EP0839283B1 - Oil-sealed vane-type rotary vacuum pump with oil feed - Google Patents

Oil-sealed vane-type rotary vacuum pump with oil feed Download PDF

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Publication number
EP0839283B1
EP0839283B1 EP96926341A EP96926341A EP0839283B1 EP 0839283 B1 EP0839283 B1 EP 0839283B1 EP 96926341 A EP96926341 A EP 96926341A EP 96926341 A EP96926341 A EP 96926341A EP 0839283 B1 EP0839283 B1 EP 0839283B1
Authority
EP
European Patent Office
Prior art keywords
oil
pump
rotor
bearing
slide valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96926341A
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German (de)
French (fr)
Other versions
EP0839283A1 (en
Inventor
Thomas Abelen
Peter Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
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Publication date
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Publication of EP0839283A1 publication Critical patent/EP0839283A1/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation
    • F04C29/025Lubrication; Lubricant separation using a lubricant pump
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/08Rotary pistons
    • F01C21/0809Construction of vanes or vane holders
    • F01C21/0818Vane tracking; control therefor
    • F01C21/0854Vane tracking; control therefor by fluid means
    • F01C21/0872Vane tracking; control therefor by fluid means the fluid being other than the working fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F04C18/3442Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/10Vacuum

Definitions

  • the invention relates to an oil-sealed rotary vane vacuum pump with the features of the generic term of claim 1.
  • DD-A-256540 is a vacuum pump with the features of the preamble of claim 1 is known.
  • This document discloses a single-stage rotary vane vacuum pump, whose rotor at both ends by means of a journal bearing is mounted.
  • the two trunnions and their end shields are with holes equipped, which are designed and arranged so that they have the effect of roosters which prevent entry and the exit of the slider gap control penetrating excess oil flow.
  • the arrival or Allocation of the holes is selected so that the oil over the first journal enters the slider gap, when it has its largest volume. In this and also in the subsequent phase, in which the volume of the space reduced is the exit locked towards the oil sump.
  • the present invention is based on the object a rotary vane vacuum pump of the type mentioned to be trained in such a way that oil noises are largely avoided are.
  • the amount of oil entering the valve gap is briefly about the size of each rotor turn opposite mouths of the holes in the housing and adjustable in the storage section. You can in simply be chosen so that exactly one such amount of oil in the slider gap and then enters the scoop, which is the vacuum technology Conditions of the pump, e.g. also taking into account the application. It is essential that the oil enters the scooping chamber without pressure. From there it reaches the pump sump via the pump outlet back. Finally, it is enough to control the Oil passing through the valve gap only one journal from, so that the invention also with vacuum pumps can be used with an overhung rotor.
  • the pump 1 shown comprises the assemblies housing 2, rotor 3 and drive motor 4.
  • the housing 2 has essentially the shape of a pot with an outer wall 5, with the lid 6, with a Inner part 7 with the scoops 8, 9 and the bearing bore 11, with the end plate 12 and the bearing piece 13, which close the scoops 8, 9 at the end.
  • the Axis of the bearing bore 11 is designated 14.
  • Between outer wall 5 and inner part 7 is located the oil space 17, which partially during the operation of the pump is filled with oil.
  • oil eyes 18, 19 in the cover 6 maximum, minimum Oil level. Oil filler and drain plug are not shown.
  • the oil sump is designated by 20.
  • the rotor 3 is located within the inner part 7 is formed in one piece and has two end faces Anchor sections 21, 22 and one between the Anchor sections 21, 22 located bearing section 23 on.
  • the anchor sections 21, 22 are provided with slots 24, 25 equipped for two sliders 26, 27.
  • the representation according to Figure 1 is chosen so that the respective slide spaces 28, 29 lie in the plane of the drawing.
  • the slide slots 25, 26 are each of the associated Milled end face of the rotor, so that in exact slot dimensions can be achieved in a simple manner can.
  • the bearing section 23 lies between the anchor sections 21, 22. Bearing section 23 and bearing bore 11 form the only bearing of the rotor.
  • Anchor section 22 and the associated scooping space 9 have a larger diameter than the anchor section 21 with the scooping space 8.
  • Anchor section 22 and scooping space 9 form the high vacuum stage.
  • the inlet of the high vacuum stage 9, 22 with the intake manifold 30 in connection stands the inlet of the high vacuum stage 9, 22 with the intake manifold 30 in connection.
  • the outlet of the high vacuum stage 9, 22 and the inlet of the fore-vacuum stage 8, 21 via the housing bore 31 in connection extends parallel to the axes of the scoops 8, 9.
  • the outlet of the forevacuum stage 8, 21 opens into the oil space 17. There the oily gases calm down and leave the pump 1 through the outlet port 33.
  • the inlet and outlet openings are clear of the two pump stages not shown in Fig. 1.
  • the housing 2 of the pump is expedient from as few as possible Parts built up. At least that the two scoops 8, 9 and wall sections comprising the oil chamber 17 5, 7 should be formed in one piece.
  • the bearing piece is coaxial with the axis 14 of the bearing bore 11 13 with a bore 35 for a rotor drive equipped. This can directly the shaft 36 of the Drive motor 4 be.
  • the embodiment is between the free end face the drive shaft 36 and the rotor 3 a coupling piece 37 provided. The way of coupling the coupling piece 37 with the drive shaft 36 on the one hand and with the rotor on the other hand is not described in detail. It is explained in more detail in DE-A-43 25 285.
  • the pump shown is with an integrated oil pump equipped. This consists of the in the bearing piece 13 scooping space let in from the engine side 45 with the rotating oval eccentric 46.
  • the eccentric is a locking slide 47, which under the Pressure of the spiral spring 48 is.
  • the eccentric 46 of the oil pump is part of the coupling piece 37. It is either fixed or positive - only with axial play - Connected to the coupling piece 37.
  • the oil pump 45, 46 is 64 via a first channel from the oil space 17 and a second channel 65 oil from the Oil sump 20 supplied.
  • the air-oil mixture leaving the oil pump enters channel 66 which enters the bearing bore 11 (mouth 67) opens.
  • mouth 67 is the journal 23 with a continuous radial bore 68 provided, of which an axial bore 69 with a nozzle 70 branches in the direction of the slide gap 28.
  • the location of the mouth 67 of the channel 66 on the one hand and the opening of the radial bore 68 in the journal 23 on the other hand is chosen so that oil from channel 66 only can then briefly enter the bore 68 when the sliders 26 assume their T position (see FIG 2).
  • the radial bore 68 penetrates the bearing pin 23 completely, there are two mouths, so that each time when the slides take their T position, one Connection to the oil pump 45, 46 is established.
  • the slider 26 take each revolution of the rotor 3 this T position twice. In this position the Slider gap 28 through its smallest volume. This for a short time through the nozzle into the slide gap 28 injected oil-air mixture flows through the slider gap 28 and passes without pressure into the scoop chamber 8.
  • the inside of the lid 12 equipped with a groove 71, which extends from the slide gap 28 extends into the scooping space 8.
  • the vacuum pump according to the invention is a one-stage Pump, then the relevant portion of the oil-air mixture flows over the bores 66, 68, 69 and the slide gap 28 into the scooping chamber 8 and arrives from there back into the oil space 17. Just a very small one Part of the oil gets into the bearing gap between the bearing bore 11 and journal 23 and supplies this storage with lubricating oil. It flows through the bearing gap and then also reaches the scooping chamber 8. Is the vacuum pump - As in the embodiment of Figure 1 shown - trained in two stages, a third occurs Oil-air partial flow in the bearing gap of the bearing 11, 23 in the direction of high vacuum pump stage 9, 22. Would Oil-air mixture get into the high vacuum stage, then would the air contained in the oil the final pressure behavior of the vacuum pump.
  • the bearing pin 23 has a circumferential groove 74 equipped, at the height of which a bore 75 opens communicates with the intermediate vacuum (bore 31).
  • the sectional view through a single-stage pump according to FIG. 2 shows further details. From that represented as a symbol Oil pump 45, 46 passes the oil-air mixture through the channel 66 to the mouth 67 in the bearing bore 11.
  • the rotor 3 is shown in a position in which the slide 26 take their T position. In this position there is a connection of the channel 66 in the housing with the radial bore 68 in stock 23. A small, just sufficient Oil quantity passes through the holes 68, 69 (with Nozzle 70) in the slide gap 28, which is in the T position has its smallest volume.
  • the groove 71 in the bearing piece 23 opposite Cover 12 is shown in dashed lines. It is in the Arranged near the outlet 30 so that one of the Slider 26 is always between inlet 33 and groove 71. Its inner end extends far into the area the recess 72 in the rotor 3, so that ensured is that the oil is the slide gap 28 without pressure build-up leave and over the turn 72 and the Groove 71 can get into the scoop space 8.

