DK353284A - Fremgangsmaade til kemisk dampafsaetning af titaniumnitrid og lignende film - Google Patents

Fremgangsmaade til kemisk dampafsaetning af titaniumnitrid og lignende film Download PDF

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Publication number
DK353284A
DK353284A DK353284A DK353284A DK353284A DK 353284 A DK353284 A DK 353284A DK 353284 A DK353284 A DK 353284A DK 353284 A DK353284 A DK 353284A DK 353284 A DK353284 A DK 353284A
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DK
Denmark
Prior art keywords
titanium nitride
procedure
vapor deposition
chemical vapor
similar films
Prior art date
Application number
DK353284A
Other languages
English (en)
Other versions
DK162938B (da
DK162938C (da
DK353284D0 (da
Inventor
Roy Gerald Gordon
Original Assignee
Roy Gerald Gordon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Roy Gerald Gordon filed Critical Roy Gerald Gordon
Publication of DK353284A publication Critical patent/DK353284A/da
Publication of DK353284D0 publication Critical patent/DK353284D0/da
Publication of DK162938B publication Critical patent/DK162938B/da
Application granted granted Critical
Publication of DK162938C publication Critical patent/DK162938C/da

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/225—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/28—Other inorganic materials
    • C03C2217/281—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chemically Coating (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Ceramic Products (AREA)
DK353284A 1982-11-22 1984-07-19 Fremgangsmaade til afsaetning af en transparent, solstraaleregulerende film hovedsageligt bestaaende af titannitrid paa et transparent, opvarmet, baandformet glassubstrat DK162938C (da)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US44334082A 1982-11-22 1982-11-22
US44334082 1982-11-22
PCT/US1983/001678 WO1984002128A1 (en) 1982-11-22 1983-10-28 Chemical vapor deposition of titanium nitride and like films
US8301678 1983-10-28

Publications (4)

Publication Number Publication Date
DK353284A true DK353284A (da) 1984-07-19
DK353284D0 DK353284D0 (da) 1984-07-19
DK162938B DK162938B (da) 1991-12-30
DK162938C DK162938C (da) 1992-05-25

Family

ID=23760404

Family Applications (1)

Application Number Title Priority Date Filing Date
DK353284A DK162938C (da) 1982-11-22 1984-07-19 Fremgangsmaade til afsaetning af en transparent, solstraaleregulerende film hovedsageligt bestaaende af titannitrid paa et transparent, opvarmet, baandformet glassubstrat

Country Status (13)

Country Link
US (3) US4524718A (da)
EP (1) EP0128169B1 (da)
AU (1) AU565957B2 (da)
CA (1) CA1222912A (da)
CH (1) CH662808A5 (da)
DE (1) DE3390341T1 (da)
DK (1) DK162938C (da)
ES (1) ES527422A0 (da)
GB (1) GB2141444B (da)
IT (1) IT1203683B (da)
MX (1) MX160808A (da)
SE (1) SE453491B (da)
WO (1) WO1984002128A1 (da)

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Also Published As

Publication number Publication date
GB8417560D0 (en) 1984-08-15
GB2141444B (en) 1986-06-11
IT8368218A0 (it) 1983-11-21
WO1984002128A1 (en) 1984-06-07
US4524718A (en) 1985-06-25
US4535000A (en) 1985-08-13
EP0128169A4 (en) 1985-08-27
CA1222912A (en) 1987-06-16
SE8403834D0 (sv) 1984-07-23
EP0128169A1 (en) 1984-12-19
ES8500874A1 (es) 1984-11-01
SE8403834L (sv) 1984-07-23
GB2141444A (en) 1984-12-19
ES527422A0 (es) 1984-11-01
DE3390341C2 (da) 1992-10-22
DK162938B (da) 1991-12-30
CH662808A5 (fr) 1987-10-30
MX160808A (es) 1990-05-25
DK162938C (da) 1992-05-25
US4585674A (en) 1986-04-29
DK353284D0 (da) 1984-07-19
AU2269883A (en) 1984-06-18
SE453491B (sv) 1988-02-08
DE3390341T1 (de) 1985-01-10
EP0128169B1 (en) 1990-07-11
AU565957B2 (en) 1987-10-01
IT1203683B (it) 1989-02-15

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