EP0839282B1 - Oil-sealed vane-type rotary vacuum pump with an oil pump - Google Patents

Oil-sealed vane-type rotary vacuum pump with an oil pump Download PDF

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Publication number
EP0839282B1
EP0839282B1 EP96925748A EP96925748A EP0839282B1 EP 0839282 B1 EP0839282 B1 EP 0839282B1 EP 96925748 A EP96925748 A EP 96925748A EP 96925748 A EP96925748 A EP 96925748A EP 0839282 B1 EP0839282 B1 EP 0839282B1
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EP
European Patent Office
Prior art keywords
oil
pump
slide valve
vacuum pump
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96925748A
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German (de)
French (fr)
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EP0839282A1 (en
Inventor
Thomas Abelen
Peter Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
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Leybold Vakuum GmbH
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Publication of EP0839282A1 publication Critical patent/EP0839282A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation

Definitions

  • the invention relates to an oil-sealed rotary vane vacuum pump with an oil pump, the pumping chamber is equipped with supply lines for oil and gas.
  • the oil with gas preferably air a reduction in the operating noise of the vacuum pump reached.
  • a rotary vane vacuum pump with the features of the generic term of claim 1 is from DE-A-3922417 known.
  • the gas and oil feeds into the pumping chamber the oil pump according to the prior art are such arranged that the oil pump first only air and then only sucks oil. This is achieved in that the Distance between the air intake openings on the one hand and oil, on the other hand, is so large that the intake opening is only released for oil when the next slider already the circulating funding volume separated from the air intake.
  • a simultaneous intake of air and oil is not possible.
  • the previously known solution therefore uses an oil pump with at least three evenly over sliders ahead of the circumference. Only because of that ensures that oil is also in the start-up phase of the pump is sucked in.
  • the present invention is based on the object an oil-sealed vacuum pump of the type mentioned to be designed such that their supply with a gas-oil mixture is particularly simple.
  • the pump 1 shown comprises the assemblies housing 2, rotor 3 and drive motor 4.
  • the housing 2 has essentially the shape of a pot with an outer wall 5, with the lid 6, with a Inner part 7 with the scoops 8, 9 and the bearing bore 11, with the end plate 12 and the bearing piece 13, which close the scoops 8, 9 at the end.
  • the Axis of the bearing bore 11 is designated 14.
  • Between outer wall 5 and inner part 7 is located the oil space 17, which partially during the operation of the pump is filled with oil.
  • oil eyes 18, 19 in the cover 6 maximum, minimum Oil level. Oil filler and drain plug are not shown.
  • the oil sump is designated by 20.
  • the rotor 3 is located within the inner part 7 is formed in one piece and has two end faces Anchor sections 21, 22 and one between the Anchor sections 21, 22 located bearing section 23 on.
  • the anchor sections 21, 22 are provided with slots 24, 25 equipped for two sliders 26, 27.
  • the representation according to Figure 1 is chosen so that the respective slide spaces 28, 29 lie in the plane of the drawing.
  • the slide slots 25, 26 are each of the associated Milled end face of the rotor, so that in exact slot dimensions can be achieved in a simple manner can.
  • the bearing section 23 lies between the anchor sections 21, 22. Bearing section 23 and bearing bore 11 form the only bearing of the rotor.
  • Anchor section 22 and the associated scooping space 9 have a larger diameter than the anchor section 21 with the scooping space 8.
  • Anchor section 22 and scooping space 9 form the high vacuum stage.
  • the inlet of the high vacuum stage 9, 22 with the intake manifold 30 in connection stands the inlet of the high vacuum stage 9, 22 with the intake manifold 30 in connection.
  • the outlet of the high vacuum stage 9, 22 and the inlet of the fore-vacuum stage 8, 21 via the housing bore 31 in connection extends parallel to the axes of the scoops 8, 9.
