of the bearing bore 11 is designated 14. Eccentric to this are the axes 15 and 16 of the scooping spaces 8, 9. Between the outer wall 5 and the inner part 7 there is the oil space 17, which is partially filled with oil during operation of the pump. To check the oil level, two oil eyes 18, 19 (maximum, minimum oil level) are provided in the cover 6. Oil filler and oil drain ports are not shown.

Innerhalb des Innenteils 7 befindet sich der Rotor 3, der in den Figuren 2 und 3 nochmals dargestellt ist. Er ist einteilig ausgebildet und weist zwei stirnseitig angeordnete Ankerabschnitte 21, 22 und einen zwischen den Ankerabschnitten 21, 22 befindlichen Lagerabschnitt 23 auf. Lagerabschnitt 23 und die Ankerabschnitte 21, 22 haben einen identischen Durchmesser. Die Ankerabschnitte 21, 22 sind mit Schlitzen 25, 26 für Schieber 27, 28 ausgerüstet. Diese sind jeweils von der zugehörigen Stirnseite des Rotors her eingefräst, so daß in einfacher Weise exakte Schlitzabmessungen erreicht werden können. Der Lagerabschnitt 23 liegt zwischen den Ankerabschnitten 21, 22. Lagerabschnitt 23 und Lagerbohrung 11 bilden die einzige Lagerung des Rotors. Diese Lagerung muß eine ausreichende axiale Länge haben, damit ein Taumeln des Rotors vermieden wird. Die Länge der Lagerung ist zweckmäßig so zu wählen, daß bei maximal möglicher Schrägstellung des Rotors 3 aufgrund des Lagerspiels in der Lagerbohrung 11 der Rotor 3 immer noch schwimmt, d.h., daß er nicht gleichzeitig an seinen beiden Stirnseiten anläuft.The rotor 3, which is shown again in FIGS. 2 and 3, is located within the inner part 7. It is made in one piece and has two end faces Anchor sections 21, 22 and a bearing section 23 located between the anchor sections 21, 22. Bearing section 23 and the anchor sections 21, 22 have an identical diameter. The anchor sections 21, 22 are equipped with slots 25, 26 for slides 27, 28. These are each milled from the associated end face of the rotor, so that exact slot dimensions can be achieved in a simple manner. The bearing section 23 lies between the armature sections 21, 22. The bearing section 23 and the bearing bore 11 form the only bearing of the rotor. This bearing must be of sufficient axial length to prevent the rotor from wobbling. The length of the bearing is expediently chosen so that when the rotor 3 is tilted to the maximum possible, the rotor 3 is still floating due to the bearing play in the bearing bore 11, that is to say that it does not start simultaneously on its two end faces.

Der Ankerabschnitt 22 und der zugehörige Schöpfraum 9 sind länger ausgebildet als der Ankerabschnitt 21 mit dem Schöpfraum 8. Ankerabschnitt 22 und Schöpfraum 9 bilden die Hochvakuumstufe. Während des Betriebs steht der Einlaß der Hochvakuumstufe 9, 22 mit dem Ansaugstutzen 30 in Verbindung. Der Auslaß der Hochvakuumstufe 9, 22 und der Einlaß der Vorvakuumstufe 8, 21 stehen über die Gehäusebohrung 31 mit ihrer Achse 32 in Verbindung, die sich parallel zu den Achsen 15, 16 der Schöpfräume 8,9 erstreckt. Der Auslaß der Vorvakuumstufe 8, 21 mündet in den Ölraum 17, der den Ölsumpf 20 umfaßt. Dort beruhigen sich die Ölhaltigen Gase und verlassen die Pumpe 1 durch den Auslaßstutzen 33. Aus Gründen der Übersichtlichkeit sind die Einlaß- und Auslaß-Öffnungen der beiden Pumpenstufen in Fig. 1 nicht dargestellt. Das Gehäuse 2 der Pumpe ist zweckmäßig ebenfalls aus möglichst wenig Teilen aufgebaut. Zumindest die die beiden Schöpfräume 8, 9 und den Ölraum 17 umfassenden Wandungsabschnitte 5, 7 sollten einstückig ausgebildet sein.The armature section 22 and the associated scooping space 9 are longer than the armature section 21 with the scooping space 8. The armature section 22 and scooping space 9 form the high vacuum stage. During operation, the inlet of the high vacuum stage 9, 22 is connected to the intake manifold 30. The outlet of the high vacuum stage 9, 22 and the inlet of the fore vacuum stage 8, 21 are connected via the housing bore 31 to their axis 32, which extends parallel to the axes 15, 16 of the scooping spaces 8, 9. The outlet of the forevacuum stage 8, 21 opens into the oil space 17, which comprises the oil sump 20. There, the oil-containing gases calm down and leave the pump 1 through the outlet port 33. For reasons of clarity, the inlet and outlet openings of the two pump stages are not shown in FIG. 1. The housing 2 of the pump is also expediently constructed from as few parts as possible. At least the wall sections 5, 7 comprising the two scooping spaces 8, 9 and the oil space 17 should be formed in one piece.

