EP0723080B1 - Système de pompage à vide - Google Patents

Système de pompage à vide Download PDF

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Publication number
EP0723080B1
EP0723080B1 EP95116395A EP95116395A EP0723080B1 EP 0723080 B1 EP0723080 B1 EP 0723080B1 EP 95116395 A EP95116395 A EP 95116395A EP 95116395 A EP95116395 A EP 95116395A EP 0723080 B1 EP0723080 B1 EP 0723080B1
Authority
EP
European Patent Office
Prior art keywords
vacuum
pump
line
vacuum pump
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95116395A
Other languages
German (de)
English (en)
Other versions
EP0723080A1 (fr
Inventor
Heinrich Amlinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SGI-PROZESS-TECHNIK GmbH
Original Assignee
SGI-PROZESS-TECHNIK GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGI-PROZESS-TECHNIK GmbH filed Critical SGI-PROZESS-TECHNIK GmbH
Publication of EP0723080A1 publication Critical patent/EP0723080A1/fr
Application granted granted Critical
Publication of EP0723080B1 publication Critical patent/EP0723080B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Definitions

  • the invention relates to a vacuum pumping station for cyclical Pump down a container and maintain it an operating vacuum in the container, which is used for pumping the container a first and a second vacuum pump has which are arranged one behind the other in terms of flow and form a first and a second pump stage.
  • Pumping stations of the above type are used in technology used for example for the cyclical pumping out of adsorbers, regeneration of zeolites or other Negative pressure adsorbents in vacuum swing systems or pressure-vacuum swing systems for oxygen and Make nitrogen enrichment.
  • pumping stations which consist of multi-stage working Rotary lobe blowers are built. Satisfy such pumping stations from their function, but it works The experts strive to further increase their energy requirements decrease, since this is a big one in cyclical processes Role play.
  • pumping stations have been low recently Progress in reducing energy requirements been achieved.
  • US-A-4,699,570 describes a vacuum pumping station at which for pumping out first a piston pump with a downstream Water ring pump is used. At lower pressure you suck with the piston pump, one of these downstream second piston pump and the water ring pump. If the pressure drops even further, the water ring pump becomes no longer used and therefore a rotary vane pump downstream of the two piston pumps.
  • the one in the flow direction seen first piston pump is a valve for Release or shutdown of the suction line upstream.
  • the vacuum pumping station according to US-A-3,922,110 also exists from a positive displacement pump as the first pump and one of these downstream water ring pump. Of the In terms of flow, the positive displacement pump is a check valve upstream.
  • the invention is based on the problem, if possible simply constructed and inexpensive vacuum pumping station of the type mentioned at the beginning that its energy requirements are as low as possible.
  • the first vacuum pump has a radial fan with one in it Intake line switched, adjustable throttle and the second vacuum pump a rotary lobe blower or a water ring pump is that the second vacuum pump into a vacuum line parallel to an outlet line of the first Vacuum pump switched and with its input on a junction is connected to the outlet line and that in terms of flow behind the branch in the vacuum line and the outlet line each have a control part for steering of the delivery volume at higher pressures from the first vacuum pump immediately or at lower pressures of the first vacuum pump via the second vacuum pump to the outlet of the vacuum pumping station is arranged.
  • the second pump stage or further pump stages are according to the invention therefore designed as a rotary lobe blower because a radial blower in comparison as a second stage with an intake pressure between 1000 mbar and 600 mbar would have to work and therefore always in energetically unfavorable Working area for radial blowers would be.
  • the controllable upstream of the first vacuum pump Throttle could be a usual swirl regulator.