  • the outlet of the forevacuum stage 8, 21 opens into the oil space 17. There the oily gases calm down and leave the pump 1 through the outlet port 33.
  • the inlet and outlet openings are clear of the two pump stages not shown in Fig. 1.
  • the housing 2 of the pump is expedient from as few as possible Parts built up. At least that the two scoops 8, 9 and wall sections comprising the oil chamber 17 5, 7 should be formed in one piece.
  • the bearing piece is coaxial with the axis 14 of the bearing bore 11 13 with a bore 35 for a rotor drive equipped. This can be the shaft 35 of the Drive motor 4 be.
  • the embodiment is between the free end face the drive shaft 36 and the rotor 3 a coupling piece 37 provided. The way of coupling the coupling piece 37 with the drive shaft 36 on the one hand and with the rotor on the other hand is not described in detail. It is explained in more detail in DE-A-43 25 285.
  • the pump shown is equipped with an oil pump. This consists of the in the bearing piece 13 of the Scooping space 45 embedded in the engine side with the therein rotating oval eccentric 46.
  • the eccentric is a Locking slide 47 on, under the pressure of the coil spring 48 stands.
  • the eccentric 46 of the oil pump is a component of the coupling piece 37. It is either fixed or positive - only with axial play - with the coupling piece 37 connected.
  • the oil pump 45, 46 is 64 via a first channel from the oil space 17 and a second channel 65 oil from the Oil sump 20 supplied.
  • the air-oil mixture leaving the oil pump enters channel 66 which enters the bearing bore 11 (mouth 67) opens.
  • mouth 67 is the bearing pin 23 with a continuous radial bore 68 provided, of which an axial bore 69 with a nozzle 70 branches in the direction of the slide gap 28.
  • the location of the mouth 67 of the channel 66 on the one hand and the mouth of the radial bore 68 in the journal 23 on the other hand is chosen so that oil from channel 66 only can then briefly enter the bore 68 when the slider 26 take their T position.
  • the vacuum pump according to the invention is a one-stage Pump, then the relevant portion of the oil-air mixture flows over the bores 66, 68, 69 and the slide gap 28 into the scooping chamber 8 and arrives from there back into the oil space 17. Just a very small one Part of the oil gets into the bearing gap between the bearing bore 11 and journal 23 and supplies this storage with lubricating oil. It flows through the bearing gap and then also reaches the scooping chamber 8. Is the vacuum pump - As in the embodiment of Figure 1 shown - trained in two stages, a third occurs Oil-air partial flow in the bearing gap of the bearing 11, 23 in the direction of high vacuum pump stage 9, 22. Would Oil-air mixture get into the high vacuum stage, then would the air contained in the oil the final pressure behavior of the vacuum pump.
  • the bearing pin 23 has a circumferential groove 74 equipped, at the height of which a bore 75 opens communicates with the intermediate vacuum (bore 31).
  • Figure 2 shows a plan view of the bearing piece 13.
  • the circular scoop 45 of the Oil pump let in there is a in the scoop oval-shaped rotor 46, the locking slide 47 of lies below.
  • the direction of rotation is indicated by an arrow featured.
  • an oil supply 81 In the volume that increases its volume (right of the gate valve 47) opens first an oil supply 81.
  • Via a laterally branching groove 82 it stands with the back of the locking slide 47 in Connection, supplies it with lubricating oil and causes a pressure relief in the gate valve slot.
  • An air supply 83 opens out offset by the angle ⁇ the scooping space 45. This is also designed as a groove and stands with the air supply duct 64 ( Figure 1) in Connection.
  • the oil-air mixture drawn in depends on the respective delivery volume promoted to outlet 84. This is formed from a groove that communicates with channel 66 ( Figure 1) stands.
  • the size of the angle ⁇ (azinuthal distance of the Air supply from the oil supply) depends on the proportion of Air in the oil-air mixture. By changing the angle ⁇ can be influenced on this part.
  • the size of the angle ⁇ is between 5 ° and 90 °, preferably 30-40. It is essential that - this also applies for rotors designed differently than shown - while a significant part of the intake bunny both oil and air is also sucked in.