Abstract

The invention concerns an oil-sealed vane-type rotary vacuum pump with a suction chamber (8) housing a rotatably mounted rotor (3) which has an anchoring section (21) and a bearing section (23) with a slot (24) in which two vanes (26) are mounted with a gap (28) between them. The rotor bearing comprises the bearing section (23) and a rotor-mounting bore (11). The vacuum pump also has an oil pump (45, 46), which produces a flow of oil through the gap (28) between the vanes, and a system for controlling the flow of oil through the gap (28), the oil passing through a channel (66) opening out in the rotor-mounting bore (11) and then through radial and longitudinal bores (68, 69) in the bearing section (23) of the rotor. In order to reduce the noise produced by the pump when in operation, the invention proposes that the location where the oil channel (66) opens out into the rotor-mounting bore (11) and the location of the radial bore (68) in the bearing section (23) of the rotor, with respect to the location of the vanes (26) or the vane-mounting slot (24), are such that oil can only flow into the gap (28) between the vanes when the gap volume is increasing, and that there is a permanently open line leading to the vacuum-pump chamber (8) for the oil leaving the gap (28) between the vanes.

Description

Die Erfindung bezieht sich auf eine ölgedichtete Drehschiebervakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to an oil-sealed rotary vane vacuum pump with the features of the generic term of claim 1.

