EP0711386B1 - Pompe a vide etanche a l'huile - Google Patents

Pompe a vide etanche a l'huile Download PDF

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Publication number
EP0711386B1
EP0711386B1 EP94917665A EP94917665A EP0711386B1 EP 0711386 B1 EP0711386 B1 EP 0711386B1 EP 94917665 A EP94917665 A EP 94917665A EP 94917665 A EP94917665 A EP 94917665A EP 0711386 B1 EP0711386 B1 EP 0711386B1
Authority
EP
European Patent Office
Prior art keywords
rotor
pump
coupling member
shaft
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94917665A
Other languages
German (de)
English (en)
Other versions
EP0711386A1 (fr
Inventor
Thomas Abelen
Lutz Arndt
Peter Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0711386A1 publication Critical patent/EP0711386A1/fr
Application granted granted Critical
Publication of EP0711386B1 publication Critical patent/EP0711386B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00—Joints and connections
    • Y10T403/70—Interfitted members
    • Y10T403/7016—Diametric end slot is joint component

Definitions

  • the invention relates to an oil-sealed vacuum pump with a scoop, with one rotatably arranged therein Rotor, with one the drive chamber on the drive side limiting bearing and with a passage in Bearing piece in which there is a coupling piece for positive locking Connection of the rotor to the shaft of a Drive motor and a sealing ring to seal the Coupling piece opposite the passage in the end plate are located, the coupling piece carrier one Is a rotor for an oil pump, the volume of which is in the End plate is formed.
  • a vacuum pump of this type is known from DE-A-24 01 171 known.
  • the one used in this known pump Coupling piece is cup-shaped.
  • the wave of Drive motor reaches into the interior of the coupling piece and stands with this over radial cams in a positive connection.
  • This solution put one Manufacture of the coupling piece with very small tolerances as well as a precise centric assembly of the drive shaft or the drive motor ahead, so that the sealing effect and the lifespan of that on the coupling piece running shaft seals through a non-centric Rotation of the coupling piece is avoided.
  • the present invention is based on the object an oil-sealed vacuum pump of the type mentioned to create their coupling component without interference the tightness in the end plate easier to manufacture and to be assembled.
  • the pump is supposed to an inexpensive oil pump will.
  • the coupling piece designed according to the invention has in addition the previously known functions (clutch, tread for a shaft sealing ring) additionally the function, Carrier and drive of a rotor for an oil pump too be. The total number of individual parts to be manufactured is reduced. In addition, the coupling piece itself easier to manufacture because it's a centric Blind hole no longer required. The exact centric one Barrel of the coupling piece is through the front arranged positive connections to the rotor or to the shaft of the drive motor hardly affected.
  • the pump 1 shown essentially comprises the assemblies Housing 2, rotor 3 and drive motor 4.
  • the housing 2 has essentially the shape of a pot an outer wall 5, with the lid 6, with an inner part 7 with the scoops 8.9 and the bearing bore 11, with the end plate 12 and the bearing piece 13, which the Complete scoops 8, 9 on the front.
  • the axis of the Bearing bore 11 is designated 14. Eccentric to it are the axes 15 and 16 of the scoops 8, 9.
  • Between Outer wall 5 and inner part 7 is the oil space 17, partially with oil during operation of the pump is filled.
  • two oil eyes 18, 19 are provided. Oil filler and oil drain ports are not shown.
  • the rotor 3 which in Figures 2 and 3 is shown again. It is in one piece formed and has two end faces arranged Anchor sections 21, 22 and one between the anchor sections 21, 22 located bearing section 23. Storage section 23 and the anchor sections 21, 22 have one identical diameter.
  • the anchor sections 21, 22 are with Slots 25, 26 equipped for slide 27, 28. These are each from the associated face of the rotor milled so that exact slot dimensions in a simple manner can be achieved.
  • the bearing section 23 is located between the anchor sections 21, 22nd bearing section 23 and Bearing bore 11 form the only bearing of the rotor. This bearing must have a sufficient axial length to prevent the rotor from wobbling.
  • the length of the Storage should be chosen so that at maximum possible inclination of the rotor 3 due to the bearing play the rotor 3 is still in the bearing bore 11 swims, i.e. that he does not use his two at the same time End faces tarnishes.
  • the anchor section 22 and the associated scoop space 9 are longer than the anchor portion 21 with the Scooping space 8.
  • Anchor section 22 and scooping space 9 form the High vacuum stage.
  • the outlet of the high vacuum stage 9, 22 and the inlet the fore-vacuum stage 8, 21 are above the housing bore 31 with its axis 32 in connection, which is parallel to the Axes 15, 16 of the scoops 8.9 extends.
  • the outlet of the Forevacuum stage 8, 21 opens into the oil space 17, which the Oil sump 20 includes.
  • the oily gases calm down there and leave the pump 1 through the outlet port 33.
  • the inlet and outlet openings are for reasons of clarity of the two pump stages not shown in Fig. 1.
  • the housing 2 of the pump is also useful made up of as few parts as possible. At least that comprising two scoops 8, 9 and the oil space 17 Wall sections 5, 7 should be formed in one piece.
  • the bearing piece is coaxial with the axis 14 of the bearing bore 11 13 equipped with a bore 35 for a rotor drive.