Abstract

The invention concerns an oil-sealed vane-type rotary vacuum pump (1) with a rotor (3) and an oil pump (45, 46) whose suction chamber is fitted with feeds (64, 65) for gas and oil. In order to simplify the supply of a gas/oil mixture to the vacuum pump, the invention proposes that the gas and oil feeds (34, 35) are disposed in such a way that initially only oil and subsequently both oil and air are aspirated into the volume swept by the oil pump (45, 46) as it rotates.

Description

Die Erfindung bezieht sich auf eine ölgedichtete Drehschiebervakuumpumpe mit einer Ölpumpe, deren Schöpfraum mit Zuführungen für Öl und Gas ausgerüstet ist. Durch die Beladung des Öls mit Gas, vorzugsweise Luft, wird eine Reduzierung der Betriebsgeräusche der Vakuumpumpe erreicht.The invention relates to an oil-sealed rotary vane vacuum pump with an oil pump, the pumping chamber is equipped with supply lines for oil and gas. By the loading of the oil with gas, preferably air a reduction in the operating noise of the vacuum pump reached.

Eine Drehschiebervakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1 ist aus der DE-A-3922417 bekannt. Die Zuführungen für Gas und Öl in den Förderraum der Ölpumpe nach dem Stand der Technik sind derart angeordnet, daß die Ölpumpe zunächst nur Luft und dann nur Öl ansaugt. Dieses wird dadurch erreicht, daß der Abstand zwischen den Ansaugöffnungen für Luft einerseits und Öl andererseits so groß bemessen ist, daß die Ansaugöffnung für Öl erst dann freigegeben wird, wenn der nächstfolgende Schieber das umlaufende Fördervolumen bereits von der Luftansaugöffnung getrennt hat. Ein gleichzeitiges Ansaugen von Luft und Öl ist nicht möglich. Die vorbekannte Lösung setzt deshalb die Verwendung einer Ölpumpe mit mindestens drei gleichmäßig über den Umfang verteilten Schiebern voraus. Nur dadurch ist sichergestellt, daß auch in der Anlaufphase der Pumpe Öl angesaugt wird. Ohne Ölversorgung würde nach kurzer Zeit sowohl die Ölpumpe als auch die mit Öl zu versorgende Drehschiebervakuumpumpe Schaden nehmen. Eine als Drehschieberpumpe mit drei Schiebern ausgebildete Ölpumpe ist aufwendig und damit kostspielig. Weiterhin kann auf die Menge der angesaugten Luft bzw. des angesaugten Öls nur mit Hilfe von Düsen Einfluß genommen werden, bei denen die Gefahr der Verstopfung besteht.A rotary vane vacuum pump with the features of the generic term of claim 1 is from DE-A-3922417 known. The gas and oil feeds into the pumping chamber the oil pump according to the prior art are such arranged that the oil pump first only air and then only sucks oil. This is achieved in that the Distance between the air intake openings on the one hand and oil, on the other hand, is so large that the intake opening is only released for oil when the next slider already the circulating funding volume separated from the air intake. A simultaneous intake of air and oil is not possible. The previously known solution therefore uses an oil pump with at least three evenly over sliders ahead of the circumference. Only because of that ensures that oil is also in the start-up phase of the pump is sucked in. Without an oil supply it would take a short time both the oil pump and the one to be supplied with oil Rotary vane vacuum pump damaged. One as a rotary vane pump Oil pump designed with three sliders is complex and therefore expensive. Furthermore, on the amount of air or oil drawn in can only be influenced with the help of nozzles where there is a risk of constipation.

Aus der EU-A-474066 ist es bekannt, das einer ebenfalls als Drehschieberpumpe ausgebildeten Ölpumpe zugeführte Gas und Öl vor dem Eintritt in die Ölpumpe zu mischen. Dazu wird eine Venturi-Düse verwendet. Im Bereich der Venturi-Düse sind der Luftstrom und der Ölstrom parallel gerichtet. Dadurch entsteht ein Druckabfall, so daß sich das Öl mit den mitgerissenen Gasen belädt. Auch diese Lösung ist insbesondere wegen der Verwendung der Venturi-Düse technisch relativ aufwendig.From EU-A-474066 it is known that one also Oil pump designed as a rotary vane pump Mix gas and oil before entering the oil pump. A Venturi nozzle is used for this. In the field of Venturi nozzle, the air flow and the oil flow are parallel directed. This creates a pressure drop, so that loaded the oil with the entrained gases. This too Solution is especially because of the use of the venturi nozzle technically relatively complex.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine ölgedichtete Vakuumpumpe der eingangs erwähnten Art derart zu gestalten, daß ihre Versorgung mit einem Gas-Ölgemisch besonders einfach ist.The present invention is based on the object an oil-sealed vacuum pump of the type mentioned to be designed such that their supply with a gas-oil mixture is particularly simple.

Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale des Patentanspruchs 1 gelöst. Bei einer Vakuumpumpe nach der Erfindung ist es nicht mehr erforderlich, als Drehschieberpumpen ausgebildete Ölpumpen und/oder von der Ölpumpe unabhängige Mittel zur Vermischung von Öl und Luft einzusetzen. Dadurch, daß zunächst Öl und dann gleichzeitig Luft und Öl angesaugt wird, tritt eine wirksame Vermischung von Gas und Öl bereits in der Ölpumpe ein. Das Ansaugen von zunächst Öl und dann sowohl Öl als auch Luft erfolgt in ein- und dasselbe Fördervolumen. Mit Drehschiebern ausgerüstete Ölpumpen, deren Fördervolumina die Ansaugöffnungen von Luft und Gas stets getrennt halten müssen, sind nicht mehr erforderlich. Ein besonderer Vorteil besteht noch darin, daß über die Winkellage der Ansaugöffnung für Luft der angesaugte Luftanteil bestimmt werden kann. Auf den Einsatz von Düsen zum Zwecke einer Einflußnahme auf die Luft-/Öl-Anteile im geförderten Gemisch kann verzichtet werden. According to the invention, this object is achieved by the characterizing Features of claim 1 solved. At a Vacuum pump according to the invention, it is no longer necessary Oil pumps designed as rotary vane pumps and / or means of mixing independent of the oil pump of oil and air. By first Oil and then sucked air and oil at the same time effective mixing of gas and oil already occurs in the oil pump. Sucking in oil first and then both oil and air takes place in and the same funding volume. Equipped with rotary valves Oil pumps, the delivery volumes of which are from Air and gas must not always be kept separate more needed. There is still a particular advantage in that about the angular position of the suction opening for Air the sucked air portion can be determined. On the use of nozzles for the purpose of influencing the air / oil proportions in the extracted mixture can be dispensed with become.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand eines in den Figuren 1 und 2 dargestellten Ausführungsbeispieles erläutert werden.