Koaxial mit der Achse 14 der Lagerbohrung 11 ist das Lagerstück 13 mit einer Bohrung 35 für einen Rotorantrieb ausgerüstet. Dieses kann unmittelbar die Welle 36 des Antriebsmotors 4 sein. Bei dem in Figur 1 dargestellten Ausführungsbeispiel ist zwischen der freien Stirnseite der Antriebswelle 4 und dem Rotor 3 ein Kupplungsstück 37 vorgesehen. Die Kupplung des Rotors 3 mit dem Kupplungsstück 37 sowie des Kupplungsstückes 37 mit der Antriebswelle 36 erfolgt formschlüssig über Vorsprünge und korrespondierende Aussparungen. Beim dargestellten Ausführungsbeispiel ist der Rotor 3 auf seiner dem Kupplungsstück 37 zugewandten Stirnseite mit einer länglichen Aussparung 38 ausgerüstet, die sich senkrecht zum Schieberschlitz 26 erstreckt (siehe auch Fig. 2). Mit einem länglichen Vorsprung 39 greift das Kupplungsstück 37 in die Aussparung 38 ein. Der Vorsprung 39 des Kupplungsstückes 37 ist seinerseits mit der Aussparung 41 ausgerüstet, welche den Schieber 28 umgreift. Eine entsprechende Verbindung besteht zwischen der Antriebswelle 36 mit ihrer länglichen Aussparung 42 und dem Kupplungsstück 37 mit dem korrespondierenden Vorsprung 43.Coaxial with the axis 14 of the bearing bore 11, the bearing piece 13 is equipped with a bore 35 for a rotor drive. This can be the shaft 36 of the drive motor 4 directly. In the embodiment shown in Figure 1, a coupling piece 37 is provided between the free end face of the drive shaft 4 and the rotor 3. The coupling of the rotor 3 with the coupling piece 37 and the coupling piece 37 with the drive shaft 36 takes place in a form-fitting manner via projections and corresponding recesses. In the exemplary embodiment shown, the rotor 3 is equipped on its end face facing the coupling piece 37 with an elongated recess 38 which extends perpendicular to the slide slot 26 (see also FIG. 2). With an elongated projection 39, the coupling piece 37 engages in the recess 38. The projection 39 of the coupling piece 37 is in turn equipped with the recess 41 which engages around the slide 28. A corresponding connection exists between the drive shaft 36 with its elongated recess 42 and the coupling piece 37 with the corresponding projection 43.

Die Aussparungen 38, 42 und die Vorsprünge 39, 43 können auch vertauscht sein. Figur 3 zeigt eine weitere Lösung, bei der die antriebsseitige Stirnseite des Rotors 3 mit einem im Durchmesser reduzierten Ansatz 44 ausgerüstet ist. Dadurch entsteht neben dem vom Schieber eingenommenen Raum ein Schlitz, in den ein länglicher Vorsprung am Kupplungsstück 37 oder an der Welle 36 eingreifen kann.The recesses 38, 42 and the projections 39, 43 can also be interchanged. FIG. 3 shows a further solution in which the drive-side end face of the rotor 3 is equipped with a shoulder 44 with a reduced diameter. This creates a slot in addition to the space occupied by the slide, into which an elongated projection on the coupling piece 37 or on the shaft 36 can engage.