Aus der DD-A-256540 ist eine Vakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1 bekannt. Diese Druckschrift offenbart eine einstufige Drehschiebervakuumpumpe, deren Rotor an seinen beiden Enden mittels einer Zapfenlagerung gelagert ist. Die beiden Lagerzapfen sowie deren Lagerschilde sind mit Bohrungen ausgerüstet, welche so ausgebildet und angeordnet sind, daß sie die Wirkung von Hähnen haben, welche den Eintritt und den Austritt eines den Schieberzwischenraum durchsetzenden Überschuß-Ölstromes steuern. Die An- bzw. Zuordnung der Bohrungen ist so gewählt, daß das Öl über den ersten Lagerzapfen in den Schieberzwischenraum eintritt, wenn dieser sein größtes Volumen hat. In dieser und auch in der sich anschließenden Phase, in der sich das Volumen des Zwischenraumes verkleinert, ist der Austritt in Richtung Ölsumpf gesperrt. Dadurch baut sich im Schieberzwischenraum ein erhöhter Öldruck auf, so daß Öl durch die Spalte, welche zwischen den Schiebern und den Schieberschlitzen und im Bereich der Rotorstirnseiten vorhanden sind, in den Schöpfraum gelangt und diesen mit dem notwendigen Dicht- und Schmier-Öl versorgt. Kurz vor dem Zeitpunkt, zu dem der Schieberzwischenraum sein kleinstes Volumen annimmt, wird der Ölaustritt über den zweiten Lagerzapfen geöffnet. Infolge der pumpenden Wirkung des Schieberzwischenraumes tritt das überschüssige Öl aus und gelangt in den Ölsumpf zurück.From DD-A-256540 is a vacuum pump with the features of the preamble of claim 1 is known. This document discloses a single-stage rotary vane vacuum pump, whose rotor at both ends by means of a journal bearing is mounted. The two trunnions and their end shields are with holes equipped, which are designed and arranged so that they have the effect of roosters which prevent entry and the exit of the slider gap control penetrating excess oil flow. The arrival or Allocation of the holes is selected so that the oil over the first journal enters the slider gap, when it has its largest volume. In this and also in the subsequent phase, in which the volume of the space reduced is the exit locked towards the oil sump. This builds up in Slider gap increased oil pressure so that oil through the column between the sliders and the Slider slots and in the area of the rotor end faces are present, get into the scoop space and this with the necessary sealing and lubricating oil. Shortly before the time when the slider gap will be assumes the smallest volume, the oil leakage over the second bearing journal opened. As a result of the pumping effect the excess of the slide gap occurs Oil out and gets back into the oil sump.

Nachteilig an der Lösung nach dem Stand der Technik ist, daß die Ölversorgung des Schöpfraumes nicht definiert ist, da sie über Spalte erfolgt, die Fertigungstoleranzen aufweisen und Verschleißerscheinungen unterworfen sind. Weiterhin setzt die vorbekannte Lösung das Vorhandensein von Lagerzapfen auf beiden Seiten des Rotors voraus. Bei einem fliegend gelagerten Rotor ist die Lösung nach dem Stand der Technik nicht realisierbar. Schließlich bauen sich im Schieberzwischenraum kurzzeitig immer wieder hohe Öldrücke auf, was nicht unerhebliche Geräusche (Ölschläge) verursacht.The disadvantage of the solution according to the prior art is that the oil supply to the scoop is not defined is the manufacturing tolerances because it is done via gaps exhibit and subject to wear are. Furthermore, the previously known solution presupposes the presence of trunnions on both sides of the rotor ahead. The solution is for a rotor with a floating bearing not realizable according to the state of the art. Finally, build up briefly in the space between the valves always high oil pressures, which is not insignificant Noise (oil hammer) caused.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Drehschiebervakuumpumpe der eingangs erwähnten Art derart auszubilden, daß Ölgeräusche weitestgehend vermieden sind.The present invention is based on the object a rotary vane vacuum pump of the type mentioned to be trained in such a way that oil noises are largely avoided are.

Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale des Patentanspruchs 1 gelöst. Bei einer Vakuumpumpe nach der Erfindung gelangt Öl nur in dem Moment in den Schieberzwischenraum, wenn dieser sein Volumen vergrößert. Außerdem ist die Verbindung des Schieberzwischenraumes mit dem Schöpfraum ständig offen. Der Aufbau eines erhöhten Öldruckes kann nicht stattfinden. Während der Phase des sich verkleinernden Schieberzwischenraumes wird Öl nicht eingelassen, so daß die pumpende Wirkung des Schieberzwischenraumes keinen Einfluß auf den Ölstrom nehmen kann. Ölschläge treten nicht auf. According to the invention, this object is achieved by the characterizing Features of claim 1 solved. At a Vacuum pump according to the invention gets oil only at that moment in the slide gap when this is its volume enlarged. In addition, the connection of the slider gap with the creative space constantly open. Of the An increase in oil pressure cannot take place. During the phase of the shrinking slide gap oil is not admitted, so that the pumping Effect of the slide gap no influence can take on the oil flow. Oil shocks do not occur.