  • Figur 1 einen Längsschnitt durch ein Ausführungsbeispiel für eine Drehschiebervakuumpumpe nach der Erfindung und
  • Figur 2 eine Draufsicht auf ein Lagerstück, in das die Ölpumpe eingelassen ist.
Further advantages and details of the invention will be explained with reference to an embodiment shown in Figures 1 and 2.
  • Figure 1 shows a longitudinal section through an embodiment of a rotary vane vacuum pump according to the invention and
  • Figure 2 is a plan view of a bearing piece in which the oil pump is inserted.

Die dargestellte Pumpe 1 umfaßt die Baugruppen Gehäuse 2, Rotor 3 und Antriebsmotor 4.The pump 1 shown comprises the assemblies housing 2, rotor 3 and drive motor 4.

Das Gehäuse 2 hat im wesentlichen die Form eines Topfes mit einer äußeren Wandung 5, mit dem Deckel 6, mit einem Innenteil 7 mit den Schöpfräumen 8, 9 sowie der Lagerbohrung 11, mit der Endscheibe 12 und dem Lagerstück 13, welche die Schöpfräume 8, 9 stirnseitig abschließen. Die Achse der Lagerbohrung 11 ist mit 14 bezeichnet. Zwischen äußerer Wandung 5 und Innenteil 7 befindet sich der Ölraum 17, der während des Betriebs der Pumpe teilweise mit Öl gefüllt ist. Zur Kontrolle des Ölstandes sind im Deckel 6 zwei Ölaugen 18, 19 (maximaler, minimaler Ölstand) vorgesehen. Öleinfüll- und Ölablaßstutzen sind nicht dargestellt. Mit 20 ist der Ölsumpf bezeichnet.The housing 2 has essentially the shape of a pot with an outer wall 5, with the lid 6, with a Inner part 7 with the scoops 8, 9 and the bearing bore 11, with the end plate 12 and the bearing piece 13, which close the scoops 8, 9 at the end. The Axis of the bearing bore 11 is designated 14. Between outer wall 5 and inner part 7 is located the oil space 17, which partially during the operation of the pump is filled with oil. To check the oil level there are two oil eyes 18, 19 in the cover 6 (maximum, minimum Oil level). Oil filler and drain plug are not shown. The oil sump is designated by 20.

Innerhalb des Innenteils 7 befindet sich der Rotor 3. Er ist einteilig ausgebildet und weist zwei stirnseitig angeordnete Ankerabschnitte 21, 22 und einen zwischen den Ankerabschnitten 21, 22 befindlichen Lagerabschnitt 23 auf. Die Ankerrabschnitte 21, 22 sind mit Schlitzen 24, 25 für zwei Schieber 26, 27 ausgerüstet. Die Darstellung nach Figur 1 ist so gewählt, daß die jeweiligen Schieberzwischenräume 28, 29 in der Zeichnungsebene liegen. Die Schieberschlitze 25, 26 sind jeweils von der zugehörigen Stirnseite des Rotors her eingefräst, so daß in einfacher Weise exakte Schlitzabmessungen erreicht werden können. Der Lagerabschnitt 23 liegt zwischen den Ankerabschnitten 21, 22. Lagerabschnitt 23 und Lagerbohrung 11 bilden die einzige Lagerung des Rotors.The rotor 3 is located within the inner part 7 is formed in one piece and has two end faces Anchor sections 21, 22 and one between the Anchor sections 21, 22 located bearing section 23 on. The anchor sections 21, 22 are provided with slots 24, 25 equipped for two sliders 26, 27. The representation according to Figure 1 is chosen so that the respective slide spaces 28, 29 lie in the plane of the drawing. The slide slots 25, 26 are each of the associated Milled end face of the rotor, so that in exact slot dimensions can be achieved in a simple manner can. The bearing section 23 lies between the anchor sections 21, 22. Bearing section 23 and bearing bore 11 form the only bearing of the rotor.

Der Ankerabschnitt 22 und der zugehörige Schöpfraum 9 haben einen größeren Durchmesser als der Ankerabschnitt 21 mit dem Schöpfraum 8. Ankerabschnitt 22 und Schöpfraum 9 bilden die Hochvakuumstufe. Während des Betriebs steht der Einlaß der Hochvakuumstufe 9, 22 mit dem Ansaugstutzen 30 in Verbindung. Der Auslaß der Hochvakuumstufe 9, 22 und der Einlaß der Vorvakuumstufe 8, 21 stehen über die Gehäusebohrung 31 in Verbindung, die sich parallel zu den Achsen der Schöpfräume 8, 9 erstreckt. Der Auslaß der Vorvakuumstufe 8, 21 mündet in den Ölraum 17. Dort beruhigen sich die ölhaltigen Gase und verlassen die Pumpe 1 durch den Auslaßstutzen 33. Aus Gründen der Übersichtlichkeit sind die Einlaß- und Auslaßöffnungen der beiden Pumpenstufen in Fig. 1 nicht dargestellt. Das Gehäuse 2 der Pumpe ist zweckmäßig aus möglichst wenigen Teilen aufgebaut. Zumindest die die beiden Schöpfräume 8, 9 und den Ölraum 17 umfassenden Wandungsabschnitte 5, 7 sollten einstückig ausgebildet sein.The anchor section 22 and the associated scooping space 9 have a larger diameter than the anchor section 21 with the scooping space 8. Anchor section 22 and scooping space 9 form the high vacuum stage. During operation stands the inlet of the high vacuum stage 9, 22 with the intake manifold 30 in connection. The outlet of the high vacuum stage 9, 22 and the inlet of the fore-vacuum stage 8, 21 via the housing bore 31 in connection extends parallel to the axes of the scoops 8, 9. The outlet of the forevacuum stage 8, 21 opens into the oil space 17. There the oily gases calm down and leave the pump 1 through the outlet port 33. For reasons The inlet and outlet openings are clear of the two pump stages not shown in Fig. 1. The housing 2 of the pump is expedient from as few as possible Parts built up. At least that the two scoops 8, 9 and wall sections comprising the oil chamber 17 5, 7 should be formed in one piece.