  • the throttle can also lead the line in which it is arranged to shut off so that when starting evacuating the pump line with the radial fan possible without arranging an additional shut-off device if, according to another development of the invention the adjustable one upstream of the first vacuum pump Throttle a motor-operated and up to the closed position is movable flap valve.
  • a flap valve enables large cross-sections to be changed quickly, so that low-inertia control is possible.
  • the invention permits numerous embodiments. For further clarification of its basic principle is one of them is shown schematically in the drawing and is described below. This shows a circuit diagram of a Pumping station according to the invention.
  • the drawing schematically shows a container to be pumped empty 1, from which an intake pipe 2 to an inlet 3 a first vacuum pump 4 leads.
  • This first vacuum pump 4 is according to the invention as a radial fan (turbocompressor) educated.
  • a radial fan turbocompressor
  • To make this work economically Suction pressures between 600 mbar and 1000 mbar in the tank
  • Throttle 5 a controllable in the intake line 2 Throttle 5 switched. This is shown on not shown however, in the usual way for the person skilled in the art, using two Pressure sensors 20, 21 controlled so that the inlet 3 of the first Vacuum pump 4 always has a suction pressure of not over There is 600 mbar as long as the pressure in tank 1 is higher is.
  • the first vacuum pump 4 has an outlet 6, one of which Outlet line 7 to a pulsation damper 8 and thus via a silencer 9 to an outlet 10 of the vacuum pumping station leads.
  • the outlet line 7 is at a branch 11 with a connected to the vacuum line 12 running parallel to it, which also leads into the pulsation damper 8 and into the a second vacuum pump 13 is connected.
  • this second vacuum pump 13 which forms the second pump stage, According to the invention, it is a rotary lobe blower (Root pump) or around a water ring pump.
  • control part 14 or 15 which is a non-return valve in both cases acts.
  • the check valve opens of the control part 14 to the second vacuum pump 13 and the Check valve of the control part 15 to the pulsation damper 8 out.
  • the second vacuum pump 13 is a bypass 16 with a Lock valve 17 assigned.
  • This bypass 16 can Connect output to the vacuum line 12 and allows it is therefore that the second vacuum pump 13 short-circuited and therefore with low energy consumption when idling can work under atmospheric pressure.
  • the vacuum line 12 allows you to start with the second Vacuum pump 13 with the throttle 5 closed, the first vacuum pump 4 and to evacuate the corresponding lines.
  • the vacuum pump designed as a radial fan can 4 at idle without pumping speed and pressure difference work in negative pressure with minimal energy consumption.
  • One of the vacuum line 12 can be shown in dash-dotted lines Suction line 18 to intake line 2 in front of the throttle 5 lead. In this suction line 18 is a check valve 19 switched, which to the second vacuum pump 13 opens.
  • Such a suction line 18 enables parallel operation of the first and second vacuum pumps 4, 13, which is advantageous if at the beginning of the Suction phase sucked a large volume from the container 1 must be, especially if then normal pressure in it prevails.
  • Prerequisite for such parallel operation is that the control part 14 can be actuated by a motor is so that it is not due to that of the second vacuum pump 13 generated negative pressure by itself, because then the second vacuum pump 13 on both sides of the first Vacuum pump 4 would suck.
  • the first work Vacuum pump 4 and the second vacuum pump 13 in parallel to each other, so that via the suction line 2 and the suction line 18 gas via the pulsation damper 8 to the outlet 10 is promoted.
  • the pumped by the first vacuum pump 4 The amount of gas becomes smaller than that of the second Vacuum pump 13 possible delivery volume, then sucks second vacuum pump 13 via the vacuum line 12 on Outlet 6 of the first vacuum pump 13 volume flow from.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (5)