Die Menge des in den Schieberzwischenraum gelangenden Öl ist über die Größe der sich bei jeder Rotordrehung kurzzeitig gegenüberstehenden Mündungen der Bohrungen im Gehäuse und im Lagerabschnitt einstellbar. Sie kann in einfacher Weise so gewählt werden, daß exakt nur eine solche Ölmenge in den Schieberzwischenraum und anschließend in den Schöpfraum gelangt, die den vakuumtechnischen Bedingungen der Pumpe, z.B. auch unter Berücksichtigung der Applikation, genügen. Wesentlich ist, daß das Öl drucklos in den Schöpfraum eintritt. Von dort aus gelangt es über den Auslaß der Pumpe in den Pumpensumpf zurück. Schließlich reicht zur Steuerung des den Schieberzwischenraum durchsetzenden Öls nur ein Lagerzapfen aus, so daß die Erfinduung auch bei Vakuumpumpen mit fliegend gelagerten Rotor einsetzbar ist.The amount of oil entering the valve gap is briefly about the size of each rotor turn opposite mouths of the holes in the housing and adjustable in the storage section. You can in simply be chosen so that exactly one such amount of oil in the slider gap and then enters the scoop, which is the vacuum technology Conditions of the pump, e.g. also taking into account the application. It is essential that the oil enters the scooping chamber without pressure. From there it reaches the pump sump via the pump outlet back. Finally, it is enough to control the Oil passing through the valve gap only one journal from, so that the invention also with vacuum pumps can be used with an overhung rotor.

Eine weitere Reduzierung der Betriebsgeräusche kann dadurch erreicht werden, daß dem Schieberzwischenraum ein Öl-Luft-Gemisch zugeführt wird. Dieses Gemisch kann vor oder in der Ölpumpe hergestellt werden.This can further reduce operating noise be achieved that the slide gap Oil-air mixture is supplied. This mixture can before or be produced in the oil pump.

Zweckmäßig wird der Zeitpunkt des Einlasses von Öl in den Schieberzwischenraum so gewählt, daß dieser im Moment des Öleinlasses sein kleinsten Volumen hat. Das Auftreten von Ölschlägen ist dadurch mit Sicherheit vermieden.The time at which oil is admitted is expedient the slider gap chosen so that this at the moment of the oil inlet has its smallest volume. The This definitely prevents the occurrence of oil hammer.

Vorteilhaft ist weiterhin, daß das Öl mit Hilfe einer Düse in den Schieberzwischenraum eingespritzt wird. Eine zuverlässige Schmierwirkung bei gleichzeitig klein gehaltener Menge des umströmenden Öls ist dadurch sichergestellt.It is also advantageous that the oil with the help of a Nozzle is injected into the slider gap. A reliable lubrication effect while keeping it small This ensures the amount of oil flowing around.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand der Figuren 1 bis 2 erläutert werden. Es zeigen

  • Figur 1 einen Längsschnitt durch ein Ausführungsbeispiel für eine zweistufige Drehschiebervakuumpumpe nach der Erfindung und
  • Figur 2 einen schematisierten Schnitt durch eine einstufige Drehschiebervakuumpumpe nach der Erfindung.
Further advantages and details of the invention will be explained with reference to FIGS. 1 to 2. Show it
  • 1 shows a longitudinal section through an embodiment for a two-stage rotary vane vacuum pump according to the invention and
  • Figure 2 is a schematic section through a single-stage rotary vane vacuum pump according to the invention.

Die dargestellte Pumpe 1 umfaßt die Baugruppen Gehäuse 2, Rotor 3 und Antriebsmotor 4.The pump 1 shown comprises the assemblies housing 2, rotor 3 and drive motor 4.

Das Gehäuse 2 hat im wesentlichen die Form eines Topfes mit einer äußeren Wandung 5, mit dem Deckel 6, mit einem Innenteil 7 mit den Schöpfräumen 8, 9 sowie der Lagerbohrung 11, mit der Endscheibe 12 und dem Lagerstück 13, welche die Schöpfräume 8, 9 stirnseitig abschließen. Die Achse der Lagerbohrung 11 ist mit 14 bezeichnet. Zwischen äußerer Wandung 5 und Innenteil 7 befindet sich der Ölraum 17, der während des Betriebs der Pumpe teilweise mit Öl gefüllt ist. Zur Kontrolle des Ölstandes sind im Deckel 6 zwei Ölaugen 18, 19 (maximaler, minimaler Ölstand) vorgesehen. Öleinfüll- und Ölablaßstutzen sind nicht dargestellt. Mit 20 ist der Ölsumpf bezeichnet.The housing 2 has essentially the shape of a pot with an outer wall 5, with the lid 6, with a Inner part 7 with the scoops 8, 9 and the bearing bore 11, with the end plate 12 and the bearing piece 13, which close the scoops 8, 9 at the end. The Axis of the bearing bore 11 is designated 14. Between outer wall 5 and inner part 7 is located the oil space 17, which partially during the operation of the pump is filled with oil. To check the oil level there are two oil eyes 18, 19 in the cover 6 (maximum, minimum Oil level). Oil filler and drain plug are not shown. The oil sump is designated by 20.