Koaxial mit der Achse 14 der Lagerbohrung 11 ist das Lagerstück 13 mit einer Bohrung 35 für einen Rotorantrieb ausgerüstet. Dieses kann unmittelbar die Welle 35 des Antriebsmotors 4 sein. Bei dem in Figur 1 dargestellten Ausführungsbeispiel ist zwischen der freien Stirnseite der Antriebswelle 36 und dem Rotor 3 ein Kupplungsstück 37 vorgesehen. Die Art und Weise der Kopplung des Kupplungsstückes 37 mit der Antriebswelle 36 einerseits und mit dem Rotor andererseits ist im einzelnen nicht beschrieben. Sie ist in der DE-A-43 25 285 näher erläutert. The bearing piece is coaxial with the axis 14 of the bearing bore 11 13 with a bore 35 for a rotor drive equipped. This can be the shaft 35 of the Drive motor 4 be. In the illustrated in Figure 1 The embodiment is between the free end face the drive shaft 36 and the rotor 3 a coupling piece 37 provided. The way of coupling the coupling piece 37 with the drive shaft 36 on the one hand and with the rotor on the other hand is not described in detail. It is explained in more detail in DE-A-43 25 285.

Die dargestellte Pumpe ist mit einer Ölpumpe ausgerüstet. Diese besteht aus dem in das Lagerstück 13 von der Motorseite her eingelassenen Schöpfraum 45 mit dem darin rotierenden ovalen Exzenter 46. Dem Exzenter liegt ein Sperrschieber 47 an, der unter dem Druck der Spiralfeder 48 steht. Der Exzenter 46 der Ölpumpe ist Bestandteil des Kupplungsstückes 37. Er ist entweder fest oder formschlüssig - nur mit axialem Spiel - mit dem Kupplungsstück 37 verbunden.The pump shown is equipped with an oil pump. This consists of the in the bearing piece 13 of the Scooping space 45 embedded in the engine side with the therein rotating oval eccentric 46. The eccentric is a Locking slide 47 on, under the pressure of the coil spring 48 stands. The eccentric 46 of the oil pump is a component of the coupling piece 37. It is either fixed or positive - only with axial play - with the coupling piece 37 connected.

Beim dargestellten Ausführungsbeispiel mit der Ölpumpe 45, 46 ist das Lagerstück 13 auf seiner dem Motor 4 zugewandten Seite mit einer kreisförmigen Aussparung 58 ausgerüstet, in der sich eine Scheibe 59 befindet. Diese wird vom Gehäuse 61 des Antriebsmotors 4 in ihrer Position gehalten. Sie ist mit einer zentralen Bohrung 62 ausgerüstet, die von der Welle 36 des Antriebsmotors 4 durchsetzt ist. Außerdem hat die Scheibe 59 die Aufgabe, den Schöpfraum 45 der Ölpumpe 45, 46 zu begrenzen.In the illustrated embodiment with the oil pump 45, 46 is the bearing piece 13 on its motor 4 facing Side with a circular recess 58 equipped, in which a disc 59 is located. This is from the housing 61 of the drive motor 4 in their Position held. It is with a central hole 62 equipped by the shaft 36 of the drive motor 4 is enforced. In addition, the disc 59 has the task to limit the scooping space 45 of the oil pump 45, 46.