  1. Installation de pompe à vide pour l'évacuation cyclique d'un récipient et pour le maintien d'un vide de service dans le récipient, qui comprend, pour évacuer le récipient, une première et une deuxième pompes à vide qui sont disposées l'une à la suite de l'autre dans le sens de l'écoulement et qui forment un premier étage et un deuxième étage de pompe, caractérisé en ce que la première pompe à vide (4) est un ventilateur radial comprenant un étranglement réglable (5) intercalé dans sa conduite d'aspiration (2) et la deuxième pompe à vide (13) est un ventilateur à piston rotatif ou une pompe à anneau d'eau, en ce que la deuxième pompe à vide (13) est branchée dans une conduite de vide (12) en parallèle avec une conduite (7) de la première pompe à vide (4), et est reliée par son entrée à la conduite de sortie (7), au droit d'un embranchement (11), et en ce qu'en aval de l'embranchement (11), dans le sens de l'écoulement, est disposée, dans chacune des conduites de vide (12) et de sortie (7), une partie de commande (14, 15) destinée à dévier le volume de refoulement vers la sortie (10) de l'installation de pompe à vide, soit directement à partir de la première pompe à vide (4) dans le cas de pressions plus élevées, soit à partir de la première pompe à vide (4), par l'intermédiaire de la deuxième pompe à vide (13), dans le cas de pressions plus faibles.
  2. Installation de pompe à vide selon la revendication 1, caractérisée en ce que la partie de commande (15) est formée dans la conduite de sortie (7) sous la forme d'un clapet anti-retour qui s'ouvre sur la sortie (10) de l'installation de pompe à vide et la partie de commande (14) est formée dans la conduite de vide (12) sous la forme d'un clapet anti-retour qui s'ouvre sur l'entrée du deuxième étage de pompe (13).
  3. Installation de pompe à vide selon les revendications 1 ou 2, caractérisée en ce que l'étranglement réglable (5) intercalé en amont de la première pompe à vide (4) est une soupape à clapet pouvant être actionnée au moteur et qui peut être manoeuvrée jusqu'à sa position de fermeture.
  4. Installation de pompe à vide selon au moins une des revendications précédentes, caractérisée en ce que la deuxième pompe à vide (13) possède un bipasse (16) muni d'une soupape d'arrêt (17) pouvant être actionnée au moteur, et qui relie son côté de sortie et son côté d'entrée l'un à l'autre.
  5. Installation de pompe à vide selon au moins une des revendications précédentes, caractérisée en ce que, de la conduite de vide (12) qui relie la sortie de la première pompe à vide (4) à l'entrée de la deuxième pompe à vide (13), part une conduite d'aspiration (18) qui mène à la conduite d'aspiration (2) de la première pompe à vide (4), en un point situé en amont de l'étranglement (5), dans le sens de l'écoulement, et la partie de commande (14) est commandée par un moteur.
EP95116395A 1995-01-13 1995-10-18 Système de pompage à vide Expired - Lifetime EP0723080B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19500823 1995-01-13
DE19500823A DE19500823A1 (de) 1995-01-13 1995-01-13 Vakuum-Pumpstand

Publications (2)

Publication Number Publication Date
EP0723080A1 EP0723080A1 (fr) 1996-07-24
EP0723080B1 true EP0723080B1 (fr) 1999-09-22

Family

ID=7751409

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95116395A Expired - Lifetime EP0723080B1 (fr) 1995-01-13 1995-10-18 Système de pompage à vide

Country Status (6)

Country Link
US (1) US5595477A (fr)
EP (1) EP0723080B1 (fr)
JP (1) JPH08232870A (fr)
AT (1) ATE184963T1 (fr)
DE (2) DE19500823A1 (fr)
ES (1) ES2136232T3 (fr)