  • This can directly drive shaft 36 of the drive motor 4.
  • a coupling piece 37 is provided in the embodiment shown in Figure 1 is between the free end of the drive shaft 4 and the rotor 3, a coupling piece 37 is provided.
  • the coupling of the rotor 3 with the coupling piece 37 and the coupling piece 37 with the drive shaft 36 takes place form-fitting via projections and corresponding Recesses.
  • the Rotor 3 on its end face facing the coupling piece 37 equipped with an elongated recess 38, the extends perpendicular to the slide slot 26 (see also Fig. 2).
  • With an elongated projection 39 it grips Coupling piece 37 into the recess 38.
  • the lead 39 the coupling piece 37 is in turn with the recess 41 equipped, which engages around the slide 28.
  • Figure 3 shows a further solution, at which the drive-side end of the rotor 3 with an im Diameter reduced approach 44 is equipped. Thereby arises next to the space occupied by the slider Slot into which an elongated protrusion on the coupling piece 37 or can engage on the shaft 36.
  • the high vacuum stage 9, 22 should have a greater pumping speed than have the pre-vacuum level.
  • Around this with an identical diameter To be able to reach the anchor sections must be axial length of the high vacuum stage greater than the length of the Be forevacuum stage, e.g. at least twice as big.
  • the inlet of the oil pump 45, 46 is located via a bore 51 the oil sump 20 in connection. All places of pump 1 that Oil need stand with the outlet of the oil pump 45, 46 in Connection.
  • a bore 51 ' is shown as an example, which via a transverse bore 51 "in the bearing section 11 in Inner part 7 of the pump 1 opens and the one located there Storage supplied with lubricating oil.
  • the eccentric 46 the oil pump is part of the coupling 37. It is either fixed or positive - axially movable the projection 42 arranged - with the coupling piece 37 connected.
  • the solution described forms the Possibility of storing the pump separately To waive motor shaft 36.
  • the bearing piece 13 and - if present - the coupling 37 can do this function take over.
  • the compression spring 50 is supported on the projection 43 of the Coupling piece 37 and in the blind bore 49 from and generates opposing forces on the shaft 37 (Contact forces for the shaft bearing, not shown 36) and the coupling piece 37. Especially with axial Slidable eccentric 46, these forces also act on the rotor 3, the fore-vacuum end face so that it is pressed against the end plate 12. That power reduces the gap between due to the game Rotor face and end plate 12, so that a significant Improvement of the compression ability and thus a better one Final pressure can be achieved.
  • This advantage of Tightness in the area of the fore-vacuum stage is independent of the existing tolerances and can therefore without special increase in manufacturing costs can be achieved.
  • the coupling piece 37 also forms the tread for a sealing ring 55, which is in an annular Recess 56 is in the bearing piece 13, on the the side of the bearing piece 13 facing the suction chamber 9 the rotor 3 is directly coupled to the drive shaft 36 then the bearing piece 13 with another - motor side - Recess for a sealing ring.
  • the bearing piece 13 has the function that Pump 1 via foot 57 screwed to bearing piece 13 to support.
  • the bearing piece 13 on its motor 4 facing Side equipped with a circular recess 58, in which is a disc 59.
  • This is from the housing 61st of the drive motor 4 held in position. She is with a central bore 62 equipped by the shaft of the drive motor 4 is penetrated.
  • the shaft 36 forms the Tread for a second shaft seal 63, which is in a recess 64 on the motor side of the disk 59 is located.
  • the disk 59 has the task of creating the scoop space 45 to limit the oil pump 45, 46.
  • the Disc 59 - alone or together with the bearing piece 13 - also the only bearing on the pump side of the motor shaft 36 form.
  • Figure 4 shows a section through the end plate 13 in height the oil pump 45, 46.
  • the eccentric to the axis of the coupling piece 37 arranged rotor 46 rotates in the scoop 45.
  • the rotor 46 and the coupling piece 37 are in one piece educated.
  • the locking slide 47 in contact with the rotor 46 defines a suction space that merges with bore 51 in Connection is established.
  • the line 51 ' forms the outlet of the oil pump.
  • Figure 5 shows three different views of a coupling piece 37, in which the rotor 46 is a separate component. It is positively connected to the coupling piece 37, by having an elongated projection 43 Passage 65 is equipped. The projection 43 is around axial extension of the rotor 46 formed longer and forms the driver for the rotor. This allows the tolerance chain interrupt, i.e., on the run of the rotor 46 tolerances can be better compensated. In addition, the eccentric 46 does not hinder the impact of the Force of the spring 50 ( Figure 1) on the rotor 3 and thus the desired reduction of the gap between end plate 12 and rotor 3.
  • the rotor 46 according to FIG. 5 differs from the rotor 46 according to Figure 4 in that it is oval (polygon with two Corners).
  • An oil pump has one per revolution of the shaft 36 such a rotor two pump phases. Polygons too Profiles with three or more corners can be used.
  • the illustrated embodiments consist of a Minimum of individual parts. This is achieved in that some components have multiple functions.
  • the invention This makes the pump easier to manufacture and thus cheaper.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (14)