Der Ölpumpe 45, 46 wird über einen ersten Kanal 64 Luft aus dem Ölraum 17 und einen zweiten Kanal 65 Öl aus dem Ölsumpf 20 zugeführt. Das die Ölpumpe verlassende Luft-Öl-Gemisch tritt in den Kanal 66 ein, der in die Lagerbohrung 11 (Mündung 67) mündet. In Höhe der Mündung 67 ist der Lagerzapfen 23 mit einer durchgehenden Radialbohrung 68 versehen, von dem eine Axial-Bohrung 69 mit einer Düse 70 in Richtung Schieberzwischenraum 28 abzweigt. Die Lage der Mündung 67 des Kanals 66 einerseits und der Mündung der Radialbohruung 68 im Lagerzapfen 23 andererseits ist so gewählt, daß Öl aus dem Kanal 66 nur dann kurzzeitig in die Bohrung 68 eintreten kann, wenn die Schieber 26 ihre T-Stellung einnehmen. Durchsetzt die Radialbohrung 68 den Lagerzapfen 23 vollständig, sind zwei Mündungen vorhanden, so daß jedesmal, wenn die Schieber ihre T-Stellung einnehmen, eine Verbindung zur Ölpumpe 45, 46 hergestellt wird. Bei jederr Umdrehung des Rotors 3 nehmen die Schieber 26 zweimal diese T-Stellung ein. In dieser Stellung hat der Schieberzwischenraum 28 sein kleinstes Volumen. Das über die Düse jeweils kurzzeitig in den Schieberzwischenraum 28 eingespritzte Öl-Luft-Gemisch strömt durch den Schieberzwischenraum 28 hindurch und gelangt drucklos in den Schöpfraum 8. Dazu ist die Innenseite des Deckels 12 mit einer Nut 71 ausgerüstet, welche sich vom Schieberzwischenraum 28 bis in den Schöpfraum 8 erstreckt. Um sicherzustellen, daß dderr Schieberzwischenraum 28 ständig mit dem Schöpfraum 8 in Verbindung steht, ist die freie Stirnseite des Ankerabschnittes 21 zusätzlich mit einer zentralen Eindrehung 72 ausgerüstet.The oil pump 45, 46 is 64 via a first channel from the oil space 17 and a second channel 65 oil from the Oil sump 20 supplied. The air-oil mixture leaving the oil pump enters channel 66 which enters the bearing bore 11 (mouth 67) opens. At mouth 67 is the bearing pin 23 with a continuous radial bore 68 provided, of which an axial bore 69 with a nozzle 70 branches in the direction of the slide gap 28. The location of the mouth 67 of the channel 66 on the one hand and the mouth of the radial bore 68 in the journal 23 on the other hand is chosen so that oil from channel 66 only can then briefly enter the bore 68 when the slider 26 take their T position. Enforced the radial bore 68 completely supports the journal 23, there are two mouths, so that every time the Slider take their T position, a connection to Oil pump 45, 46 is manufactured. With every revolution of the rotor 3, the slider 26 take this T position twice on. In this position there is space between the slides 28 its smallest volume. That through the nozzle injected briefly in each case into the slide gap 28 Oil-air mixture flows through the slide gap 28 through and reaches the Scooping space 8. The inside of the cover 12 is also included a groove 71, which extends from the slide gap 28 extends into the scooping space 8. To ensure, that the slide gap 28 constantly communicates with the scooping chamber 8 is the free one Front side of the anchor section 21 additionally with a central recess 72 equipped.

Ist die erfindungsgemäße Vakuumpumpe eine einstufige Pumpe, dann strömt der maßgebliche Anteil des Öl-Luft-Gemisches über die Bohrungen 66, 68, 69 und den Schieberzwischenraum 28 in den Schöpfraum 8 und gelangt von dort aus in den Ölraum 17 zurück. Nur ein sehr kleiner Teil des Öls gelangt in den Lagerspalt zwischen Lagerbohrung 11 sowie Lagerzapfen 23 und versorgt diese Lagerung mit Schmieröl. Sie durchströmt den Lagerspalt und gelangt dann ebenfalls in den Schöpfraum 8. Ist die Vakuumpumpe - wie beim Ausführungsbeispiel nach Figur 1 dargestellt - zweistufig ausgebildet, tritt ein dritter Öl-Luft-Teilstrom in den Lagerspalt der Lagerung 11, 23 in Richtung Hochvakuumpumpenstufe 9, 22 ein. Würde das Öl-Luft-Gemisch in die Hochvakuumstufe gelangen, dann würde die im Öl enthaltene Luft das Enddruckverhalten der Vakuumpumpe beeinträchtigen. Auf dem Weg von der Mündung 67 des Kanals 66 bis zum Schöpfraum 9 der Hochvakuumstufe findet deshalb ein Entgasungsschritt statt. Dazu ist der Lagerzapfen 23 mit einer umlaufenden Nut 74 ausgerüstet, in deren Höhe eine Bohrung 75 mündet, die mit dem Zwischenvakuum (Bohrung 31) in Verbindung steht. The vacuum pump according to the invention is a one-stage Pump, then the relevant portion of the oil-air mixture flows over the bores 66, 68, 69 and the slide gap 28 into the scooping chamber 8 and arrives from there back into the oil space 17. Just a very small one Part of the oil gets into the bearing gap between the bearing bore 11 and journal 23 and supplies this storage with lubricating oil. It flows through the bearing gap and then also reaches the scooping chamber 8. Is the vacuum pump - As in the embodiment of Figure 1 shown - trained in two stages, a third occurs Oil-air partial flow in the bearing gap of the bearing 11, 23 in the direction of high vacuum pump stage 9, 22. Would Oil-air mixture get into the high vacuum stage, then would the air contained in the oil the final pressure behavior of the vacuum pump. On the way from the Mouth 67 of the channel 66 to the scooping chamber 9 of the high vacuum stage there is therefore a degassing step. For this purpose, the bearing pin 23 has a circumferential groove 74 equipped, at the height of which a bore 75 opens communicates with the intermediate vacuum (bore 31).