Innerhalb des Innenteils 7 befindet sich der Rotor 3. Er ist einteilig ausgebildet und weist zwei stirnseitig angeordnete Ankerabschnitte 21, 22 und einen zwischen den Ankerabschnitten 21, 22 befindlichen Lagerabschnitt 23 auf. Die Ankerrabschnitte 21, 22 sind mit Schlitzen 24, 25 für zwei Schieber 26, 27 ausgerüstet. Die Darstellung nach Figur 1 ist so gewählt, daß die jeweiligen Schieberzwischenräume 28, 29 in der Zeichnungsebene liegen. Die Schieberschlitze 25, 26 sind jeweils von der zugehörigen Stirnseite des Rotors her eingefräst, so daß in einfacher Weise exakte Schlitzabmessungen erreicht werden können. Der Lagerabschnitt 23 liegt zwischen den Ankerabschnitten 21, 22. Lagerabschnitt 23 und Lagerbohrung 11 bilden die einzige Lagerung des Rotors.The rotor 3 is located within the inner part 7 is formed in one piece and has two end faces Anchor sections 21, 22 and one between the Anchor sections 21, 22 located bearing section 23 on. The anchor sections 21, 22 are provided with slots 24, 25 equipped for two sliders 26, 27. The representation according to Figure 1 is chosen so that the respective slide spaces 28, 29 lie in the plane of the drawing. The slide slots 25, 26 are each of the associated Milled end face of the rotor, so that in exact slot dimensions can be achieved in a simple manner can. The bearing section 23 lies between the anchor sections 21, 22. Bearing section 23 and bearing bore 11 form the only bearing of the rotor.

Der Ankerabschnitt 22 und der zugehörige Schöpfraum 9 haben einen größeren Durchmesser als der Ankerabschnitt 21 mit dem Schöpfraum 8. Ankerabschnitt 22 und Schöpfraum 9 bilden die Hochvakuumstufe. Während des Betriebs steht der Einlaß der Hochvakuumstufe 9, 22 mit dem Ansaugstutzen 30 in Verbindung. Der Auslaß der Hochvakuumstufe 9, 22 und der Einlaß der Vorvakuumstufe 8, 21 stehen über die Gehäusebohrung 31 in Verbindung, die sich prallel zu den Achsen der Schöpfräume 8, 9 erstreckt. Der Auslaß der Vorvakuumstufe 8, 21 mündet in den Ölraum 17. Dort beruhigen sich die ölhaltigen Gase und verlassen die Pumpe 1 durch den Auslaßstutzen 33. Aus Gründen der Übersichtlichkeit sind die Einlaß- und Auslaßöffnungen der beiden Pumpenstufen in Fig. 1 nicht dargestellt. Das Gehäuse 2 der Pumpe ist zweckmäßig aus möglichst wenigen Teilen aufgebaut. Zumindest die die beiden Schöpfräume 8, 9 und den Ölraum 17 umfassenden Wandungsabschnitte 5, 7 sollten einstückig ausgebildet sein.The anchor section 22 and the associated scooping space 9 have a larger diameter than the anchor section 21 with the scooping space 8. Anchor section 22 and scooping space 9 form the high vacuum stage. During operation stands the inlet of the high vacuum stage 9, 22 with the intake manifold 30 in connection. The outlet of the high vacuum stage 9, 22 and the inlet of the fore-vacuum stage 8, 21 via the housing bore 31 in connection extends parallel to the axes of the scoops 8, 9. The outlet of the forevacuum stage 8, 21 opens into the oil space 17. There the oily gases calm down and leave the pump 1 through the outlet port 33. For reasons The inlet and outlet openings are clear of the two pump stages not shown in Fig. 1. The housing 2 of the pump is expedient from as few as possible Parts built up. At least that the two scoops 8, 9 and wall sections comprising the oil chamber 17 5, 7 should be formed in one piece.

Koaxial mit der Achse 14 der Lagerbohrung 11 ist das Lagerstück 13 mit einer Bohrung 35 für einen Rotorantrieb ausgerüstet. Dieses kann unmittelbar die Welle 36 des Antriebsmotors 4 sein. Bei dem in Figur 1 dargestellten Ausführungsbeispiel ist zwischen der freien Stirnseite der Antriebswelle 36 und dem Rotor 3 ein Kupplungsstück 37 vorgesehen. Die Art und Weise der Kopplung des Kupplungsstückes 37 mit der Antriebeswelle 36 einerseits und mit dem Rotor andererseits ist im einzelnen nicht beschrieben. Sie ist in der DE-A-43 25 285 näher erläutert.The bearing piece is coaxial with the axis 14 of the bearing bore 11 13 with a bore 35 for a rotor drive equipped. This can directly the shaft 36 of the Drive motor 4 be. In the illustrated in Figure 1 The embodiment is between the free end face the drive shaft 36 and the rotor 3 a coupling piece 37 provided. The way of coupling the coupling piece 37 with the drive shaft 36 on the one hand and with the rotor on the other hand is not described in detail. It is explained in more detail in DE-A-43 25 285.