Bei vielen, insbesondere größeren zweistufigen Vakuumpumpen soll die Hochvakuumstufe 9, 22 ein größeres Saugvermögen als die Vorvakuumstufe haben. Um dieses bei identischem Durchmesser der Ankerabschnitte erreichen zu können, ist muß die axiale Länge der Hochvakuumstufe größer als die Länge der Vorvakuumstufe sein, z.B. mindestens doppelt so groß. Durch die antriebsseitige Anordnung der Hochvakuumstufe ergibt sich der Vorteil, daß nur die kurze Vorvakuumstufe fliegend gelagert ist, während sich die relativ lange Hochvakuumstufe im Kupplungsstück 37 bzw. - wenn dieses nicht vorhanden ist - in der Welle 36 abstützt.In many, in particular larger, two-stage vacuum pumps, the high vacuum stage 9, 22 should have a higher pumping speed than the fore-vacuum stage. In order to be able to achieve this with an identical diameter of the armature sections, the axial length of the high vacuum stage must be greater than the length of the fore vacuum stage, for example at least twice as long. The arrangement of the high-vacuum stage on the drive side has the advantage that only the short forevacuum stage is flying is supported while the relatively long high vacuum stage is supported in the coupling piece 37 or - if this is not present - in the shaft 36.

Die Pumpe nach Figur 1 ist schließlich noch mit einer Ölpumpe ausgerüstet. Diese besteht aus dem in das Lagerstück 13 von der Motorseite her eingelassenen Schöpfraum 45 mit dem darin rotierenden Exzenter 46. Dem Exzenter liegt ein Sperrschieber 47 an, der unter dem Druck der Spiralfeder 48 steht.The pump of Figure 1 is finally equipped with an oil pump. This consists of the scooping chamber 45, which is let into the bearing piece 13 from the motor side, with the eccentric 46 rotating therein. The eccentric is connected to a locking slide 47 which is under the pressure of the spiral spring 48.

Über eine Bohrung 51 steht der Einlaß der Ölpumpe 45, 46 mit dem Ölsumpf 20 in Verbindung. Alle Stellen der Pumpe 1, die Öl benötigen, stehen mit dem Auslaß der Ölpumpe 45, 46 in Verbindung. Als Beispiel ist eine Bohrung 51' dargestellt, die über eine Querbohrung 51" in den Lagerabschnitt 11 im Innenteil 7 der Pumpe 1 mündet und die dort befindliche Lagerung mit Schmieröl versorgt.The inlet of the oil pump 45, 46 is connected to the oil sump 20 via a bore 51. All points of the pump 1 that require oil are connected to the outlet of the oil pump 45, 46. As an example, a bore 51 'is shown which opens into the bearing section 11 in the inner part 7 of the pump 1 via a transverse bore 51 "and supplies the bearing located there with lubricating oil.

