ES2136232T3 - Estacion de bombeo de vacio. - Google Patents

Estacion de bombeo de vacio.

Info

Publication number
ES2136232T3
ES2136232T3 ES95116395T ES95116395T ES2136232T3 ES 2136232 T3 ES2136232 T3 ES 2136232T3 ES 95116395 T ES95116395 T ES 95116395T ES 95116395 T ES95116395 T ES 95116395T ES 2136232 T3 ES2136232 T3 ES 2136232T3
Authority
ES
Spain
Prior art keywords
pump
pipe
pressure
vessel
vacuum pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95116395T
Other languages
English (en)
Inventor
Heinrich Amlinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SGI PROZESS TECHNIK GmbH
Original Assignee
SGI PROZESS TECHNIK GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGI PROZESS TECHNIK GmbH filed Critical SGI PROZESS TECHNIK GmbH
Application granted granted Critical
Publication of ES2136232T3 publication Critical patent/ES2136232T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)

Abstract

UN BANCO DE PRUEBAS DE BOMBAS DE VACIO PARA BOMBEO CICLICO A PARTIR DE RECIPIENTES (1) Y PARA MANTENIMIENTO DE UN VACIO DE OPERACION EN EL RECIPIENTE (1) DISPONE PARA BOMBEO A PARTIR DEL RECIPIENTE (1) UNA PRIMERA Y UNA SEGUNDA BOMBA (4,13) DE VACIO, QUE ESTAN DISPUESTAS UNA DETRAS DE OTRA Y FORMAN UNA PRIMERA Y UN SEGUNDA ETAPA DE BOMBEO. LA PRIMERA BOMBA (4) DE VACIO ES UN SOPLADOR RADIAL CONECTADO EN UNA CONDUCCION (2) DE ASPIRACION, DISPONIENDO DE UNA ESTRANGULACION (5) REGULABLE Y LA SEGUNDA BOMBA (13) DE VACIO ES UN SOPLADOR DE EMBOLO GIRATORIO O UNA BOMBA ANULAR DE AGUA. LA SEGUNDA BOMBA (30) DE VACIO ESTA CONECTADA EN UNA CONDUCCION (12) DE VACIO DE FORMA PARALELA CON RESPECTO A LA CONDUCCION (7) DE SALIDA DE LA PRIMERA BOMBA (4) DE VACIO Y SE UNE CON SU ENTRADA EN UNA DERIVACION (11) CON LA CONDUCCION (7) DE SALIDA. DE FORMA REGULAR CON RESPECTO A LA CIRCULACION DETRAS DE LA DERIVACION (11) EN LA CONDUCCION (12) DE VACIO Y EN LA CONDUCCION (7) DE SALIDA SE ENCUENTRA DE FORMA RESPECTIVA UNA PARTE (14,15) DE CONTROL PARA LA DIRECCION DEL VOLUMEN DE TRANSPORTE EN PRESIONES ELEVADAS A PARTIR DE LA PRIMERA BOMBA (4) DE VACIO DE FORMA INMEDIATA O EN PRESIONES REDUCIDAS A PARTIR DE LA PRIMERA BOMBA (4) DE VACIO A TRAVES DE LA SEGUNDA BOMBA (13) DE VACIO HACIA LA SALIDA (10) DEL BANCO DE PRUEBAS DEL BANCO DE VACIO.
ES95116395T 1995-01-13 1995-10-18 Estacion de bombeo de vacio. Expired - Lifetime ES2136232T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19500823A DE19500823A1 (de) 1995-01-13 1995-01-13 Vakuum-Pumpstand

Publications (1)

Publication Number Publication Date
ES2136232T3 true ES2136232T3 (es) 1999-11-16

Family

ID=7751409

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95116395T Expired - Lifetime ES2136232T3 (es) 1995-01-13 1995-10-18 Estacion de bombeo de vacio.

Country Status (6)