  1. Pompe à vide à joint à huile (1) comprenant une chambre d'aspiration (8, 9), un rotor (3) qui y est monté rotatif, un élément de palier (13) qui limite la chambre d'aspiration sur le côté d'entraínement et un passage traversant (35) ménagé dans le palier (13) et dans lequel se trouvent une pièce d'accouplement (37) servant à relier le rotor (3) par une liaison par sûreté de forme à l'arbre (36) d'un moteur d'entraínement (4), ainsi qu'une bague d'étanchéité (55) servant à établir un joint étanche entre la pièce d'accouplement et le passage traversant (35) de l'élément de palier (13), la pièce d'accouplement (37) étant le support d'un rotor (46) d'une pompe à huile (45, 46) dont la chambre d'aspiration (45) est formée dans le flasque d'extrémité (13), caractérisée en ce que des liaisons servant à l'établissement de liaisons par sûreté de forme entre le rotor (3) et la pièce d'accouplement (37) ainsi qu'entre la pièce d'accouplement (37) et l'arbre (36) respectivement sont agencées en position frontale.
  2. Pompe selon la revendication 1, caractérisée en ce que la pièce d'accouplement (37) et le rotor (46) de la pompe à huile (45, 46) sont construits en une seule pièce.
  3. Pompe selon la revendication 1, caractérisée en ce que la pièce d'accouplement (37) et le rotor (46) de la pompe à huile (45, 46) sont des éléments séparés qui sont accouplés l'un à l'autre par une liaison par sûreté de forme pendant le fonctionnement.
  4. Pompe selon la revendication 3, caractérisée en ce qu'une liaison par sûreté de forme reliant la pièce d'accouplement (37) au rotor (3) ou à l'arbre (36) forme en même temps la liaison par sûreté de forme entre la pièce d'accouplement (37) et le rotor (46).
  5. Pompe selon la revendication 4, caractérisée en ce que la pompe à huile (45, 46) est agencée côté entraínement, que la pièce d'accouplement (37) soit équipée d'une protubérance (43) et que la protubérance (43) est en liaison par sûreté de forme aussi bien avec le rotor (46) de la pompe à huile (45, 46) qu'avec l'arbre (36) du moteur d'entraínement (4).
  6. Pompe selon une des revendications précédentes, caractérisée en ce que la face frontale du rotor (3) est munie d'un évidement (38) pour l'engagement d'une protubérance (39) de la pièce d'accouplement (37).
  7. Pompe selon la revendication 6, caractérisée en ce que l'évidement (38) est de forme allongée, s'étend à peu près perpendiculairement à la fente de palette (26) ménagée dans le rotor (3) et croise cette fente et en ce que la saillie d'entraínement (39) de la pièce d'accouplement (37) qui correspond à l'évidement (38) sous l'aspect de sa dimension présente un évidement (41) qui entoure la palette (28).
  8. Pompe selon une des revendications 1 à 5, caractérisée en ce que la face frontale du rotor (3) présente des protubérances (44) pour l'établissement d'une liaison par sûreté de forme avec la pièce d'accouplement (37).
  9. Pompe selon une des revendications précédentes, caractérisée en ce que l'admission (51) de la pompe à huile (45, 46) est en communication avec le carter d'huile (20) de la pompe par un canal (51).
  10. Pompe selon une des revendications précédentes, caractérisée en ce que, sur le côté entraínement, est prévu un flasque (59) qui limite la chambre d'aspiration (45) de la pompe à huile (45, 46) et dont le passage traversant (62) prévu pour l'arbre (36) est muni d'un évidement (64) pour recevoir une deuxième bague d'étanchéité d'arbre (63).
  11. Pompe selon la revendication 10, caractérisée en ce que le flasque d'extrémité (13) est muni d'un évidement (58) pour recevoir le flasque d'extrémité (59) et en ce que le flasque (59) est retenu dans sa position de travail par le carter (61) du moteur d'entraínement (4).
  12. Pompe selon une des revendications 1 à 11, caractérisée en ce qu'entre le rotor (3) et l'arbre (36) est disposé un ressort (50) qui exerce des forces orientées axialement sur le rotor (3) et sur l'arbre (36).
  13. Pompe selon la revendication 12, caractérisée en ce que le ressort (50) se trouve entre la pièce d'accouplement (3) et l'arbre (36).
  14. Pompe selon la revendication 5 et la revendication 13, caractérisée en ce que le ressort (50) prend appui sur la protubérance (43) de la pièce d'accouplement (37) et dans un perçage borgne frontal (49) ménagé dans l'arbre (36).
EP94917665A 1993-07-28 1994-05-26 Pompe a vide etanche a l'huile Expired - Lifetime EP0711386B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4325285A DE4325285A1 (de) 1993-07-28 1993-07-28 Ölgedichtete Vakuumpumpe
DE4325285 1993-07-28
PCT/EP1994/001680 WO1995004222A1 (fr) 1993-07-28 1994-05-26 Pompe a vide etanche a l'huile