Figur 2 zeigt eine Draufsicht auf das Lagerstück 13. In das Lagerstück 13 ist der kreisrunde Schöpfraum 45 der Ölpumpe eingelassen. Im Schöpfraum befindet sich ein oval gestalteter Rotor 46, dem der Sperrschieber 47 von unten anliegt. Die Drehrichtung ist durch einen Pfeil gekennzeichnet. In das sein Volumen vergrößernde Fördervolumen (rechts vom Sperrschieber 47) mündet zunächst eine Ölzuführung 81. Diese ist als Nut in der Oberfläche des Lagerstückes 13 ausgebildet und erstreckt sich von der Mündung des Ölzuführungskanals 65 (Figur 1) bis in den Schöpfraum 45. Über eine seitlich abzweigende Nut 82 steht sie mit der Rückseite des Sperrschiebers 47 in Verbindung, versorgt diesen mit Schmieröl und bewirkt eine Druckentlastung im Sperrschieberschlitz.Figure 2 shows a plan view of the bearing piece 13. In the bearing piece 13 is the circular scoop 45 of the Oil pump let in. There is a in the scoop oval-shaped rotor 46, the locking slide 47 of lies below. The direction of rotation is indicated by an arrow featured. In the volume that increases its volume (right of the gate valve 47) opens first an oil supply 81. This is a groove in the surface the bearing piece 13 is formed and extends from the mouth of the oil supply channel 65 (Figure 1) to in the scooping space 45. Via a laterally branching groove 82 it stands with the back of the locking slide 47 in Connection, supplies it with lubricating oil and causes a pressure relief in the gate valve slot.

Um den Winkel α versetzt mündet eine Luftzuführung 83 in den Schöpfraum 45. Auch diese ist als Nut ausgebildet und steht mit dem Luftzuführungskanal 64 (Figur 1) in Verbindung.An air supply 83 opens out offset by the angle α the scooping space 45. This is also designed as a groove and stands with the air supply duct 64 (Figure 1) in Connection.

Das angesaugte Öl-Luft-Gemisch wird vom jeweiligen Fördervolumen zum Auslaß 84 gefördert. Dieser wird gebildet von einer Nut, die mit dem Kanal 66 (Figur 1) in Verbindung steht.The oil-air mixture drawn in depends on the respective delivery volume promoted to outlet 84. This is formed from a groove that communicates with channel 66 (Figure 1) stands.

Von der Größe des Winkels α (azinutaler Abstand der Luftzuführung von der Ölzuführung) hängt der Anteil der Luft im Öl-Luft-Gemisch ab. Durch Veränderung des Winkels α kann auf diesen Anteil Einfluß genommen werden. Die Größe des Winkels α liegt zwischen 5° und 90°, vorzugsweise 30-40. Wesentlich ist, daß - dieses gilt auch für anders als dargestellt gestaltete Rotoren - während eines maßgeblichen Teils der Ansaughase sowohl Öl als auch Luft angesaugt wird.On the size of the angle α (azinuthal distance of the Air supply from the oil supply) depends on the proportion of Air in the oil-air mixture. By changing the angle α can be influenced on this part. The size of the angle α is between 5 ° and 90 °, preferably 30-40. It is essential that - this also applies for rotors designed differently than shown - while a significant part of the intake bunny both oil and air is also sucked in.

Claims (8)