Beim Ausführungsbeispiel nach Figur 1 ist der Exzenter 46 der Ölpumpe Bestandteil des Kupplungsstückes 37. Er ist entweder fest oder formschlüssig - axial verschieblich auf dem Vorsprung 42 angeordnet - mit dem Kupplungsstück 37 verbunden. Insgesamt bildet die beschriebene Lösung die Möglichkeit auf eine separate pumpenseitige Lagerung der Motorwelle 36 zu verzichten. Das Lagerstück 13 und - falls vorhanden - das Kupplungsstück 37 können diese Funktion übernehmen. Darüberhinaus besteht die Möglichkeit, im Bereich der dargestellten Stirnseite der Welle 36 Lageranstellkräfte für das im Bereich der nicht dargestellten Stirnseite der Welle 36 vorhandene Lager zu erzeugen. Dazu ist die dargestellte Stirnseite mit einer zentralen Sackbohrung 49 versehen, in der sich die Druckfeder 50 befindet. Die Druckfeder 50 stützt sich auf dem Vorsprung 43 des Kupplungsstückes 37 sowie in der Sackbohrung 49 ab und erzeugt einander entgegengerichtete Kräfte auf die Welle 37 (Anstellkräfte für das nicht dargestellte Lager der Welle 36) und das Kupplungsstück 37. Insbesondere bei axial verschieblichem Exzenter 46 wirken sich diese Kräfte auch auf den Rotor 3 aus, dessen vorvakuumseitige Stirnseite damit gegen die Endscheibe 12 gedrückt wird. Diese Kraft reduziert den aufgrund des Spiels vorhandenen Spalt zwischen Rotorstirnseite und Endscheibe 12, so daß eine maßgebliche Verbesserung des Kompressionsvermögens und damit ein besserer Enddruck erzielt werden können. Dieser Vorteil der Dichtheit im Bereich der Vorvakuumstufe ergibt sich unabhängig von den vorhandenen Toleranzen und kann deshalb ohne besondere Erhöhung des Fertigungsaufwandes erzielt werden.In the exemplary embodiment according to FIG. 1, the eccentric 46 of the oil pump is part of the coupling piece 37. It is either fixed or positively connected to the coupling piece 37 - axially displaceably arranged on the projection 42. Overall, the solution described provides the option of dispensing with a separate pump-side mounting of the motor shaft 36. The bearing piece 13 and - if present - the coupling piece 37 can take over this function. In addition, there is the possibility of generating bearing contact forces in the region of the end face of the shaft 36 shown for the bearing present in the region of the end face of the shaft 36, not shown. For this purpose, the end face shown is provided with a central blind bore 49, in which the compression spring 50 is located. The compression spring 50 is supported on the projection 43 of the coupling piece 37 and in the blind bore 49 and generates opposing forces on the shaft 37 (contact forces for the shaft bearing, not shown) 36) and the coupling piece 37. In particular in the case of an axially displaceable eccentric 46, these forces also have an effect on the rotor 3, the fore-vacuum end of which is thus pressed against the end plate 12. This force reduces the gap between the rotor end face and the end plate 12 due to the play, so that a significant improvement in the compression capacity and thus a better final pressure can be achieved. This advantage of tightness in the area of the fore-vacuum stage arises independently of the existing tolerances and can therefore be achieved without any particular increase in the production outlay.

Das Kupplungsstück 37 bildet außerdem noch die Lauffläche für einen Dichtring 55, der sich in einer ringförmigen Aussparung 56 im Lagerstück 13 befindet, und zwar auf der dem Schöpfraum 9 zugewandten Seite des Lagerstücks 13. Ist der Rotor 3 unmittelbar mit der Antriebswelle 36 gekoppelt, dann kann das Lagerstück 13 mit einer weiteren - motorseitigen - Aussparung für einen Dichtring ausgerüstet sein. Schließlich hat das Lagerstück 13 noch die Funktion, die Pumpe 1 über den am Lagerstück 13 angeschraubten Fuß 57 abzustützen.The coupling piece 37 also forms the running surface for a sealing ring 55, which is located in an annular recess 56 in the bearing piece 13, on the side of the bearing piece 13 facing the suction chamber 9. If the rotor 3 is directly coupled to the drive shaft 36, then can the bearing piece 13 be equipped with a further - motor-side - recess for a sealing ring. Finally, the bearing piece 13 also has the function of supporting the pump 1 via the foot 57 screwed onto the bearing piece 13.