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SE504483C2 (sv) * 1995-06-26 1997-02-17 Tetra Laval Holdings & Finance Förfarande för reglering av vakuumnivån i en mjölkningsanläggning och mjölkningsanläggning
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
DE19630264A1 (de) * 1996-07-26 1998-01-29 Klein Schanzlin & Becker Ag Verfahren zur Schaltung von Einrichtungen oder Maschinen in einem Strömungssystem
RU2113636C1 (ru) * 1997-06-16 1998-06-20 Сергей Анатольевич Попов Насосно-эжекторная установка (варианты)
JP3763193B2 (ja) 1997-09-22 2006-04-05 アイシン精機株式会社 多段式真空ポンプ
DE10018526A1 (de) * 2000-04-13 2001-10-25 Tbs Tech Betr Schmidt Gmbh Beschichtungseinrichtung
DE10144210A1 (de) * 2001-09-08 2003-03-27 Sgi Prozess Technik Gmbh Pumpensystem
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
DE10225774C1 (de) * 2002-06-10 2003-12-11 Vacuubrand Gmbh & Co Kg Vakuumpumpe
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
DE102005042451B4 (de) * 2005-09-06 2007-07-26 Vacuubrand Gmbh + Co Kg Vakuumpumpvorrichtung
DE102008009715A1 (de) * 2008-02-19 2009-08-20 Oerlikon Leybold Vacuum Gmbh Vakuumpump-System und Verwendung einer Mehrstufen-Vakuumpumpe
KR101012581B1 (ko) * 2009-01-19 2011-02-07 김재선 진공작동식 물펌프
EP2518317B1 (fr) * 2009-12-24 2019-06-05 Sumitomo Seika Chemicals CO. LTD. Appareil à double pompe à vide, système d'épuration de gaz doté d'un appareil à double pompe à vide, et dispositif de suppression des vibrations des gaz d'échappement dans un appareil à double pompe à vide
CN101982658B (zh) * 2010-09-01 2012-02-15 中国科学院广州地球化学研究所 小型/微型超高真空装置
DE102011015464B4 (de) * 2010-11-30 2012-09-06 Von Ardenne Anlagentechnik Gmbh Vakuumpumpeinrichtung und -verfahren für staubhaltige Gase
CH706231B1 (fr) * 2012-03-05 2016-07-29 Ateliers Busch Sa Installation de pompage et procédé de contrôle d'une telle installation.
FR2998010A1 (fr) * 2012-11-09 2014-05-16 Centre Nat Rech Scient Dispositif de pompage, comprenant un ensemble de pompes en series et un element de commutation commun
GB2510829B (en) 2013-02-13 2015-09-02 Edwards Ltd Pumping system
DE102013108090A1 (de) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. Pumpenanordnung
FR3017425A1 (fr) * 2014-02-12 2015-08-14 Adixen Vacuum Products Systeme de pompage et procede de descente en pression dans un sas de chargement et de dechargement
JP6832869B2 (ja) * 2015-04-30 2021-02-24 アトラス コプコ コンプテック， エルエルシーＡｔｌａｓ Ｃｏｐｃｏ Ｃｏｍｐｔｅｃ， Ｌｌｃ ガスの状態の変化を効率的に管理するためのガスハンドリングシステムおよび方法
CN105545783B (zh) * 2016-02-26 2018-07-27 武汉艾德沃泵阀有限公司 真空保持系统
EP3491243A1 (fr) * 2016-07-12 2019-06-05 Dr.-ing. K. Busch GmbH Système d'évacuation
EP3880970B1 (fr) * 2018-11-15 2023-02-15 Flowserve Management Company Appareil et procédé d'évacuation de très grands volumes
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
US11492020B2 (en) 2020-05-05 2022-11-08 Flowserve Management Company Method of intelligently managing pressure within an evacuated transportation system
US11619231B1 (en) * 2021-12-28 2023-04-04 Elvac Co., Ltd Complete bearing-sealed root vacuum pump system capable of promoting vacuum ability of condenser of power plant

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DE2462187A1 (de) * 1974-06-24 1976-09-02 Siemens Ag Fluessigkeitsring-vakuumpumpe mit vorgeschaltetem seitenkanal-ringverdichter
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DE4136950A1 (de) * 1991-11-11 1993-05-13 Pfeiffer Vakuumtechnik Mehrstufiges vakuumpumpsystem

Also Published As

Publication number Publication date
EP0723080A1 (fr) 1996-07-24
ES2136232T3 (es) 1999-11-16
ATE184963T1 (de) 1999-10-15
DE59506893D1 (de) 1999-10-28
JPH08232870A (ja) 1996-09-10
DE19500823A1 (de) 1996-07-18
US5595477A (en) 1997-01-21

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