Publications (2)

Publication Number Publication Date
EP0711386A1 EP0711386A1 (fr) 1996-05-15
EP0711386B1 true EP0711386B1 (fr) 1998-03-25

Family

ID=6493894

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94917665A Expired - Lifetime EP0711386B1 (fr) 1993-07-28 1994-05-26 Pompe a vide etanche a l'huile

Country Status (6)

Country Link
US (1) US5749716A (fr)
EP (1) EP0711386B1 (fr)
JP (1) JPH09500942A (fr)
KR (1) KR960704160A (fr)
DE (2) DE4325285A1 (fr)
WO (1) WO1995004222A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19526321A1 (de) * 1995-07-19 1997-01-23 Leybold Ag Ölgedichtete Drehschiebervakuumpumpe mit Ölpumpe
DE19526303A1 (de) * 1995-07-19 1997-01-23 Leybold Ag Ölgedichtete Drehschiebervakuumpumpe mit einer Ölversorgung
DE10024669B4 (de) * 2000-05-18 2005-10-13 Hella Kgaa Hueck & Co. Pumpe
EP2746532B1 (fr) 2012-12-19 2018-02-14 Pierburg Pump Technology GmbH Agencement de rotor pour une pompe à vide ainsi que la pompe à vide dotée d'un tel agencement de rotor

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1190134B (de) * 1957-02-07 1965-04-01 Edwards High Vacuum Ltd Drehkolben-Vakuumpumpe mit oelueberlagertem Auspuffventil
US3289601A (en) * 1965-02-12 1966-12-06 Fawick Corp Fluid displacement device usable as a hydraulic motor or pump
DE2354039A1 (de) * 1973-10-29 1975-05-07 Leybold Heraeus Gmbh & Co Kg Drehschieberpumpe
DE2401171A1 (de) * 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Oelfuehrung in einer drehschieberpumpe
US4120621A (en) * 1976-07-19 1978-10-17 Puritan Bennett Corporation Oil sealed single stage vacuum pump
US4276005A (en) * 1979-04-26 1981-06-30 Varian Associates, Inc. Oil flow metering structure for oil sealed mechanical vacuum vane pump
IT1207829B (it) * 1987-02-04 1989-06-01 Galileo Spa Off Perfezionamento nel circuito di lubrificazione delle pompe rotative per vuoto.
DE3805346A1 (de) * 1987-04-04 1988-10-20 Barmag Barmer Maschf Fluegelzellenpumpe
JPH0784869B2 (ja) * 1988-09-20 1995-09-13 三菱電機株式会社 スクロール流体機械
JPH0385387A (ja) * 1989-08-28 1991-04-10 Mitsubishi Electric Corp スクロール圧縮機
DE4017191A1 (de) * 1990-05-29 1991-12-05 Leybold Ag Verfahren zur oelversorgung einer zweistufigen drehschiebervakuumpumpe und fuer die durchfuehrung dieses verfahrens geeignete drehschiebervakuumpumpe
JPH05172073A (ja) * 1991-12-24 1993-07-09 Toshiba Corp 流体圧縮機
KR950007519B1 (ko) * 1992-09-09 1995-07-11 김영수 로터리 형식의 진공펌프장치

Also Published As

Publication number Publication date
EP0711386A1 (fr) 1996-05-15
WO1995004222A1 (fr) 1995-02-09
US5749716A (en) 1998-05-12
DE4325285A1 (de) 1995-02-02
JPH09500942A (ja) 1997-01-28
DE59405538D1 (de) 1998-04-30
KR960704160A (ko) 1996-08-31

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