Beim dargestellten Ausführungsbeispiel mit der Ölpumpe 45, 46 ist das Lagerstück 13 auf seiner dem Motor 4 zugewandten Seite mit einer kreisförmigen Aussparung 58 ausgerüstet, in der sich eine Scheibe 59 befindet. Diese wird vom Gehäuse 61 des Antriebsmotors 4 in ihrer Position gehalten. Sie ist mit einer zentralen Bohrung 62 ausgerüstet, die von der Welle 36 des Antriebsmotors 4 durchsetzt ist. Die Welle 36 bildet die Lauffläche für einen zweiten Wellendichtring 63, der sich in einer motorseitigen Aussparung 64 der Scheibe 59 befindet. Außerdem hat die Scheibe 59 die Aufgabe, den Schöpfraum 45 der Ölpumpe 45, 46 zu begrenzen. Schließlich kann die Scheibe 59 - allein oder zusammen mit dem Lagerstück 13 - ebenfalls die einzige pumpenseitige Lagerung der Motorwelle 36 bilden.In the illustrated embodiment with the oil pump 45, 46, the bearing piece 13 is equipped on its side facing the engine 4 with a circular recess 58 in which a disk 59 is located. This is held in position by the housing 61 of the drive motor 4. It is equipped with a central bore 62 which is penetrated by the shaft 36 of the drive motor 4. The shaft 36 forms the running surface for a second shaft sealing ring 63, which is located in a recess 64 on the motor side of the disk 59. In addition, the disc 59 has the task of limiting the scooping space 45 of the oil pump 45, 46. Finally, the disk 59 - alone or together with the bearing piece 13 - can also form the only pump-side bearing of the motor shaft 36.

Beim Ausführungsbeispiel nach Figur 5 ist die Welle 36 des Antriebsmotors 4 unmittelbar mit dem Rotor 3 gekoppelt. Im Lagerstück 13 befinden sich, da die Deckelscheibe 59 entfallen kann, zwei Aussparungen 56 mit Dichtungen 55. Ein wellenseitig angeordneter Nocken 40 greift in die Aussparung 38 des Rotors 3. Die Ölpumpe 45, 46 befindet sich in der vorvakuumseitigen Endscheibe 12, die zur Unterbringung des Schöpfraumes 45 der Ölpumpe mit einem Deckel 52 ausgerüstet ist. Mit Vorsprüngen oder Nocken 53 an der vorvakuumseitigen Stirnseite des Rotors 3 (siehe auch Fig. 4) erfolgt der Antrieb des Exzenters 46 der Ölpumpe. Über die Bohrung 51 steht die Ölpumpe 45, 46 mit dem Ölsumpf 20 in Verbindung. Mit dem Auslaß der Ölpumpe 45, 46 verbundene, zu mit Öl zu versorgenden Stellen in der Pumpe 1 führende Kanäle sind nicht dargestellt.In the exemplary embodiment according to FIG. 5, the shaft 36 of the drive motor 4 is directly coupled to the rotor 3. In the bearing piece 13, since the cover plate 59 can be omitted, there are two recesses 56 with seals 55. A cam 40 arranged on the shaft side engages in the recess 38 of the rotor 3. The oil pump 45, 46 is located in the fore-vacuum end plate 12, which is used for accommodation the scoop chamber 45 of the oil pump is equipped with a cover 52. The eccentric 46 of the oil pump is driven by projections or cams 53 on the fore-vacuum side of the rotor 3 (see also FIG. 4). The oil pump 45, 46 is connected to the oil sump 20 via the bore 51. Channels connected to the outlet of the oil pump 45, 46 and leading to locations in the pump 1 to be supplied with oil are not shown.

Figur 6 zeigt ein weiteres Ausführungsbeispiel für den Rotor 3. Lagerabschnitt 23 und Ankerabschnitt 21 der Vorvakuumstufe 8, 21 haben einen gegenüber dem Ankerabschnitt 22 der Hochvakuumstufe 9, 22 verkleinerten Durchmesser, um die Reibungskräfte in diesen Bereichen klein zu halten. Bei einer (nicht dargestellten) Pumpe 1, in die ein Rotor 3 dieser Art eingesetzt wird, müssen die Durchmesser des Schöpfraumes 8 und der Lagerbohrung 11 ebenfalls reduziert sein.FIG. 6 shows a further exemplary embodiment for the rotor 3. The bearing section 23 and the armature section 21 of the fore-vacuum stage 8, 21 have a smaller diameter than the armature section 22 of the high-vacuum stage 9, 22 in order to keep the frictional forces small in these areas. In the case of a pump 1 (not shown) into which a rotor 3 of this type is inserted, the diameter of the scooping chamber 8 and the bearing bore 11 must also be reduced.