Country Link
US (1) US5595477A (es)
EP (1) EP0723080B1 (es)
JP (1) JPH08232870A (es)
AT (1) ATE184963T1 (es)
DE (2) DE19500823A1 (es)
ES (1) ES2136232T3 (es)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE504483C2 (sv) * 1995-06-26 1997-02-17 Tetra Laval Holdings & Finance Förfarande för reglering av vakuumnivån i en mjölkningsanläggning och mjölkningsanläggning
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
DE19630264A1 (de) * 1996-07-26 1998-01-29 Klein Schanzlin & Becker Ag Verfahren zur Schaltung von Einrichtungen oder Maschinen in einem Strömungssystem
RU2113636C1 (ru) * 1997-06-16 1998-06-20 Сергей Анатольевич Попов Насосно-эжекторная установка (варианты)
JP3763193B2 (ja) 1997-09-22 2006-04-05 アイシン精機株式会社 多段式真空ポンプ
DE10018526A1 (de) * 2000-04-13 2001-10-25 Tbs Tech Betr Schmidt Gmbh Beschichtungseinrichtung
DE10144210A1 (de) * 2001-09-08 2003-03-27 Sgi Prozess Technik Gmbh Pumpensystem
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
DE10225774C1 (de) * 2002-06-10 2003-12-11 Vacuubrand Gmbh & Co Kg Vakuumpumpe
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
DE102005042451B4 (de) * 2005-09-06 2007-07-26 Vacuubrand Gmbh + Co Kg Vakuumpumpvorrichtung
DE102008009715A1 (de) * 2008-02-19 2009-08-20 Oerlikon Leybold Vacuum Gmbh Vakuumpump-System und Verwendung einer Mehrstufen-Vakuumpumpe
KR101012581B1 (ko) * 2009-01-19 2011-02-07 김재선 진공작동식 물펌프
ES2731202T3 (es) * 2009-12-24 2019-11-14 Sumitomo Seika Chemicals Aparato de doble bomba de vacío, sistema de purificación de gas dotado de aparato con doble bomba de vacío y dispositivo de supresión de vibraciones del gas de escape en un aparato con doble bomba de vacío
CN101982658B (zh) * 2010-09-01 2012-02-15 中国科学院广州地球化学研究所 小型/微型超高真空装置
DE102011015464B4 (de) * 2010-11-30 2012-09-06 Von Ardenne Anlagentechnik Gmbh Vakuumpumpeinrichtung und -verfahren für staubhaltige Gase
CH706231B1 (fr) 2012-03-05 2016-07-29 Ateliers Busch Sa Installation de pompage et procédé de contrôle d'une telle installation.
FR2998010A1 (fr) * 2012-11-09 2014-05-16 Centre Nat Rech Scient Dispositif de pompage, comprenant un ensemble de pompes en series et un element de commutation commun
GB2510829B (en) * 2013-02-13 2015-09-02 Edwards Ltd Pumping system
DE102013108090A1 (de) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. Pumpenanordnung
FR3017425A1 (fr) * 2014-02-12 2015-08-14 Adixen Vacuum Products Systeme de pompage et procede de descente en pression dans un sas de chargement et de dechargement
JP6832869B2 (ja) * 2015-04-30 2021-02-24 アトラス コプコ コンプテック， エルエルシーＡｔｌａｓ Ｃｏｐｃｏ Ｃｏｍｐｔｅｃ， Ｌｌｃ ガスの状態の変化を効率的に管理するためのガスハンドリングシステムおよび方法
CN105545783B (zh) * 2016-02-26 2018-07-27 武汉艾德沃泵阀有限公司 真空保持系统
WO2018010767A1 (en) * 2016-07-12 2018-01-18 Dr.-Ing. K. Busch Gmbh Evacuation system
CN113056610B (zh) * 2018-11-15 2023-03-31 福斯管理公司 用于抽空超大体积的设备和方法
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
EP4103441B1 (en) 2020-02-13 2024-05-01 Flowserve Pte. Ltd. Apparatus for interconnecting and isolating very large evacuated volumes
CN111304409B (zh) * 2020-03-23 2025-04-29 中冶南方工程技术有限公司 Rh真空精炼系统及其使用方法
US11492020B2 (en) 2020-05-05 2022-11-08 Flowserve Management Company Method of intelligently managing pressure within an evacuated transportation system
US11619231B1 (en) * 2021-12-28 2023-04-04 Elvac Co., Ltd Complete bearing-sealed root vacuum pump system capable of promoting vacuum ability of condenser of power plant
US12292026B2 (en) 2022-07-13 2025-05-06 Flowserve Pte. Ltd. Variable speed reconfigurable pump/turbine clusters

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1711902A (en) * 1924-11-11 1929-05-07 Neumann Fritz Water-ring pump
US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system
US3922110A (en) * 1974-01-28 1975-11-25 Henry Huse Multi-stage vacuum pump
DE2462187A1 (de) * 1974-06-24 1976-09-02 Siemens Ag Fluessigkeitsring-vakuumpumpe mit vorgeschaltetem seitenkanal-ringverdichter
DE2430314C3 (de) * 1974-06-24 1982-11-25 Siemens AG, 1000 Berlin und 8000 München Flüssigkeitsring-Vakuumpumpe mit vorgeschaltetem Verdichter
US4505647A (en) * 1978-01-26 1985-03-19 Grumman Allied Industries, Inc. Vacuum pumping system
US4699570A (en) * 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump
ES2030561T3 (es) * 1988-06-24 1992-11-01 Siemens Aktiengesellschaft Grupo de bombas de vacio de varias fases.
DE4136950A1 (de) * 1991-11-11 1993-05-13 Pfeiffer Vakuumtechnik Mehrstufiges vakuumpumpsystem

Also Published As

Publication number Publication date
US5595477A (en) 1997-01-21
DE19500823A1 (de) 1996-07-18
JPH08232870A (ja) 1996-09-10
ATE184963T1 (de) 1999-10-15
EP0723080A1 (de) 1996-07-24
DE59506893D1 (de) 1999-10-28
EP0723080B1 (de) 1999-09-22

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