Die dargestellte Pumpe ist mit einer integrierten Ölpumpe ausgerüstet. Diese besteht aus dem in das Lagerstück 13 von der Motorseite her eingelassenen Schöpfraum 45 mit dem darin rotierenden ovalen Exzenter 46. Dem Exzenter liegt ein Sperrschieber 47 an, der unter dem Druck der Spiralfeder 48 steht. Der Exzenter 46 der Ölpumpe ist Bestandteil des Kupplungsstückes 37. Er ist entweder fest oder formschlüssig - nur mit axialem Spiel - mit dem Kupplungsstück 37 verbunden.The pump shown is with an integrated oil pump equipped. This consists of the in the bearing piece 13 scooping space let in from the engine side 45 with the rotating oval eccentric 46. The eccentric is a locking slide 47, which under the Pressure of the spiral spring 48 is. The eccentric 46 of the oil pump is part of the coupling piece 37. It is either fixed or positive - only with axial play - Connected to the coupling piece 37.

Beim dargestellten Ausführungsbeispiel mit der Ölpumpe 45, 46 ist das Lagerstück 13 auf seiner dem Motor 4 zugewandten Seite mit einer kreisförmigen Aussparung 58 ausgerüstet, in der sich eine Scheibe 59 befindet. Diese wird vom Gehäuse 61 des Antriebsmotors 4 in ihrer Position gehalten. Sie ist mit einer zentralen Bohrung 62 ausgerüstet, die von der Welle 36 des Antriebsmotors 4 durchsetzt ist. Außerdem hat die Scheibe 59 die Aufgabe, den Schöpfraum 45 der Ölpumpe 45, 46 zu begrenzen.In the illustrated embodiment with the oil pump 45, 46 is the bearing piece 13 on its motor 4 facing Side with a circular recess 58 equipped, in which a disc 59 is located. This is in position by the housing 61 of the drive motor 4 held. It has a central bore 62 equipped by the shaft 36 of the drive motor 4th is enforced. In addition, the disc 59 has the task to limit the scooping space 45 of the oil pump 45, 46.

Der Ölpumpe 45, 46 wird über einen ersten Kanal 64 Luft aus dem Ölraum 17 und einen zweiten Kanal 65 Öl aus dem Ölsumpf 20 zugeführt. Das die Ölpumpe verlassende Luft-Ölgemisch tritt in den Kanal 66 ein, der in die Lagerbohrung 11 (Mündung 67) mündet. In Höhe der Mündung 67 ist der Lagerzapfen 23 mit einer durchgehenden Radial-Bohrung 68 versehen, von dem eine Axial-Bohrung 69 mit einer Düse 70 in Richtung Schieberzwischenraum 28 abzweigt. Die Lage der Mündung 67 des Kanals 66 einerseits und der Mündung der Radialbohrung 68 im Lagerzapfen 23 andererseits ist so gewählt, daß Öl aus dem Kanal 66 nur dann kurzzeitig in die Bohrung 68 eintreten kann, wenn die Schieber 26 ihre T-Stellung einnehmen (vgl. Figur 2). Durchsetzt die Radialbohrung 68 den Lagerzapfen 23 vollständig, sind zwei Mündungen vorhanden, so daß jedesmal, wenn die Schieber ihre T-Stellung einnehmen, eine Verbindung zur Ölpumpe 45, 46 hergestellt wird. Bei jeder Umdrehung des Rotors 3 nehmen die Schieber 26 zweimal diese T-Stellung ein. In dieser Stellung hat der Schieberzwischenraum 28 hindurch sein kleinstes Volumen. Das über die Düse jeweils kurzzeitig in den Schieberzwischenraum 28 eingespritzte Öl-Luft-Gemisch strömt durch den Schieberzwischenraum 28 und gelangt drucklos in den Schöpfraum 8. Dazu ist die Innenseite des Deckels 12 mit einer Nut 71 ausgerüstet, welche sich vom Schieberzwischenraum 28 bis in den Schöpfraum 8 erstreckt. Um sicherzustellen, daß der Schieberzwischenraum 28 ständig mit dem Schöpfraum 8 in Verbindung steht, ist die freie Stirnseite des Ankerabschnittes 21 zusätzlich mit einer zentralen Eindrehung 72 ausgerüstet.The oil pump 45, 46 is 64 via a first channel from the oil space 17 and a second channel 65 oil from the Oil sump 20 supplied. The air-oil mixture leaving the oil pump enters channel 66 which enters the bearing bore 11 (mouth 67) opens. At mouth 67 is the journal 23 with a continuous radial bore 68 provided, of which an axial bore 69 with a nozzle 70 branches in the direction of the slide gap 28. The location of the mouth 67 of the channel 66 on the one hand and the opening of the radial bore 68 in the journal 23 on the other hand is chosen so that oil from channel 66 only can then briefly enter the bore 68 when the sliders 26 assume their T position (see FIG 2). The radial bore 68 penetrates the bearing pin 23 completely, there are two mouths, so that each time when the slides take their T position, one Connection to the oil pump 45, 46 is established. At the slider 26 take each revolution of the rotor 3 this T position twice. In this position the Slider gap 28 through its smallest volume. This for a short time through the nozzle into the slide gap 28 injected oil-air mixture flows through the slider gap 28 and passes without pressure into the scoop chamber 8. To do this, the inside of the lid 12 equipped with a groove 71, which extends from the slide gap 28 extends into the scooping space 8. Around ensure that the slide gap 28 constantly communicates with the scooping chamber 8 is the free one Front side of the anchor section 21 additionally with a central recess 72 equipped.