Weitere Unterschiede des Rotors 3 nach Figur 6 gegenüber dem Rotor 3 nach Figur 2 sind:

  • Die Aussparungen 38 in der freien Stirnseite des Ankerabschnittes 22 der Hochvakuumstufe 9, 22 haben die Form von Sackbohrungen. Entsprechend müssen die Vorsprünge 39 am Kupplungsstück 37 stiftförmig sein (nicht dargestellt).
  • Der Lagerabschnitt 23 ist mit einer umlaufenden Nut 70 versehen, die sich etwa in Höhe der Mündung der Querbohrung 11 (vgl. Figur 1) befindet. Eine ausreichende Schmiermittelversorgung der Lagerung ist dadurch sichergestellt.
  • Der Ankerabschnitt 21 der Vorvakuumstufe ist mit einer Längsbohrung 71 ausgerüstet, die von seiner Stirnseite ausgeht und mit einer Querbohrung 72 in Verbindung steht. Die Mündung 73 der Querbohrung 72 befindet sich in Höhe der Nut 70 und damit auch im Bereich der Mündung der gehäuseseitigen Querbohrung 51". Über die Bohrungen 71, 72 erfolgt die Schmierung des Spaltes zwischen der Stirnseite des Ankerabschnittes 21 und dem Lagerdeckel 12.
Further differences between the rotor 3 according to FIG. 6 and the rotor 3 according to FIG. 2 are:
  • The cutouts 38 in the free end face of the armature section 22 of the high vacuum stage 9, 22 have the shape of blind bores. Accordingly, the projections 39 on the coupling piece 37 must be pin-shaped (not shown).
  • The bearing section 23 is provided with a circumferential groove 70 which is approximately at the level of the mouth of the Cross bore 11 (see FIG. 1) is located. This ensures an adequate supply of lubricant to the bearing.
  • The armature section 21 of the fore-vacuum stage is equipped with a longitudinal bore 71, which starts from its end face and is connected to a transverse bore 72. The opening 73 of the transverse bore 72 is located at the level of the groove 70 and thus also in the region of the opening of the transverse bore 51 ″ on the housing side. The bores 71, 72 are used to lubricate the gap between the end face of the armature section 21 and the bearing cover 12.

Die dargestellten Ausführungsbeispiele bestehen aus einem Minimum an Einzelteilen. Dieses wird dadurch erreicht, daß einige Bauteile mehrere Funktionen haben. Die erfindungsgemäße Pumpe wird dadurch einfacher herstellbar und somit kostengünstiger.The exemplary embodiments shown consist of a minimum of individual parts. This is achieved in that some components have multiple functions. The pump according to the invention is thereby easier to manufacture and therefore less expensive.

Claims (21)