  1. An oil-sealed rotary slide valve vacuum pump (1) with a rotor (3) and with an oil pump (45, 46), whose pump chamber is equipped with supply ducts (64, 65) for gas and oil, characterised in that the arrangement of the supply ducts (64, 65) for gas and oil is selected in such a manner that firstly only oil and then both oil and air are drawn into the circulating conveyed volume of the oil pump (45, 46).
  2. A rotary slide valve vacuum pump according to claim 1, characterised in that the oil pump (45, 46) comprises a rotor (46) and a shut-off slide valve (47) resting against the rotor.
  3. A rotary slide valve vacuum pump according to claim 2, characterised in that the rotor (46) has the shape of an ellipse.
  4. A rotary slide valve vacuum pump according to claim 1, 2 or 3, characterised in that the oil pump (45, 46) is integrated into the rotary slide valve pump and is coupled with the drive shaft (36) for the rotor (3).
  5. A rotary slide valve vacuum pump according to claim 4, characterised in that the pump chamber (45) of the oil pump (45, 46) is embedded in a bearing element (13) on the drive side and a slide valve (59) resting upon the bearing element (13) forms one of the pump chamber walls.
  6. A rotary slide valve vacuum pump according to claim 5, characterised in that the bearing element (13) and/or the slide valve (59) is equipped with grooves (81 to 84), which open out into the pump chamber (45) of the oil pump (45, 46).
  7. A rotary slide valve vacuum pump according to claim 2 and claim 6, characterised in that a groove (81) conducting oil is connected via a branch (82) to the shut-off slide valve slot.
  8. A rotary slide valve vacuum pump according to one of the preceding claims, characterised in that the outlet (84) of the oil pump (45, 46) is connected via ducts (66, 68, 69) in the housing and in a bearing element (23) to the slide valve intermediate space (28).
EP96925748A 1995-07-19 1996-07-12 Oil-sealed vane-type rotary vacuum pump with an oil pump Expired - Lifetime EP0839282B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19526321A DE19526321A1 (en) 1995-07-19 1995-07-19 Oil sealed rotary vane vacuum pump with oil pump
DE19526321 1995-07-19
PCT/EP1996/003077 WO1997004235A1 (en) 1995-07-19 1996-07-12 Oil-sealed vane-type rotary vacuum pump with an oil pump

Publications (2)

Publication Number Publication Date
EP0839282A1 EP0839282A1 (en) 1998-05-06
EP0839282B1 true EP0839282B1 (en) 1999-06-09

Family

ID=7767216

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96925748A Expired - Lifetime EP0839282B1 (en) 1995-07-19 1996-07-12 Oil-sealed vane-type rotary vacuum pump with an oil pump

Country Status (10)

Country Link
US (1) US6149414A (en)
EP (1) EP0839282B1 (en)
JP (1) JP3946254B2 (en)
KR (1) KR100442466B1 (en)
CN (1) CN1083067C (en)
CA (1) CA2227191C (en)
DE (2) DE19526321A1 (en)
ES (1) ES2133977T3 (en)
TW (1) TW367396B (en)
WO (1) WO1997004235A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030000735A (en) * 2001-06-26 2003-01-06 김덕겸 Vacuum pump apparatus having improved sealing structure
US6790019B1 (en) * 2003-02-28 2004-09-14 Thomas Industries Inc. Rotary vane pump with multiple sound dampened inlet ports
JP5781334B2 (en) * 2011-03-04 2015-09-24 アルバック機工株式会社 Oil rotary vacuum pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2233017A (en) * 1938-08-10 1941-02-25 Charles F Lambin Compressor
US3166017A (en) * 1962-12-26 1965-01-19 Borg Warner Flex pump
GB1303430A (en) * 1969-06-12 1973-01-17
DE2401171A1 (en) * 1974-01-11 1975-07-24 Pfeiffer Vakuumtechnik Rotary sliding vane pump - sliding vane seal arrangement is submerged in oil inside a container
US4276005A (en) * 1979-04-26 1981-06-30 Varian Associates, Inc. Oil flow metering structure for oil sealed mechanical vacuum vane pump
FR2555674B1 (en) * 1983-11-30 1986-03-28 Cit Alcatel PALLET OIL SEAL PUMP
DD228008A1 (en) * 1984-10-02 1985-10-02 Medizin Labortechnik Veb K ADJUSTMENT DEVICE FOR AN OIL PUMP FOR PRESSURE OIL LUBRICATION OF ROTATING VACUUM PUMPS
DD256540A1 (en) * 1986-12-30 1988-05-11 Medizin Labortechnik Veb K PRESSURE OIL LUBRICATION FOR TURNOVER VACUUM PUMPS
US4967707A (en) * 1988-07-14 1990-11-06 Rogant H R Rotary engine
DE3922417A1 (en) * 1989-07-07 1991-01-17 Vacuubrand Gmbh & Co VACUUM PUMP WITH SECURITY TO VENTILATE THE RECIPIENT AT STOP
FR2666382B1 (en) * 1990-08-28 1992-10-16 Cit Alcatel DEVICE FOR PUMPING A GAS BY AN OIL SEAL PUMP AND APPLICATION TO HELIUM LEAK DETECTORS.
DE4325285A1 (en) * 1993-07-28 1995-02-02 Leybold Ag Oil-sealed vacuum pump

Also Published As

Publication number Publication date
TW367396B (en) 1999-08-21
CN1083067C (en) 2002-04-17
MX9800405A (en) 1998-09-30
CA2227191C (en) 2007-09-11
DE59602182D1 (en) 1999-07-15
WO1997004235A1 (en) 1997-02-06
DE19526321A1 (en) 1997-01-23
EP0839282A1 (en) 1998-05-06
KR100442466B1 (en) 2004-09-24
JPH11509595A (en) 1999-08-24
CN1191593A (en) 1998-08-26
KR19990028828A (en) 1999-04-15
JP3946254B2 (en) 2007-07-18
CA2227191A1 (en) 1997-02-06
US6149414A (en) 2000-11-21
ES2133977T3 (en) 1999-09-16

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