Ist die erfindungsgemäße Vakuumpumpe eine einstufige Pumpe, dann strömt der maßgebliche Anteil des Öl-Luft-Gemisches über die Bohrungen 66, 68, 69 und den Schieberzwischenraum 28 in den Schöpfraum 8 und gelangt von dort aus in den Ölraum 17 zurück. Nur ein sehr kleiner Teil des Öls gelangt in den Lagerspalt zwischen Lagerbohrung 11 sowie Lagerzapfen 23 und versorgt diese Lagerung mit Schmieröl. Sie durchströmt den Lagerspalt und gelangt dann ebenfalls in den Schöpfraum 8. Ist die Vakuumpumpe - wie beim Ausführungsbeispiel nach Figur 1 dargestellt - zweistufig ausgebildet, tritt ein dritter Öl-Luft-Teilstrom in den Lagerspalt der Lagerung 11, 23 in Richtung Hochvakuumpumpenstufe 9, 22 ein. Würde das Öl-Luft-Gemisch in die Hochvakuumstufe gelangen, dann würde die im Öl enthaltene Luft das Enddruckverhalten der Vakuumpumpe beeinträchtigen. Auf dem Weg von der Mündung 67 des Kanals 66 bis zum Schöpfraum 9 der Hochvakuumstufe findet deshalb ein Entgasungsschritt statt. Dazu ist der Lagerzapfen 23 mit einer umlaufenden Nut 74 ausgerüstet, in deren Höhe eine Bohrung 75 mündet, die mit dem Zwischenvakuum (Bohrung 31) in Verbindung steht.The vacuum pump according to the invention is a one-stage Pump, then the relevant portion of the oil-air mixture flows over the bores 66, 68, 69 and the slide gap 28 into the scooping chamber 8 and arrives from there back into the oil space 17. Just a very small one Part of the oil gets into the bearing gap between the bearing bore 11 and journal 23 and supplies this storage with lubricating oil. It flows through the bearing gap and then also reaches the scooping chamber 8. Is the vacuum pump - As in the embodiment of Figure 1 shown - trained in two stages, a third occurs Oil-air partial flow in the bearing gap of the bearing 11, 23 in the direction of high vacuum pump stage 9, 22. Would Oil-air mixture get into the high vacuum stage, then would the air contained in the oil the final pressure behavior of the vacuum pump. On the way from the Mouth 67 of the channel 66 to the scooping chamber 9 of the high vacuum stage there is therefore a degassing step. For this purpose, the bearing pin 23 has a circumferential groove 74 equipped, at the height of which a bore 75 opens communicates with the intermediate vacuum (bore 31).

Das Schnittbild durch eine einstufige Pumpe nach Figur 2 zeigt weitere Details. Von der als Symbol dargestellten Ölpumpe 45, 46 gelangt das Öl-Luft-Gemisch durch den Kanal 66 zur Mündung 67 in der Lagerbohrung 11. Der Rotor 3 ist in einer Stellung dargestellt, in der die Schieber 26 ihre T-Stellung einnehmen. In dieser Stellung besteht eine Verbindung des Kanals 66 im Gehäuse mit der Radialbohrung 68 im Lagerstück 23. Eine kleine, gerade ausreichende Ölmenge gelangt über die Bohrungen 68, 69 (mit Düse 70) in den Schieberzwischenraum 28, der in der T-Stellung sein kleinstes Volumen hat.The sectional view through a single-stage pump according to FIG. 2 shows further details. From that represented as a symbol Oil pump 45, 46 passes the oil-air mixture through the channel 66 to the mouth 67 in the bearing bore 11. The rotor 3 is shown in a position in which the slide 26 take their T position. In this position there is a connection of the channel 66 in the housing with the radial bore 68 in stock 23. A small, just sufficient Oil quantity passes through the holes 68, 69 (with Nozzle 70) in the slide gap 28, which is in the T position has its smallest volume.

Die Nut 71 in dem dem Lagerstück 23 gegenüberliegenden Deckel 12 ist gestrichelt dargestellt. Sie ist in der Nähe des Auslasses 30 angeordnet, so daß sich einer der Schieber 26 stets zwischen Einlaß 33 und Nut 71 befindet. Ihr inneres Ende erstreckt sich weit bis in den Bereich der Eindrehung 72 im Rotor 3, damit sichergestellt ist, daß das Öl den Schieberzwischenraum 28 ohne Druckaufbau verlassen und über die Eindrehung 72 sowie die Nut 71 in den Schöpfraum 8 gelangen kann.The groove 71 in the bearing piece 23 opposite Cover 12 is shown in dashed lines. It is in the Arranged near the outlet 30 so that one of the Slider 26 is always between inlet 33 and groove 71. Its inner end extends far into the area the recess 72 in the rotor 3, so that ensured is that the oil is the slide gap 28 without pressure build-up leave and over the turn 72 and the Groove 71 can get into the scoop space 8.