  1. Slide vane vacuum pump (1) having a high-vacuum stage (9, 22), having an initial vacuum stage (8, 21), having a substantially cylindrical rotor (3) comprising bearing and armature portions (11 and 21, 22 respectively), one bearing portion (11) being situated between two armature portions (21, 22) and the armature portions (21, 22) being equipped with vane slots (25, 26), and having a substantially pot-shaped housing (2), in which the suction chambers (8, 9) are situated and of which the base part is designed as a bearing piece (13) with a passage (35) for the rotor drive, characterized in that the operable rotor (3) comprises a single part, that both armature portions (21, 22) of the rotor (3) are disposed at an end face, that the bearing portion (11) situated between the armature portions (21, 22) is the sole bearing portion and that both vane slots (25, 26) are open from their respective end face.
  2. Pump according to claim 1, characterized in that the high vacuum stage (9, 22) is adjacent to the bearing piece (13) and that the end face of the armature portion (22) of the high vacuum stage (9, 22) is equipped with means of connecting the rotor (3) in a keyed manner to the drive shaft (36) of a motor (4).
  3. Pump according to claim 2, characterized in that the end face of the armature portion (22) of the high vacuum stage (9, 22) is equipped with a recess (38) for the engagement of a projection (39, 40).
  4. Pump according to claim 3, characterized in that the recess (38) is oblong, extends substantially at right angles to the vane slot (26) and crosses said vane slot and that the projection (39, 40), which in terms of its size corresponds with the recess (38), in turn has a recess (41) embracing the slide vane (28).
  5. Pump according to one of claims 1 to 4, characterized in that the wall portion (7) of the housing (2) enclosing the two suction chambers (8, 9) is of a one-part construction.
  6. Pump according to one of claims 1 to 5, characterized in that a foot (57) supporting the pump (1) is connected to the end plate (13).
  7. Pump according to one of claims 1 to 6, characterized in that it is equipped with an oil pump (45, 46) and that a channel (51', 51") connected to the outlet of the oil pump opens in the region of the single rotor bearing (11).
  8. Pump according to claim 7, characterized in that it is equipped with a coupling piece (37), which is situated in the passage (35) of the bearing piece (13), connects rotor (3) and shaft (36) of the drive motor (4) in a keyed manner to one another, is the running surface for at least one shaft sealing ring (55) and is the carrier of the rotor (46) of the oil pump (45, 46).
  9. Pump according to claim 8, characterized in that the oil pump (45, 46) is situated in the opposite side of the end plate (12) to the drive (4, 36).
  10. Pump according to claim 9, characterized in that the shaft (36) of the drive motor (4) is key-connected to the one end face of the rotor (3) and the rotor (46) of the oil pump is key-connected to the other end face of the rotor (3).
  11. Pump according to claim 9, 10 or 11, characterized in that the passage (35, 62) in the bearing piece (13) and/or in a cover (59) forms the single pump-side bearing of the motor shaft (36).
  12. Pump according to claim 2 or 3 and one of the remaining claims, characterized in that disposed between rotor (3) and shaft (36) is a spring (50) which exerts axially directed forces upon the rotor (3) and the shaft (36).
  13. Pump according to claim 12, characterized in that the spring (50) is situated between coupling piece (37) and shaft (36).
  14. Pump according to claim 3 and claim 13, characterized in that the spring (50) is supported on the projection (43) of the coupling piece (37) and in a blind hole (49) in the end face of the shaft (36).
  15. Pump according to one of the preceding claims, characterized in that the bearing portion (23) is equipped with a circumferential groove (70).
  16. Pump according to one of the preceding claims, characterized in that the rotor (3) is provided with bores (71, 72) which open, on the one hand, into the end face of the armature portion (21) of the initial vacuum stage (8, 21) and, on the other hand, radially into the bearing portion (23).
  17. Pump according to claim 7 and one of claims 15 or 16, characterized in that the groove (70) and/or the opening of the bore (72) into the bearing portion (23) are situated at the level of the opening of the housing-side bore (51") into the armature bearing (11, 23).
  18. Pump according to one of the preceding claims, characterized in that the bearing portion (23) as well as the armature portions (21, 22) have the same diameter.
  19. Pump according to claim 18, characterized in that the bearing piece (13) and the housing portion, which encloses the suction chamber (9) on the bearing piece side, are of an integral construction.
  20. Pump according to claim 18 or 19, characterized in that the armature portion (22) of the high vacuum stage (9, 22) is at least twice as long as the armature portion (21) of the initial vacuum stage (8, 21).
  21. Pump according to one of the preceding claims, characterized in that the length of the bearing portion (11) is so selected that, given the maximum possible inclination of the rotor (3), by virtue of the bearing clearance in the bearing bore 11 the rotor (3) still floats, i.e. it does not start up simultaneously at its two end faces.
EP94925379A 1993-07-28 1994-07-22 Two-stage slide vane vacuum pump Expired - Lifetime EP0711384B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4325286A DE4325286A1 (en) 1993-07-28 1993-07-28 Two-stage rotary vane vacuum pump
DE4325286 1993-07-28
PCT/EP1994/002425 WO1995004221A1 (en) 1993-07-28 1994-07-22 Two-stage slide vane vacuum pump