Claims (9)

  1. An oil-sealed rotary slide valve vacuum pump with a pump chamber (8), with a rotor (3) which is rotatably arranged in the pump chamber and is equipped with an armature section (21) and a bearing section (23), with a slide valve slot (24) provided in the armature section, with two slide valves (26), which are arranged in the slide valve slot and between them form a slide valve intermediate chamber (28), with a bearing for the rotor (3) which comprises the bearing section (23) and a bearing bore (11), with an oil pump (45, 46) for generating an oil flow passing through the slide valve intermediate chamber (28) and with a control for the oil passing through the slide valve intermediate chamber (28) via an oil duct (66) opening into the bearing bore (11) and via radial and axial bores (68, 69) in the bearing section (23), characterised in that the position of the openings of the oil duct (66) opening into the bearing bore (11) on the one hand and of the radial bore (68) in the bearing section (23) on the other hand is selected in relation to the position of the slide valves (26) or slide valve slots (24) in such a manner that oil only enters the slide valve intermediate chamber (28) when the latter increases its volume, and a constantly open connection leading to the pump chamber (8) is provided for the oil leaving the slide valve intermediate chamber (28).
  2. A pump according to claim 1, characterised in that the position of the openings of the oil duct (66) and of the radial bore (68) in the bearing section (23) are selected in such a manner that oil only enters the intermediate chamber when the latter has its smallest volume.
  3. A pump according to claim 1 or 2, characterised in that the axial bore (69) is equipped with a nozzle (70).
  4. A pump according to claim 1, 2 or 3, characterised in that the lid (12) of the pump chamber (8) lying opposite the bearing section (23) is equipped with a groove (71), which connects the slide valve intermediate chamber (28) with the pump chamber (8).
  5. A pump according to claim 4, characterised in that the end face of the rotor (21) facing the lid is provided with a central recess (72).
  6. A pump according to one of the preceding claims, characterised in that the radial bore (68) fully penetrates the bearing section (23).
  7. A pump according to one of the preceding claims, characterised in that the oil pump (45, 46) is equipped with supply ducts for oil (65) and gas (64).
  8. A pump according to one of the preceding claims with a rotor (3), which is equipped with two armature sections (21, 22) arranged on its end face for forming a preliminary vacuum stage (8, 21) and a high vacuum stage (9, 22), and with a bearing section (23) disposed between the armature sections (21, 22), characterised in that degasifying means are provided for the oil flowing from the opening (67) in the direction of the high vacuum stage (9, 22).
  9. A pump according to claim 8, characterised in that the bearing section (23) is equipped between the radial bore (68) and the armature section (22) with a circumferential groove (74), which is connected to the intermediate vacuum (31) of the pump.
EP96926341A 1995-07-19 1996-07-12 Oil-sealed vane-type rotary vacuum pump with oil feed Expired - Lifetime EP0839283B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19526303 1995-07-19
DE19526303A DE19526303A1 (en) 1995-07-19 1995-07-19 Oil sealed rotary vane vacuum pump with an oil supply
PCT/EP1996/003078 WO1997004236A1 (en) 1995-07-19 1996-07-12 Oil-sealed vane-type rotary vacuum pump with oil feed

Publications (2)

Publication Number Publication Date
EP0839283A1 EP0839283A1 (en) 1998-05-06
EP0839283B1 true EP0839283B1 (en) 1999-06-09

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EP96926341A Expired - Lifetime EP0839283B1 (en) 1995-07-19 1996-07-12 Oil-sealed vane-type rotary vacuum pump with oil feed

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US (1) US6019585A (en)
EP (1) EP0839283B1 (en)
JP (1) JP3842292B2 (en)
KR (1) KR100442467B1 (en)
CN (1) CN1079505C (en)
CA (1) CA2227168C (en)
DE (2) DE19526303A1 (en)
ES (1) ES2133980T3 (en)
TW (1) TW438940B (en)
WO (1) WO1997004236A1 (en)

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CN100362240C (en) * 2004-02-03 2008-01-16 孙洪乐 Rotary plate type vacuum pump
ITTO20040268A1 (en) * 2004-04-30 2004-07-30 Varian Spa ROTARY OIL MECHANICAL VACUUM PUMP AND METHOD OF PRODUCTION OF THAT PUMP
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JP5364052B2 (en) * 2010-07-22 2013-12-11 株式会社ヴァレオジャパン Vane type compressor
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Publication number Publication date
CN1191592A (en) 1998-08-26
TW438940B (en) 2001-06-07
JP3842292B2 (en) 2006-11-08
DE59602183D1 (en) 1999-07-15
CA2227168A1 (en) 1997-02-06
CA2227168C (en) 2007-09-11
ES2133980T3 (en) 1999-09-16
KR100442467B1 (en) 2004-09-18
US6019585A (en) 2000-02-01
WO1997004236A1 (en) 1997-02-06
EP0839283A1 (en) 1998-05-06
CN1079505C (en) 2002-02-20
DE19526303A1 (en) 1997-01-23
JPH11509596A (en) 1999-08-24
KR19990028935A (en) 1999-04-15

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