Publications (2)

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EP0711384A1 EP0711384A1 (en) 1996-05-15
EP0711384B1 true EP0711384B1 (en) 1997-05-14

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US (1) US5879138A (en)
EP (1) EP0711384B1 (en)
JP (1) JP3614434B2 (en)
KR (1) KR100335037B1 (en)
DE (2) DE4325286A1 (en)
WO (1) WO1995004221A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017055129A1 (en) * 2015-10-02 2017-04-06 Leybold Gmbh Multi-stage rotary vane pump

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6929455B2 (en) 2002-10-15 2005-08-16 Tecumseh Products Company Horizontal two stage rotary compressor
US7059839B2 (en) 2002-12-10 2006-06-13 Tecumseh Products Company Horizontal compressor end cap with a terminal, a visually transparent member, and a heater well mounted on the end cap projection
US7458792B2 (en) * 2003-06-30 2008-12-02 Mahle Motorkomponenten Schweiz Ag Sintered metal rotor of a rotary piston pump
DE102006058839A1 (en) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Lubricant-sealed rotary vane vacuum pump
JP5781334B2 (en) * 2011-03-04 2015-09-24 アルバック機工株式会社 Oil rotary vacuum pump
DE202015006922U1 (en) 2015-10-02 2017-01-03 Leybold Gmbh Multi-stage rotary vane pump
DE202016005229U1 (en) 2016-08-26 2016-12-29 Oerlikon Leybold Vacuum Gmbh Multi-stage rotary vane pump
KR102027219B1 (en) * 2018-12-24 2019-10-01 주식회사 백콤 Water ring vaccum pump having internal check or debris removement function

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2902210A (en) * 1955-08-15 1959-09-01 Edwards High Vacuum Ltd Multi-stage mechanical vacuum pumps
US2877946A (en) * 1955-11-10 1959-03-17 Central Scientific Co Vacuum pump
US3525578A (en) * 1968-11-29 1970-08-25 Precision Scient Co Vacuum pump
DE2354039A1 (en) * 1973-10-29 1975-05-07 Leybold Heraeus Gmbh & Co Kg ROTARY VALVE PUMP
DE2401171A1 (en) * 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Rotary sliding vane pump - sliding vane seal arrangement is submerged in oil inside a container
DE3805346A1 (en) * 1987-04-04 1988-10-20 Barmag Barmer Maschf Vane-cell pump
DD299393A7 (en) * 1989-08-09 1992-04-16 Zwetkow,Zwetko,Bg OIL PUMP FOR ROTATING VACUUM PUMPS
DE4017191A1 (en) * 1990-05-29 1991-12-05 Leybold Ag METHOD FOR OIL SUPPLYING A TWO-STAGE ROTARY VALVE VACUUM PUMP AND A ROTARY VALVE VACUUM PUMP SUITABLE FOR CARRYING OUT THIS METHOD
DE4017192A1 (en) * 1990-05-29 1991-12-05 Leybold Ag METHOD FOR PRODUCING A PUMP RING FOR A TWO-STAGE VACUUM PUMP AND VACUUM PUMP EQUIPPED WITH SUCH A PUMP RING
DE4017194A1 (en) * 1990-05-29 1991-12-05 Leybold Ag ROTARY VALVE VACUUM PUMP
JPH06185482A (en) * 1992-12-22 1994-07-05 Nippon Soken Inc Vane type compressor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017055129A1 (en) * 2015-10-02 2017-04-06 Leybold Gmbh Multi-stage rotary vane pump

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JP3614434B2 (en) 2005-01-26
JPH09500703A (en) 1997-01-21
WO1995004221A1 (en) 1995-02-09
US5879138A (en) 1999-03-09
DE59402769D1 (en) 1997-06-19
DE4325286A1 (en) 1995-02-02
KR100335037B1 (en) 2002-11-27
EP0711384A1 (en) 1996-05-15
KR960704158A (en) 1996-08-31

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